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WO2005085934A1 - Dispositif pour generer une zone de focalisation lineaire pour une source de lumiere laser - Google Patents

Dispositif pour generer une zone de focalisation lineaire pour une source de lumiere laser Download PDF

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Publication number
WO2005085934A1
WO2005085934A1 PCT/EP2004/010529 EP2004010529W WO2005085934A1 WO 2005085934 A1 WO2005085934 A1 WO 2005085934A1 EP 2004010529 W EP2004010529 W EP 2004010529W WO 2005085934 A1 WO2005085934 A1 WO 2005085934A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser light
fast
slow
axis
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2004/010529
Other languages
German (de)
English (en)
Inventor
Dirk Hauschild
Wieland Hill
Peter Bruns
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hentze Lissotschenko Patentverwaltungs GmbH and Co KG
Original Assignee
Hentze Lissotschenko Patentverwaltungs GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hentze Lissotschenko Patentverwaltungs GmbH and Co KG filed Critical Hentze Lissotschenko Patentverwaltungs GmbH and Co KG
Publication of WO2005085934A1 publication Critical patent/WO2005085934A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
    • G02B19/0009—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only
    • G02B19/0014—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed having refractive surfaces only at least one surface having optical power
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0955—Lenses
    • G02B27/0961—Lens arrays
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
    • H01S5/4025—Array arrangements, e.g. constituted by discrete laser diodes or laser bar

