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WO2005038373A1 - High-pressure heat treatment furnace - Google Patents

High-pressure heat treatment furnace Download PDF

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Publication number
WO2005038373A1
WO2005038373A1 PCT/JP2004/009922 JP2004009922W WO2005038373A1 WO 2005038373 A1 WO2005038373 A1 WO 2005038373A1 JP 2004009922 W JP2004009922 W JP 2004009922W WO 2005038373 A1 WO2005038373 A1 WO 2005038373A1
Authority
WO
WIPO (PCT)
Prior art keywords
cooling
furnace
heat treatment
pressure
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2004/009922
Other languages
French (fr)
Japanese (ja)
Inventor
Akira Suzuki
Hirotoshi Ishikawa
Tatsuya Hamada
Noboru Kiya
Noriaki Nagai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
IHI Corp
Ishikawajima Iwakuni Seisakusho Co Ltd
Original Assignee
Ishikawajima Iwakuni Seisakusho Co Ltd
Ishikawajima Harima Heavy Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ishikawajima Iwakuni Seisakusho Co Ltd, Ishikawajima Harima Heavy Industries Co Ltd filed Critical Ishikawajima Iwakuni Seisakusho Co Ltd
Priority to DE112004001923T priority Critical patent/DE112004001923B4/en
Publication of WO2005038373A1 publication Critical patent/WO2005038373A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories or equipment specially adapted for furnaces of these types
    • F27B5/18Arrangement of controlling, monitoring, alarm or like devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories or equipment specially adapted for furnaces of these types
    • F27B5/14Arrangements of heating devices
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00Forming, maintaining or circulating atmospheres in heating chambers
    • F27D7/06Forming or maintaining special atmospheres or vacuum within heating chambers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D9/00Cooling of furnaces or of charges therein
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27BFURNACES, KILNS, OVENS OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/06Details, accessories or equipment specially adapted for furnaces of these types
    • F27B5/16Arrangements of air or gas supply devices
    • F27B2005/166Means to circulate the atmosphere
    • F27B2005/167Means to circulate the atmosphere the atmosphere being recirculated through the treatment chamber by a turbine

