WO2004090392A1 - A sealing unit for a rotary device - Google Patents
A sealing unit for a rotary device Download PDFInfo
- Publication number
- WO2004090392A1 WO2004090392A1 PCT/KR2004/000835 KR2004000835W WO2004090392A1 WO 2004090392 A1 WO2004090392 A1 WO 2004090392A1 KR 2004000835 W KR2004000835 W KR 2004000835W WO 2004090392 A1 WO2004090392 A1 WO 2004090392A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- housing
- sealing
- unit
- seat groove
- sealing member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/76—Sealings of ball or roller bearings
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/002—Sealings comprising at least two sealings in succession
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/162—Special parts or details relating to lubrication or cooling of the sealing itself
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/164—Sealings between relatively-moving surfaces the sealing action depending on movements; pressure difference, temperature or presence of leaking fluid
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S277/00—Seal for a joint or juncture
- Y10S277/908—Seal for use in rotating and reciprocating arrangement
Definitions
- the present invention relates, in general, to sealing units for rotary devices, and in more detail, to a sealing unit that is installed around an outer surface of a rotary shaft in a rotary device, such as a pump, to prevent leakage of fluid fed by the rotary device, and has a simple construction to minimize the volume of a space in which the rotary device is installed, and more particularly, to a sealing unit for oilless rotary devices free from an oil supply.
- rotary devices having rotary shafts such as gearboxes, chemical pumps, agitators, mixers, speed change gears, dryers, and compressors, must be provided with sealing units (so-called “mechanical seals”) around the rotary shafts to prevent leakage of fluid during rotations of the rotary shafts .
- sealing units so-called “mechanical seals”
- Fig. 5 shows the construction of a conventional mechanical seal that comprises : a rotary ring body 2 ' mounted to a rotary shaft 1' by a plurality of locking bolts; an elastic support body 3' provided on an end thereof with a plurality of guide pins 3a' to slide through a plurality of guide holes 2a' of the rotary ring body 2', with a plurality of springs 3b' placed between the guide pins 3a' , and a locking protrusion 3c' provided on the opposite end of the elastic support body 3' ,- a seal ring body 4' having a locking slot 4a' to correspond to the locking protrusion 3c' , with an O-ring 4b' fitted in the seal ring body 4' to come into contact with an inner surface of the seal ring body 4', and a hard ring 4c' inscribed with an end of the seal ring body 4' while projecting outward from the end; and a stationary ring body 5' installed around the rotary shaft 1' to be idle from
- the above-mentioned parts of the conventional mechanical seal are installed in a housing (not shown) .
- the rotary ring body 2' engaging with the elastic support body 3' is mounted to the rotary shaft 1' by the locking bolts.
- the seal ring body 4' is installed on the rotary shaft __' .
- the locking slot 4a' of the seal ring body 4' engages with the locking protrusion 3c' of the elastic support body 3' so that the seal ring body 4' is rotated along with the rotary shaft 1' .
- the stationary ring body 5' is mounted to the locking unit so that the end of the stationary ring body 5' is in surface contact with the hard ring 4c' of the seal ring body 4' .
- the stationary ring body 5' is idle from the rotary shaft 1' .
- the O-ring 4b' of the seal ring body 4' first intercepts fluid that flows along the outer surface of the rotary shaft 1' .
- the remaining volume of the fluid is intercepted by both the hard ring 4c' and the stationary ring body 5' that are in surface contact with each other.
- the conventional mechanical seal is problematic as follows .
- the rotary ring body 2 ' that engages with both the seal ring body 4' and the elastic support body 3' rotates at a high speed along with the rotary shaft __' , while the stationary ring body 5' that is in surface contact with the hard ring 4c' of the seal ring body 4' is in an immobile state.
- the friction coefficients of both the hard ring 4c' and the stationary ring body 5' are greatly increased which causes severe abrasion of the contact surfaces of both the hard ring 4c' and the stationary ring body 5' .