Definitions

  • the present invention relates to a device for generating a line-like focus region of a laser light source, comprising at least one semiconductor laser with at least one emitting section, the divergence of the laser light emanating from this at least one emitting section being greater in the fast-axis direction than in the direction perpendicular thereto Slow-axis direction, further comprising fast-axis collimation means for collimating the laser light emerging from the at least one emitting section with respect to the fast-axis direction, homogenizer means for homogenizing the laser light collimated by the fast-axis collimation means and focusing means for focusing of the laser light emanating from the homogenizer means into a line-like focus area.
  • a device of the aforementioned type is known from German published patent application DE 198 41 040 A1.
  • the light emanating from a laser diode bar is collimated by a cylindrical fast-axis collimation lens.
  • this laser light is homogenized by two homogenizers arranged one behind the other.
  • the homogenizers are each designed as substrates with arrays of cylindrical lenses on the entry and exit surfaces, the cylinder lenses opposite one another on the entry and exit surfaces being crossed with respect to one another.
  • the laser light After passing through the two homogenizers, the laser light is superimposed by, for example, a rotationally symmetrical converging lens in such a way that a comparatively homogeneous intensity distribution of the laser light is given both in the fast-axis direction and in the slow-axis direction at a predetermined distance behind the homogenizers and the converging lens is. That on this Wise homogenized light hits a mask in which a narrow gap is formed. The light essentially emerges from this slit with a linear intensity distribution, which can be imaged, for example, by means of a lens onto an object to be processed.
  • the problem on which the present invention is based is the creation of a device of the type mentioned at the outset, which is of simpler construction and / or works more effectively.
  • the homogenizer means are designed in such a way that they homogenize the laser light only with respect to the slow axis direction.
  • the laser light can be focused into a line-like focus area by means of suitable focusing means in such a way that the focus area has a very small extent in the fast axis direction and that the focus area on the other hand is comparatively extended in the slow axis direction and is still very homogeneous.
  • the homogenizer means comprise at least one array of cylinder lenses, the cylinder axes of which extend in the fast axis direction.
  • the extension of the cylinder axes in the fast axis direction ensures that the beam quality of the laser light in the fast axis direction is not influenced by the homogenizer means.
  • the cylindrical lenses have a focal length of 0.2 mm to 10 mm, in particular of 1 mm.
  • the cylindrical lenses have a width of approximately 0.2 mm to 3 mm, in particular approximately 1 mm, in the slow axis direction.
  • the numerical aperture of the homogenizer means with regard to the slow axis direction is larger than the numerical aperture of the laser light to be homogenized in the slow axis direction.
  • the numerical aperture of the homogenizer means with respect to the slow axis direction is greater than 0.1, in particular greater than 0.2, preferably greater than 0.3.
  • the homogenizer means used should have a comparatively large numerical aperture for cylindrical lenses with a very short focal length.
  • the configuration of the invention according to claims 3 to 6 can ensure that the line-like focus region generated has a very homogeneous intensity distribution.
  • the device has slow-axis collimation means, which are arranged in particular between the fast-axis collimation means and the homogenizer means.
  • the slow-axis collimation means can be used to reduce the numerical aperture of the laser light to be homogenized by the homogenizer means, so that the numerical aperture of the homogenizer means can be chosen to be sufficiently good for homogenization.
  • the width of the line-like focus area in the slow axis direction can be reduced.
  • a particularly high homogeneity of the line-like focus area can be achieved by a comparatively high numerical aperture of the homogenizer means despite the slow-axis collimation means present.
  • the slow-axis collimation means have at least one array of cylindrical lenses, the cylinder axes of which extend in the fast-axis direction.
  • Such slow-axis collimation means only bring about collimation with regard to the slow axis direction and do not impair the beam quality with regard to the fast axis direction.
  • the slow-axis collimation means are designed as a slow-axis collimator array or a slow-axis telescope array.
  • Such slow-axis collimation means are known from the prior art and have proven themselves in practice in many different embodiments.
  • the fast-axis collimation means are designed in such a way that the laser light emanating from the at least one emitting section of the semiconductor laser is collimated by the fast-axis collimation means, essentially with diffraction limitation.
  • the distance of the fast-axis collimation means from the emitting sections of the semiconductor laser can be selected to be larger, so that the expansion of the laser light in the fast-axis direction after passing through the Fast-axis collimation means is comparatively large.
  • Such a comparatively large extent in the fast axis direction can further reduce the extent of the line-like focus area in the fast axis direction.