Definitions

  • the present invention relates to a high-pressure heat treatment furnace for heat-treating metals such as cemented carbides, ceramics, composite materials, and the like at a high pressure of normal pressure IMPaG or more, and more specifically, a high-pressure heat treatment furnace capable of rapidly cooling the inside of the furnace.
  • a high-pressure heat treatment furnace for heat-treating metals such as cemented carbides, ceramics, composite materials, and the like at a high pressure of normal pressure IMPaG or more, and more specifically, a high-pressure heat treatment furnace capable of rapidly cooling the inside of the furnace.
  • FIG. 1 is a schematic configuration diagram of a conventional general high-pressure heat treatment furnace as disclosed in Patent Document 1 below, for example.
  • reference numeral 3 denotes a pressure vessel composed of a furnace vessel 1 and a furnace lid 2 that closes both ends of the furnace vessel 1.
  • Jackets 4 and 5 are provided on the outer periphery of the furnace vessel 1 and outside the furnace lid, respectively. The cooling water is allowed to flow through the inside.
  • a hollow cylindrical heat insulating wall 6 having openings at both ends is provided, and an inner case 17 is disposed therein, and the object 7 to be heated is accommodated therein.
  • Reference numeral 8 denotes a heat insulating cover (bang) that opens and closes the opening of the heat insulating wall 6, and is driven to open and close by a cylinder 9 provided outside the furnace cover 2.
  • Reference numeral 10 denotes a heater for heating the object 7 to be heated, and a heating chamber 11 is formed inside the heat insulating wall 6.
  • a water cooling tube 12 for circulating cooling water inside the furnace vessel 1 may be provided.
  • reference numeral 16 denotes a space formed between the pressure vessel 3 and the heat insulating wall 6.
  • FIG. 3 is a diagram showing a state of a change in a furnace temperature (heating chamber temperature) during operation in the above-described heat treatment furnace. As shown in this figure, at the start of operation, the heater is energized at! Jt to raise the temperature.
  • a predetermined processing temperature for example, 1500 ° C.
  • the electricity is stopped and the process proceeds to the cooling process.
  • the heat-insulating lid 8 is closed at first, and the heat-insulating lid 8 is opened when the temperature in the furnace decreases to a predetermined temperature T.
  • the time at temperature T is t.
  • a flow is generated, and the gas 18 flowing out of the heating chamber 11 is cooled by exchanging heat with the inner surface of the water-cooled furnace wall, thereby promoting the cooling of the furnace.
  • FIG. 4 shows a heat treatment furnace disclosed in Patent Document 2.
  • This heat treatment furnace is characterized in that it includes an internal circulation fan 19, a motor 20 for driving the internal circulation fan 19 to rotate, and a circulation gas guide plate 21.
  • the heat-insulating lid 8 is initially closed, and when the furnace temperature drops to a predetermined temperature, the heat-insulating lid 8 is opened.
  • the hot gas 18 in the heating chamber 11 is sucked from one opening (right side in the figure) of the heating chamber 11 and circulated to the heating chamber 11 from the opening on the opposite side (left side in the figure) by the circulation gas guide plate 21. Has become.
  • forced gas convection is generated, heat exchange with the inner surface of the pressure vessel 3 is promoted, and the cooling capacity of the furnace is improved.
  • Patent Document 1 Japanese Patent Application Laid-Open No. Hei 4-26726 (FIG. 7)
  • Patent Document 2 Japanese Patent Publication No. 62-55529 (Fig. 1)
  • an object of the present invention is to provide an economical high-pressure heat treatment furnace that has a high cooling capacity, can shorten the cycle time, has a simple structure, and is economical.
  • a pressure vessel having a furnace vessel and a furnace lid for closing the furnace vessel, and a pressure vessel provided in the pressure vessel, A heat-insulating wall that opens oppositely to form a heating chamber for accommodating the object to be processed, a heat-insulating lid that is driven to open and close the opening of the heat-insulating wall, and an object to be processed provided in the heating chamber. And a plurality of cooling fins provided on the inner surface of the furnace lid and cooling the gas in the pressure vessel.
  • a second invention is a preferred embodiment of the first invention, wherein the cooling fin is connected to a cooling member cooled by a refrigerant.
  • the cooling fins are provided so as to be connected to the cooling member cooled by the refrigerant, so that the cost increases. It is minimal and economical.
  • a third invention is a preferred embodiment of the second invention, wherein the cooling member is attached to an inner wall surface of the container lid.
  • the cooling member by attaching the cooling member to the inner wall surface of the furnace lid, the cooling member can be installed simply by extending the furnace vessel length, and the design is easy.
  • the cooling fins are located near the position where the high-temperature gas is blown from the heating chamber, the cooling effect can be enhanced.
  • a fourth invention is a preferred embodiment of the second invention, wherein the cooling fin and the cooling member are integrally formed.
  • the cooling fin and the cooling member integrally, it is possible to eliminate a gap generated at a connecting portion between the cooling fin and the cooling member. Thereby, the heat transfer between the cooling fins and the cooling member can be sufficiently ensured, and the cooling performance can be sufficiently exhibited.
  • a fifth invention is a preferred embodiment of the first invention, wherein each of the cooling fins has a slit for absorbing thermal expansion.
  • each cooling fin has a slit for absorbing thermal expansion, so that deformation and breakage of the cooling fin can be prevented, and gas enters the slit. As a result, a vortex is generated in the gas flow, and the cooling efficiency is improved.
  • a sixth invention is a preferred embodiment of the first invention, wherein the cooling fin is made of a material having excellent thermal conductivity (aluminum, copper, or the like).
  • the cooling fin is made of a material having excellent thermal conductivity, so that the gas in the pressure vessel can be effectively cooled. As a result, the cooling performance is improved, and the cycle time of the furnace can be significantly reduced.
  • a seventh invention is a preferred embodiment of the first invention, wherein the cooling fin is oriented in a longitudinal direction of the fin in a direction along a gas flow.
  • the longitudinal direction of the cooling fins is set in a direction along the gas flow.
  • the natural convection can be smoothly performed without obstructing the gas flow, and the cooling performance can be improved.
  • FIG. 1 is a schematic configuration diagram of a conventional high-pressure heat treatment furnace.
  • FIG. 2 is a schematic configuration diagram of another conventional high-pressure heat treatment furnace.
  • FIG. 3 is a view showing a state of a change in a furnace temperature (heating chamber temperature) during operation in the high-pressure heat treatment furnaces of FIGS. 1 and 2.
  • FIG. 4 is a schematic configuration diagram of another conventional high-pressure heat treatment furnace.
  • FIG. 5 is a schematic configuration diagram of a high-pressure heat treatment furnace of the present invention.
  • FIG. 6 is a view showing a state of a change in a furnace temperature (heating chamber temperature) during operation of the high-pressure heat treatment furnace of the present invention.
  • FIG. 5 is a schematic configuration diagram showing an embodiment of the high-pressure heat treatment furnace of the present invention.
  • reference numeral 3 denotes a pressure vessel composed of a hollow cylindrical furnace vessel 1 and a flat furnace lid 2 that closes both ends of the furnace vessel 1.
  • the pressure vessel 3 is configured to control the internal pressure. Further, a jacket is provided on the outer periphery of the furnace vessel 1, and cooling water is circulated inside as a coolant to cool the furnace vessel 1.
  • Reference numeral 6 denotes a hollow cylindrical heat-insulating wall provided in the pressure vessel 3, in which an inner case 17 is disposed, and the object 7 to be heated is accommodated therein. Both ends of the heat insulating wall 6 have openings that open at positions facing the furnace wall 2.
  • Reference numeral 8 denotes a heat-insulating lid (bang) for opening and closing the opening of the heat-insulating wall 6, which is driven to open and close by a cylinder 9 provided outside the furnace lid 2.
  • Reference numeral 10 denotes a heater for heating the object 7 to be heated, and a heating chamber 11 is formed inside the heat insulating wall 6.
  • Reference numeral 16 denotes a space formed between the pressure vessel 3 and the heat insulating wall 6.
  • Reference numeral 13 denotes a cooling fin for cooling the gas 18 in the pressure vessel 3, and is connected to a cooling member 14 attached to the inner wall surface of the furnace lid 2.
  • the cooling member 14 has a circular flat plate shape, and has a structure in which cooling water flows as a coolant inside. Further, the cooling member 14 has an opening 14a for passing the rod of the cylinder 9 in the center.
  • the cooling fins 13 are in the shape of a rectangular flat plate, and are connected to each other at a predetermined interval perpendicular to one surface of the cooling member 14.
  • a metal material having excellent heat conductivity is used for the cooling fins 13, a metal material having excellent heat conductivity is used. However, it is particularly preferable to use aluminum, copper, or the like having good heat conductivity. Since copper has higher thermal conductivity and lower linear expansion coefficient than aluminum, copper is more suitable as a material for cooling fins than aluminum.
  • the cooling fins 18 are preferably set so that the direction along the direction in which the gas 18 flows, that is, the length direction (longitudinal direction) is oriented vertically. As a result, the natural convection can be smoothly performed without obstructing the flow of the gas 18, and it is possible to exert a good cooling performance.
  • the cooling fins 13 may be provided with slits for absorbing thermal expansion.
  • the slit may be provided with a plurality of notches extending in the width direction (transverse direction) of the cooling fin 13 across the length direction (longitudinal direction) of the cooling fin 13.
  • the cooling member 14 is attached to the furnace lid 2.
  • the cooling water introduced into the cooling member 14 configured as described above cools the cooling member 14 and is discharged.
  • the cooling fins 13 connected to the cooling member 14 are cooled by the cooling member 14.
  • the cooling fins 13 and the cooling members 14 may be separately formed and then joined by welding or the like, but it is difficult to bring all the mating surfaces of the cooling fins 13 and the cooling members 14 into close contact with each other. It is conceivable that the cooling performance of the fins 13 cannot be sufficiently exhibited. Therefore, in order to eliminate a gap between the cooling fin 13 and the cooling member 14, it is preferable that both are integrally formed. As a result, a sufficient amount of heat transfer between the cooling fins 13 and the cooling member 14 can be secured. Next, the operation of the high-pressure heat treatment furnace of the present invention configured as described above will be described. FIG.
  • FIG. 6 is a diagram showing a change in the furnace temperature (heating chamber temperature) during operation in the high-pressure heat treatment furnace of the present invention.
  • the solid line indicates the temperature change according to the present invention, and the dashed line indicates the conventional high temperature of FIG.
  • the temperature change by the pressure heat treatment furnace is shown.
  • Fig. 6 at the operation start time t
  • the heat treatment is performed while maintaining the temperature (for example, 1500 ° C.). And when the process is completed
  • the heat-insulating lid 8 is closed at first, and the heat-insulating lid 8 is opened when the temperature in the furnace decreases to a predetermined temperature T '.
  • the high-temperature gas 18 in the heating chamber 11 blows out from the opening of the heat insulating wall 6 toward the space 16 and contacts the cooling fins 13. Since the cooling fins 13 are cooled by the cooling member 14, the temperature T 'when opening the opening / closing door should be set to a temperature higher than the opening temperature T of the heat insulating lid of the conventional high-pressure heat treatment furnace in FIG. Can be. As a result, it is possible to advance the time t ′ at which the heat-insulating lid is opened from the time t in FIG.
  • the gas 18 in contact with the cooling fins 13 exchanges heat with many of the cooling fins 13, convects in the pressure vessel 3 while being cooled, and is circulated from the opening of the heat insulating wall 6 to the heating chamber 11.
  • the cooling fins 13 are provided in a large number in the pressure vessel, and the cooling area is greatly increased as compared with the conventional one, so that the cooling performance is high. As a result, as shown in FIG. 6, the cooling time can be significantly reduced, and the cycle time of the furnace can be shortened. For example, it is possible to reduce the cooling time by about half compared with the conventional case.
  • the following effects can be obtained in addition to the effects described above.
  • the cooling fins are provided so as to be connected to the cooling member 14 cooled by the refrigerant and the cooling member 14 is attached to the inner wall portion of the pressure vessel 3, a cooling method using a water cooling tube, a cooling method using a motor and a fan, etc. Since the structure is simpler and the number of parts is small, the cost increase is minimized.
  • the cooling member 14 inside the furnace lid 2 By mounting on a wall, it can be installed simply by extending the length of the furnace vessel, facilitating design.
  • the furnace lid 2 of the pressure vessel 3 is a flat plate, but may be a curved end plate.
  • the side of the cooling member 14 facing the furnace lid 2 is formed according to the curved shape of the head plate.
  • the horizontal type sintering furnace has been described, but the present invention is naturally applicable to a vertical type sintering furnace.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)

