WO2004114363A1 - Light irradiation device, lamp for light irradiation device, and light irradiation method - Google Patents

Abstract

A light irradiation device (500) has a high-voltage discharge lamp (100) with a light emission tube (1) and a sealing portion (2), and has a reflection mirror (50) reflecting light (111) emitted from the discharge lamp (100). The light (111) emitted from the discharge lamp (100) has at least an ultraviolet spectrum and at least part of the light emission tube (1) has an absorption spectrum in a wavelength of 250 nm. With this arrangement, light with a wavelength of 250 nm and light above and below the wavelength by at least 5 nm are filtered.

Description

 Specification

 Light irradiation device, lamp for light irradiation device, and light irradiation method

 The present invention relates to a light irradiation device, a lamp for a light irradiation device, and a light irradiation method. In particular, the present invention relates to a light irradiation device (for example, an ultraviolet irradiation device) used for curing an ultraviolet curable resin and for exposing in a manufacturing process of a semiconductor device and a liquid crystal display device. Background art

 An ultraviolet irradiation device that emits ultraviolet light is used for precision bonding of electronic parts and optical parts using an ultraviolet curable resin as an adhesive, and exposure in the manufacturing process of semiconductor devices and liquid crystal display devices. A conventional ultraviolet irradiation apparatus is disclosed in, for example, Japanese Patent Application Laid-Open No. 11555/13 (Reference 1).

 FIG. 14 shows the configuration of the ultraviolet irradiation device disclosed in the above-mentioned Document 1. The ultraviolet irradiator shown in Fig. 14 holds a short-arc type discharge lamp 1 〇 1 〇, an elliptical condensing mirror 1002 1 with an opening in the center, and an elliptical condensing mirror 102 1 And an optical fiber F.

 The short arc type discharge lamp 1〇1〇 has a pair of electrodes consisting of a cathode 1〇1. And an anode 101 内部 2 inside, and the anode 100〇 of the discharge lamp 101〇1 .. Flange 1 0 1 5 on 2 side base 1 CM 3

I Is provided. A fitting hole 1022 is provided in the center of the bottom of the elliptical converging mirror holding member 1020, and by inserting the small diameter portion 1 部 16 of the base 1〇13 of the discharge lamp 1〇10 into the fitting hole 1022, A discharge lamp 1010 is set. The discharge lamp 1010 is arranged such that the arc of the discharge lamp 101 is located on the optical axis L passing through the two focal points of the ellipse of the elliptical condenser 1021. The position of the elliptical condensing mirror “1021” is adjusted so that the radiated light is incident on the light incident end Fin of the optical fiber F when the lamp is lit.

 In the ultraviolet irradiation device disclosed in this publication, a panel that fits into the fitting hole 1022, removably engages with the base 1013, and urges the flange portion 1015 of the base 1013 toward the elliptical collector mirror holding member 1020 side. 103 mm is provided on the elliptical converging mirror holding member 1020, so that after the discharge lamp 1010 is mounted, the position adjustment of the discharge lamp 1 mm is not required.

In addition, in order to increase the UV irradiation of a DC-operated short-arc type mercury lamp, 1 to 8 atm of argon gas is sealed at room temperature, and the maximum radius R (cm) of the arc tube and the thickness of the arc tube are increased. Japanese Unexamined Patent Publication No. H11 (1998) -1131 describes that d (cm) and input power W (kW) satisfy the relationship of 0.21 1 ≤ ((Wd / R ² ) ^{, / 2} ≤ 0.38). It is disclosed in 191394 (Reference 2), in which mercury is enclosed at 4.5 mg / cc per unit volume in the lamp.

Research and development have been conducted on conventional ultraviolet irradiation equipment using a short arc type mercury lamp so that the ultraviolet wavelength of mercury can be used effectively. I have. The conventional UV irradiator used to cure the UV-curable resin and expose semiconductor and liquid crystal substrates requires an operating pressure of about several tens of atmospheres of mercury in order to efficiently emit ultraviolet light from mercury. High-pressure mercury lamps (or ultra-high pressure mercury lamps) are used. Use at levels higher than this will reduce the efficiency of ultraviolet light emission (ie, the energy efficiency of ultraviolet radiation), so other uses have not been adopted.

 On the other hand, at a mercury operating pressure of several tens of atmospheres, there is a problem that mercury emission having a wavelength of less than 300 nm is strong, and the light may damage an irradiation target and an irradiation apparatus. Since the emission of mercury with a wavelength of less than 300 ηm occurs at that pressure due to the emission characteristics of mercury, ultraviolet rays (short-wavelength-side ultraviolet rays) that cause damage are not emitted. Needs to be adjusted with a reflector. A conventional UV irradiator has a reflecting mirror that efficiently reflects light with a wavelength of 300 nm or more (for example, light with a wavelength of 300 nm to 400 nm) and eliminates light with a wavelength of less than 300 nm as much as possible. It is designed so that light having a wavelength of less than 300 nm is not included in the emitted light.

Under these circumstances, the present inventor once reviewed the conventional common sense and prerequisites, aimed at improving the ultraviolet radiation energy efficiency more than before, and was able to realize such a light irradiation device. Worked on the development of. A main object of the present invention is to provide a light irradiation device capable of improving the ultraviolet radiation energy efficiency as compared with the related art. Another object of the present invention is to provide a lamp suitable for such a light irradiation device.

 Still another object of the present invention is to provide a light irradiation method for irradiating a fixed amount of light without reducing the amount of light as compared with the related art. Further, still another object of the present invention and features of the present invention can be understood by embodiments of the present invention described later. Disclosure of the invention

 A light irradiation device according to the present invention includes: a high-pressure discharge lamp having a light-emitting tube in which a light-emitting substance is sealed in a tube; a sealing portion extending from the light-emitting tube; and a reflection for reflecting light emitted from the high-pressure discharge lamp. A mirror, wherein the light emitted from the high-pressure discharge lamp has at least a spectrum in an ultraviolet region, and at least a part of the arc tube absorbs light at a wavelength of 250 nm. It has a vector, so that light having a wavelength of not less than 255 nm and not more than 255 nm, which is light emitted from the inside of the arc tube to the outside, is filtered.

 In a preferred embodiment, the absorption spectrum has a maximum value of absorptance within a wavelength range of not less than 245 nm and not more than 255 nm, and the full width of the semi-encapsulation is not less than 5 nm and not more than 90 nm. It is as follows.

In a preferred embodiment, the spectral transmittance of the arc tube has a minimum value of transmittance within a wavelength range of not less than 245 nm and not more than 255 nm, The minimum value is 50% or less of the transmittance of the arc tube at a wavelength of 300 nm.

 In a preferred embodiment, the arc tube is formed of glass in which one peak of an absorption spectrum is included in a wavelength range of 245 nm to 255 nm.

It is preferable that the arc tube has a function of substantially reducing the emission intensity of light having a wavelength of 250 nm out of the light emitted by the light emitting substance. In a preferred embodiment, the arc tube is substantially made of quartz glass, the high-pressure discharge lamp is a high-pressure mercury lamp, and the light-emitting substance is based on a volume of the arc tube. Contains more than 15 mg / cm ³ of mercury.

In a preferred embodiment, the light irradiation device is an ultraviolet irradiation device that irradiates at least ultraviolet rays, the reflecting mirror is a cold mirror, and the amount of mercury enclosed is the volume of the arc tube. as a reference, and a 1 90mgZcm ³ or more, the arc tube is, eight androgenic is enclosed, tube wall loading of the lamp is 80W / cm ² or more. In a preferred embodiment, the absorption spectrum of the arc tube having the absorption spectrum is such that the high-pressure discharge lamp is operated at a high temperature of 100 ° C. to 11 ° C. It is formed by holding for more than 2 hours.

In a preferred embodiment, a pair of electrodes are disposed in the arc tube so as to face each other, and the electrodes are disposed in the sealing portion and electrically connected to a metal foil. The distance between the electrodes is 2. Omm or less, and the high pressure discharge lamp is an AC lighting type lamp.

