WO2004112970A1 - Swirl type fluid atomizing nozzle - Google Patents

Abstract

A swirl type fluid atomizing nozzle (1), comprising a hollow body (2) having a gas outlet (201) opened to the front thereof and a gas inlet (202) opened to the side thereof and a hollow member (3) inserted into the body (2) from the rear side and having, therein, a fluid passage allowing a front fluid outlet (301) to communicate with a rear fluid inlet (316). A gas passage (7) allowing the gas inlet (202) to communicate with the gas outlet (201) is demarcated between the body (2) and the member (3), a turning groove (304) generating turning swirl flow at the front of the fluid outlet (301) in association with the body (2) is formed in the front end outer periphery of the member (3), and the turning swirl flow crushes and atomizes the fluid jetted from the fluid outlet (301). The body (2) and the member (3) are formed of a fluororesin, fluororesin flow passage structural members (5, 15) and (4, 4A) are fitted to the gas inlet (202) and the fluid inlet (316), and the fitted parts are fixed and sealed by welding so that the inner peripheral surfaces (15a, 403a) of the flow passage structural members fixed to the gas inlet (202) and the liquid inlet (316) are continuously made flush with the inner peripheral surfaces (7a, 8a) of the gas passage (7) and the fluid passage (8) on the nozzle (1) side. Thus, since a recessed part and a screw part allowing fluid-contained substance to be adhered and stacked thereinto are absent in the fluid lead-in passage of the nozzle (1), impurities do not mix in sprayed fluid particles.

Description

 Specification

 Vortex liquid atomization

 Technical field

 [0001] The present invention relates to a nozzle that atomizes and sprays a liquid, and more particularly to a vortex-type liquid atomization nozzle suitable for semiconductor manufacturing, thin film precision coating, medical analysis, scientific analysis, and the like.

 ^ Scenic technology

 [0002] Nozzles that atomize and spray liquids have been used in a wide variety of industrial fields such as painting, granulation, combustion, spraying glaze in the ceramics industry, and precision thin film coating of magnetic disks and the like.

 [0003] In particular, a vortex-type atomizing nozzle proposed in Japanese Patent Application Laid-Open Nos. Hei 4-21551 and Hei 4-59023, that is, a high-speed vortex is generated in the gas introduced into the inside of the nose, The nozzles that pulverize and atomize the liquid by the high-speed vortex flow are widely used in various industrial fields because they can precisely and stably obtain desired ultrafine particles.

 [0004] However, in the above-mentioned atomized nose, since the material is conventionally limited to metals such as stainless steel, high-strength brass, and brass, when the acid or alkaline liquid is atomized, There was concern that metal ions would elute during the passage of the liquid through the nozzle.

 [0005] Furthermore, it has been pointed out that the above-mentioned conventional nozzles made of metal are heavy in weight, so that there is a problem that an extra load is applied to various members to which the nozzle is attached, and a reduction in weight is required. I was

 [0006] Therefore, the present invention provides a synthetic resin fine-grained nose that has characteristics of chemical resistance and heat-resistance, and that is lightweight, and has excellent fine-graining characteristics. In order to expand the versatility of the swirl type nozzle, a fine atomizing nozzle (Patent Document 1) has been proposed.

[0007] As shown in FIG. 7, this is a hollow synthetic resin nosore body a having a gas injection port al opening forward and a gas introduction port a2 opening laterally, and a nozzle body a from the rear. Insertion A liquid passage member b having a hollow shape and made of a synthetic resin and having a liquid ejection port bl facing the gas ejection port al at the front and a liquid introduction port b2 opening at the rear. In the outer periphery of the front end of the nozzle, a swirl groove b2 is formed which generates a high-speed swirl vortex having a focal point in front of the liquid ejection port b1 in cooperation with the inner region of the tip of the nose body a. The liquid ejected from the nozzle is crushed and atomized by the high-speed swirling vortex c of the gas ejected from the gas ejection port al. Reference numeral d denotes a gas supply tube (air tube), which is connected to an attachment e attached to the gas inlet a2. Reference numeral f denotes a liquid supply tube which is connected to an attachment g attached to the liquid inlet b2. Patent Document 1: Japanese Patent Application Laid-Open No. H11-66307 (the entire specification, FIGS. 1 to 4)

 Disclosure of the invention

 Problems the invention is trying to solve

 However, in the nozzle described above, the attachments e and g are screwed and integrated into the gas inlet a2 of the nozzle body a and the gas inlet b2 of the liquid passage member b, respectively. The liquid passage and the gas passage have a recess b3 and screwed portions b4 and a4 exposed. For this reason, the flow stagnates in the concave portion b3 and the threaded portions b4 and a4, and the substances contained in the fluid (liquid or gas) accumulated in the stagnation portion accumulate in the concave portion b3 and the threaded portions b4 and a4. It may change (deterioration or denaturation), and this may be mixed as impurities into the fine particles of the liquid to be sprayed. Therefore, when this nozzle is used, for example, in a semiconductor manufacturing facility, there has been a problem that it cannot be adopted at all.