Abstract

A high-pressure heat treatment furnace, comprising a pressure vessel having a furnace container and a furnace cover closing the furnace container and allowing an internal pressure to be controlled, heat-insulating walls installed in the pressure vessel, opened oppositely to the furnace cover, and forming a heating chamber for storing a treated material therein, a heat-insulating cover driven to open and close the opening part of the heat-insulating wall, a heater installed in the heating chamber to heat the treated material, and a plurality of cooling fins installed on the inner surface of the furnace cover to cool gases in the pressure vessel.

Description

明 細 書  Specification

高圧熱処理炉  High pressure heat treatment furnace

発明の背景  Background of the Invention

[0001] 発明の技術分野  [0001] TECHNICAL FIELD OF THE INVENTION

[0002] 本発明は、超硬合金などの金属、セラミックス、複合材等を常用圧力 IMPaG以上 の高圧で熱処理する高圧熱処理炉に関し、さらに詳しくは、炉内の急速冷却を可能 にした高圧熱処理炉に関する。  [0002] The present invention relates to a high-pressure heat treatment furnace for heat-treating metals such as cemented carbides, ceramics, composite materials, and the like at a high pressure of normal pressure IMPaG or more, and more specifically, a high-pressure heat treatment furnace capable of rapidly cooling the inside of the furnace. About.

関連技術の説明  Description of related technology

[0003] 超硬合金、セラミックス等を常用圧力 IMPaG以上の高圧で熱処理する高圧熱処理 炉では、サイクルタイムの短縮及び処理品の品質向上のために、炉の冷却時間をい 力にして短縮するかが重要な課題となっている。図 1は、例えば下記特許文献 1に開 示されているような従来の一般的な高圧熱処理炉の概略構成図である。図 1におい て符号 3は、炉容器 1と炉容器 1の両端を閉じる炉蓋 2とから構成される圧力容器であ り、炉容器 1の外周と炉蓋の外側にはそれぞれジャケット 4、 5が設けられ、その内部 に冷却水を流通させるようになってレ、る。圧力容器 3内には両端に開口部を有する中 空円筒形の断熱壁 6が設けられており、その内部にはインナーケース 17が配置され 、被加熱物 7はその内部に収容される。符号 8は、断熱壁 6の開口部を開閉する断熱 蓋 (バング)であり、炉蓋 2の外側に設けられたシリンダ 9により開閉駆動されるように なっている。また、符号 10は、被加熱物 7を加熱するヒータであり、断熱壁 6内部に加 熱室 11が形成される。また、図 2に示すように、炉容器 1の外周部に冷却水用のジャ ケットを設ける代わりに、炉容器 1の内壁に内部に冷却水を流通させる水冷チューブ 12を設けたものもある。なお、図 1及び図 2において、符号 16は、圧力容器 3と断熱 壁 6との間に形成される空間である。  [0003] In a high-pressure heat treatment furnace in which cemented carbide, ceramics, etc. are heat-treated at a high pressure higher than the normal pressure IMPaG, in order to shorten the cycle time and improve the quality of the treated product, is it necessary to reduce the furnace cooling time? Is an important issue. FIG. 1 is a schematic configuration diagram of a conventional general high-pressure heat treatment furnace as disclosed in Patent Document 1 below, for example. In FIG. 1, reference numeral 3 denotes a pressure vessel composed of a furnace vessel 1 and a furnace lid 2 that closes both ends of the furnace vessel 1. Jackets 4 and 5 are provided on the outer periphery of the furnace vessel 1 and outside the furnace lid, respectively. The cooling water is allowed to flow through the inside. Inside the pressure vessel 3, a hollow cylindrical heat insulating wall 6 having openings at both ends is provided, and an inner case 17 is disposed therein, and the object 7 to be heated is accommodated therein. Reference numeral 8 denotes a heat insulating cover (bang) that opens and closes the opening of the heat insulating wall 6, and is driven to open and close by a cylinder 9 provided outside the furnace cover 2. Reference numeral 10 denotes a heater for heating the object 7 to be heated, and a heating chamber 11 is formed inside the heat insulating wall 6. In addition, as shown in FIG. 2, instead of providing a jacket for cooling water on the outer periphery of the furnace vessel 1, a water cooling tube 12 for circulating cooling water inside the furnace vessel 1 may be provided. 1 and 2, reference numeral 16 denotes a space formed between the pressure vessel 3 and the heat insulating wall 6.

[0004] この熱処理炉では、加熱室 11内に被処理物 7を装入して断熱壁 8を閉じた後、加熱 室 11内に雰囲気ガスを導入してヒータ 10により被処理物 7をガス雰囲気下で加熱焼 結させ、処理後には、加熱室 11内の雰囲気ガスおよび被処理物 7が十分に冷却さ れてから被処理物 11を取り出すようにしてレ、る。 [0005] 図 3は、上記の熱処理炉における操業時の炉内温度 (加熱室温度)の変化の様子を 示す図である。この図に示すように、操業開始時亥 !Jtにおいてヒータに通電して昇温 [0004] In this heat treatment furnace, after the object 7 is charged into the heating chamber 11 and the heat insulating wall 8 is closed, an atmosphere gas is introduced into the heating chamber 11 and the object 7 is gasified by the heater 10. After heating and sintering in an atmosphere, the processing object 11 is taken out after the atmosphere gas in the heating chamber 11 and the processing object 7 are sufficiently cooled. [0005] FIG. 3 is a diagram showing a state of a change in a furnace temperature (heating chamber temperature) during operation in the above-described heat treatment furnace. As shown in this figure, at the start of operation, the heater is energized at! Jt to raise the temperature.