 In a preferred embodiment, the reflector has a hollow neck portion formed with an opening into which the sealing portion of the high-pressure discharge lamp is inserted, and the high-pressure discharge lamp has a hollow neck portion. Wherein the reflector is a top-end mirror having an elliptical reflection surface, the light irradiating device surrounds the reflector, and the reflector is And a lighting circuit that is electrically connected to the high-pressure discharge lamp and disposed in the housing.

 In a preferred embodiment, an optical fiber is arranged around a window of the housing, a core of the optical fiber is made of glass different from quartz glass, and the glass is It is selected from the group consisting of high quartz glass, soda glass and borosilicate glass.

A lamp for a light irradiation device according to the present invention is a lamp used for a light irradiation device that irradiates at least ultraviolet light, in which mercury is sealed in a tube, and an arc tube substantially made of quartz glass; and a lamp extending from the arc tube. Wherein the arc tube absorbs light having a wavelength of about 250 nm and transmits light having a wavelength of about 300 nm, and the mercury contains 1 SOmgZcm ^{3 based} on the volume of the arc tube. Octane is sealed in the arc tube, and the tube wall load of the lamp is 8〇W / cm ² or more. In a preferred embodiment, of the light emitted from the light irradiation device lamp, the emission intensity of the light having a wavelength of 25 nm is substantially zero, and the light irradiation method of the present invention provides at least a light for irradiating ultraviolet light. A method of irradiating, wherein of the light emitted by the high-pressure mercury lamp, a step of eliminating ultraviolet light having a wavelength of about 250 nm and reducing the amount of ultraviolet light having a wavelength of about 300 nm to detect the illuminance of the light, and Irradiating the light while maintaining a constant illuminance within a range equal to or less than the maximum illuminance.

 In the step of irradiating the light, the constant illuminance is not less than the illuminance of light when the ultraviolet light around the wavelength of 250 nm is excluded, and the ultraviolet light around the wavelength of 3 nm is also excluded. It is preferable to maintain BRIEF DESCRIPTION OF THE FIGURES

 FIG. 1 is a schematic diagram showing a configuration of a light irradiation device 500 according to an embodiment of the present invention.

 FIG. 2 is a schematic diagram showing a configuration of the high-pressure discharge lamp 100 according to the embodiment of the present invention.

 FIG. 3 is a transmittance graph for explaining the absorption spectrum of the arc tube 1 of the high-pressure discharge lamp 100 of the present embodiment.

FIG. 4 is a spectral distribution diagram for explaining the outline of the spectral characteristics of the high-pressure mercury lamp. FIG. 5 is a spectral distribution diagram of the high-pressure discharge lamp 100 of the present embodiment. FIG. 6 is a spectral distribution diagram of a conventional high-pressure mercury lamp.

 FIG. 7 is a graph showing the absorption characteristics of the ultraviolet curable resin.

 FIG. 8 is an ultraviolet spectral distribution diagram for explaining the absorption spectrum of the arc tube 1.

 FIG. 9 is a diagram for explaining the relationship between the focal points f 1 and f 2 and the focal lengths F 1 and F 2.

 FIG. 10 is a graph showing various mercury emission line intensities emitted from the lamp when the mercury operating pressure is changed.

 Figure 11 is a graph showing the intensity of various mercury emission lines emitted from the lamp when the operating pressure of mercury is changed when the lamp is incorporated in a reflector.

 Fig. 12 is a graph of the UV lamp life characteristics of a conventional lamp.

 FIG. 13 is a graph for explaining the light irradiation method of the present embodiment.

 FIG. 14 is a diagram showing a configuration of a conventional ultraviolet irradiation device.

 FIG. 15 is a graph showing the relationship between the ratio of the minimum value of the spectral transmittance to the spectral transmittance at a wavelength of 300 nm and the operating pressure of the arc tube.

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following drawings, components having substantially the same function may be denoted by the same reference numeral for simplification of description. In addition, the present invention It is not limited to the following embodiment.

 (Embodiment 1)

 A light irradiation device according to Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 schematically shows a configuration of a light irradiation device 500 according to the present embodiment.

 The light irradiation device 500 shown in FIG. 1 includes a high-pressure discharge lamp 100 and a reflecting mirror 50 that reflects light 111 emitted from the high-pressure discharge lamp 100. Around the reflecting mirror 5 #, there is provided a housing 120 having a window 125 formed to allow the light 112 from the reflecting mirror 50 to pass therethrough. The high-pressure discharge lamp 100 is electrically connected to the lighting circuit 100, and in the present embodiment, the lighting circuit 100 is arranged in the housing 120.

The high-pressure discharge lamp 100 includes a light-emitting tube 1 in which a light-emitting substance is sealed, and a sealing portion 2 extending from the light-emitting tube 1, and emits light having at least an ultraviolet spectrum. I do. The high-pressure discharge lamp 100 of the present embodiment is a high-pressure mercury lamp, and has a UV spectrum (for example, a wavelength of 365 nm (i-line), etc.) and a visible spectrum (for example, i-line). For example, wavelengths of 405 nm (h-line) and 436 nm (g-line) are also emitted. FIG. 2 shows a configuration of the high-pressure discharge lamp 100 of the present embodiment. The arc tube 1 of the lamp 1 is substantially made of quartz glass, and a sealing portion 2 also made of quartz glass extends from both ends of the arc tube 1. A metal foil (molybdenum foil) 4 is disposed in the sealing portion 2, and the metal foil 4 is disposed to face the arc tube 1. It is connected to one end of the electrode. External leads 5 are connected to the metal foil 4. A cap is attached to one end of the sealing part 2.

Mercury 6 exceeding 150 mgZcm ^{3 based} on the volume of the arc tube 1 is sealed in the arc tube 1 of the high-pressure discharge lamp 10 mm. The operating pressure of the high-pressure discharge lamp 10 ° of the present embodiment is a value exceeding 150 atm. The arc tube 1 contains a rare gas and octogen in addition to mercury 6. The lamp wall load of the lamp 100 is 80 Wcm ² or more. The distance between the pair of electrodes 3 is 2.5 mm or less, for example, 0.6 to 2.5 mm (preferably 0.8 to 2.0 mm). Further, the high-pressure discharge lamp 100 of the present embodiment is an alternating-current lighting type lamp.

The arc tube 1 of the high-pressure mercury lamp 100 of the present embodiment has an absorption spectrum at a wavelength of 250 nm, despite being made of quartz glass. Due to this absorption spectrum, ultraviolet light having a wavelength of about 250 nm (for example, light having a wavelength of 240 nm or more and 260 nm or less, preferably 245 nm or more) of the radiation emitted from the inside of the arc tube 1 to the outside. (Light of 255 nm or less) can be filtered (substantially cut). In other words, the arc tube 1 itself absorbs light having a wavelength of about 25 Onm and transmits light having a wavelength of about 300 nm. In the present embodiment, the arc tube 1 has an ability to cut ultraviolet light having a wavelength of about 25 nm, whereby the arc tube 1 substantially reduces the emission intensity of ultraviolet light having a wavelength of 250 nm. To zero. Figure 3 shows an absorption spectrum (absorption peak) at a wavelength of 250 nm. FIG. 3 is a graph showing an outline of the transmittance of the arc tube. The curve denoted by reference numeral “101” in FIG. 3 indicates the ultraviolet spectrum of the high-pressure discharge lamp 10〇 of the present embodiment, and the curve denoted by reference numeral Π02 ”. The curve shows the UV spectrum of a conventional high-pressure discharge lamp.

 As can be seen from FIG. 3, the arc tube made of quartz glass used in the conventional high-pressure discharge lamp does not show absorption at a wavelength of 250 nm (and its surroundings), but the arc tube of the lamp 100 of the present embodiment. Has an absorption peak at a wavelength of about 250 nm and absorbs light in the vicinity. The effect described below can be obtained by the fact that the arc tube absorbs light having a wavelength of about 250 nm to reduce or filter the emission at a wavelength of 25 nm measured from the outside of the arc tube. This effect will be described with reference to FIG.

 FIG. 4 is a spectral distribution diagram for explaining the outline of the spectral characteristics of the high-pressure mercury lamp. Curve 105 in Fig. 4 is the spectral distribution of a conventional high-pressure discharge lamp at several tens of atmospheres (operating pressure). In addition to the peaks of the j-line, i-line, h-line, and g-line, the wavelength is 250 nm. There is a peak.