  • the focusing means comprise at least one essentially rotationally symmetrical lens, wherein this lens can serve in particular as a field lens for the homogenizer means in the slow axis direction.
  • the lens used as the focusing means can thus have a dual function exercise, namely on the one hand the focusing of the laser light in the fast axis direction and on the other hand the homogenization of the laser light in the slow axis direction.
  • a fast-axis beam expansion is arranged between the fast-axis collimation means and the focusing means.
  • the expansion of the laser light in the fast axis direction can be increased further by the fast axis beam expansion, so that the extension of the line-like focus area in the fast axis direction can be further reduced.
  • the homogenizer means comprise two arrays of cylindrical lenses which are arranged one behind the other in the direction of propagation of the laser light.
  • the distance between the two arrays of cylindrical lenses corresponds approximately to the focal length of the cylindrical lenses of the rear array in the direction of propagation of the laser light.
  • Such an arrangement makes it possible to homogenize divergent laser light in the slow axis direction.
  • partial beams emerging from the first array of cylindrical lenses at the same angles are combined with one another in the line-like focus region at the same points.
  • slow-axis collimation means can optionally be dispensed with. In this way it can be achieved that partial beams emanating from individual emitting sections of the semiconductor laser already overlap with one another when they strike the homogenizer means are. This further improves the homogenization of the laser light.
  • the number of cylindrical lenses of the at least one array of cylindrical lenses of the homogenizer means is greater than the number of emitting sections.
  • Figure 1 is a schematic side view of a first embodiment of a device according to the invention.
  • FIG. 2 shows a side view of the device according to FIG. 1 rotated by 90 °;
  • FIG. 3 shows a schematic side view of a second embodiment of a device according to the invention.
  • FIG. 4 shows a side view of the device according to FIG. 3 rotated by 90 °.
  • the embodiment of a device according to the invention shown in FIGS. 1 and 2 comprises a semiconductor laser 1, which in the illustrated embodiment has three emitting sections 2 arranged next to one another and spaced apart in the X direction. 2 is only a schematic illustration because, as a rule, semiconductor lasers have a significantly larger number of spaced-apart emitting sections 2. For example, there is the possibility that the semiconductor laser 1 has thirty or fifty emitting sections 2. Such semiconductor lasers 1 are referred to as laser diode bars.
  • the device further comprises fast-axis collimation means 4, which in the exemplary embodiment shown are designed as a cylindrical lens with a cylinder axis extending in the X direction.
  • the cylindrical lens serving as the fast-axis collimation means 4 has a convex curvature only on its exit side, whereas it is flat on its entry side. It is quite possible to provide the entry side with a convex curvature and to make the exit side flat, or to bend both the entry side and the exit side convexly and / or concavely.
  • the fast-axis collimation means 4 should be designed in such a way that the laser light 3 is collimated with respect to the fast-axis or the Y-direction with limited diffraction.
  • the cylindrical lens serving as a fast-axis collimation means 4 can have an aspherical surface.
  • the distance between the emitting sections 2 of the semiconductor laser 1 and the fast-axis collimation means 4 is chosen to be comparatively large, so that the laser light 3 in the Y direction after passing through the fast-axis collimation means 4 is one has a comparatively large expansion.
  • the device according to the invention comprises slow-axis collimation means 5, which in the exemplary embodiment shown are designed as an array of cylindrical lenses 6, 7 on the entry and exit sides of the slow-axis collimation means 5 ,
  • the cylinder axes of the cylindrical lenses 6, 7 of the array of cylindrical lenses extend in the Y direction.
  • the slow axis Collimation means are arranged such that one of the partial beams 3a, 3b, 3c (see FIG. 2) of the laser light 3 entering each of the emitting sections 2 enters each of the cylindrical lenses 6.
  • Each of these partial beams 3a, 3b, 3c is collimated by the corresponding cylindrical lenses 6, 7 with respect to the slow axis or with respect to the X direction.
  • the embodiment of the slow-axis collimation means 5 shown in FIGS. 1 and 2 represents a telescope arrangement.
  • the slow-axis collimation means 5 as one on only one side, for example the entry side or the exit side arranged array of cylindrical lenses to perform.
  • the embodiment of a device according to the invention depicted in FIGS. 1 and 2 further comprises homogenizer means 8 behind the slow-axis collimation means 5.
  • the homogenizer means 8 depicted in FIGS. 1 and 2 comprise an array of cylindrical lenses 9 on the Exit side of a transparent substrate, which in the illustrated embodiment is flat on its entry side.
  • the axes of the cylindrical lenses 9 extend in the Y direction, so that the laser radiation 3 is influenced by the cylindrical lenses 9 only with regard to the slow axis direction.
  • the cylindrical lenses 9 can be spherical as well as aspherical.
  • the focal length of the cylindrical lenses 9 can be 1 mm, for example.