0  0

を開始し、時刻 tから時刻 tまでの間にわたって所定の処理温度(例えば 1500°C)  Starting from time t to time t and at a predetermined processing temperature (for example, 1500 ° C).

1 2  1 2

に保持して熱処理を行う。そして、処理が完了した時刻 tの時点でヒータに対する通  And heat treatment is performed. Then, at the time t when the process is completed, communication with the heater is performed.

2  2

電を停止して冷却工程に移行する。冷却工程では、最初のうちは断熱蓋 8を閉じて おき、炉内温度が所定温度 Tまで低下したら断熱蓋 8を開くようにしている。なお、温 度 Tのときの時刻を tとする。これにより、加熱室 11と空間 16との温度差により自然対  The electricity is stopped and the process proceeds to the cooling process. In the cooling process, the heat-insulating lid 8 is closed at first, and the heat-insulating lid 8 is opened when the temperature in the furnace decreases to a predetermined temperature T. The time at temperature T is t. As a result, a natural difference occurs due to the temperature difference between the heating chamber 11 and the space 16.

3  Three

流が生じ、加熱室 11から流出したガス 18が水冷された炉壁内面と熱交換を行うこと により冷却され、炉の冷却を促進するようになっている。  A flow is generated, and the gas 18 flowing out of the heating chamber 11 is cooled by exchanging heat with the inner surface of the water-cooled furnace wall, thereby promoting the cooling of the furnace.

[0006] 図 4は、特許文献 2に開示された熱処理炉である。この熱処理炉は、内部循環ファン 19と、内部循環ファン 19を回転駆動させるモータ 20と、循環ガス案内板 21とを備え ている点に特徴を有している。冷却工程では、上述した熱処理炉と同様に、最初のう ちは断熱蓋 8を閉じておき、炉内温度が所定温度まで低下したら断熱蓋 8を開くよう にし、内部循環ファン 19により断熱壁 6の一方の開口部(図で右側)から加熱室 11内 の高温のガス 18を吸引し、循環ガス案内板 21により反対側の開口部(図で左側)か ら加熱室 11に循環させるようになっている。これにより強制ガス対流を発生させ、圧 力容器 3内面との熱交換を促進させ、炉の冷却能力を向上させている。  FIG. 4 shows a heat treatment furnace disclosed in Patent Document 2. This heat treatment furnace is characterized in that it includes an internal circulation fan 19, a motor 20 for driving the internal circulation fan 19 to rotate, and a circulation gas guide plate 21. In the cooling step, as in the case of the heat treatment furnace described above, the heat-insulating lid 8 is initially closed, and when the furnace temperature drops to a predetermined temperature, the heat-insulating lid 8 is opened. The hot gas 18 in the heating chamber 11 is sucked from one opening (right side in the figure) of the heating chamber 11 and circulated to the heating chamber 11 from the opening on the opposite side (left side in the figure) by the circulation gas guide plate 21. Has become. As a result, forced gas convection is generated, heat exchange with the inner surface of the pressure vessel 3 is promoted, and the cooling capacity of the furnace is improved.

[0007] 特許文献 1 :特開平 4一 26726号公報 (第 7図)  Patent Document 1: Japanese Patent Application Laid-Open No. Hei 4-26726 (FIG. 7)

特許文献 2:実公昭 62-55529号公報 (第 1図)  Patent Document 2: Japanese Patent Publication No. 62-55529 (Fig. 1)

[0008] しかし、上述した従来の高圧熱処理炉における冷却方式には、以下のような種々の 問題点があった。  [0008] However, the above-described cooling method in the conventional high-pressure heat treatment furnace has various problems as follows.

[0009] (1)図 1に示したような炉容器 1及び炉蓋 2にジャケット 4、 5を設ける方式では、伝熱 面積が圧力容器 3の内壁面積に限定されるため、冷却面積が十分でなぐ冷却能力 が低い。また、圧力容器 3の壁厚は高圧に耐え得るよう肉厚となっているため、圧力 容器 3外壁から水冷しても圧力容器 3内壁を十分に冷却することは困難である。この ため、冷却能力が制約されてしまう。  (1) In the method in which the jackets 4 and 5 are provided on the furnace vessel 1 and the furnace lid 2 as shown in FIG. 1, since the heat transfer area is limited to the inner wall area of the pressure vessel 3, the cooling area is sufficient. Low cooling capacity. In addition, since the wall thickness of the pressure vessel 3 is thick enough to withstand high pressure, it is difficult to sufficiently cool the inner wall of the pressure vessel 3 even with water cooling from the outer wall of the pressure vessel 3. For this reason, the cooling capacity is restricted.

[0010] (2)図 2に示したような炉容器 2の内壁に水冷チューブ 12を設ける方式では、水冷チ ユーブ 12自体が高価であるため、コスト面での負担が大きく不経済であり、また、水 冷チューブ 12の設置スペースを確保するため炉径を大きくする必要がある。また、水 冷チューブ 12からの水漏れ及びガスリークの危険性がある。さらに、水冷チューブ 1 2内にゴミが詰まる等により通水量が減少すると冷却効果が得られなくなるだけでなく 、水冷チューブ 12が損傷する危険性もある。 [0010] (2) In the method in which the water-cooled tube 12 is provided on the inner wall of the furnace vessel 2 as shown in Fig. 2, the water-cooled tube 12 itself is expensive, so that the cost burden is large and uneconomical. Also water It is necessary to increase the furnace diameter to secure the installation space for the cold tube 12. Further, there is a danger of water leak and gas leak from the water cooling tube 12. Furthermore, if the amount of flowing water decreases due to clogging of the water cooling tube 12 or the like, not only the cooling effect cannot be obtained, but also the water cooling tube 12 may be damaged.

