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WO2005067365A3 - Beleuchtungseinheit und verfahren zu deren betrieb - Google Patents

Beleuchtungseinheit und verfahren zu deren betrieb Download PDF

Info

Publication number
WO2005067365A3
WO2005067365A3 PCT/EP2005/000554 EP2005000554W WO2005067365A3 WO 2005067365 A3 WO2005067365 A3 WO 2005067365A3 EP 2005000554 W EP2005000554 W EP 2005000554W WO 2005067365 A3 WO2005067365 A3 WO 2005067365A3
Authority
WO
WIPO (PCT)
Prior art keywords
light source
optical waveguide
power light
illumination unit
cross
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2005/000554
Other languages
English (en)
French (fr)
Other versions
WO2005067365A2 (de
Inventor
Detlef Gerhard
Martin Renner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Icos Vision Systems NV
Siemens AG
Siemens Corp
Original Assignee
Icos Vision Systems NV
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Icos Vision Systems NV, Siemens AG, Siemens Corp filed Critical Icos Vision Systems NV
Priority to US10/586,247 priority Critical patent/US7427731B2/en
Priority to EP05715201A priority patent/EP1709471A2/de
Publication of WO2005067365A2 publication Critical patent/WO2005067365A2/de
Publication of WO2005067365A3 publication Critical patent/WO2005067365A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/0001—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems
    • G02B6/0005—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings specially adapted for lighting devices or systems the light guides being of the fibre type
    • G02B6/0006—Coupling light into the fibre
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4298—Coupling light guides with opto-electronic elements coupling with non-coherent light sources and/or radiation detectors, e.g. lamps, incandescent bulbs, scintillation chambers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

Beleuchtungseinheit mit einer Hochleistungs-Lichtquelle (1), einer ersten Optik (12) zur Fokussierung des von der Hochleistungs-Lichtquelle (1) ausgesandten Lichts, einem Lichtmesskopf (8) zur vorgebbaren Beleuchtung eines Objektes (3), einem Lichtleiter (2) zur Übertragung des ausgesandten und fokussierten Lichts zum Lichtmesskopf (8), einer Verschiebeeinheit (6) zur Variation des axialen Abstands der Hochleistungs-Lichtquelle (1) mit erster Optik (12) vom Lichtleiter eintritt, wobei die Querschnittsfläche des Fokus minimal doppelt so gross ist wie die Querschnittsfläche des Lichtleiters (2) an der Lichteintrittsseite und durch axiale Verschiebung der Hochleistungs-Lichtquelle (1) die Intensität des in den Lichtleiter (2) eingekoppelten Lichts variierbar ist.
PCT/EP2005/000554 2004-01-16 2005-01-17 Beleuchtungseinheit und verfahren zu deren betrieb Ceased WO2005067365A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US10/586,247 US7427731B2 (en) 2004-01-16 2005-01-17 Illumination unit and method for the operation thereof
EP05715201A EP1709471A2 (de) 2004-01-16 2005-01-17 Beleuchtungseinheit und verfahren zu deren betrieb

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004002450A DE102004002450A1 (de) 2004-01-16 2004-01-16 Beleuchtungseinheit und Verfahren zu deren Betrieb
DE102004002450.2 2004-01-16

Publications (2)

Publication Number Publication Date
WO2005067365A2 WO2005067365A2 (de) 2005-07-28
WO2005067365A3 true WO2005067365A3 (de) 2006-04-13

Family

ID=34778074

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2005/000554 Ceased WO2005067365A2 (de) 2004-01-16 2005-01-17 Beleuchtungseinheit und verfahren zu deren betrieb

Country Status (4)

Country Link
US (1) US7427731B2 (de)
EP (1) EP1709471A2 (de)
DE (1) DE102004002450A1 (de)
WO (1) WO2005067365A2 (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006058079B4 (de) * 2006-12-07 2011-04-28 Schott Ag Beleuchtungsvorrichtung
CA2749832C (en) * 2010-08-30 2016-04-26 Ushio Denki Kabushiki Kaisha Light source unit
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning
US9520742B2 (en) 2014-07-03 2016-12-13 Hubbell Incorporated Monitoring system and method
CN116709614B (zh) * 2023-08-02 2023-10-20 深圳爱图仕创新科技股份有限公司 灯光控制方法、装置、计算机设备及计算机可读存储介质

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013311A (en) * 1988-10-06 1991-05-07 Lasag Ag Envelope generator for a power beam
US20020012502A1 (en) * 2000-02-17 2002-01-31 Cogent Light Technologies, Inc. Snap-on connector system for coupling light from an illuminator to a fiber optic

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0685022B2 (ja) * 1984-07-05 1994-10-26 オリンパス光学工業株式会社 内視鏡用照明光学系
DE69109285T2 (de) * 1991-08-02 1995-11-02 Ibm Apparat und Methode zur Inspektion eines Substrates.
US5615938A (en) * 1992-02-14 1997-04-01 Lemke; Norbert Device for illuminating objects in particular those to be recorded with a video camera
WO2003002972A2 (fr) * 2001-06-29 2003-01-09 Universite Libre De Bruxelles Procede et dispositif destines a l'obtention par microscopie d'images en trois dimensions d'un echantillon
US6832849B2 (en) * 2001-12-04 2004-12-21 Ccs, Inc. Light radiation device, light source device, light radiation unit, and light connection mechanism

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5013311A (en) * 1988-10-06 1991-05-07 Lasag Ag Envelope generator for a power beam
US20020012502A1 (en) * 2000-02-17 2002-01-31 Cogent Light Technologies, Inc. Snap-on connector system for coupling light from an illuminator to a fiber optic

Also Published As

Publication number Publication date
DE102004002450A1 (de) 2005-08-25
WO2005067365A2 (de) 2005-07-28
US7427731B2 (en) 2008-09-23
EP1709471A2 (de) 2006-10-11
US20070273891A1 (en) 2007-11-29

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