 [0009] The present invention has been made in view of the above-mentioned problems of the related art, and an object of the present invention is to provide a liquid to be sprayed while not only dissolving metal ions but also having chemical resistance and heat resistance. It is an object of the present invention to provide a swirl type liquid atomizing nozzle which realizes a light weight without impurities being mixed in the fine particles.

 Means for solving the problem

[0010] In order to achieve the above object, a swirl type atomization nozzle according to claim 1 has a hollow synthetic resin nozzle body having a gas injection port opened forward and a gas introduction port opened laterally. , A hollow in which a liquid passage is formed, which is inserted and integrated into the inside of the nose body from behind with a sealing means interposed therebetween, and has a liquid passage opening in front of the liquid injection opening facing the gas injection opening and a liquid introduction opening opening in the rear. A synthetic resin liquid passage member,

 A gas passage for guiding the gas introduced into the gas introduction port to the gas injection port is defined between the inner region of the nozzle body and the liquid passage member, and a gas passage is formed around the front end of the liquid passage member. A swirl groove for generating a high-speed swirling vortex having a focal point in front of the liquid outlet is formed in cooperation with a pointed inner region of the nozzle body, so that the liquid ejected from the liquid outlet is In the vortex-type liquid atomization nozzle, which is crushed and atomized by the high-speed swirling vortex injected from the gas injection port,

 The nozzle body and the liquid passage member are made of fluororesin,

 The gas inlet and the liquid inlet are each fitted with a tubular fluid supply path member made of fluororesin, and the fitting portions are fixed and sealed by welding, respectively.

 The inner peripheral surface of the fluid supply path constituting member fixed to the gas inlet and the liquid inlet, respectively, and the inner peripheral surface of the gas passage or the liquid passage on the nozzle side are configured to be flush with each other.

 [0011] (Operation) The insertion portion between the nozzle body and the liquid passage member is sealed by sealing means such as a ring, sheet packing, welding, or the like, and the gas inlet and the liquid inlet and the respective fluid supply passages are sealed. The fitting portions with the constituent members are fixed and sealed by welding, respectively, so that the air tightness of the gas inlet and the liquid inlet of the nozzle is ensured.

 [0012] Since the nozzle body, the liquid passage member, and the respective fluid supply path constituting members are made of a fluororesin, the entire periphery of the nozzle including the nozzle can be lightened, and as in the case of the conventional metal nozzle, A chemical-resistant product that does not elute metal ions into the liquid to be atomized.Excellent in drug resistance.Used in the fields of semiconductor manufacturing, pharmaceutical manufacturing, chemical manufacturing, medical equipment, scientific analysis, etc. be able to.

[0013] Further, the inner peripheral surface of the fluid supply path constituting member fixed to the gas inlet and the liquid inlet, respectively, and the inner peripheral surface of the gas passage or the liquid passage on the nozzle side are continuous with each other. The gas inlet at the inlet and the liquid inlet at the liquid inlet As seen in the prior art, there is no concave-threaded portion that causes the flow to be stagnant and is apt to deposit and accumulate the substances contained in the fluid collected in the stagnation portion. For this reason, the flow of gas and liquid introduced from the fluid supply path constituent member into the gas inlet and the liquid inlet of the nozzle passes through the gas passage and the liquid passage in the nozzle that do not stagnate at the gas inlet and the liquid inlet. The liquid and the gas contained in the sprayed liquid fine particles are guided smoothly to the gas injection port and the liquid injection port, respectively.

[0014] In addition, a screwing portion, a fitting portion, and a connecting portion are provided at the attachment portion between the nozzle body and the liquid passage member, and these are exposed in the gas passage of the nozzle. However, gas (contained material), which is almost viscous compared to liquid (contained material), is unlikely to adhere and accumulate on these parts, and these parts (screwed part and fitting part) have gas inlets. Since it is located at a position that hardly functions as a gas passage on the opposite side of the sandwiched gas injection port, there is a danger that the gas-containing substance will deposit and accumulate on the threaded part or the fitting part in the insertion part between the nozzle body and the liquid passage member. rare.

 [0015] According to a second aspect, the fluid supply path constituting member according to the first aspect is configured by a fluid supply tube made of a fluororesin. That is, in claim 2, in the vortex atomizing nozzle according to claim 1, a fluororesin tube for feeding a pressurized gas supplied from a gas supply source is directly fixed to the gas inlet. The liquid inlet is directly fixed (fitted and fixed by welding) to the above-mentioned liquid inlet port.

 (Operation) Not only the gas inlet and the liquid inlet of the nozzle, but also a feed path (gas feed tube) for feeding a pressurized gas supplied from a gas supply source to the gas inlet, and a liquid feeder Even in the supply path (liquid supply tube) that supplies the liquid supplied from the supply source to the liquid inlet, there is no site where the substance contained in the fluid adheres and accumulates. Liquid substances or substances contained in liquids that have undergone aging (deterioration or denaturation) are never mixed as impurities into liquid fine particles.