[0011] (3)図 4に示したような圧力容器 3内に内部循環ファン 19、モータ 20及び循環ガス案 内板 21を設ける方式では、ファン及びモータ等の追加により、構造が複雑になり製 造コスト増の要因となる。また、モータへの電力供給に伴う客先電源設備及びラン二 ングコストが増加する。また、軸受の損傷などによる故障の危険性があり、メンテナン スコストも増加する。また、ファンの風圧によっては軽量の被処理物を処理できない場 合がある。さらに、モータの設置スペースによりモータ容量が制限されてしまレ、、冷却 能力が制約されてしまう。 発明の要約 [0011] (3) In the method in which the internal circulation fan 19, the motor 20, and the circulation gas plan inner plate 21 are provided in the pressure vessel 3 as shown in Fig. 4, the structure becomes complicated due to the addition of the fan and the motor. This will increase manufacturing costs. In addition, customer power supply equipment and running costs associated with power supply to the motor will increase. In addition, there is a risk of failure due to damage to bearings, etc., and maintenance costs also increase. In addition, depending on the wind pressure of the fan, there is a case where a light weight object cannot be processed. Furthermore, the motor capacity is limited by the installation space of the motor, and the cooling capacity is limited. Summary of the Invention

[0012] 本発明は上述した問題点を解決するため創案されたものである。すなわち、本発明 の目的は、冷却能力が高ぐサイクルタイムを短縮でき、構造が簡単で、かつ経済的 な高圧熱処理炉を提供することにある。  The present invention has been made to solve the above-mentioned problems. That is, an object of the present invention is to provide an economical high-pressure heat treatment furnace that has a high cooling capacity, can shorten the cycle time, has a simple structure, and is economical.

[0013] 本発明の目的を達成するために、第 1の発明によれば、炉容器と該炉容器を閉じる 炉蓋とを有する圧力容器と、該圧力容器内に設けられ、前記炉蓋に対向して開口し 、内部に被処理物を収容する加熱室を形成する断熱壁と該断熱壁の開口部を開閉 するように駆動される断熱蓋と、該前記加熱室に設けられ被処理物を加熱するヒータ と、前記炉蓋内面に設けられ、該圧力容器内のガスを冷却する複数の冷却フィンとを 備えることを特徴とする高圧熱処理炉が提供される。 [0013] To achieve the object of the present invention, according to the first invention, a pressure vessel having a furnace vessel and a furnace lid for closing the furnace vessel, and a pressure vessel provided in the pressure vessel, A heat-insulating wall that opens oppositely to form a heating chamber for accommodating the object to be processed, a heat-insulating lid that is driven to open and close the opening of the heat-insulating wall, and an object to be processed provided in the heating chamber. And a plurality of cooling fins provided on the inner surface of the furnace lid and cooling the gas in the pressure vessel.

[0014] 第 1の発明によれば、圧力容器内を流れるガスを冷却する複数の冷却フィンを設ける ことで、圧力容器内の冷却面積が大幅に増加し、この結果、冷却性能が向上する。 従って、炉のサイクルタイムを短縮することができるという効果が得られる。また、可動 部がないため、作動不良を起こす要因が無ぐ電気やガスなどを必要とせず、寿命の 問題がない。従って、省エネに優れ、半永久的に使用できる。 [0015] 第 2の発明は、第 1の発明の好ましい実施形態であり、前記冷却フィンは、冷媒により 冷却される冷却部材に連結されてレ、る。 [0014] According to the first invention, by providing a plurality of cooling fins for cooling gas flowing in the pressure vessel, the cooling area in the pressure vessel is greatly increased, and as a result, the cooling performance is improved. Therefore, the effect that the cycle time of the furnace can be shortened is obtained. In addition, since there are no moving parts, there is no need for electricity or gas, which has no cause for malfunction, and there is no problem with life. Therefore, it is excellent in energy saving and can be used semi-permanently. [0015] A second invention is a preferred embodiment of the first invention, wherein the cooling fin is connected to a cooling member cooled by a refrigerant.

[0016] 第 2の発明によれば、冷却フィンを、冷媒により冷却される冷却部材に連結して設け る構成としたので、構造が簡単であり、部品点数の増加も少ないため、コスト増が最 小限に抑えられ、経済的である。 [0016] According to the second aspect, since the cooling fins are provided so as to be connected to the cooling member cooled by the refrigerant, the structure is simple and the number of parts is small, so that the cost increases. It is minimal and economical.

[0017] 第 3の発明は、第 2の発明の好ましい実施形態であり、前記冷却部材は、前記容器 蓋の内壁面に取り付けられている。 [0017] A third invention is a preferred embodiment of the second invention, wherein the cooling member is attached to an inner wall surface of the container lid.

[0018] 第 3の発明によれば、冷却部材を炉蓋の内壁面に取り付けることにより、炉容器長を 伸ばすだけで設置可能となり、設計が容易である。また、加熱室からの高温ガスが噴 き出す位置の近傍に冷却フィンがあるため、冷却効果を高くすることができる。 [0018] According to the third invention, by attaching the cooling member to the inner wall surface of the furnace lid, the cooling member can be installed simply by extending the furnace vessel length, and the design is easy. In addition, since the cooling fins are located near the position where the high-temperature gas is blown from the heating chamber, the cooling effect can be enhanced.

[0019] 第 4の発明は、第 2の発明の好ましい実施形態であり、前記冷却フィンと前記冷却部 材とは、一体成形されている。 A fourth invention is a preferred embodiment of the second invention, wherein the cooling fin and the cooling member are integrally formed.

[0020] 第 4の発明によれば、冷却フィンと冷却部材を一体成形とすることにより、冷却フィンと 冷却部材との連結部に生じる隙間を無くすことができる。これにより、冷却フィンと冷 却部材との間の伝熱量を十分に確保して冷却性能を十分に発揮することができる。 [0020] According to the fourth aspect, by forming the cooling fin and the cooling member integrally, it is possible to eliminate a gap generated at a connecting portion between the cooling fin and the cooling member. Thereby, the heat transfer between the cooling fins and the cooling member can be sufficiently ensured, and the cooling performance can be sufficiently exhibited.

[0021] 第 5の発明は、第 1の発明の好ましい実施形態であり、前記各冷却フィンは、熱膨張 を吸収するためのスリットを有している。 A fifth invention is a preferred embodiment of the first invention, wherein each of the cooling fins has a slit for absorbing thermal expansion.

[0022] 第 5の発明によれば、各冷却フィンは、熱膨張を吸収するためのスリットを有してレ、る ので、冷却フィンの変形、破損を防止できると共に、ガスがスリットに入り込むことによ りガス流れに渦を発生させ冷却効率が向上する。 [0022] According to the fifth invention, each cooling fin has a slit for absorbing thermal expansion, so that deformation and breakage of the cooling fin can be prevented, and gas enters the slit. As a result, a vortex is generated in the gas flow, and the cooling efficiency is improved.

[0023] 第 6の発明は、第 1の発明の好ましい実施形態であり、前記冷却フィンは、熱伝導率 に優れる材料 (アルミニウム、銅など)からなる。 [0023] A sixth invention is a preferred embodiment of the first invention, wherein the cooling fin is made of a material having excellent thermal conductivity (aluminum, copper, or the like).