For example, in the case of an ultraviolet irradiation device used for UV-curable resin, while efficiently irradiating ultraviolet light with a wavelength of 3〇 to 4〇0 nm (region 106), a wavelength that damages the irradiation device and the irradiation device Ultraviolet light of less than 3 nm (region 1 end) should be excluded as much as possible. In order to satisfy this requirement, it is preferable that the reflecting mirror efficiently reflects light having a wavelength of 300 nm or more and does not reflect light having a wavelength of less than 300 nm. The reflection characteristic of such a mirror is shown by the curve 108 in FIG. Curve 108 is a curve that shows a higher reflectance as it goes away from the horizontal axis (wavelength axis) in FIG. 4 and shows a lower reflectance as it gets closer to the horizontal axis (wavelength axis). As shown by the curve 108, it is preferable that the reflection characteristic of the reflecting mirror sharply decreases to zero as the wavelength approaches 3〇0 nm, while exhibiting a high reflectance at a wavelength of, for example, about 4〇0 nm. . A dotted line 109 in FIG. 4 is a curve showing other reflection characteristics of the reflecting mirror. The reflection characteristic shown by the curve 109 shows a relatively high reflectance at a wavelength of 300 nm. The reflecting mirror having such a reflection characteristic sufficiently reflects light having a wavelength of 250 nm, so that light having a wavelength of 250 nm is emitted from the irradiation device.

 As described above, in the method of adjusting the reflection characteristics of the reflecting mirror, when trying to cut light having a wavelength of 25 Onm, a reflecting mirror having the reflecting characteristics shown by the curve 108 must be used. As a result, light near the wavelength of 300 nm is not used, and light with a wavelength of 365 nm is mainly used.

 However, if light with a wavelength of 250 nm does not come out of the lamp, it can be designed to reflect light with a wavelength of 300 nm with high efficiency as shown by the dotted line 109 in the reflection characteristics of the reflector.

In the lamp for the light irradiation device of the present embodiment, light around a wavelength of 250 nm (for example, light having a wavelength of 245 nm or more and 255 nm or less) can be reduced and filtered.で き As shown in Fig. 9, it can be extended to the short wavelength side. UV light around O nm can be positively used. In this way, the active use of ultraviolet light around the wavelength of 3〇0 nm, which could not be conventionally used to eliminate the wavelength of 25 Onm, could improve ultraviolet energy efficiency Means that. In order to effectively cut light having a wavelength of 25 nm as described above, at least a part of the arc tube of the high-pressure discharge lamp in the light irradiation device of the present invention has an absorption switch as shown in FIG. Has a vector. This absorption spectrum has an important feature in that the material itself constituting the arc tube has itself. Note that “having an absorption spectrum at a wavelength of 250 nm” means that the peak value (minimum value of transmittance) of the portion that is convex below the curve 1-1 shown in FIG. It means a state where the transmittance at 3〇0 nm is about 50% or less. In addition, the full width at half maximum of the portion convex below the curve 101 shown in FIG. 3 is preferably 5 nm or more and 90 nm or less. If the full width at half maximum is less than 5 nm, the emission line of H g cannot be sufficiently absorbed, and if the full width at half maximum exceeds 9 nm, the emission at a wavelength of 300 nm will be absorbed. It is.

The operating pressure of a conventional lamp for an ultraviolet irradiation apparatus is set to several + atmosphere or less in consideration of the efficiency of ultraviolet energy, but the high-pressure discharge lamp 100 of the present embodiment employs the technology. contrary to common sense, mercury and畺sealed more than 1 5_Rei_mg / cm ³ and is set to a level in excess of 1 50 atm operating pressure. Operating pressure at such a high level The spectral distribution is as shown by the curve 104 in FIG. 4. As the visible light component increases, each sharp peak becomes broader.

 Also, when the operating pressure exceeds 150 atm, the height of the emission peak at a wavelength of 250 nm becomes lower and the proportion of the component decreases as compared with the case where the operating pressure is lower than several tens of atm. Therefore, it is possible to make the emission intensity of light having a wavelength of 250 nm substantially zero by the filtering ability of the arc tube 1 of the high-pressure discharge lamp 100 of the present embodiment, compared with the case where the operating pressure is several tens of atmospheres or less. And easier.

 FIG. 15 is a graph showing the relationship between the ratio of the minimum value of the spectral transmittance to the spectral transmittance at a wavelength of 30 nm and the operating pressure of the arc tube. This graph was derived from the data shown in FIG. As can be seen from the graph in Fig. 15, when the operating pressure is 150 atm, the transmittance of the arc tube for light with a wavelength of 250 nm is about 47% of the transmittance for light with a wavelength of 300 nm. It is. When the operating pressure reaches 190 atm, the transmittance of the arc tube for light with a wavelength of 250 nm is reduced to about 34% of the transmittance for light with a wavelength of 300 nm, and the absorption spectrum at that time is reduced. The full width at half maximum of the knob is nm.

Next, refer to FIG. FIG. 5 is a spectral distribution diagram showing the result of measuring the spectral distribution of an example of the high-pressure discharge lamp (light irradiation device lamp) 100 of the present embodiment. The amount of mercury enclosed in lamp 100 is approximately 190 mg / cm ³ (operating pressure is approximately 190 atm), and the input power is 200W. The tube wall load is 8〇WZcm ² . As shown in FIG. 5, the intensity at a wavelength of 250 nm was zero or a level that was not measurable. Also, as can be seen from the fact that there is almost no intensity at a wavelength of less than 30 nm, light having a wavelength of less than 30 nm in the ultraviolet range of 245 to 380 nm is well cut, and 285 n The intensity of light below m is substantially zero.

 Therefore, when the spectral transmittance at a wavelength of 250 nm is about 35% of the spectral transmittance at a wavelength of 300 nm, the filtering capability of the arc tube is optimized. At that time, the full width at half maximum of the absorption spectrum of the arc tube is n nm, and the filtering function for the emission line having a wavelength of 25 nm is sufficiently exhibited.

 The measurement conditions were as follows. The power supply voltage (Vs) is constant at 100 V and input. The lamp lighting position is horizontal lighting with the lamp base horizontal. The lamp measurement direction is perpendicular to the long axis of the lamp. The measurement temperature is room temperature (24 ° C). In addition, the number of measurement samples is two, and the average value is plotted in FIG.

For comparison, Fig. 6 shows the spectral distribution of a conventional high-pressure mercury lamp (a lamp for an ultraviolet irradiation device). As shown in Fig. 6, this conventional lamp has many components having a wavelength of less than 30 nm and a peak at a wavelength of 250 nm. Therefore, when this conventional lamp is used as a lamp for an ultraviolet irradiation device in combination with a reflecting mirror, the reflection characteristics of the reflecting mirror should be attenuated to a wavelength of 30 nm as shown in Fig. 4. Is required, such a conventional purple It was difficult for an external irradiation device to effectively use ultraviolet light having a wavelength of around 300 nm (for example, 30 nm to 35 Onm).

 The figure shows the absorption characteristics of a UV curable resin marketed by a certain manufacturer. The vertical axis is the molar extinction coefficient (1Zmo1Xcm), and the horizontal axis is the wavelength (nm). Usually, ultraviolet curing resin is often cured by using ultraviolet light with a wavelength of 365 nm, etc., but resins A to D shown in the figure show absorption even at 365 nm, but about 3 nm more.吸収 Absorption from 0 nm to about 350 nm is larger, so it is meaningful to use ultraviolet light in that region. Conventionally, it is often said that a resin having a predetermined amount of sensitivity at a wavelength of, for example, 365 ηm has been developed in accordance with a commercially available (or available) ultraviolet irradiation apparatus. Focusing on, ultraviolet rays in the region below the wavelength of 365 nm (eg, about 300 nm to about 350 nm) are valuable for active use.

As shown in FIG. 5, the lamp 100 of the present embodiment contains a spectrum having a predetermined intensity at a wavelength of, for example, 310 to 35 nm, and thus actively utilizes these ultraviolet lights. However, the energy efficiency of ultraviolet radiation can be improved more than before. The positive use of the light in the wavelength range of 310 to 35 nm is related to the fact that the lamp 100 of the present embodiment does not emit light having a wavelength of about 250 nm, as described above. . According to the configuration of the present embodiment, ultraviolet light having a wavelength of around 300 nm can be used in a region having a wavelength of less than 365 nm. UV radiation energy efficiency can be improved, for example, by about 30% as compared with the conventional method.

