WO2005043699B1 - Traitement laser d'une matiere cible localement chauffee - Google Patents
Traitement laser d'une matiere cible localement chauffeeInfo
- Publication number
- WO2005043699B1 WO2005043699B1 PCT/US2004/034903 US2004034903W WO2005043699B1 WO 2005043699 B1 WO2005043699 B1 WO 2005043699B1 US 2004034903 W US2004034903 W US 2004034903W WO 2005043699 B1 WO2005043699 B1 WO 2005043699B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- laser
- processing laser
- target material
- laser output
- heating energy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Abstract
L'invention concerne une méthode et un système de laser permettant un retrait rapide de matière d'une pièce (20) par l'application d'énergie chauffante, sous la forme d'un faisceau lumineux (28) sur un emplacement cible (16) d'une pièce, pour élever la température de cette pièce, tout en maintenant sa stabilité dimensionnelle. Lorsque la partie cible de la pièce est chauffée, un faisceau laser (12) est dirigé pour une incidence sur l'emplacement cible chauffé. Ce faisceau laser présente de préférence une sortie laser de traitement appropriée pour effectuer un retrait de matière cible de la pièce. L'incidence combinée de la sortie laser de traitement et de l'énergie chauffante, sur l'emplacement cible, permet à la sortie laser de traitement de retirer une partie de matière cible, à une vitesse de retrait de matière supérieure à une vitesse de retrait de matière pouvant être obtenue lorsque la matière cible n'est pas chauffée.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE112004002009T DE112004002009T5 (de) | 2003-10-24 | 2004-10-20 | Laserbearbeitung eines lokal erhitzten Zielmaterials |
| CA002543463A CA2543463A1 (fr) | 2003-10-24 | 2004-10-20 | Traitement laser d'une matiere cible localement chauffee |
| GB0608158A GB2422343B (en) | 2003-10-24 | 2004-10-20 | Laser processing of a locally heated target material |
| JP2006536791A JP2007508946A (ja) | 2003-10-24 | 2004-10-20 | 局所的に加熱されたターゲット材料のレーザ加工 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US51424003P | 2003-10-24 | 2003-10-24 | |
| US60/514,240 | 2003-10-24 | ||
| US10/777,973 US20050087522A1 (en) | 2003-10-24 | 2004-02-11 | Laser processing of a locally heated target material |
| US10/777,973 | 2004-02-11 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| WO2005043699A2 WO2005043699A2 (fr) | 2005-05-12 |
| WO2005043699A3 WO2005043699A3 (fr) | 2005-12-08 |
| WO2005043699B1 true WO2005043699B1 (fr) | 2006-01-19 |
Family
ID=34526973
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2004/034903 Ceased WO2005043699A2 (fr) | 2003-10-24 | 2004-10-20 | Traitement laser d'une matiere cible localement chauffee |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20050087522A1 (fr) |
| JP (1) | JP2007508946A (fr) |
| KR (1) | KR20060099517A (fr) |
| CA (1) | CA2543463A1 (fr) |
| DE (1) | DE112004002009T5 (fr) |
| GB (1) | GB2422343B (fr) |
| TW (1) | TW200518411A (fr) |
| WO (1) | WO2005043699A2 (fr) |
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| DE102009047995B3 (de) * | 2009-09-28 | 2011-06-09 | Technische Universität Dresden | Verfahren zur gratfreien trennenden Bearbeitung von Werkstücken |
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| JP5860221B2 (ja) * | 2011-03-17 | 2016-02-16 | 株式会社ディスコ | 非線形結晶基板のレーザー加工方法 |
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| US8399281B1 (en) * | 2011-08-31 | 2013-03-19 | Alta Devices, Inc. | Two beam backside laser dicing of semiconductor films |
| US9828278B2 (en) | 2012-02-28 | 2017-11-28 | Electro Scientific Industries, Inc. | Method and apparatus for separation of strengthened glass and articles produced thereby |
| US10357850B2 (en) | 2012-09-24 | 2019-07-23 | Electro Scientific Industries, Inc. | Method and apparatus for machining a workpiece |
| CN104136967B (zh) | 2012-02-28 | 2018-02-16 | 伊雷克托科学工业股份有限公司 | 用于分离增强玻璃的方法及装置及由该增强玻璃生产的物品 |