[0024] 第 6の発明によれば、冷却フィンは、熱伝導率の優れた材料からなるので、圧力容器 内のガスを効果的に冷却することができる。これにより、冷却性能が向上し、炉のサイ クルタイムを大幅に短縮化できる。 [0024] According to the sixth aspect, the cooling fin is made of a material having excellent thermal conductivity, so that the gas in the pressure vessel can be effectively cooled. As a result, the cooling performance is improved, and the cycle time of the furnace can be significantly reduced.

[0025] 第 7の発明は、第 1の発明の好ましい実施形態であり、前記冷却フィンは、ガスの流 れに沿う方向にフィンの長手方向を向ける。 [0025] A seventh invention is a preferred embodiment of the first invention, wherein the cooling fin is oriented in a longitudinal direction of the fin in a direction along a gas flow.

[0026] 第 7の発明によれば、冷却フィンの長手方向をガスの流れに沿う方向に設定すること により、ガスの流れを妨げず、 自然対流が円滑に行われ、良好な冷却性能を発揮す ること力 Sできる。 [0026] According to the seventh invention, the longitudinal direction of the cooling fins is set in a direction along the gas flow. Thus, the natural convection can be smoothly performed without obstructing the gas flow, and the cooling performance can be improved.

[0027] 本発明のその他の目的及び有利な特徴は、添付図面を参照した以下の説明から明 らかになろう。 図面の簡単な説明  [0027] Other objects and advantageous features of the present invention will become apparent from the following description with reference to the accompanying drawings. Brief Description of Drawings

[0028] [図 1]従来の高圧熱処理炉の概略構成図である。  FIG. 1 is a schematic configuration diagram of a conventional high-pressure heat treatment furnace.

[図 2]従来の別の高圧熱処理炉の概略構成図である。  FIG. 2 is a schematic configuration diagram of another conventional high-pressure heat treatment furnace.

[図 3]図 1、図 2の高圧熱処理炉における操業時の炉内温度 (加熱室温度)の変化の 様子を示す図である。  FIG. 3 is a view showing a state of a change in a furnace temperature (heating chamber temperature) during operation in the high-pressure heat treatment furnaces of FIGS. 1 and 2.

[図 4]従来の別の高圧熱処理炉の概略構成図である。  FIG. 4 is a schematic configuration diagram of another conventional high-pressure heat treatment furnace.

[図 5]本発明の高圧熱処理炉の概略構成図である。  FIG. 5 is a schematic configuration diagram of a high-pressure heat treatment furnace of the present invention.

[図 6]本発明の高圧熱処理炉における操業時の炉内温度 (加熱室温度)の変化の様 子を示す図である。  FIG. 6 is a view showing a state of a change in a furnace temperature (heating chamber temperature) during operation of the high-pressure heat treatment furnace of the present invention.

好ましい実施例の説明  Description of the preferred embodiment

[0029] 以下、本発明の好ましい実施例を図 5及び図 6に基づいて詳細に説明する。 Hereinafter, a preferred embodiment of the present invention will be described in detail with reference to FIGS. 5 and 6.

[0030] 図 5は、本発明の高圧熱処理炉の実施例を示す概略構成図である。図 5において、 符号 3は、中空円筒形の炉容器 1と炉容器 1の両端を閉じる平板状の炉蓋 2とから構 成される圧力容器である。この圧力容器 3は、内部の圧力を制御可能に構成されて いる。また、炉容器 1の外周にはジャケットが設けられており、内部に冷媒として冷却 水を流通させ、炉容器 1を冷却するようになっている。 FIG. 5 is a schematic configuration diagram showing an embodiment of the high-pressure heat treatment furnace of the present invention. In FIG. 5, reference numeral 3 denotes a pressure vessel composed of a hollow cylindrical furnace vessel 1 and a flat furnace lid 2 that closes both ends of the furnace vessel 1. The pressure vessel 3 is configured to control the internal pressure. Further, a jacket is provided on the outer periphery of the furnace vessel 1, and cooling water is circulated inside as a coolant to cool the furnace vessel 1.

[0031] 符号 6は圧力容器 3内に設けられた中空円筒形の断熱壁であり、その内部にはイン ナーケース 17が配置され、被加熱物 7はその内部に収容される。また断熱壁 6の両 端は炉壁 2に対向する位置で開口する開口部を有している。符号 8は断熱壁 6の開 口部を開閉する断熱蓋 (バング)であり、炉蓋 2の外側に設けられたシリンダ 9により開 閉駆動されるようになっている。また、符号 10は、被加熱物 7を加熱するヒータであり 、断熱壁 6内部に加熱室 11が形成される。符号 16は、圧力容器 3と断熱壁 6との間 に形成される空間である。 [0032] 符号 13は、圧力容器 3内のガス 18を冷却するための冷却フィンであり、炉蓋 2の内 壁面に取り付けられた冷却部材 14に連結されている。冷却部材 14は円形平板状で あり、内部に冷媒として冷却水が流れる構造となっている。また、冷却部材 14は、中 心部にシリンダ 9のロッドを通すための開口部 14aを有している。冷却フィン 13は、方 形平板状であり、冷却部材 14の一方の面に対して垂直に互いに所定間隔を隔てて 複数連結されている。冷却フィン 13には熱伝導性に優れる金属材料が使用されるが 、特に熱伝導性の良いアルミニウムや銅等を用いるのが好ましい。なお、銅は、アルミ ニゥムよりも熱伝導性が高ぐかつ線膨張係数も小さいため、冷却フィンの材料として はアルミニウムよりも銅の方がより適してレ、るとレ、える。 Reference numeral 6 denotes a hollow cylindrical heat-insulating wall provided in the pressure vessel 3, in which an inner case 17 is disposed, and the object 7 to be heated is accommodated therein. Both ends of the heat insulating wall 6 have openings that open at positions facing the furnace wall 2. Reference numeral 8 denotes a heat-insulating lid (bang) for opening and closing the opening of the heat-insulating wall 6, which is driven to open and close by a cylinder 9 provided outside the furnace lid 2. Reference numeral 10 denotes a heater for heating the object 7 to be heated, and a heating chamber 11 is formed inside the heat insulating wall 6. Reference numeral 16 denotes a space formed between the pressure vessel 3 and the heat insulating wall 6. [0032] Reference numeral 13 denotes a cooling fin for cooling the gas 18 in the pressure vessel 3, and is connected to a cooling member 14 attached to the inner wall surface of the furnace lid 2. The cooling member 14 has a circular flat plate shape, and has a structure in which cooling water flows as a coolant inside. Further, the cooling member 14 has an opening 14a for passing the rod of the cylinder 9 in the center. The cooling fins 13 are in the shape of a rectangular flat plate, and are connected to each other at a predetermined interval perpendicular to one surface of the cooling member 14. For the cooling fins 13, a metal material having excellent heat conductivity is used. However, it is particularly preferable to use aluminum, copper, or the like having good heat conductivity. Since copper has higher thermal conductivity and lower linear expansion coefficient than aluminum, copper is more suitable as a material for cooling fins than aluminum.