In addition, since the lamp 10〇 of the present embodiment does not emit light having a wavelength of about 250 nm, the light emitted from the reflecting mirror 50 is made incident on an optical fiber, and accordingly, ultraviolet light (or ultraviolet light) is emitted to an arbitrary position. In the case of irradiating (visible light), it is possible to use an inexpensive glass as the material for the optical fiber without using expensive quartz glass. The non-quartz glass that can be used here is a glass having a Si ₂ of 90% or less (90% by mass or less), for example, Takaishi glass containing glass, soda lime glass, and borosilicate glass. In the configuration shown in Fig. 1, the input end of the optical fiber should be placed around the window 125 of the housing 122.

 Next, a method for causing the arc tube 1 of the lamp 100 of the present embodiment to have an absorption spectrum at a wavelength of 250 nm will be described. The method for providing the arc tube 1 with an absorption spectrum having a wavelength of 25 nm is based on the fact that the inventor of the present application has discovered the incident spectrum. I don't know exactly why 1 has it. However, at least a part of the arc tube 1 has an absorption spectrum with a wavelength of 25 nm, which is a fact confirmed by the present inventors through measurement.

In order to form a part having an absorption spectrum at a wavelength of 25 nm in the arc tube 1 made of quartz glass, the following is performed. First, according to the normal manufacturing process, the order of 1 0- ⁷ mo I / cc inside the arc tube 1 or to produce a high pressure discharge lamp including a more H ₂ (high-pressure mercury lamp). If the manufactured high-pressure discharge lamp is referred to as a completed lamp, the completed lamp is heated under a high temperature condition for a predetermined time. This heating is performed by leaving the completed lamp in a furnace at a predetermined temperature. The atmosphere in the furnace is a reduced pressure atmosphere, a vacuum atmosphere, or an inert gas atmosphere (such as Ar gas). The temperature in the furnace is, for example, from 100 ° C. to 1100 ° C., and in this embodiment, the temperature was set to 1,080 ° C. The heating time is, for example, 2 hours or more (or 50 hours or more). In this embodiment, the heating time is 100 hours. The upper limit of the H ₂ content in the arc tube 1 of the completed lamp is preferably set to 1 ^1-6 mo] Zc c. This is because more H ₂ may cause blackening of the lamp and cause starting difficulties.

FIG. 8 shows an ultraviolet spectral distribution diagram for explaining the absorption spectrum of the arc tube 1. The plot of the original glass (the X-thick line) in Fig. 8 shows the ultraviolet spectral distribution of the high-pressure mercury lamp without heat treatment. On the other hand, 90 atm (〇), 12〇atm (X), and 190 atm (△) in Fig. 8 indicate that mercury is contained in the arc tube 1 at QOmgZcm ³ (operating pressure of about 90 atmospheres), respectively. 1 20mgZcm ³ (operating pressure approx. 12〇atm), 190mg / cm ³ (operating pressure approx. 19〇atm) Ultraviolet spectroscopy of our sealed high-pressure mercury lamp (completed lamp) under high temperature conditions Distribution. As can be seen from FIG. 8, no absorption peak exists at a wavelength of 250 nm in a high-pressure discharge lamp that has not been subjected to the heat treatment under the high temperature conditions described above. On the other hand, in the high-pressure discharge lamp subjected to the heat treatment, it can be seen that the absorption peak at a wavelength of 250 nm increases as the amount of enclosed mercury increases. That is, the spectral transmittance at a wavelength of 250 nm is about 80% for a lamp without heat treatment, about 50% for a lamp at 90 atm, about 60% for a lamp at 120 aΐm, and 1 90 atm lamps can be as much as 34%. Considering from this graph, it seems that the spectroscopic transmittance can be reduced to 40% or less from around 150 atm (150 mgZcm ³ ). It is difficult to estimate its structure immediately from the absorption spectrum with a peak at a wavelength of 25 nm (in Fig. 8, the region from Onm to 230 nm at wavelength 2). Due to the heat treatment under the high-temperature condition of the morphology, a part of the structure such as “1-Si-〇1” in the quartz glass is cut, etc., and the structure is different from that of ordinary quartz glass (for example, due to oxygen deficiency defects). It may have been formed more than non-glass after heat treatment. It is also conceivable that Si ₂ is reduced by H ₂ due to high-temperature heat treatment in a state in which undesirable H ₂ is contained in light emitting tube 1. From this point as well, the large amount of H ₂ described above is not preferable. If S i 0 ₂ is excessively reduced, as a result there is a large amount of H ₂ 〇 cause blackening early. If the quartz glass constituting the arc tube 1 has an absorption spectrum having a wavelength of 2 nm, there is a possibility that the glass may cause devitrification or the like by the spectrum. However, upon examination by the present inventor, no devitrification or the like was observed.

 Referring to FIG. 1 again, description of other components of the light irradiation device 50 # of the present embodiment will be continued.

 The light irradiation device 50 ° of the present embodiment is the same as the high-pressure discharge lamp 10 described above.

0 is an ultraviolet irradiation device that irradiates at least ultraviolet light. The light irradiation device 500 can emit short-wavelength visible light (for example, h-line and g-line) in addition to ultraviolet light. The reflecting mirror 50 combined with the lamp 100 has a reflecting portion 5a having a concave reflecting surface and a hollow neck portion 5b formed integrally with the reflecting portion 50a. Both the reflecting portion 50a and the hollow neck portion 50b are made of glass. The thickness of the reflecting portion 50a is, for example, 3 mm or more. The size D of the opening (wide opening) on the emission direction side of the reflecting mirror 50 is, for example, 3 mm or more, and preferably 4 mm to 20 Omm. The sealing portion 2 of the lamp 100 is inserted into the opening (narrow opening) of the hollow neck portion 50b of the reflector 5〇, and the lamp 100 is fixed to the reflector 50. The lamp 1 固 着 is fixed to the hollow neck portion 50 b by, for example, a cement 53 so that no gap is formed between the lamp 1 〇〇 and the hollow neck portion 50 b. Therefore, in the light irradiation device 500 of the present embodiment, when the lamp is replaced, the reflecting mirror 50 and the lamp 100 can be replaced at the same time.

The reflecting mirror 5〇 is a cold mirror, and a film that transmits infrared rays and reflects ultraviolet rays is coated on the inner surface (reflecting surface) of the reflecting portion 5 Ob of the reflecting mirror 50. The reflecting mirror 50 of the present embodiment has an elliptical reflecting surface. This is an ellipsoidal mirror having two focal points f 1 and f 2, and the respective focal lengths F 1 and F 2 are shown in FIG. The focal length F1 is, for example, 3 mm or more, preferably between 5 mm and 35 mm, while the focal length F2 is, for example, 50 mm or more, preferably between 5 Omm and 30 mm is there. FIG. 9 shows the relationship between the focal points f 1 and f 2 and the focal lengths F 1 and F 2.

 The high-pressure discharge lamp 100 is set on the optical axis passing through the two focal points f 1 and f 2 of the elliptical reflecting mirror 50, and is formed between the electrodes 3 and 3 of the high-pressure discharge lamp 100. The arc is arranged such that the arc is located at the focal point f1 on the side closer to the reflecting mirror 50 among the two focal points.

 As described above, the high-pressure discharge lamp 100 is electrically connected to the lighting circuit 130 that can supply power to the lamp 100. More specifically, it is as follows. One terminal (external lead 5) of the high-pressure discharge lamp 100 is electrically connected to an external lead lead 61, and the external lead lead 61 is connected to a wiring through a through hole 58 formed in the reflector 50. It is electrically connected to member 62. One terminal is a base 9, and the wiring 60 is electrically connected to the base 9 and the wiring connecting member 62, and the wiring 60 is electrically connected to the lighting circuit 13〇. Being done. The electrical connection between the members is made by welding.

