[go: up one dir, main page]

WO2006078894A3 - Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma - Google Patents

Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma Download PDF

Info

Publication number
WO2006078894A3
WO2006078894A3 PCT/US2006/002025 US2006002025W WO2006078894A3 WO 2006078894 A3 WO2006078894 A3 WO 2006078894A3 US 2006002025 W US2006002025 W US 2006002025W WO 2006078894 A3 WO2006078894 A3 WO 2006078894A3
Authority
WO
WIPO (PCT)
Prior art keywords
cleaning
objects
members
surface conditioning
dielectric barrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/002025
Other languages
French (fr)
Other versions
WO2006078894A2 (en
Inventor
Peter Frank Kurunczi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cerionx Inc
Original Assignee
Cerionx Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/039,628 external-priority patent/US7017594B2/en
Priority claimed from US11/040,222 external-priority patent/US20060162740A1/en
Application filed by Cerionx Inc filed Critical Cerionx Inc
Publication of WO2006078894A2 publication Critical patent/WO2006078894A2/en
Anticipated expiration legal-status Critical
Publication of WO2006078894A3 publication Critical patent/WO2006078894A3/en
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L13/00—Cleaning or rinsing apparatus
    • B01L13/02—Cleaning or rinsing apparatus for receptacle or instruments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32348—Dielectric barrier discharge
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/021—Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/021—Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids
    • B01L3/0217—Pipettes, i.e. with only one conduit for withdrawing and redistributing liquids of the plunger pump type
    • B01L3/022—Capillary pipettes, i.e. having very small bore
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0241—Drop counters; Drop formers
    • B01L3/0244—Drop counters; Drop formers using pins
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/02—Burettes; Pipettes
    • B01L3/0275—Interchangeable or disposable dispensing tips

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Clinical Laboratory Science (AREA)
  • Epidemiology (AREA)
  • Veterinary Medicine (AREA)
  • Public Health (AREA)
  • General Health & Medical Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Cleaning In General (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

A method and apparatus for cleaning and surface conditioning objects using plasma is disclosed. One embodiment of the method discloses providing a plurality of elongated dielectric barrier members arranged adjacent each other, the members having electrodes connected therein, introducing the objects proximate the members, and producing a dielectric barrier discharge to form plasma between the objects and the members for cleaning the objects. One embodiment of the apparatus for cleaning objects using plasma discloses a plurality of elongated dielectric barrier members arranged adjacent each other, and a plurality of electrodes, each contained within, and extending substantially along the length of, respective ones of the elongated dielectric barrier members.
PCT/US2006/002025 2005-01-20 2006-01-19 Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma Ceased WO2006078894A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11/039,628 2005-01-20
US11/039,628 US7017594B2 (en) 2003-06-16 2005-01-20 Atmospheric pressure non-thermal plasma device to clean and sterilize the surfaces of probes, cannulas, pin tools, pipettes and spray heads
US11/040,222 US20060162740A1 (en) 2005-01-21 2005-01-21 Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma
US11/040,222 2005-01-21

Publications (2)

Publication Number Publication Date
WO2006078894A2 WO2006078894A2 (en) 2006-07-27
WO2006078894A3 true WO2006078894A3 (en) 2007-11-22

Family

ID=36692920

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/002025 Ceased WO2006078894A2 (en) 2005-01-20 2006-01-19 Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma

Country Status (1)

Country Link
WO (1) WO2006078894A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060162741A1 (en) * 2005-01-26 2006-07-27 Cerionx, Inc. Method and apparatus for cleaning and surface conditioning objects with plasma

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6818193B2 (en) * 1999-12-15 2004-11-16 Plasmasol Corporation Segmented electrode capillary discharge, non-thermal plasma apparatus and process for promoting chemical reactions

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6818193B2 (en) * 1999-12-15 2004-11-16 Plasmasol Corporation Segmented electrode capillary discharge, non-thermal plasma apparatus and process for promoting chemical reactions

Also Published As

Publication number Publication date
WO2006078894A2 (en) 2006-07-27

Similar Documents

Publication Publication Date Title
SG112101A1 (en) Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials
WO2006078888A3 (en) Method and apparatus for cleaning and surface conditioning objects using plasma
EP1594161A4 (en) Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method
WO2006080977A3 (en) Method and apparatus for cleaning and surface conditioning objects with plasma
EP1560262A4 (en) Plasma etching chamber and plasma etching system using same
AU2002356897A1 (en) Non-thermal plasma slit discharge apparatus
SG112978A1 (en) Apparatus method for control, pumping and abatement for vacuum process chambers
EP2052097A4 (en) Plasma surface treatment using dielectric barrier discharges
AU2003285772A1 (en) Columnar structured material, electrode having columnar structured material, and production method therefor
AU2001279171A1 (en) Improved apparatus and method for forming a high pressure plasma discharge column
EP1512734A4 (en) PLASMA DISPLAY, PHOSPHORUS AND METHOD FOR PRODUCING PHOSPHORUS
GB2400613B (en) Plasma deposition method
TWI370481B (en) Plasma chamber having multiple rf source frequencies
DE60237380D1 (en) PLASMA CLEANING PROCESS
GB0318942D0 (en) Process for producing an electrode
MX2010000445A (en) Method for making hard pretzels that effectively absorb seasoning slurry.
AU2003240520A8 (en) Electrode design for stable micro-scale plasma discharges
ZA200505678B (en) Process for manufacturing fluoroolefins
WO2006115542A3 (en) Method and apparatus for cleaning and surface conditioning objects with plasma
EP2179808B8 (en) Process for producing electrode for discharge surface treatment.
EP1828070A4 (en) Selective high dielectric constant material etchant
TWI367429B (en) A plasma chamber utilizing an enhanced process and profile simulator algorithms and a method for operating the same
WO2006078894A3 (en) Method and apparatus for cleaning and surface conditioning objects using non-equilibrium atmospheric pressure plasma
ITMI20032209A1 (en) PROCESS FOR THE PRODUCTION OF DEVICES THAT REQUIRE A NON-EVAPORABLE GETTER MATERIAL FOR THEIR OPERATION.
TWI340180B (en) Electrode for discharge surface treatment

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application
NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 06719006

Country of ref document: EP

Kind code of ref document: A2