- the sealing effect provided at the junction between the hard ring 4c' and the stationary ring body 5' is greatly reduced to remarkably deteriorate the operational efficiency of the conventional mechanical seal .
- the above-mentioned sealing unit has a complex construction, and thus, it is very difficult to manufacture, assemble or repair the sealing unit.
- the O-ring 4b' made of rubber cannot effectively resist chemicals, so that the use of the conventional sealing unit is limited when requiring to use it under severe operational conditions at a high speed, high temperature and high pressure.
- a cooling jacket is provided in the conventional sealing unit to cool both the hard ring 4c' and the stationary ring body 5' which generate the friction heat during a high- speed rotation of the rotary shaft 1' .
- the cooling jacket is far from the heating point, so that the cooling jacket cannot provide a desired cooling effect, but reduces the life span thereof.
- the conventional mechanical seal provides a sealing effect to prevent a leakage of the fluid by a formation of an oil layer caused by surface contact, lubrication oil must be supplied to the mechanical seal.
- the mechanical seal must be provided with a lubrication oil supply system that supplies the lubrication oil to the seal.
- the supply of the lubrication oil to the mechanical seal reduces the yield of products in semiconductor equipments requiring super precision. Furthermore, the lubrication oil may infiltrate into the semiconductor equipments. Thus, the mechanical seal unit having the conventional mechanical seal is problematic in that the life span thereof is too short due to the above-mentioned problems caused by the lubrication oil. Furthermore, the conventional sealing method of providing a sealing effect caused by the surface contact cannot prevent infiltration of slurry including ultrafine particles into the seal. Thus, the expected life span of the mechanical seal unit is further reduced.
- an object of the present invention is to provide a sealing unit for rotary devices which remarkably improves the sealing effect, and is easily manufactured, assembled and repaired, and is efficiently used under severe operational conditions at a high speed, high temperature, high pressure, and furthermore, in a vacuum state, and enhances the cooling efficiency to improve the durability and lengthen the life span thereof.
- Another object of the present invention is to provide a sealing unit for rotary devices in which a sealing member is provided by integrally forming a curved annular blade on an inner surface of an annular support, and a plurality of sealing members having the above-mentioned construction are sequentially arranged to enhance the sealing effect of the sealing unit.
- a further object of the present invention is to provide a sealing unit for rotary devices in which an elastic reinforcing member is attached to the annular blade to provide an additional sealing member to further enhances the sealing effect of the sealing unit .
- Yet another object of the present invention is to provide a sealing unit for rotary devices in which the sealing member is in linear contact with a rotary object, thus minimizing the friction between the sealing unit and the rotary object and thereby removing the necessity to supply the lubrication oil .
- the present invention provides a sealing unit for rotary devices, including: a housing unit having a plurality of housings sequentially arranged, each of the housings being provided on an inner surface thereof with a seat groove that defines a shaft hole in a central portion of each of the housings; a flange unit mounted to a rear end of the housing unit and including a plurality of flanges, each of the flanges having a shaft hole at a central portion thereof; a sleeve inserted into the shaft holes of both the housing unit and the flange unit, the sleeve having a central bore through which the rotary shaft passes; a plurality of sealing members placed in the seat grooves so that sealing surfaces thereof are in contact with an outer surface of the sleeve; and a collar mounted to a front end of the housing unit to prevent the sleeve from being removed.
- Fig. 1 is an exploded perspective view of a sealing unit for rotary devices according to the present invention
- Fig. 2 is a sectional view of the assembled sealing unit for rotary devices according to the present invention
- Fig. 3 is an enlarged sectional view of the portion A of Fig. 2;
- Fig. 4 is a sectional view of a sealing unit according to another embodiment of the present invention.
- Fig. 5 is a sectional view showing an embodiment of conventional mechanical seals for rotary devices.