The lighting circuit 130 of the present embodiment includes a DC-DC converter circuit 131. The DC-DC converter circuit 131 includes, for example, a switching element, a switching transformer, a diode, and a capacitor. It is composed of The lighting circuit 130 of the present embodiment changes the switching frequency of the switching element, the {NZ} FF ratio of the switch, or both to change the electric power supplied to the lamp 1 It has a function that can be changed between 100% of the rated power of 00) and 5%.

 Furthermore, the lighting circuit 130 of the present embodiment includes an inverter circuit 132 at the output terminal of the DC-DC converter circuit 131. The inverter circuit 132 has a plurality of switching elements, and the switching frequency can be changed, for example, between 60 Hz and 80 ° Hz by the switching elements.

 The configuration of the high-pressure discharge lamp 100 will be described in more detail. The lamp 100 is a double-end type lamp having two sealing portions 2, and the light emitting tube 1 has a substantially spherical shape and an outer diameter. For example, 5mrr! The glass thickness is, for example, about 1 mm to 5 mm. The volume of the discharge space in the arc tube 1 is, for example, about 0.1 cc to 5 cc (preferably, 0.05 to 2 cc). In the present embodiment, the arc tube 1 having an outer diameter of about 10 mm, a glass thickness of about 3 mm, and a discharge space volume of about 0.06 cc is used. The sealing part 2 has a shrink structure manufactured by a shrink method.

As described above, the arc tube 1 is filled with more than 15 mg / cm ^{3 of} mercury 6 as a luminous species, for example. Amount of the enclosed mercury 6 is preferably from ^{1 9 Om cm 3 35 Om gZ} cm 3. Also within the arc tube 1, 1 0- ⁶ mo〗 ZMM ³ or more halogens It is enclosed. Halogen, preferably the amount of bromine between 1 〇- ⁶ and 1 O mo I Zmm ³ is sealed. The halogen may be encapsulated in the form of an halogen precursor, which is decomposed to generate halogen, in addition to the hapogen alone. In the present embodiment, CH ₂ Br ₂ , HBr, and HgB “ ₂ The rare gas (for example, A “) of 5 to 40 kPa is also sealed in the arc tube 1. Ar of 〇 k Pa is enclosed.

 Next, in the conventional ultraviolet irradiation apparatus, in consideration of ultraviolet energy efficiency, only the high-pressure mercury lamp was used up to several tens of atmospheres at a high mercury operating pressure. The reason for ignoring the conventional concept of UV energy efficiency and increasing the amount of mercury enclosed to more than 150 mg Ze e is described below.

 The high-pressure discharge lamp 100 of the present embodiment is used for resin curing and exposure in the light reflected and condensed from the reflecting mirror 5〇 regardless of operating at a pressure higher than 150 atm. The intensity of the mercury emission line at wavelengths of 365 nm, 4〇5 nm, and 436 nm is higher than the conventional one. This surprising event has been found by the present inventors. Hereinafter, the description will be further continued.

The present inventors, in the high pressure mercury lamp 1 0_Rei of the present embodiment shown in FIG. 2, the tube wall loading set to 80W / cm ^2, the amount of the enclosed mercury 9_Rei_mg ^{/ cm 3 v 1 20mg / cm} 3 x 1 The wavelength radiated from the lamp when the operating pressure is changed to 9〇, 120, 150, and 19〇 at 5〇mg / cm ³ and 190 mg / cm ³ 365 nm, 405 nm and 436 nm mercury emission line intensities were measured. The results are shown in FIG.

 The vertical axis of the graph in FIG. 10 shows the intensity of the conventional lamp as 10%, and in FIG. 10, the results are plotted as relative values. The horizontal axis of the graph in FIG. 10 represents the operating pressure (atmospheric pressure) of the lamp. In this case, the light intensity was measured using an integrating sphere without the reflector 50. Indeed, as has been said in the past, the higher the mercury vapor pressure, the lower the intensity of the mercury emission line at wavelengths of 365 nm, 405 nm, and 436 nm, and the increase in mercury vapor pressure depends on resin curing and Exposure (shows unfavorable behavior).

 However, when the same lamp was incorporated into the reflector 50, the convergent light from the reflector 5〇 was guided to the integrating sphere, and the light intensity was measured. The intensity was higher than that of the conventional lamp, as shown in Fig. 11.

Figure 1 1 is incorporated into the reflector 50 from a high pressure mercury electric lamp (1 00), and the amount of the enclosed mercury is changed from ^{90m gZcm 3, 1 20m gZc m} 3, 1 50m g / cm 1 90m g / cm 3 When the operating pressure was changed to 9〇, 120, 150, and 190 atm, the mercury emission line intensity of 365 nm, 405 nm, and 436 nm of the convergent light from the reflector 5〇 was changed. It is a graph which shows a measurement result. For reference, radiant energy in wavelength range 355 nm to 375 nm, radiant energy in wavelength range 3 45 nm to 385 nm, radiant energy in wavelength range 335 nm to 395 nm, wavelength range 300 nm to 400 n The results are plotted for each of the m radiant energies. Similarly to the graph shown in FIG. 10, the vertical axis of the graph in FIG. 11 indicates the intensity of the conventional lamp as 1%>. The horizontal axis of the graph in Fig. 11 represents the operating pressure (atmospheric pressure) of the lamp.The lamp used here is a lamp that absorbs at a wavelength of 250 η m. In this test, a lamp that does not show absorption at a wavelength of 25 nm can be used.

 As shown in Fig. 11, the light intensity at wavelengths of 405 nm and 436 nm, which are advantageous for exposure, is already 1.5 times higher than that of the conventional one when operating at 90 atm, and very high values can be obtained. With vapor pressure, their strengths tend to decrease, but surprisingly, they increase with pressure in the vapor pressure range above 150 atmospheres. The 365-nm emission line intensity, which is advantageous for resin curing, is constant from 90 atm to 150 atm, and increases with operating pressure above 15 1atm. Outstanding strength is obtained.

On the other hand, if the wavelength selection range is slightly expanded to include 365 nm, for example, the radiant energy in the wavelength range of 355 nm to 375 is already more than 1.2 times larger than that of the conventional one at the operation at 9〇 atmospheric pressure. High values are obtained. Therefore, it is considered that even at an operating pressure of 90 atm in curing the resin, the performance is equal to or better than that of the conventional one. Its radiant energy in the range of 355 nm to 375 nm has a tendency to decrease with vapor pressure, but surprisingly, emission lines with wavelengths of 4〇5 nm and 436 nm, which are advantageous for exposure, are surprising. Like the behavior of strength, It is higher than 15〇 atmospheric pressure, and in the vapor pressure range, it starts to increase with pressure. For other wavelength ranges that are advantageous for resin curing, radiant energy from 345 nm to 385 nm, radiant energy from 335 nm to 395 ηm, and radiant energy from 300 nm to 400 nm, 90 Even when operating at atmospheric pressure, the energy is already 1.2 to 1.8 times higher than before, and extremely high values can be obtained. They show a tendency to decrease with vapor pressure, but increase with pressure in the vapor pressure range higher than 15 atmospheres, as well as the behavior of the emission line intensity of 4-5 nm and 436 nm, which is advantageous for exposure.

As described above, the amount of mercury sealed in the high-pressure discharge lamp 100 combined with the reflecting mirror 50 is 9〇mgZcm ^3, which is larger than the amount of mercury sealed in the conventional operating pressure of several tens of atmospheres. Preferably, the amount of enclosed mercury is greater than 150 mg / cm ³ , and the operating pressure is at least 90 atm, preferably higher than 150 atm, so that radiation that is advantageous for resin curing and exposure can be increased. Can also be obtained with much higher efficiency.