[0033] また、本実施例において、高圧熱処理炉は横置き型であるため、加熱室 11から吹き 出たガス 18は矢印の方向に流れる。従って、冷却フィン 18は、ガス 18の流れる方向 に沿う方向、即ち、長さ方向(長手方向)が上下方向に向くように設定すると良い。こ れにより、ガス 18の流れを妨げず、 自然対流が円滑に行われ、良好な冷却性能を発 揮すること力 Sできる。  In the present embodiment, since the high-pressure heat treatment furnace is of a horizontal type, the gas 18 blown out from the heating chamber 11 flows in the direction of the arrow. Therefore, the cooling fins 18 are preferably set so that the direction along the direction in which the gas 18 flows, that is, the length direction (longitudinal direction) is oriented vertically. As a result, the natural convection can be smoothly performed without obstructing the flow of the gas 18, and it is possible to exert a good cooling performance.

[0034] また、冷却フィン 13には、熱膨張を吸収するためのスリットを設けるとよい。スリットは 、例えば、冷却フィン 13の幅方向(短手方向)に延びる切欠きを冷却フィン 13の長さ 方向(長手方向)にわたつて複数設けるとよい。これにより、熱応力を吸収して冷却フ インの変形、破損を防止できると共に、ガスがスリットに入り込むことによりガス流れに 渦を発生させ冷却効率が向上するという効果が得られる。  [0034] The cooling fins 13 may be provided with slits for absorbing thermal expansion. For example, the slit may be provided with a plurality of notches extending in the width direction (transverse direction) of the cooling fin 13 across the length direction (longitudinal direction) of the cooling fin 13. As a result, the deformation and breakage of the cooling fin can be prevented by absorbing the thermal stress, and the gas enters the slit to generate a vortex in the gas flow, thereby improving the cooling efficiency.

[0035] 図 5において、冷却部材 14は炉蓋 2に取り付けられている。このように構成された冷 却部材 14に導入された冷却水は、冷却部材 14を冷却し、排出されるようになってい る。そして、冷却部材 14に連結された冷却フィン 13は、冷却部材 14により冷却される ようになつている。  In FIG. 5, the cooling member 14 is attached to the furnace lid 2. The cooling water introduced into the cooling member 14 configured as described above cools the cooling member 14 and is discharged. The cooling fins 13 connected to the cooling member 14 are cooled by the cooling member 14.

[0036] なお、冷却フィン 13と冷却部材 14はそれぞれ別々に成形した後、溶接等により接合 してもよいが、冷却フィン 13と冷却部材 14との合わせ面を全て密着させることは難し ぐ冷却フィン 13の冷却性能を十分に発揮できないことも考えられる。そこで、冷却フ イン 13と冷却部材 14との隙間をなくすため、両者を一体成形することが好ましい。こ れにより、冷却フィン 13と冷却部材 14との間の伝熱量を十分に確保することができる [0037] 次に、上述のように構成された本発明の高圧熱処理炉の動作について説明する。 図 6は、本発明の高圧熱処理炉における操業時の炉内温度 (加熱室温度)の変化の 様子を示す図であり、実線は本発明による温度変化を示し、破線は図 3の従来の高 圧熱処理炉による温度変化を示している。図 6に示すように、操業開始時刻 tにおい [0036] The cooling fins 13 and the cooling members 14 may be separately formed and then joined by welding or the like, but it is difficult to bring all the mating surfaces of the cooling fins 13 and the cooling members 14 into close contact with each other. It is conceivable that the cooling performance of the fins 13 cannot be sufficiently exhibited. Therefore, in order to eliminate a gap between the cooling fin 13 and the cooling member 14, it is preferable that both are integrally formed. As a result, a sufficient amount of heat transfer between the cooling fins 13 and the cooling member 14 can be secured. Next, the operation of the high-pressure heat treatment furnace of the present invention configured as described above will be described. FIG. 6 is a diagram showing a change in the furnace temperature (heating chamber temperature) during operation in the high-pressure heat treatment furnace of the present invention. The solid line indicates the temperature change according to the present invention, and the dashed line indicates the conventional high temperature of FIG. The temperature change by the pressure heat treatment furnace is shown. As shown in Fig. 6, at the operation start time t

0 てヒータに通電して昇温を開始し、時亥 ijtから時刻 tまでの間にわたって所定の処理  0 to start the temperature rise by energizing the heater.

1 2  1 2

温度(例えば 1500°C)に保持して熱処理を行う。そして、処理が完了した時亥 ijtの時  The heat treatment is performed while maintaining the temperature (for example, 1500 ° C.). And when the process is completed

2 点でヒータに対する通電を停止して冷却工程に移行する。冷却工程では、最初のう ちは断熱蓋 8を閉じておき、炉内温度が所定温度 T'まで低下したら断熱蓋 8を開くよ うにしている。このとき、加熱室 11内の高温のガス 18が、断熱壁 6の開口部から空間 16に向けて吹き出し、冷却フィン 13に接触する。この冷却フィン 13は冷却部材 14に より冷却されているため、開閉ドアを開くときの温度 T'は、図 3における従来の高圧熱 処理炉の断熱蓋の開放温度 Tより高い温度に設定することができる。この結果、断熱 蓋を開放する時刻 t 'を、図 3の時刻 tより早めること力 Sできる。  At two points, power supply to the heater is stopped and the process moves to the cooling process. In the cooling step, the heat-insulating lid 8 is closed at first, and the heat-insulating lid 8 is opened when the temperature in the furnace decreases to a predetermined temperature T '. At this time, the high-temperature gas 18 in the heating chamber 11 blows out from the opening of the heat insulating wall 6 toward the space 16 and contacts the cooling fins 13. Since the cooling fins 13 are cooled by the cooling member 14, the temperature T 'when opening the opening / closing door should be set to a temperature higher than the opening temperature T of the heat insulating lid of the conventional high-pressure heat treatment furnace in FIG. Can be. As a result, it is possible to advance the time t ′ at which the heat-insulating lid is opened from the time t in FIG.