[0017] In claims 3 and 4, one of the fluid supply path constituting members according to claim 1 is constituted by a fluid supply tube made of fluorine resin, and the other fluid supply path constituting member is constituted by a fluorine resin. , Fluorine resin Made of fluororesin with a fluid supply tube made of stainless steel connected and detachable:

 It has been achieved. That is, in claim 3, in the swirl type atomization nozzle according to claim 1, a fluorine resin tube for feeding a pressurized gas supplied from a gas supply source is directly fixed to the gas inlet. (Fitting and welding and fixing), and a fluororesin attachment to which a fluororesin liquid feeding tube is detachably connected is fixed (fitting and welding and fixing) to the liquid inlet. Configured.

 (Function) Since the liquid supply tube can be easily attached to and detached from the attachment fixed to the liquid inlet of the nozzle, the connection of the liquid supply tube to the attachment is released as necessary. As a result, the tube connection portion of the attachment where the substance contained in the liquid may adhere and deposit can be cleaned.

 Also, by connecting another liquid supply tube extending from another liquid supply source to the attachment, the other liquid can be atomized.

 According to a fourth aspect, in the swirling type atomizing nozzle according to the first aspect, a fluororesin tube for feeding a liquid supplied from a liquid supply source is directly fixed to the liquid inlet. Fitting and welding and fixing), and a fluororesin attachment in which a gas supply tube is detachably connected to the gas inlet is fixed (fitting and welding and fixing).

 (Function) Since the gas supply tube can be easily inserted into and removed from the attachment fixed to the gas inlet of the horn, the connection of the gas supply tube to the attachment is released as necessary. As a result, the tube connecting portion of the attachment where the substance contained in the gas may adhere and deposit can be cleaned.

 [0021] In addition, by connecting another gas supply tube extending from another gas supply source to the attachment, the liquid can be atomized using another gas.

[0022] According to claim 5, in the swirl type atomization nozzle according to claim 1, a fluorine resin attachment in which a gas feeding tube made of a fluororesin is detachably connected to the gas inlet port. Is fixed (fitted and welded and fixed), and a fluororesin attachment to which the liquid supply tube made of fluororesin is detachably connected is fixedly fitted (fitted and welded and fixed) to the liquid inlet. Configured. (Function) Since the liquid supply tube and the gas supply tube can be easily inserted into and detached from each of the attachments fixed to the nozzle, the liquid supply tube and the gas supply tube can be attached as necessary. By disconnecting the connection tube from the attachment, the tube connection portion of the attachment where the substance contained in the fluid may adhere and accumulate can be cleaned.

 [0024] Further, by connecting another liquid supply tube extending from another liquid supply source or another gas supply tube extending from another gas supply source to each of the attachments, the other liquid is atomized. Alternatively, the liquid can be atomized using another gas.

 [0025] According to claim 6, in the swirl type atomization nozzle according to any one of claims 11 to 15, an attachment hole communicating with the gas injection port is provided at a rear end of the nozzle body. The liquid passage member is screwed and fixed to the attachment hole via an O-ring serving as sealing means.

 (Function) By screwing the nozzle body and the liquid passage member in the direction in which the liquid passage member is inserted into the attachment hole, the nozzle can be easily fixed and integrated. The airtightness of the insertion hole of the horn body into which the liquid passage member is inserted can be secured by the O-ring as the sealing means.

 The invention's effect

 According to the first aspect, since the nozzle body, the liquid passage member, and the respective members for forming the fluid supply path are made of a fluororesin, it is easy to handle as a nose by light weight siding, and is suitable for atomization. Since no metal ions are eluted in a liquid, it can be widely used in a wide range of fields such as semiconductor manufacturing, pharmaceutical manufacturing, drug manufacturing, medical equipment, and scientific analysis.

 [0028] The flows of the gas and the liquid introduced into the gas inlet and the liquid inlet of the nozzle, respectively, flow into the gas inlet and the liquid inlet without stagnating. Nozzle force that is smoothly guided to the gas injection port and the liquid injection port through the nozzle, and the substances that have been aged (deteriorated or denatured) in the liquid or gas are mixed as impurities into the sprayed liquid fine particles. Since there is no liquid, it is possible to atomize a liquid without impurities.

[0029] According to claim 2, the air from the gas supply tube to the gas injection port of the nozzle is discharged. The liquid supply path from the body supply path and the liquid supply tube to the liquid ejection port of the nozzle does not have any parts where the substances contained in the fluid may adhere and accumulate, so impurities can be reliably removed. It is possible to make the liquid ultra-fine particles without mixing.