With this high efficiency, the problem of heat of the irradiated object due to the increased infrared ray and the increased infrared ray can be substantially eliminated. As is well known, as mercury vapor pressure increases, visible and long-wavelength infrared emissions increase. However, here, the high efficiency reduces the lamp power required to obtain the same amount of UV radiation as before, and therefore the absolute amount of infrared radiation emitted from the lamp. Therefore, the problem of heat of the irradiated object due to the increase of the mercury vapor pressure and the increasing infrared ray can be substantially eliminated. The merits of increasing the amount of mercury enclosed to more than 15cmmgZcm ³ and increasing the operating pressure to more than 15〇atm are that not only radiation efficiency is improved but also a very long life is obtained. It is. In the high-pressure discharge lamp 100 used in the light irradiation device of the present embodiment, bromine is sealed to prevent blackening due to the so-called halogen cycle. I know that loggen cycles are always difficult to work. This is because, in the amount of the enclosed mercury is 1 5_Rei_mg Roh cm ³ or less, without binding with mercury, is halogen excessive contribute to eight Rogensa Ikuru, electrodes 3 of the constant temperature region, the concrete This is because a portion of the electrode 3 close to the sealing portion 2 is violently eroded by octagon, and as a result, there is a possibility that the nearby arc tube 1 may be blackened or the electrode may be broken. In fact, 1 5_Rei_mgZcm ³ In the following, a phenomenon that the portion near the sealing portion 2 of the Lachi of the arc tube 1 becomes blackened frequently.

Also, a decrease in the amount of enclosed mercury causes an excessive decrease in the temperature of the arc tube 1 because convection generated in the arc tube 1 is weakened. For this reason, when the amount of mercury charged was 9 μm gZcm ³ , tungsten was transported to the upper part of the arc tube 1 when the temperature became lower, and the phenomenon of blackening at the beginning was observed. Stated viewpoint et lifetime, the amount of the enclosed mercury is more than 1 50MgZcm ^3, is made higher than the operating pressure 1 5_Rei pressure, lighting of 1 〇 000 hours 5_Rei_rei_rei time Nioitechi, The lamp does not turn black, but can continue to light. The life of a conventional UV irradiation device lamp This very long life is a remarkable effect compared to the long life of 200 hours of lighting time.

If the upper limit of the amount of enclosed mercury is specified from a thermal point of view, the amount of enclosed mercury is, for example, SSOmgZcm ^ operating pressure of 35〇 atm. If this value is exceeded, the amount of infrared radiation is expected to increase sharply, which may cause thermal damage to the irradiated object. Increasing the wall load to 80 WZ cm ² or more, wavelength 365 nm boiled 405 nm, 436 nm mercury emission line strength of the converging light from the reflecting mirror 50, and further, 375 nm of radiant energy from the wavelength range 365 nm First, the radiant energy in the wavelength range of 345 nm to 385 nm, the radiant energy in the wavelength range of 335 nm to 395 nm, and the radiant energy in the wavelength range of 300 nm to 400 nm are even greater than those of conventional lamps. For example, as shown in Table 1, increasing the tube wall loading to 80W / cm ² or al ^{1 40W / cm 2, 3 65} nm convergent light from the reflecting mirror 50, 405 nm, 436 nm mercury emission line Intensity, as well as radiant energy in the wavelength range 365 nm to 375 nm, radiant energy in the wavelength range 345 nm to 385 nm, radiant energy in the wavelength range 335 nm to 395 nm, wavelength range 3〇0 nm to 40〇 nm The radiant energies are 1.1 times, 3.4 times, 2.4 times, 2.6 times, 3.5 times and 4.1 times, respectively, compared to the comparative example (conventional lamp). However, under these conditions, the intensity is not lower than that of the comparative example (conventional lamp), and all of them can be much higher, and the radiation can be obtained. 【table 1】

When the tube wall loading is less than 8_Rei_WZc m ^2, too lamp temperature is low, part of the mercury not evaporate condensed, operating pressure is lowered, the resulting compared with conventional lamps However, the intensity of 365 nm, 405 nm, and 436 nm of the condensed light from the reflected light 5 mm is reduced, which is disadvantageous. Conversely, the higher the tube wall load, the better the radiation. This reduces light loss in the arc tube (eg, quartz glass or encapsulated mercury vapor and short-wavelength light loss due to the absorption of Z and halogen), and the smaller arc tube reduces the discharge arc. It may be to increase the brightness by causing the shrinkage of the image. However, due to the limitation of the heat resistance of quartz glass, the upper limit is preferably 3〇〇W / cm ² in order to obtain 1,000 hours from a practical life of 5,000 hours. However, this does not apply if it can be used to provide cooling or shorten the lamp replacement cycle. The distance between the tips of the electrodes 3 in the arc tube 1 is adjusted so that the distance between the tips, that is, the distance between the electrodes, is approximately 〇0.6 mm to 2.5 mm, and preferably 0.8 mm to 2.0 mm. The reason for the arrangement is described below. This is because the temperature of the electrode 3 increases when the distance between the electrodes is shorter than mm. 6 mm, and the heat radiation of the electrode (rich in long-wavelength components, similar to an incandescent lamp) is added to the convergent light from the reflector 50. This is because the temperature of the irradiated object may be excessively increased. On the other hand, if the length is longer than 2.5 mm, the instability of the discharge arc due to the convection due to the high operating pressure increases, the flicker tends to occur, and the temperature of the arc decreases, resulting in a substantially lower mercury vapor pressure. This is because the emission line intensity at 405 nm and 436 nm tends to decrease as in the lamp of FIG. In the preferred range of 0.8 mm to 2.〇 mm, in addition to the above disadvantages, in addition to the above, the halogen cycle evaporates and tungsten is returned to the current tip, resulting in a very sharp tip shape and a thin arc. At least, it is advantageous for the convergence of light by the reflecting mirror 50.

The reason why the inner volume of the arc tube 1 is between about 0.01 cm ³ and 5 cm ³ , preferably 〇. 5 cm ³ to 2 cm ³ will be described below. 〇. If it is smaller than 〇1 cm ³ , the input power can be substantially limited to about ³程度 W due to the thermal limitation of quartz glass, and an absolutely large output cannot be obtained. On the other hand, if it is larger than 5 cm ³ , the larger dimension no longer affects the convection of the mercury vapor during operation, for example, the difference between the highest temperature part and the lowest temperature part of the arc tube 1 becomes larger. And increase arc instability. I like it. In the range of 05 cm ³ to 2 cm ³ , in addition to the above-mentioned disadvantages, the time from the start of lighting until all of the mercury evaporates to obtain the specified rated light output depends on the headlight of the car. The light output rises very smoothly in about one or two minutes, as in the start of a high-pressure discharge lamp for a light source. This means that the period during which an excessive current flows more than the rated current is shorter, and therefore, the electrode damage due to the starting current is kept low, and this has an advantageous effect on the service life.

The amount of halogen are enclosed in the arc tube 1 is 1 O- ^ mo I / mm ³ or more, preferably described below why is between 1 0 ⁶ and 1 0- 'imo I Zmm ^3. It, 1 O ^_6 iumo 1 Zmm ³ or more halogens, returns the evaporated tungsten on the electrode tip, the electrode tip shape Wochi pointed very likeness, as a result, have brought form a narrow arc, of light by the reflecting mirror 5 0 This is because it works for convergence. That is, a trace amount of oxygen that exist H ₂ 0 which is connexion S i 0 ₂ by the heat treatment occurs in the results is reduced with H ₂ becomes the source, by the the eight androgenic slightly actively allowed the evaporation of the electrodes, The tip shape is sharpened more. (If this point is considered a little deeper, a large amount of H ₂ will give off a large amount of H ₂ 、, resulting in a large deformation of the electrode tip. the presence of large amounts of H ₂ is not desirable). However, when the amount of halogen is more than 1 O—'wmo I Zmm ³ , the shape of the tip is severely deformed, and the arc position is not fixed and unstable. Regarding the sharpening of the tip shape, the type of halogen can be selected from iodine and chlorine in addition to bromine. However, iodine tends to have a high starting voltage, and chlorine Since the electric voltage is increased, the transition to arc discharge becomes more difficult than iodine or bromine, so bromine is preferred.

 The reflecting mirror 50 includes a reflecting portion 50a having a concave reflecting surface having an optical axis, and a hollow neck portion 5〇b surrounding the optical axis integrally with the reflecting portion 50a. However, at least the reflecting portion 50a preferably has a thickness of 3 mm or more. A higher mercury vapor pressure than before increases the amount of light at wavelengths that are advantageous for resin effect exposure, but at the same time increases the emission of infrared components. If the thickness is set to 3 mm or more as in the present embodiment, it is possible to absorb the infrared rays increased from the conventional one, and as a result, the infrared rays leaking from the reflecting mirror 50 to the surroundings are suppressed to the conventional lamp level. It becomes possible. This prevents heating of the device and works advantageously for miniaturization of the device. Furthermore, since the hollow neck portion 5〇b is hardly affected by the light of the discharge lamp, it absorbs infrared rays and acts as a radiator for the reflecting portion 50a, effectively increasing the temperature of the entire reflecting mirror 50. Contributes to the decline.