- first housing 3 oil sealing member
- first base ring 11 second sealing member
- sealing surface 112 reinforcing member
- housing unit 300 flange unit
- Fig. 1 is an exploded perspective view of a sealing unit for rotary devices according to the present invention.
- Fig. 2 is a sectional view of the assembled sealing unit for rotary devices according to the present invention.
- Fig. 3 is an enlarged sectional view of the portion A of Fig. 2.
- the sealing unit comprises a housing unit 200 that is installed in a rotary device having a rotary shaft 100, such as a feed pump.
- the housing unit 200 comprises cylindrical first, second and third housings 2, 4 and 6 each of which has a shaft hole 22, 42, 62 and which are sequentially fitted over the rotary shaft 100 through the shaft holes and are fastened together by a plurality of longitudinal bolts 29.
- the first, second and third housings 2, 4 and 6 are provided on inner surfaces thereof with seat grooves 24, 26, 41, 44, 46 and 66 that define the shaft holes 22, 42 and 62 through which the rotary shaft 100 passes.
- the first housing 2 has a shaft hole 22 through which a sleeve 7 passes, with a first seat groove 24 provided on the inner surface of the first housing 2 to communicate with the shaft hole 22 and seat an oil sealing member 3 therein.
- a second seat groove 26 to seat a bearing 18 therein is formed on the inner surface of the first housing 2 at a position in back of the first seat groove 24.
- a lubrication oil inlet 28 is formed through a sidewall of the first housing 2 in a radial direction to communicate with the second seat groove 26, while a plurality of first locking holes 27 are formed through the sidewall of the first housing 2 in axial directions to respectively receive the longitudinal bolts 29.
- the second housing 4 is a cylindrical body that has a shaft hole 42 through which the rotary shaft 100 passes, with a fourth seat groove 41 having a same design as that of the first seat groove 24 and provided on a rear portion of the inner surface of the second housing 4.
- a third seat groove 44 to seat another bearing 18 therein is formed on the inner surface of the second housing 4 at a position in front of the fourth seat groove 41.
- a fifth seat groove 46 to receive therein a seal cover 61 of the third housing 6 is formed on the inner surface of the second housing 4 at a position in back of the fourth seat groove 41.
- a lubrication oil outlet 48 is formed through a sidewall of the second housing 4 in a radial direction to communicate with the third seat groove 44, while a plurality of second locking holes 47 are formed through the sidewall of the second housing 4 in axial directions to respectively receive the longitudinal bolts 29.
- the second housing 4 is arranged in back of the first housing 2 , and is fastened to the first housing 2 by the longitudinal bolts 29.
- a leakage checking hole 64 is formed on the second housing 4 to communicate with the fifth seat groove 46, thus allowing a user to check a leakage of oil in the sealing unit .
- the third housing 6 is a cylindrical body that has a shaft hole 62 through which the rotary shaft 100 passes, with the seal cover 61 received in the fifth seat groove 46 is threaded to a front end of the third housing 6, and a sixth seat groove 66 provided on the inner surface of the third housing 6 to communicate with the shaft hole 62 and seat a plurality of first and second sealing members 5 and 11 therein.
- a coolant channel 94 having a plurality of manifold ports is formed through a sidewall of the third housing 6 to communicate with the sixth seat groove 66, while a plurality of third locking holes 67 are formed through the sidewall of the third housing 6 in axial directions to respectively receive the longitudinal bolts 29.
- the third housing 6 is arranged in back of the second housing 4, and is fastened to the second housing 4 by the longitudinal bolts 29.
- the sealing unit further includes a flange unit 300 that comprises first and second flanges 8 and 9 fastened together through a screw-type engagement. The flange unit 300 is placed in back of the third housing 6 while being fitted over the outer surface of the rotary shaft 100, thus covering the housing unit 200.
- the first flange 8 is provided on an inner surface thereof with a seventh seat groove 81 that has a same diameter as that of the sixth seat groove 66 of the third housing 6.