 According to the third aspect, since the liquid supply tube can be easily attached to and detached from the attachment, the tube connection portion of the attachment to which the substance contained in the liquid may adhere and accumulate is appropriately cleaned, thereby spraying. In addition to being able to cope with the contamination of the liquid fine particles with impurities, by replacing the liquid supply source together with the liquid supply tube, it is possible to cope with various liquid fine particles.

 According to claim 4, since the gas supply tube can be easily attached to and detached from the attachment, the tube connection portion of the attachment to which the substance contained in the gas may adhere and accumulate is appropriately cleaned, so that the gas is sprayed. In addition to being able to cope with the contamination of liquid particles with impurities, by replacing the gas supply source together with the gas supply tube, it is possible to use various gases and to cope with the atomization of liquids.

[0032] According to claim 5, the liquid supply tube and the gas supply tube can be easily attached and detached from the attachment, so that the tube connection portion of the attachment in which the substance contained in the fluid may adhere and accumulate. By cleaning appropriately, contamination of impurities can be dealt with, and various gases were used by replacing the liquid supply source with the liquid supply tube and the gas supply source with the gas supply tube. It can cope with various liquid particles.

 According to claim 6, the configuration is very simple, and the nozzle can be easily integrated as a nozzle by screwing the liquid passage member through the O-ring in the attachment hole of the nozzle body. Is easy to assemble.

 BEST MODE FOR CARRYING OUT THE INVENTION

Next, preferred embodiments of the present invention will be described based on examples.

FIGS. 14 to 14 show a liquid atomization nozzle according to a first embodiment of the present invention, FIG. 1 is a longitudinal sectional view of the nozzle, FIG. 2 is an exploded perspective view showing a component configuration of the nozzle. Fig. 3 is a partial perspective view showing the configuration of the upper end (front end) of the liquid passage member that forms the high-speed vortex generator. Fig. 4 shows a specific example in which the nozzle is used to atomize the liquid. Show simplified layer FIG.

 [0036] In these figures, reference numeral 1 denotes a nozzle body of a liquid atomization nozzle, and its outer configuration is a hollow fluororesin nozzle body having a tapered tapered head 203. 2 and a liquid passage member 3 made of fluororesin screwed inside the nozzle body 2. A gas supply tube 15 made of fluororesin is directly connected to the nozzle body 2. A liquid supply tube 5 made of fluororesin is connected to the liquid passage member 3 via an attachment 4 made of fluororesin.

 The nose body 2 includes a gas inlet 202 formed by vertically hollowing a hollow outer peripheral portion 207 opening front and rear, and an opening formed at the tip of the pointed head 203. A gas injection port 201 for jetting out the gas A introduced from the gas introduction port 202 to the front and outside, and an opening formed at the rear end of the body 2 and a core-shaped liquid passage member 3 are attached. It is configured to have an external appearance such as a through hole 205 and a pair of concave flat portions 204 (see FIG. 2) formed facing the outer peripheral portion 207 of the nose body 2. Note that the pair of concave flat portions 204 is used to sandwich the atomizing nozzle 1 with a gripping member to facilitate fixing to peripheral members, or to be a portion to be gripped by a wrench to facilitate assembling of a nozzle. It is provided in

Next, the external configuration of the liquid passage member 3 will be described with reference to FIGS.

[0039] The liquid passage member 3 is inserted and integrated into the hollow interior of the nose body 2 to define an air passage 7 in cooperation with the inside of the nozzle body 2, and extends forward and rearward inside. The liquid passage 8 is formed.

That is, the liquid passage member 3 includes a cylindrical tube portion 305 serving as the passage 8 for the liquid R, a liquid outlet 301 formed at the front end of the tube portion 305, and discharging the liquid R to the outside. A ring portion 302 provided with a plurality of swirling flow forming grooves 304 for projecting in a ring shape in the circumferential direction of the pipe portion 305 at a position slightly behind the liquid ejection port 301 and for vortexing the gas A; A ring-shaped groove portion 303 is formed in an inner region surrounded by a circle so as to communicate with the vortex flow forming groove 304 and opens forward, and is provided around a rear portion of the tube portion 305 to form a mounting hole 205 of the nozzle body 2. A male screw portion 308 that is screwed into the female screw portion 206 formed on the inner periphery of the male screw portion, a step portion 310 for mounting a ring protruding in the circumferential direction behind the male screw portion 308, and a further rear portion of the step portion 310 Formed into A flange portion 312 serving as a portion to be welded to the nose cover body 2 and a spanner grip portion 314 formed at the rearmost end and provided with a liquid introduction port 316 are formed. Reference numeral 312a is a flat spanner hook provided on the outer peripheral surface of the flange 312.

 Reference numeral 317 denotes a ring interposed between the nozzle body 2 and the liquid passage member 3 (the step 310 of the liquid passage member 3). By increasing the pressing force of the threaded portions 206 and 308 between the three, the relative rotation of the two and the three is restrained, and the sealing hole 205 acts to be sealed. Reference numeral 318 denotes a welding portion, which acts to secure the fixing between the nozzle body 2 and the liquid passage member 3 and the sealing of the fixing hole 205. It is to be noted that the fixing between the nozzle body 2 and the liquid passage member 3 and the sealing of the attachment hole 205 are sufficient only with the screwing portions 206 and 308 and the O-ring 317 described above. is not.