 If the opening (wide opening) of the reflecting mirror 500 is closed with a glass that transmits ultraviolet light, for example, quartz glass, the temperature of the discharge lamp 100 can be more stably kept constant. , Suppresses changes in mercury vapor pressure and works to stabilize light output. In addition, the glass absorbs a part of the infrared ray which is increased compared to the conventional one, and can effectively suppress the temperature rise of the irradiation object, which is advantageous.

The reason why the focal length F1 of the elliptical reflecting mirror 5〇 of the present embodiment is 3 mm or more, preferably between 5 mm and 35 mm is as follows. If it is less than m, the lamp 100 is too close to the hollow neck portion 50b, which raises the temperature of that portion and suppresses the above-mentioned radiator effect. This is because there is an increased risk of occurrence. The reason why the range of 5 mm to 35 mm is preferable is that, in addition to the disadvantages described above, the sealing portion 2 of the discharge lamp 100 located on the side of the hollow neck portion 50 b is not excessively long. Therefore, the temperature of the discharge lamp 100 can be appropriately increased, and a decrease in the vapor pressure can be suppressed.

 The reason why the focal length F2 is 5 mm or more, preferably between 50 mm and 30 mm, is as follows. First, if the focal length is less than 50 mm, the convergent light from the reflecting mirror 50 seals the discharge lamp 100. This is because there is a possibility of being blocked by part 2. If the distance exceeds 300 mm, the range in which the light from the reflecting mirror 50 converges at the convergence position is widened, and a sharp light intensity distribution cannot be obtained.For example, an entrance end of an optical fiber is provided near the convergence, and the light is transmitted through the optical fiber. This is because, in the case of irradiating light through the optical fiber, the efficiency of incidence on the optical fiber is low, and as a result, the light use efficiency is reduced. However, when using a lens to correct this, the focal length F2 may be longer than 3 mm, and in that sense, a parabolic reflector is used instead of an elliptical reflector and a condensing lens You may make it the structure which combines a system.

In the light irradiation device of the present embodiment, the sealing portion 2 is inserted into the hollow neck portion 50b in a state where the high-pressure discharge lamp 100 is on the optical axis so that there is no gap with the hollow neck portion 50b. For example, inorganic adhesives Therefore, the lamp can be replaced by replacing the reflector 50 and the high-pressure discharge lamp 100 at the same time. This is because the film coated on the reflecting surface of the reflecting portion 50a (ultraviolet light) is different from the conventional method in which only the lamp is replaced (see, for example, Japanese Patent Application Laid-Open No. 5-57113). Reflection and infrared transmitting film) deteriorates when exposed to the strong heat of the discharge lamp 100 for a long time, eliminating the possibility of changing the light output characteristics. This means that it is possible to substantially completely eliminate the troublesome work of adjusting and positioning the decency, or the possibility of misplacement.

 In the configuration of the present embodiment, the sealing portion 2 is inserted into the hollow neck portion 50b in a state where the high-pressure discharge lamp 100 is on the optical axis, and there is no gap with the hollow neck portion 50b. In this example, a gap for controlling the temperature of the reflector 5〇 is located between the hollow neck 5〇 b and the sealing part 2. Further, the hollow neck portion 50b and the sealing portion 2 may not be directly fixed by a cement, but may be fixed to each other via a spacer. In addition, the hollow neck of the hollow neck portion 5〇b is conical toward the reflection portion 50a, and the shape of the hole becomes smaller. This allows for a larger reflecting surface of the reflecting portion 50a, and therefore increases the amount of converging light.

 In addition, although there are some overlaps with the above,

In the related art disclosed in Japanese Patent Application Laid-Open No. 0-55771, etc., the mercury vapor pressure during lighting is as low as several tens of atmospheres as compared with the configuration of the present embodiment. Can occur. However, this problem has traditionally However, it was not considered a problem because it was used under common sense conditions.

 Since the mercury vapor pressure during operation is as low as several tens of atmospheres, the lamp operating voltage during operation is low, and the lamp current is large, resulting in a large heat load on the electrodes and therefore a short life. In addition, because of the low vapor pressure, the emission of mercury with a wavelength of less than 300 nm was particularly strong, and the object and the irradiation device itself were damaged by the ultraviolet light. Furthermore, since only the lamp is replaced, the characteristics (spectral reflectance, intensity, etc.) of the reflector deteriorate over a long period of time, and the output may change or the reflector may be damaged due to the deterioration of the reflector. There was also.

Further, as in the technique disclosed in Document 2 (Japanese Patent Application Laid-Open No. 11-191394), in order to enclose argon at a high pressure to increase ultraviolet radiation, it is necessary to use a liquid in the lamp manufacturing process. It is necessary to cool the lamp with nitrogen and trap the argon gas (boiling point: 186 ° C) in the arc tube. When the lamp is cooled with liquid nitrogen having a boiling point close to that of argon gas (boiling point: 196 ° C), only a large arc tube with a tube wall load of 10 to 3〇WZ cm ² can be manufactured. When making small or small lamps, very expensive liquid helium must be used, which is a problem. In addition, high-pressure argon gas makes starting the lamp very difficult, which necessitates the application of a high starting voltage, which leads to an increase in the size of the equipment or a high starting voltage which damages the lamp electrodes. Giving rise to the problem of shortening the service life. Japanese Patent Application Laid-Open No. Hei 1-157157 / Japanese Patent Application Laid-Open No. Hei 1-1 "1-191394, which is the same as in the prior art, the lamp for the ultraviolet light irradiation device is a DC high-pressure discharge lamp (DC lamp). On the other hand, when an AC high-pressure discharge lamp is used, two cathodic bright spots (in this vicinity, more UV light is emitted due to the high temperature) are produced. Also, there is an advantage that more ultraviolet light is converged (condensed) to optical fibers, etc. The above-mentioned filtering effect at a wavelength of 25 nm enables mercury to be enclosed in high-pressure discharge lamps with a mercury filling amount of more than 150 mg / cm ³ The effect brought by the present invention is not limited to the DC lamp and the AC lamp, but can be obtained. Therefore, the light irradiation device of the present embodiment can be used for both the AC lamp and the DC lamp.

To prevent the wavelength of 250 nm and the surrounding light from being emitted from the reflector 50, provide a front glass that cuts the wavelength of 250 nm on the reflector 5〇, or use a wavelength of 250 nm on the reflector 5〇. It is possible to provide a reflection film that cuts the light. The filtering function of one or a combination of the reflecting tube 50 and the arc tube 1 of the lamp 100 can attenuate or cut the wavelength of 25 nm and the surrounding light. It is preferable to use the filtering function of the arc tube 1. This is because the filtering function of the reflector is affected by the degree of change due to the surrounding environment such as temperature and humidity, but the filtering function of the arc tube 1 does not come into contact with the outside. Because they exist in This is because they are not affected by external factors and therefore function stably and with little variation.

(Embodiment 2)

 In the first embodiment, the light irradiation device 500 will be described with a focus on improving the energy efficiency of ultraviolet light. However, the light irradiation device (ultraviolet light irradiation device) is required to maintain a constant illuminance. Yes.

 Fig. 12 is a graph of the UV lamp life characteristics of a conventional lamp. As shown in Fig. 12, as shown in Fig. 5, the intensity radiated from the lamp varies with the lighting time (use time). In fact, when using an ultraviolet irradiation device, it is necessary to measure the illuminance and to check whether the illuminance is stable for each use. At present, the irradiation process using an ultraviolet irradiation device cannot be performed unless it is carried out.Therefore, complicated operations must be accepted for essential processes, but if possible, such operations are complicated. Is slightly reduced.