  • the width of the cylindrical lenses 9 in the X direction can also be 1 mm, for example.
  • the homogenizer means 8 have a comparatively high numerical aperture of more than 0.1, better of more than 0.2 to 0.3.
  • the numerical aperture of the homogenizer means 8 should be larger, in particular significantly larger than the numerical aperture of the laser light 3 entering the homogenizer means 8.
  • the numerical aperture of the laser light of a semiconductor laser 1 in the slow axis direction is approximately 0.1.
  • the individual partial beams 3a, 3b, 3c of the laser light 3 are very effectively superimposed on one another in the slow axis direction or in the X direction.
  • the laser light 10 emerging from the homogenizer means 8 can be focused by focusing means 11 arranged in the direction of propagation Z behind the homogenizer means 8.
  • the focusing means 1 1 are as rotationally symmetrical plano-convex lens.
  • the focusing means 1 1 can also be formed by other designs, for example by a biconvex lens or by a plurality of interacting lenses.
  • This lens can focus the laser radiation 10 with respect to the fast axis or the Y direction and at the same time serve as a field lens for the homogenizer means 8 which only act on the slow axis or X direction.
  • the focus of the lens serving as focusing means 1 1 can practically lie with respect to the fast axis in a plane in which the field of laser light 10 is homogenized in the slow axis direction by the lens serving as field lens.
  • each of the cylindrical lenses 9 refracts the light passing through them in a variety of different directions.
  • the plano-convex spherical lens serving as the focusing means 11 or field lens deflects each partial beam striking the field lens at the same angle in the line-like focus region 12 so that the partial laser beams 3a, 3b, 3c of the original laser light 3 originating portions of the laser light 10 in the focus area 12 are evenly distributed over its width in the X direction or in the slow axis direction.
  • the focusing means 1 1 focus the laser light 10 in a line-like focus area 12 which extends in the X direction and has a very small extent in the Y direction.
  • the extent of the focus area 12 in the Y direction or in the fast axis direction is less than 1 mm or less than 0.5 mm.
  • the width of the line Focus area 12 in the X direction or in the slow axis direction is greater than 5 mm or greater than 20 mm.
  • the distance d between the exit surface of the focusing means 1 1 and the line-like focus area 12 can be comparatively large, for example greater than 50, in particular greater than 200 mm.
  • a fast axis beam expansion can be arranged between the fast axis collimation means 4 and the focusing means 11.
  • the beam waist and thus the height of the line-like focus area 12 in the fast-axis direction can be reduced.
  • Such a fast-axis beam expansion can be achieved with any means known from the prior art, such as, for example, with a telescope-like arrangement of refractive elements.
  • the refractive elements or lenses of the fast-axis beam expansion should be designed in such a way that the beam quality of the laser light 3 is retained.
  • the lenses of the fast-axis beam expansion should be aspherical.
  • FIGS. 3 and 4 differs of the device according to FIG. 1 and FIG. 2 essentially in that the homogenizer means 13 are constructed in several parts and there is no slow-axis collimation means.
  • the homogenizer means 13 there is a first array of cylindrical lenses 15 on a first substrate 14 in the direction of propagation of the laser radiation 3 and on one of the first A second array of cylindrical lenses 17 is provided in the substrate 14 spaced apart in the beam direction.
  • the first array of cylindrical lenses 15 serves as an illumination array for the second array of cylindrical lenses 17, which serves as an imaging array or as a homogenizing array.
  • FIG. 4 shows that the cylinder lenses 15, 17 have cylinder axes running in the Y direction. It can also be seen from FIG. 4 that the partial beams 3a to 3e of the laser light 3 emerging from individual emitting sections 2a to 2e are already partially overlapped with one another when they strike the first substrate 14 of the homogenizer means 13. Each of the cylindrical lenses 15 of the first substrate 14 of the homogenizer means 13 illuminates an opposing cylindrical lens 17 of the second substrate 16.
  • FIG. 4 shows that the first array of cylindrical lenses 15 is arranged on the exit side of the first substrate 14 , whereas the second array of cylindrical lenses 17 is arranged on the entry side of the substrate 16. The distance between the two arrays of cylindrical lenses 15, 17 essentially corresponds to the focal length f 7 of the cylindrical lenses 17 of the array arranged on the second substrate 16. This is illustrated in Fig. 4.
  • the lenses of the second array are optimally illuminated by the first array of cylindrical lenses 15, which serves as an illumination array, so that a very effective homogenization in the slow-axis direction can take place. Furthermore, homogenization takes place by mixing individual partial beams 3a, 3b, 3c, 3d, 3e in the slow axis direction. Furthermore, the homogenizer means 13 make it possible to homogenize the laser light 3 which diverges in the slow-axis direction when it hits the homogenizer means 13. It can be seen from FIGS. 2 and 4 that the number of cylindrical lenses 9, 15, 17 of the homogenizer means 8 or of the substrates 14, 16 is greater than the number of emitting sections 2 or 2a to 2e.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
  • Lenses (AREA)