 On the other hand, the attachment 4 is formed in a cylindrical shape as a whole, and a liquid passage 401 is formed therein, and a cylindrical front portion extending forward of the attachment base 402 at the center in the longitudinal direction. An extension 403, a cylindrical rear extension 404 extending behind the attachment base 402, a cylindrical tube insertion sleeve 405 housed in a form prevented from rotating in the rear extension 404, It comprises a nut 406 formed with a female screw 406a screwed into a male screw 404a provided on the outer periphery of the rear extension 404.

Then, the front extending portion 403 of the attachment 4 is fitted into the liquid introduction port 316 of the liquid passage member 3, and the peripheral portion of the liquid introduction port 316 is welded to attach the liquid passage member 3 to the attachment. 4 is fixed and the fitting portion (liquid inlet 316) is sealed, so that the liquid passage 8 of the liquid passage member 3 and the liquid passage 401 of the attachment 4 communicate with each other. Reference numeral 410 indicates a welded portion. In particular, as shown in FIG. 1, the inner peripheral surface 403a of the front extension portion 403 of the attachment 4 (the inner peripheral surface of the liquid passage 401) and the inner peripheral surface 8a of the liquid passage 8 of the liquid passage member 3 are flush with each other. In the liquid introduction passage of the liquid introduction port 316, a concave portion that causes a flow stagnation and easily accumulates and accumulates substances contained in the fluid collected in the stagnation portion, as seen in the related art.ゃ There is no threaded part. Therefore, the liquid introduced from the liquid passage 401 of the attachment 4 to the liquid inlet 316 of the nozzle is smoothly guided to the front liquid outlet 301 through the liquid passage 8 without stagnation on the way. Aging (deterioration or denaturation) of substances contained in liquid R in liquid fine particles sprayed by Is not mixed as an impurity.

 The tube insertion sleeve 405 can be inserted into the distal end of the tube 5 using a special jig. The inner peripheral surface of the attached sleeve 405 and the inner peripheral surface of the tube 5 are substantially It is flush. Then, the sleeve 405 connected to the tube 5 is inserted into the rear extension portion 404 of the attachment 4, and the nut 406 is tightened, so that the tip of the liquid supply tube 5 is connected to the tube 5 as shown in FIG. The outer peripheral surface of the attachment sleeve 405 and the inner peripheral surface of the rear extension 404 can be held in a gripped state, whereby the liquid supply tube 5 can be connected and integrated with the rear end of the attachment 4. On the other hand, by loosening the nut 406, the connection of the liquid supply tube 5 with the sleeve 405 can be released, and the liquid supply tube 5 with the sleeve 405 can be easily removed from the rear end of the attachment 4. Can be.

 The connection between the attachment 4 and the liquid supply tube 5 may cause a flow of liquid, such as a step 401 a between the liquid passage 401 of the attachment 4 and the inner peripheral surface of the sleeve 405. Force with stepped portion The liquid supply tube 5 can be easily inserted into and removed from the attachment 4 integrated with the nozzle 1, so if necessary, the liquid supply tube 5 with a sleeve can be connected to the attachment 4. May be released and the tube connection of the attachment 4 where the substance contained in the liquid may adhere and deposit may be washed.

Further, as shown in FIG. 1, a gas feeding tube 15 made of a fluororesin is directly fixed to the gas inlet 202 of the horn body 2. That is, the distal end portion of the gas supply tube 15 extending from the gas supply source is fitted into the gas introduction port 202, and the fitted portion is fixed and sealed by welding, so that the inside of the gas supply tube 15 and the gas introduction The port 202 communicates with the gas, and the gas inlet 202 is kept airtight. Reference numeral 320 indicates a welded portion. In particular, the inner peripheral surface 15a of the gas supply tube 15 and the inner peripheral surface 7a of the gas passage 7 on the nozzle 1 side are configured to be flush with each other. As can be seen in the prior art, there is no recessed / threaded portion which causes the flow to be stagnant and in which the substances contained in the gas collected in the stagnation portion are liable to adhere and deposit. For this reason, the gas introduced from the gas supply tube 15 to the gas inlet 202 of the nozzle is smoothly guided to the front gas outlet 201 through the gas passage 7 without stagnation on the way. The substance contained in gas A in the liquid fine particles sprayed by There is no mixing as pure.