As described in the first embodiment, the light illuminating device 50〇 according to the embodiment of the present invention has a higher ultraviolet energy efficiency than the conventional device, and therefore has a margin capable of performing a constant illuminance more than that. Therefore, it is possible to use the method of irradiating light while maintaining a constant illuminance using the light irradiation device 5〇〇. In other words, it is possible to provide a method of irradiating light with a constant illuminance at an illumination level which has been conventionally used. FIG. 13 is a graph for explaining the light irradiation method of the present embodiment, in which the conventional irradiation level is set to a relative intensity of 100%. By using the light irradiation device 500 of the present embodiment, it is possible to irradiate light having a relative intensity of 100 and a very large intensity at the beginning of the lighting time. Is irradiated. Also, when the lighting time is T1 or T2, the light with the relative intensity “1〇0” or more can be emitted. Then, when the light intensity from the light irradiation device 500 decreases to the level of the relative intensity of 100, the light irradiation method is stopped.

 Thereafter, the high-pressure discharge lamp 100 may be replaced (for example, the entire reflecting mirror 50 is replaced). However, instead of replacing the high-pressure discharge lamp 100, the illuminance may be measured and used each time as in the conventional light irradiation method. This is because even at this point, it has the same level of irradiation capability as a conventional light irradiation device. In some cases, the relative intensity may be lowered to a level lower than 100 instead of 100, and the method of irradiating while maintaining a constant illuminance may be continued.

 If the light around the wavelength of 25 nm is to be filtered and the light around the wavelength of 300 nm is actively used, the method may be executed while taking the following steps.

First, of the light emitted by the high-pressure mercury lamp 100, the ultraviolet light around a wavelength of 250 nm is excluded, and the illuminance containing at least the ultraviolet light around a wavelength of 3 nm is detected. Specifically, it absorbs at a wavelength of 25 nm. It is sufficient to measure the illuminance of the high-pressure mercury lamp 100 of the present embodiment having the absorption spectrum. Typically, the illuminance from the reflector 50 incorporating the lamp 100 will be detected.

 Next, when the illuminance is set to the maximum illuminance, light is emitted while maintaining a constant illuminance within a range of less than (or less than) the maximum illuminance. This is as described in FIG. When irradiating light, UV light around a wavelength of 250 nm is excluded, and a certain amount of light within a range that is equal to or higher than the illuminance of the light when the UV light around a wavelength of 300 nm is eliminated. It is possible to maintain the friction. If this is done, it is possible to irradiate ultraviolet light (or ultraviolet-visible light) with higher intensity than before. However, considering the point of irradiating while maintaining a constant illuminance, there is a sufficient advantage if the intensity of the conventional irradiation level can be maintained.

 The light irradiation device and the light irradiation method according to the embodiment of the present invention can be applied to an application of irradiating at least ultraviolet light. For example, it can be used for curing the above-described ultraviolet curable resin and for exposing semiconductor substrates and liquid crystal substrates. More specific applications include curing, UV bonding, wafer exposure, peripheral exposure, liquid crystal exposure, print substrate exposure, and TAB exposure. Industrial applicability

According to the present invention, at least a part of the arc tube of the high-pressure discharge lamp that emits light having at least the ultraviolet spectrum has a wavelength of 250 nm. In the light emitted from the inside of the arc tube to the outside, the light having a wavelength of 250 nm and light having a wavelength of at least 5 nm above and below it is filtered, so that a wavelength of 30 nm is used. Ambient light (for example, light with a wavelength of less than 365 nm) can be actively used, and as a result, UV radiation energy efficiency can be improved more than before.

Claims

1. a high-pressure discharge lamp having a light-emitting tube in which a light-emitting substance is sealed in a tube, and a sealing portion extending from the light-emitting tube;  A reflecting mirror for reflecting light emitted from the high-pressure discharge lamp, wherein the light emitted from the high-pressure discharge lamp is at least in the ultraviolet region. Has a spectrum of  Example  At least a part of the arc tube has an absorption spectrum at a wavelength of 250 nm. A light irradiating device, which filters light having a wavelength of 245 nm or more and 255 nm or less, which is light emitted from inside the arc tube to the outside. 2. The absorption spectrum has a maximum value of absorptance within a wavelength range of 245 nm to 255 nm, and a full width at half maximum of 5 nm to 9 nm. The light irradiation device according to claim 1, wherein the light irradiation device has an Onm or less. 3. The spectral transmittance of the arc tube has a minimum value of transmittance within a range of wavelength 245 nm to 255 ηm, and the minimum value is 50% of the transmittance of the arc tube at a wavelength of 300 nm. The light irradiation device according to claim 1, which is as follows. 4. The light irradiation device according to claim 1, wherein the arc tube is formed of glass in which one peak of an absorption spectrum is included in a wavelength range of 245 nm to 255 nm. 5. The light irradiation device according to claim 1, wherein the arc tube has a function of substantially reducing the emission intensity of light having a wavelength of 25 nm from the light emitted by the light-emitting substance. 6. The arc tube is substantially made of quartz glass, the high-pressure discharge lamp is a high-pressure mercury lamp, Wherein as a light-emitting substance, mercury greater than 1 50 mg / cm ³ based on the volume of the arc tube are enclosed, the light irradiation device according to claim 1. 7. The light irradiator is an ultraviolet irradiator that irradiates at least ultraviolet light,  The reflecting mirror is a cold mirror; The amount of the enclosed mercury, based on the volume of the arc tube, is 1 9_Rei_m GZcm ³ or more,  The luminous tube is filled with octogen, The light irradiation device according to claim 6, wherein a tube wall load of the lamp is 8 で W / cm ² or more. 8. The absorption spectrum of the arc tube having the absorption spectrum is such that the high-pressure discharge lamp is operated for 2 hours under a high temperature condition of 100 ° C. to 11 ° C. 7. The light irradiation device according to claim 6, wherein the light irradiation device is formed by holding. 9. In the arc tube, a pair of electrodes are arranged to face each other, and the electrodes are arranged in the sealing portion and electrically connected to a metal foil,  The distance between the pair of electrodes is 2.5 mm or less;  The light irradiation device according to any one of claims 1 to 8, wherein the high-pressure discharge lamp is an AC lighting type lamp. 10. The reflecting mirror has a hollow neck portion formed with an opening into which the sealing portion of the high-pressure discharge lamp is inserted,  The high-pressure discharge lamp is inserted into the hollow neck and fixed to the reflector.  The reflecting mirror is an elliptical mirror for relaxing an elliptical reflecting surface, and the light irradiation device further includes a housing surrounding the reflecting mirror and having a window formed to allow light from the reflecting mirror to pass therethrough. And 10. The light irradiation device according to claim 1, wherein a lighting circuit electrically connected to the high-pressure discharge lamp is arranged in the housing. 1 1. An optical fiber is arranged around the window of the housing, and the core of the optical fiber is made of glass different from quartz glass.  The light irradiation device according to claim 10, wherein the glass is selected from the group consisting of high quartz content glass, soda glass, and borosilicate glass. 1 2. A lamp used in a light irradiation device that irradiates at least ultraviolet light,  An arc tube in which mercury is sealed in the tube and substantially made of quartz glass;  A sealing portion extending from the arc tube;  With  The arc tube absorbs light having a wavelength of about 250 nm, and transmits light having a wavelength of about 3 nm, The mercury is 1 SOmgZcm ³ Yorichi many encapsulated based on the volume of the arc tube,  The luminous tube is filled with octogen, The lamp for a light irradiation device, wherein a tube wall load of the lamp is 80 WZcm ² or more. 13. The lamp for a light irradiation device according to claim 12, wherein the light emitted from the lamp for a light irradiation device has a light emission intensity of light having a wavelength of 5 Onm substantially zero. 1 4. A method of irradiating at least ultraviolet light, which excludes ultraviolet light around a wavelength of 250 nm from light emitted from a high-pressure mercury lamp, and reduces ultraviolet light around a wavelength of 300 nm. Detecting the illuminance of the light,  Irradiating the light while maintaining a constant illuminance within a range equal to or less than the maximum illuminance, wherein the illuminance is a maximum illuminance;  A light irradiation method. 1 5. In the step of irradiating the light,  The ultraviolet light around the wavelength of 250 nm is excluded, and the constant illuminance is maintained in a range equal to or higher than the illuminance of light when the ultraviolet light around the wavelength of about 300 nm is eliminated. The light irradiation method described in the above.