- the first flange 8 further includes, on an outer part thereof, a coolant inlet 84, a coolant outlet 83, a plurality of fourth locking holes 88 to respectively receive the longitudinal bolts 29 therein, and a plurality of first screw holes 89.
- the second flange 9 has a shaft hole 92 through which the rotary shaft 100 passes, with the coolant channel 94 formed on a side surface of the second flange 9 to communicate with both the coolant inlet 84 and the coolant outlet 83.
- a plurality of second screw holes 95 is provided on the second flange 9 to correspond to the first screw holes 89 of the first flange 8.
- the sleeve 7 is a cylindrical body that has a predetermined outer diameter to be fitted into the shaft holes of both the housing unit 200 and the flange unit 300.
- a central bore 72 through which the rotary shaft 100 passes is defined in the sleeve 7.
- the sleeve 7 is inserted into the shaft holes of both the housing unit 200 and the flange unit 300.
- the rotary shaft 100 passes through the central bore 72, with a plurality of seal rings 74 installed in the central bore 72 to enhance the sealing effect.
- the sealing members 3, 5 and 11 include an oil sealing member 3 that is placed in each of the first and fourth seat grooves 24 and 41 of the first and second housings 2 and 4, a plurality of base rings 10, 12 and 13 that are installed in the sixth seat groove 66 of the third housing 6, and the first and second sealing members 5 and 11 that are interposed between the base rings.
- the plurality of sealing members 3, 5 and 11 are preferably installed so that the sealing surfaces provided by the inner surfaces of the sealing members 3, 5 and 11 are in contact with the outer surface of the sleeve 7.
- the oil sealing members 3 and the first and second sealing members 5 and 11 are preferably made of elastic materials, such as PTFE+carbon, PTFE+carbon+graphite, PTFE+polyimide, PTFE+polyimide+graphite, PTFE+polyimide+carbon.
- An oil sealing member 3 is installed in the first seat groove 24 to be in contact with the outer surface of the sleeve 7, thus preventing external dust and contaminants from coming into contact with the inner lubrication oil .
- the oil sealing member 3 is preferably constructed to have an inner diameter that is slightly smaller than the size of the sleeve 7, thus providing an enhanced sealing effect .
- Each of the oil sealing members 3 is a circular ring having a '"c '-shaped cross-section, with a plurality of sealing lips 36 provided along an outer surface of a lower horizontal part of each of the oil sealing members 3 to come into contact with the outer surface of the sleeve 7.
- a spring 32 is placed around an inner surface of the lower horizontal part of each of the oil sealing members 3.
- a metal reinforcing member 34 having a r ' - shaped cross-section is placed in each of the oil sealing members 3 to come into contact with inner surfaces of both a vertical part and an upper horizontal part of each of the oil sealing members .3 , thus preventing deformation of each of the oil sealing members 3.
- the first sealing member 5 comprises an annular support body 52, with an annular blade 54 provided along an inner surface of the support body 52 while being curved to have a curved surface.
- the first sealing member 5 is placed in the sixth seat groove 66 of the third housing 6 so that the annular blade 54 comes into contact with the outer surface of the sleeve 7 to prevent a leakage of fluid.
- the second sealing member 11 is a circular ring having a c ' - shaped cross-section, with a sealing surface 110 provided along an outer surface of a lower horizontal part of the second sealing member 11 to come into contact with the outer surface of the sleeve 7.
- a reinforcing member 112 having a ⁇ '-shaped cross-section is placed in the second sealing member 11 to prevent deformation of the second sealing member 11.
- Each of the first, second and third base rings 10, 12 and 13 is an circular ring, with a cooling channel 120 provided along an, outer surface of each of the first, second and third base rings 10, 12 and 13 to communicate with the coolant channel 94, and a plurality of O-rings placed in each of the first, second and third base rings 10, 12 and 13 to provide a desired sealing effect.