3 3  3 3

[0038] そして、冷却フィン 13と接触したガス 18は、多数の冷却フィン 13と熱交換を行って 冷却されながら圧力容器 3内を対流し、断熱壁 6の開口部から加熱室 11へ循環され る。この冷却フィン 13は、圧力容器内に多数設けられ、その冷却面積が従来と比較 して大幅に増加しているため、冷却性能が高レ、。この結果、図 6に示すように、冷却 時間を大幅に短縮することができ、炉のサイクルタイムを短縮することができるという 効果が得られる。例えば、従来と比較して冷却時間を約半分に短縮することが可能 である。  The gas 18 in contact with the cooling fins 13 exchanges heat with many of the cooling fins 13, convects in the pressure vessel 3 while being cooled, and is circulated from the opening of the heat insulating wall 6 to the heating chamber 11. You. The cooling fins 13 are provided in a large number in the pressure vessel, and the cooling area is greatly increased as compared with the conventional one, so that the cooling performance is high. As a result, as shown in FIG. 6, the cooling time can be significantly reduced, and the cycle time of the furnace can be shortened. For example, it is possible to reduce the cooling time by about half compared with the conventional case.

[0039] 本発明では、上述した効果に加え、次のような効果が得られる。すなわち、炉の冷却 機構に可動部がないため、作動不良を起こす要因が無ぐまた、電気やガスなどを必 要とせず、寿命の問題がない。従って、省エネに優れ、半永久的に使用できる。また 、冷却フィンを、冷媒により冷却される冷却部材 14に連結して設け、冷却部材 14を 圧力容器 3の内壁部に取り付ける構成としたので、水冷チューブによる冷却方式や モータ及びファンによる冷却方式などに比べて構造が簡単であり、部品点数の増加 も少ないため、コストアップが最小限に抑えられる。し力、も、冷却部材 14を炉蓋 2の内 壁に取り付けることにより、炉容器長を伸ばすだけで設置可能となり、設計が容易で める。 In the present invention, the following effects can be obtained in addition to the effects described above. In other words, since there are no moving parts in the furnace cooling mechanism, there are no factors that cause malfunctions, and there is no need for electricity or gas, and there is no problem with life. Therefore, it is excellent in energy saving and can be used semi-permanently. Further, since the cooling fins are provided so as to be connected to the cooling member 14 cooled by the refrigerant and the cooling member 14 is attached to the inner wall portion of the pressure vessel 3, a cooling method using a water cooling tube, a cooling method using a motor and a fan, etc. Since the structure is simpler and the number of parts is small, the cost increase is minimized. The cooling member 14 inside the furnace lid 2 By mounting on a wall, it can be installed simply by extending the length of the furnace vessel, facilitating design.

[0040] なお、上述した実施例では、圧力容器 3の炉蓋 2は、平板であつたが、湾曲した形状 の鏡板であっても良い。この場合、冷却部材 14の炉蓋 2に面する側は、鏡板の湾曲 形状に合わせて成形される。  [0040] In the above-described embodiment, the furnace lid 2 of the pressure vessel 3 is a flat plate, but may be a curved end plate. In this case, the side of the cooling member 14 facing the furnace lid 2 is formed according to the curved shape of the head plate.

また、上述した実施例では横置き型の焼結炉について説明したが、本発明は縦置き 型の焼結炉についても当然に適用可能である。  Further, in the above-described embodiment, the horizontal type sintering furnace has been described, but the present invention is naturally applicable to a vertical type sintering furnace.

[0041] なお、本発明の高圧熱処理炉を好ましい実施例により説明したが、本発明に包含さ れる権利範囲は、この実施例に限定されないことが理解されよう。反対に、本発明の 権利範囲は、添付の請求の範囲に含まれるすべての改良、修正及び均等物を含む ものである。 Although the high-pressure heat treatment furnace of the present invention has been described with reference to a preferred embodiment, it will be understood that the scope of rights included in the present invention is not limited to this embodiment. On the contrary, the scope of the invention is intended to cover all improvements, modifications and equivalents included in the appended claims.

Claims

請求の範囲 The scope of the claims [1] 炉容器と該炉容器を閉じる炉蓋とを有する圧力容器と、  [1] a pressure vessel having a furnace vessel and a furnace lid for closing the furnace vessel, 該圧力容器内に設けられ、前記炉蓋に対向して開口し、内部に被処理物を収容する 加熱室を形成する断熱壁と  A heat-insulating wall provided in the pressure vessel, opened to face the furnace lid, and forming a heating chamber for accommodating an object to be processed therein; 該断熱壁の開口部を開閉するように駆動される断熱蓋と、  An insulating lid driven to open and close the opening of the insulating wall, 該前記加熱室に設けられ被処理物を加熱するヒータと、  A heater provided in the heating chamber to heat the object to be processed; 前記炉蓋内面に設けられ、該圧力容器内のガスを冷却する複数の冷却フィンと、を 備えることを特徴とする高圧熱処理炉。  And a plurality of cooling fins provided on the inner surface of the furnace lid for cooling gas in the pressure vessel. [2] 前記冷却フィンは、冷媒により冷却される冷却部材に連結されてレ、る、ことを特徴とす る請求項 1に記載の高圧熱処理炉。  [2] The high-pressure heat treatment furnace according to claim 1, wherein the cooling fin is connected to a cooling member cooled by a refrigerant. [3] 前記冷却部材は、前記炉蓋の内壁面に取り付けられている、ことを特徴とする請求項[3] The cooling member, wherein the cooling member is attached to an inner wall surface of the furnace lid. 2に記載の高圧熱処理炉。 2. The high-pressure heat treatment furnace according to 2. [4] 前記冷却フィンと前記冷却部材とは、一体成形されている、ことを特徴とする請求項 2 に記載の高圧熱処理炉。 4. The high-pressure heat treatment furnace according to claim 2, wherein the cooling fin and the cooling member are integrally formed. [5] 前記各冷却フィンは、熱膨張を吸収するためのスリットを有している、ことを特徴とす る請求項 1に記載の高圧熱処理炉。 5. The high-pressure heat treatment furnace according to claim 1, wherein each of the cooling fins has a slit for absorbing thermal expansion. [6] 前記冷却フィンは、熱伝導率に優れる材料からなる、ことを特徴とする請求項 1に記 載の高圧熱処理炉。 6. The high pressure heat treatment furnace according to claim 1, wherein the cooling fin is made of a material having excellent thermal conductivity. [7] 前記冷却フィンは、ガスの流れに沿う方向にフィンの長手方向を向ける、ことを特徴と する請求項 1に記載の高圧熱処理炉。  7. The high-pressure heat treatment furnace according to claim 1, wherein the cooling fins are oriented in a longitudinal direction of the fins in a direction along a gas flow.
PCT/JP2004/009922 2003-10-17 2004-07-12 High-pressure heat treatment furnace Ceased WO2005038373A1 (en)

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CN112331471A (en) * 2020-11-17 2021-02-05 江西理工大学 Sintering device for sintering neodymium-iron-boron magnet and using method thereof
CN113701501A (en) * 2021-09-02 2021-11-26 宁波恒普真空科技股份有限公司 Sintering furnace cooling system

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DE112004001923B4 (en) 2011-02-24

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