| CN104114506B (zh) | 2012-02-29 | 2017-05-24 | 伊雷克托科学工业股份有限公司 | 加工强化玻璃的方法和装置及藉此制造的物品 |
| US8842951B2 (en) | 2012-03-02 | 2014-09-23 | Analog Devices, Inc. | Systems and methods for passive alignment of opto-electronic components |
| US9716193B2 (en) | 2012-05-02 | 2017-07-25 | Analog Devices, Inc. | Integrated optical sensor module |
| CN104884205A (zh) * | 2012-12-20 | 2015-09-02 | 伊雷克托科学工业股份有限公司 | 经由激光微加工形成影像的方法 |
| JP6031370B2 (ja) * | 2013-02-01 | 2016-11-24 | 本田技研工業株式会社 | ろう接装置及びろう接方法 |
| CN105142853B (zh) * | 2013-02-28 | 2017-07-04 | Ipg光子公司 | 用于加工蓝宝石的激光系统和方法 |
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| KR102309213B1 (ko) * | 2015-03-06 | 2021-10-05 | 인텔 코포레이션 | 레이저 빔 조향용 음향 광학 편향기 및 거울 |
| US10442720B2 (en) * | 2015-10-01 | 2019-10-15 | AGC Inc. | Method of forming hole in glass substrate by using pulsed laser, and method of producing glass substrate provided with hole |
| US10712197B2 (en) | 2018-01-11 | 2020-07-14 | Analog Devices Global Unlimited Company | Optical sensor package |
| EP3938138B1 (fr) * | 2019-06-10 | 2025-11-12 | Electro Scientific Industries, Inc. | Appareil de traitement laser, procédés de fonctionnement dudit appareil et procédés de traitement de pièces à l'aide dudit appareil |
| KR102282357B1 (ko) * | 2020-03-16 | 2021-07-27 | 디아이티 주식회사 | 반도체 표면처리 장치 |
| DE102021204601A1 (de) * | 2021-05-06 | 2022-11-10 | Hyundai Motor Company | Sensorvorrichtung zum messen einer bewegung eines fahrzeugs und verfahren zum betreiben einer sensorvorrichtung zum messen einer bewegung eines fahrzeugs |
| WO2023283255A1 (fr) * | 2021-07-06 | 2023-01-12 | The Florida State University Research Foundation, Inc. | Supraconducteurs à superhydrure |
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| US5453594A (en) * | 1993-10-06 | 1995-09-26 | Electro Scientific Industries, Inc. | Radiation beam position and emission coordination system |
| US5593606A (en) * | 1994-07-18 | 1997-01-14 | Electro Scientific Industries, Inc. | Ultraviolet laser system and method for forming vias in multi-layered targets |
| US5841099A (en) * | 1994-07-18 | 1998-11-24 | Electro Scientific Industries, Inc. | Method employing UV laser pulses of varied energy density to form depthwise self-limiting blind vias in multilayered targets |
| US8217304B2 (en) * | 2001-03-29 | 2012-07-10 | Gsi Group Corporation | Methods and systems for thermal-based laser processing a multi-material device |
| US6534241B2 (en) * | 2000-01-12 | 2003-03-18 | Howard A. Fromson | Method of actinically imaging a semiconductor |
| WO2001074529A2 (fr) * | 2000-03-30 | 2001-10-11 | Electro Scientific Industries, Inc. | Systeme laser et technique de micro-usinage par passe unique sur des pieces multicouches |
| WO2002082600A2 (fr) * | 2001-04-04 | 2002-10-17 | Coherent Deos | Laser declenche a vidage de cavite pour traitement de matieres |
| US6784399B2 (en) * | 2001-05-09 | 2004-08-31 | Electro Scientific Industries, Inc. | Micromachining with high-energy, intra-cavity Q-switched CO2 laser pulses |
| WO2003002289A1 (fr) * | 2001-06-28 | 2003-01-09 | Electro Scientific Industries, Inc. | Traitement laser multietapes de tranches comportant des couches de dispositifs de surface |
-
2004
- 2004-02-11 US US10/777,973 patent/US20050087522A1/en not_active Abandoned
- 2004-10-20 WO PCT/US2004/034903 patent/WO2005043699A2/fr not_active Ceased
- 2004-10-20 JP JP2006536791A patent/JP2007508946A/ja not_active Abandoned
- 2004-10-20 DE DE112004002009T patent/DE112004002009T5/de not_active Withdrawn
- 2004-10-20 CA CA002543463A patent/CA2543463A1/fr not_active Abandoned
- 2004-10-20 KR KR1020067007610A patent/KR20060099517A/ko not_active Withdrawn
- 2004-10-20 GB GB0608158A patent/GB2422343B/en not_active Expired - Fee Related
- 2004-10-22 TW TW093132139A patent/TW200518411A/zh unknown
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