 [0047] In the gas passage 7, the screw portions 206 and 308 between the nozzle body 2 and the liquid passage member 3 are exposed, but the viscosity is almost lower than that of the liquid (containing substance). However, gas (contained substance) is unlikely to adhere and accumulate on these portions, and the force is also small.The screw portions 206 and 308 are located on the opposite side of the gas injection port 201 across the gas introduction port 202, and are almost Since it is in a position where it does not function, there is almost no possibility that a gas-containing substance will adhere to the screwed portions 206 and 308. Therefore, the presence S of the threaded portions 206 and 308 and the aging of the substance contained in the gas A in the sprayed liquid microparticles do not become a factor of mixing as impurities.

[0048] As described above, in addition to the nozzle body 2 and the liquid passage member 3 that constitute the nozzle 1, the attachment ₄ , the liquid supply tube 5, and the gas supply tube 15 are also made of fluororesin, and are atomized. Metal ions (eg, iron ions, copper ions, aluminum ions, etc.) are not eluted into the target liquid R, and the entire area around the nozzle including the nozzle body 1 is lightened, and chemical resistance and chemical resistance are reduced. Excellent chemical resistance. It can be widely used in the fields of semiconductor manufacturing, pharmaceutical manufacturing, chemical manufacturing, medical equipment, scientific analysis, etc.

 [0049] Furthermore, since the liquid supply tube 5 with the sleeve can be easily attached and detached, the liquid supply tube with the sleeve extending from another liquid supply source is connected to the attachment 4, so that the other liquid can be atomized. Can be easily handled.

 Here, an internal configuration of the atomization nozzle 1 according to the present embodiment will be described with reference to FIGS.

 [0051] A region surrounded by the inner peripheral wall 205 of the squirrel body 2 and the tube 305 of the liquid passage member 3 forms a gas passage 7 through which the gas A introduced from the gas introduction hole 202 passes. 7, the gas A goes forward (upward in FIG. 3), passes through the high-speed vortex generator W described below, and becomes high-speed vortex gas (T).

[0052] The high-speed vortex generating portion W includes a vortex forming groove 304 formed in the ring portion 302 of the liquid passage member 3, a ring-shaped groove 303 communicating with the vortex forming groove 304, and the ring-shaped groove 303. A region extending to the injection port 201, the inner peripheral wall of the pointed head 203 of the nozzle body 2, and a force are also configured, and these members and the region cooperate to generate the high-speed vortex gas T. The swirl flow forming grooves 304 are formed by spirally cutting grooves in the ring portion 302. In the present embodiment, the swirling flow forming grooves 304 are formed at a total of six places and at equal intervals.

[0054] Due to the shape characteristics of the vortex flow forming groove 304, the gas A traveling in the gas passage 7 (see FIG. 3) (upward in FIG. While being rectified, the force is converted forward (upward in FIG. 3) into a high-speed (tapered) substantially conical high-speed vortex gas T, which is ejected from the gas injection port 201.

Then, at the position of the focal point F shown in FIG. 1, the liquid discharged from the liquid ejection port 301 comes into contact with the high-speed vortex gas T and is crushed, atomized into the liquid Rm, and sprayed forward.

Hereinafter, with reference to FIG. 4, an example of a method of sending each of the liquid R and the gas A to the nozzle 1 when atomizing the liquid R using the atomization nozzle 1 of the present embodiment will be described. Is explained.

 First, a required amount of liquid (pure water) R to be atomized, which is sent from the liquid supply tube 5 to the nozzle 1, is stored in the liquid tank 504. Then, after the liquid (pure water) R is filtered by the tank 504 and the strainer 503, the liquid is adjusted by the liquid supply pump 502 by the pressure of the liquid supply pump 502 and adjusted by the liquid supply adjustment valve (orifice or electromagnetic valve) 501 to make the nozzle Send to 1. Reference numeral 505 denotes a return pipe for returning the excess liquid (pure water) R to the liquid tank 504 again in the liquid feeding amount adjustment process.

 On the other hand, the gas (air) A for atomizing the liquid (pure water) is supplied from the air compressor 903, via the on-off valve 902 and the pressure fine adjustment valve 901, and from the gas introduction hole 202 of the nozzle 1 to the nozzle. 1Sent inside.

 The method of sending the liquid (pure water) R and the gas (air) A to the nozzle 1 is not limited to the above-described embodiment, and the liquid tank 504 is supplied with the gas introduced from the air compressor 903. A tank pressurizing method or the like, in which the pressure is increased by a pressure and the liquid is sent to the nozzle 1 via a pressure adjusting valve, may be adopted.

 FIG. 5 is a longitudinal sectional view of a liquid atomizing nozzle according to a second embodiment of the present invention.

In the first embodiment described above, the gas supply tube 15 is directly fixed to the gas inlet 202 of the nozzle 1 by welding, and the attachment 4 is fixed to the liquid inlet 316 of the nozzle 1 by welding. The liquid supply tube 5 is connected so that it can be attached and detached. In the second embodiment, a fluorine resin gas supply tube 15 is detachably connected to a fluorine resin attachment 4A fixed to the gas introduction 202 of the nozzle 1. Reference numeral 320 indicates a welded portion.