- the first, second and third base rings 10, 12 and 13 are installed to be aligned with the first sealing member 5 placed in the sixth seat groove 66, thus supporting the first sealing member 5 and enhancing the sealing effect of the first sealing member 5.
- the second sealing member 11 is seated along the inner surface of the second base ring 12.
- the first and second sealing members 5 and 11 may be installed while the positions thereof are changed with each other when necessary, and each may be changed in the number thereof such that one or more sealing members as each of the first and second sealing members may be installed as desired.
- the first and second sealing members 5 and 11 may be installed so that the annular blade 54 and the sealing surface 110 face each other to provide stability against vacuum states of both ends of the rotary shaft 100.
- the sealing surface is drawn by the vacuum pressure applied thereto from the both ends of the rotary shaft, the desired sealing effect is provided.
- the above-mentioned parts of the sealing unit are assembled with each other as follows.
- An oil sealing member 3 is placed in the first seat groove 24 of the first housing 2, while a bearing 18 is placed in the second seat groove 26 of the first housing 2. Another bearing 18 is placed in the third seat groove 44 of the second housing 4, while another oil sealing member 3 is placed in the fourth seat groove 41 of the second housing 4. Furthermore, the first sealing member 5, the first base ring 10, the second sealing member 11, the second base ring 12 and the third base ring 13 are sequentially placed in the sixth seat groove 66 of the third housing 6.
- the second flange 9 is placed to be in contact with a rear surface of the first flange 8 so that the second screw holes 95 are aligned with the first screw holes 89.
- the first and second flanges 8 and 9 are fastened together by a plurality of locking bolts 130, so that the assembling of the flange unit 300 is accomplished.
- the second housing 4, the third housing 6 and the flange unit 300 are sequentially placed in back of the first housing 2, and are fastened together by tightening the plurality of longitudinal bolts 29 through the locking holes 27, 47, 67 and 88, thus being integrated with each other.
- a V- ring 15 and a collar 14 are sequentially installed in front of the first housing 2, and thus, the assembling of the parts of the sealing unit for rotary devices according to the present invention is accomplished.
- the rotary shaft 100 is fitted into the central bore 72 of the sleeve 7, and then, a coolant pipe is coupled to each of the coolant inlet 84 and the coolant outlet 83.
- a lubrication oil supply unit (not shown) is coupled to both the lubrication oil inlet 28 and the lubrication oil outlet 48, while a leakage sensing unit (not shown) is coupled to the leakage checking hole 64.
- the present invention provides a sealing unit for rotary devices.
- the sealing unit is installed on a rotary shaft of a variety of rotary devices having rotary shafts, such as gearboxes, chemical pumps, agitators, mixers, speed change gears, dryers, and compressors, thus supporting a rotating motion of the rotary shaft and preventing a leakage of fluid.
- the sealing unit has a remarkably improved sealing effect, and a simple construction to be easily manufactured, assembled and repaired. Furthermore, the cooling efficiency of the sealing unit is enhanced, thus improving the durability and lengthening the life span of the sealing unit.
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sealing Devices (AREA)
- Sealing Of Bearings (AREA)
Abstract
The object of this invention is to provide a sealing unit for rotary devices. The sealing unit has a housing unit (200) including a plurality of housings (2, 4, 6), with a seat groove provided on an inner surface of each of the housings to define a shaft hole; a flange unit (300) mounted to a rear end of the housing unit and including a plurality of flanges each having a shaft hole; a sleeve (7) inserted into the shaft holes of both the housing unit and the flange unit, with a central bore (72) to receive a rotary shaft (100) therein; a plurality of sealing members (3, 5, 11) placed in the seat grooves so that sealing surfaces thereof are in contact with the outer surface of the sleeve (7); and a collar (14) mounted to a front end of the housing unit.