Abstract

L'invention concerne un dispositif pour générer une zone de focalisation linéaire (12) pour une source de lumière laser, comprenant : au moins un laser à semi-conducteurs (1) qui comporte au moins une section d'émission (2), la divergence de la lumière laser (3) qui sort de la/des section(s) d'émission (2) étant plus grande dans la direction de l'axe rapide (Y), que dans la direction de l'axe lent (X) qui lui est perpendiculaire ; un moyen de collimation d'axe rapide (4) pour assurer la collimation de la lumière laser (3) sortant de la/des section(s) d'émission (2) par rapport à la direction de l'axe rapide (Y) ; des moyens d'homogénéisation (8, 13) pour homogénéiser la lumière laser (3) collimatée par le moyen de collimation d'axe rapide (4), et ; un moyen de focalisation (11) pour focaliser la lumière laser (10) sortant des moyens d'homogénéisation (8, 13), en une zone de focalisation linéaire (12). Cette invention est caractérisée en ce que les moyens d'homogénéisation (8, 13) sont configurés de manière à homogénéiser la lumière laser (3) uniquement par rapport à la direction de l'axe lent (X).
PCT/EP2004/010529 2004-03-06 2004-09-20 Dispositif pour generer une zone de focalisation lineaire pour une source de lumiere laser Ceased WO2005085934A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004011074 2004-03-06
DE102004011074.3 2004-03-06

Publications (1)

Publication Number Publication Date
WO2005085934A1 true WO2005085934A1 (fr) 2005-09-15

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WO (1) WO2005085934A1 (fr)

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EP2073051A2 (fr) 2007-12-19 2009-06-24 LIMO Patentverwaltung GmbH & Co. KG Dispositif destiné à la formation de rayons laser
WO2010084001A1 (fr) 2009-01-23 2010-07-29 Limo Patentverwaltung Gmbh & Co. Kg Dispositif de mise en forme d'un faisceau de réseaux de diodes laser
DE102010045620A1 (de) 2010-09-17 2012-03-22 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Erzeugung einer linienförmigen Intensitätsverteilung in einer Arbeitsebene
WO2012138584A3 (fr) * 2011-04-07 2012-11-29 Coherent, Inc. Dispositif d'éclairage à lasers à diode ayant des modules interchangeables pour changer un éclairement énergétique et des dimensions de faisceau
WO2013124822A1 (fr) * 2012-02-22 2013-08-29 Koninklijke Philips N.V. Appareil d'éclairage
US8596823B2 (en) 2010-09-07 2013-12-03 Coherent, Inc. Line-projection apparatus for arrays of diode-laser bar stacks
WO2015042331A1 (fr) * 2013-09-23 2015-03-26 Microsoft Corporation Modules optiques qui réduisent le contraste de granulation et les artefacts de diffraction
CN104763963A (zh) * 2014-01-03 2015-07-08 深圳市海洋王照明工程有限公司 安全出口指示灯
EP3059630A1 (fr) * 2015-02-19 2016-08-24 VITRONIC Dr.-Ing. Stein Bildverarbeitungssysteme GmbH Unité d'éclairage pour lecteurs de codes
US20170188016A1 (en) * 2013-10-09 2017-06-29 Microsoft Technology Licensing, Llc Illumination modules that emit structured light
WO2018019374A1 (fr) * 2016-07-27 2018-02-01 Trumpf Laser Gmbh Éclairage de ligne laser
CN109444825A (zh) * 2018-11-15 2019-03-08 深圳市速腾聚创科技有限公司 激光发射设备
DE102017131000A1 (de) * 2017-12-21 2019-06-27 LIMO GmbH Kollimationsvorrichtung für einen Nanostack
CN110554508A (zh) * 2018-05-30 2019-12-10 宁波舜宇车载光学技术有限公司 光束整形装置及其光束整形方法

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US8946594B2 (en) 2011-11-04 2015-02-03 Applied Materials, Inc. Optical design for line generation using microlens array
DE102013104986A1 (de) * 2013-05-15 2014-12-04 Limo Patentverwaltung Gmbh & Co. Kg Vorrichtung zur Beaufschlagung der Außenseite eines rotationssymmetrischen Bauteils mit Laserstrahlung
CN112260044B (zh) * 2020-10-23 2022-06-10 青岛镭创光电技术有限公司 一种能量均匀的激光装置

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Cited By (29)

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US7986461B2 (en) 2007-12-19 2011-07-26 Limo Patentverwaltung Gmbh & Co. Device for shaping laser radiation
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