[0061] That is, the attachment 4A is bent at a right angle, penetrates the gas passage 401A, a cylindrical front extension 403A extending forward of the attachment base 402A, and a lateral extension of the attachment base 402A. Cylindrical side extension 404A, tube 揷 wearing sleeve 405A housed in a form detented inside side extension 404A, and male screw 404a provided on the outer periphery of side extension 404A. It is composed of a nut 406A formed with a female screw 406a screwed into the nut.

 [0062] Then, the front extending portion 403A of the attachment 4A is fitted into the gas inlet 202, and the peripheral portion of the gas inlet 202 is welded, so that the fitting portion is fixed and sealed. The gas passage 401A of the attachment 4A communicates with the gas passage 7 of the nozzle 1. In particular, the inner peripheral surface 403a of the forward extension 403A of the attachment 4A (the inner peripheral surface of the gas passage 401A) and the inner peripheral surface 7a of the gas passage 7 of the nozzle 1 are formed so as to be flush with each other. The gas guided from the gas passage 401A of 4A to the gas passage 7 of the nozzle 1 is smoothly guided to the gas injection port 201 in the front without stagnating on the way.

 [0063] Further, a tube insertion sleeve 405A is inserted and integrated with the end of the gas supply tube 15 using a special jig, and the inner peripheral surface of the tube 15 and the inner peripheral surface of the sleeve 405 are substantially flush with each other. After inserting the sleeve 405A into the rear extension 404A of the attachment 4A and tightening the nut 406A, as shown in FIG. 5, the distal end of the gas supply tube 15 is connected to the tube mounting sleeve. The outer peripheral surface of the 405A and the inner peripheral surface of the rear extension 404A can be held so that the gas supply tube 15 can be integrally connected to the rear end of the attachment 4A.

On the other hand, by loosening the nut 406A, the connection of the gas supply tube 15 with the sleeve can be disconnected, and the gas supply tube 15 with the sleeve can be easily removed from the rear end of the attachment 4A. be able to. For this reason, the connecting portion between the attachment 4A and the gas supply tube 15 has a step that causes a gas flow stagnation, such as a step 401b between the gas passage 401A of the attachment 4A and the inner peripheral surface of the sleeve 405A. Department exists, If necessary, the connection of the gas supply tube 15 with the sleeve to the attachment 4A may be released, and the tube connection portion of the attachment 4A to which the substance contained in the gas may adhere may be washed.

[0065] Further, since the gas supply tube 15 with a sleeve can be easily attached to and detached from the attachment 4A, the gas supply tube 15 with a sleeve can be connected to another gas supply tube extending from another gas supply source. By replacement, the liquid can be atomized using another gas.

 Further, in the second embodiment, the welding portion 318 provided in the first embodiment is not provided, and the fixing and sealing between the nozzle body 2 and the liquid passage member 3 are not performed. It comprises only screw portions 206, 308 between the nozzle body 2 and the liquid passage member 3 and a ring 317.

 The other points are the same as those of the first embodiment described above, and the same reference numerals are given to omit redundant description.

 FIG. 6 is a longitudinal sectional view of a liquid atomizing nozzle according to a third embodiment of the present invention.

In the above-described first and second embodiments, the fixing means for fixing the attachment portion between the nozzle body 2 and the liquid passage member 3 is constituted by at least the threaded portions 206 and 308 and the O-ring 317. In the embodiment of FIG. 3, the insertion portion between the nozzle body 2 and the liquid passage member 3 is fixed and sealed only by the welding portion 312.

[0070] That is, the inner peripheral surface of the nozzle body 2 and the outer peripheral surface of the liquid passage member 3 are provided with female screw portions 206

Only the step portions 209 and 309 which are engaged with each other in the axial direction and have a portion corresponding to the male screw portion 308 are provided.

 Further, in the first embodiment, the gas supply tube 15 is fixed directly to the gas inlet 202 of the nozzle 1, and the liquid is supplied to the attachment 4 fixed to the liquid inlet 316 of the nozzle 1. Although the supply tube 5 is connected so as to be detachable, in the third embodiment, the liquid supply tube 5 is also directly fixed to the liquid introduction port 316 of the nozzle 1.

That is, the distal end of the fluororesin liquid supply tube 5 extending from the liquid supply source is fitted into the liquid introduction port 316, and the fitting portion is fixed and sealed by welding to supply the liquid. The inside of the supply tube 5 and the liquid inlet 316 are continuous, and the airtightness of the liquid inlet 316 is confirmed. Is maintained. Particularly, the inner peripheral surface 5a of the liquid supply tube 5 and the inner peripheral surface 8a of the liquid passage 8 on the nozzle 1 side are configured to be flush with each other, and the liquid from the liquid supply tube 5 to the nozzle 1 side is formed. The liquid guided to the passage 8 is smoothly guided to the liquid ejection port 301 in front without stagnation on the way.