Description
A SEALING UNIT FOR A ROTARY DEVICE
Technical Field
The present invention relates, in general, to sealing units for rotary devices, and in more detail, to a sealing unit that is installed around an outer surface of a rotary shaft in a rotary device, such as a pump, to prevent leakage of fluid fed by the rotary device, and has a simple construction to minimize the volume of a space in which the rotary device is installed, and more particularly, to a sealing unit for oilless rotary devices free from an oil supply.
Background Art
Generally, rotary devices having rotary shafts, such as gearboxes, chemical pumps, agitators, mixers, speed change gears, dryers, and compressors, must be provided with sealing units (so-called "mechanical seals") around the rotary shafts to prevent leakage of fluid during rotations of the rotary shafts .
Fig. 5 shows the construction of a conventional mechanical seal that comprises : a rotary ring body 2 ' mounted to a rotary shaft
1' by a plurality of locking bolts; an elastic support body 3' provided on an end thereof with a plurality of guide pins 3a' to slide through a plurality of guide holes 2a' of the rotary ring body 2', with a plurality of springs 3b' placed between the guide pins 3a' , and a locking protrusion 3c' provided on the opposite end of the elastic support body 3' ,- a seal ring body 4' having a locking slot 4a' to correspond to the locking protrusion 3c' , with an O-ring 4b' fitted in the seal ring body 4' to come into contact with an inner surface of the seal ring body 4', and a hard ring 4c' inscribed with an end of the seal ring body 4' while projecting outward from the end; and a stationary ring body 5' installed around the rotary shaft 1' to be idle from the rotary shaft 1' and supported by a locking unit (not shown) that is independent from the rotary shaft 1' , with an end of the stationary ring body 5' being in surface contact with the hard ring 4c' of the seal ring body 4' . The above-mentioned parts of the conventional mechanical seal are installed in a housing (not shown) . In other words, the rotary ring body 2' engaging with the elastic support body 3' is mounted to the rotary shaft 1' by the locking bolts. Thereafter, the seal ring body 4' is installed on the rotary shaft __' . In the above state, the locking slot 4a' of the seal ring body 4' engages with the
locking protrusion 3c' of the elastic support body 3' so that the seal ring body 4' is rotated along with the rotary shaft 1' . Thereafter, the stationary ring body 5' is mounted to the locking unit so that the end of the stationary ring body 5' is in surface contact with the hard ring 4c' of the seal ring body 4' . Thus, the stationary ring body 5' is idle from the rotary shaft 1' . In the above state, the O-ring 4b' of the seal ring body 4' first intercepts fluid that flows along the outer surface of the rotary shaft 1' . The remaining volume of the fluid is intercepted by both the hard ring 4c' and the stationary ring body 5' that are in surface contact with each other.
However, the conventional mechanical seal is problematic as follows . The rotary ring body 2 ' that engages with both the seal ring body 4' and the elastic support body 3' rotates at a high speed along with the rotary shaft __' , while the stationary ring body 5' that is in surface contact with the hard ring 4c' of the seal ring body 4' is in an immobile state. Thus, particularly, in the case of an oilless rotary shaft, the friction coefficients of both the hard ring 4c' and the stationary ring body 5' are greatly increased which causes severe abrasion of the contact surfaces of both the hard ring 4c' and the stationary ring body 5' . Thus, the sealing effect
provided at the junction between the hard ring 4c' and the stationary ring body 5' is greatly reduced to remarkably deteriorate the operational efficiency of the conventional mechanical seal . Furthermore, the above-mentioned sealing unit has a complex construction, and thus, it is very difficult to manufacture, assemble or repair the sealing unit. The O-ring 4b' made of rubber cannot effectively resist chemicals, so that the use of the conventional sealing unit is limited when requiring to use it under severe operational conditions at a high speed, high temperature and high pressure.
Particularly, in the case of a sealing unit to prevent leakage of fluid in a pressurized or vacuum state, the construction of the sealing unit is further complicated. Thus, the process of manufacturing such a sealing unit must be executed through an excessive number of steps.