 The other points are the same as those of the first embodiment described above, and the same reference numerals are given to omit duplicated explanations.

 BRIEF DESCRIPTION OF THE FIGURES

 FIG. 1 is a longitudinal cross-sectional view of a liquid atomized nozzle according to a first embodiment of the present invention.

 FIG. 2 is an exploded perspective view showing a part configuration of the atomized nose.

 FIG. 3 is a partial perspective view showing a configuration of an upper end portion (front end portion) of a liquid passage member forming a high-speed eddy current generating portion.

 FIG. 4 is a simplified layout diagram showing a specific example in which liquid is atomized using the same nozzle.

 FIG. 5 is a vertical cross-sectional view of a liquid atomized nozzle according to a second embodiment of the present invention.

 FIG. 6 is a vertical cross-sectional view of a liquid atomized nozzle according to a third embodiment of the present invention.

 FIG. 7 is a longitudinal sectional view of a conventional liquid atomization nozzle.

 Explanation of reference numerals

[0075] 1 Atomizing nozzle body

 2 Nozzle body

 3 Liquid passage member

 4 Attachment for connecting liquid supply tube

 4A Attachment for gas supply tube connection

 5 Liquid supply tube

 5a Inner peripheral surface of liquid supply tube

 7 Gas passage

 7a Inner peripheral surface of gas passage

 8 Liquid passage

8a Inner peripheral surface of liquid passage 15 Gas delivery tube

 15a Inner peripheral surface of gas supply tube

 201 gas injection port

 202 Gas inlet

 203 pointed head

 206, 308 Threaded portion which is a fixing means between nozzle body and liquid passage member

 301 liquid spout

 309 Liquid passage tube

 316 Liquid inlet

 317 O-ring, a sealing means between the nozzle body and the liquid passage member

 318, 320, 410 weld

 W High-speed vortex generator

 403a Inner surface of gas (liquid) passage of gas (liquid) supply tube connection attachment

 504 Liquid supply source liquid tank

 903 with a gas source

Claims

The scope of the claims  [1] a hollow synthetic resin nozzle body having a gas injection opening in the front and a gas introduction opening in the side;  A hollow in which a liquid passage is formed, which is integrally attached to the inside of the nozzle body with a rear force sealing means interposed therebetween, and has a liquid passage opening in front of the liquid ejection opening facing the gas injection opening and a liquid introduction opening opening in the rear. A synthetic resin liquid passage member,  A gas passage for guiding the gas introduced into the gas introduction port to the gas injection port is defined between the inner region of the nozzle body and the liquid passage member, and a gas passage is formed around the front end of the liquid passage member. A swirl groove for generating a high-speed swirling vortex having a focal point in front of the liquid outlet is formed in cooperation with a pointed inner region of the nozzle body, so that the liquid ejected from the liquid outlet is In the vortex-type liquid atomization nozzle, which is crushed and atomized by the high-speed swirling vortex injected from the gas injection port,  The nozzle body and the liquid passage member are made of fluororesin,  The gas inlet and the liquid inlet are each fitted with a tubular fluid supply path constituent member made of a fluororesin, and the fitting portions are fixed and sealed by welding, respectively.  An inner peripheral surface of a fluid supply path forming member fixed to the gas inlet and the liquid inlet, respectively, and an inner peripheral surface of the gas passage or the liquid passage on the nozzle side are respectively continuous with each other. Swirling type atomizing nozzle.  [2] A fluororesin tube for supplying a pressurized gas supplied from a gas supply source is directly fixed to the gas introduction port, and a liquid supplied from the liquid supply source is supplied to the liquid introduction port. The vortex type atomization nozzle according to claim 1, wherein the fluororesin tube to be supplied is directly fixed.  [3] A fluororesin tube for supplying a pressurized gas supplied from a gas supply source is directly fixed to the gas inlet, and a fluororesin liquid supply tube is connected to the liquid inlet. 2. The swirling type atomizing nozzle according to claim 1, wherein a fluororesin attachment to which the valve is detachably connected is fixed. [4] The liquid inlet is provided with a fluoroplastic chip for feeding a liquid supplied from a liquid supply source. The vortex type fine particle according to claim 1, wherein a Ube is directly fixed, and a fluororesin attachment in which a gas supply tube is detachably connected is fixed to the gas inlet. Nozzle.  [5] A fluororesin attachment to which a fluororesin gas supply tube is detachably connected is fixed to the gas inlet, and a fluororesin liquid supply tube is connected to the liquid inlet. 2. The swirling type atomizing nozzle according to claim 1, wherein a fluororesin attachment, which is detachably connected to the attachment, is fixed.  [6] At the rear end of the horn body, a 揷 attachment hole communicating with the gas passage is provided, and the liquid passage member is screwed and fixed to the 孔 attachment hole via a 〇 ring as sealing means. The atomizing nozzle according to any one of claims 15 to 15, characterized in that the nozzle is an air nozzle.