Furthermore, a cooling jacket is provided in the conventional sealing unit to cool both the hard ring 4c' and the stationary ring body 5' which generate the friction heat during a high- speed rotation of the rotary shaft 1' . However, the cooling jacket is far from the heating point, so that the cooling jacket cannot provide a desired cooling effect, but reduces the life span thereof.
Particularly, because the conventional mechanical seal provides a sealing effect to prevent a leakage of the fluid by a formation of an oil layer caused by surface contact, lubrication oil must be supplied to the mechanical seal. Thus, the mechanical seal must be provided with a lubrication oil supply system that supplies the lubrication oil to the seal. However, the supply of the lubrication oil to the mechanical seal reduces the yield of products in semiconductor equipments requiring super precision. Furthermore, the lubrication oil may infiltrate into the semiconductor equipments. Thus, the mechanical seal unit having the conventional mechanical seal is problematic in that the life span thereof is too short due to the above-mentioned problems caused by the lubrication oil. Furthermore, the conventional sealing method of providing a sealing effect caused by the surface contact cannot prevent infiltration of slurry including ultrafine particles into the seal. Thus, the expected life span of the mechanical seal unit is further reduced.
Disclosure of the Invention
Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of
the present invention is to provide a sealing unit for rotary devices which remarkably improves the sealing effect, and is easily manufactured, assembled and repaired, and is efficiently used under severe operational conditions at a high speed, high temperature, high pressure, and furthermore, in a vacuum state, and enhances the cooling efficiency to improve the durability and lengthen the life span thereof.
Another object of the present invention is to provide a sealing unit for rotary devices in which a sealing member is provided by integrally forming a curved annular blade on an inner surface of an annular support, and a plurality of sealing members having the above-mentioned construction are sequentially arranged to enhance the sealing effect of the sealing unit. A further object of the present invention is to provide a sealing unit for rotary devices in which an elastic reinforcing member is attached to the annular blade to provide an additional sealing member to further enhances the sealing effect of the sealing unit . Yet another object of the present invention is to provide a sealing unit for rotary devices in which the sealing member is in linear contact with a rotary object, thus minimizing the
friction between the sealing unit and the rotary object and thereby removing the necessity to supply the lubrication oil . In order to accomplish the above objects, the present invention provides a sealing unit for rotary devices, including: a housing unit having a plurality of housings sequentially arranged, each of the housings being provided on an inner surface thereof with a seat groove that defines a shaft hole in a central portion of each of the housings; a flange unit mounted to a rear end of the housing unit and including a plurality of flanges, each of the flanges having a shaft hole at a central portion thereof; a sleeve inserted into the shaft holes of both the housing unit and the flange unit, the sleeve having a central bore through which the rotary shaft passes; a plurality of sealing members placed in the seat grooves so that sealing surfaces thereof are in contact with an outer surface of the sleeve; and a collar mounted to a front end of the housing unit to prevent the sleeve from being removed.
Brief Description of the Drawings
The above and other objects, features and other advantages of the present invention will be more clearly understood from the
following detailed description taken in conjunction with the accompanying drawings, in which:
Fig. 1 is an exploded perspective view of a sealing unit for rotary devices according to the present invention; Fig. 2 is a sectional view of the assembled sealing unit for rotary devices according to the present invention;
Fig. 3 is an enlarged sectional view of the portion A of Fig. 2;
Fig. 4 is a sectional view of a sealing unit according to another embodiment of the present invention; and Fig. 5 is a sectional view showing an embodiment of conventional mechanical seals for rotary devices.
*Description of the elements in the drawings*
2 : first housing 3 : oil sealing member
4 : second housing 5 : first sealing member 6 : third housing 7 : sleeve
8 : first flange 9 : second flange
10: first base ring 11: second sealing member
12 : second base ring 13 : third base ring
14 : collar 15 : V-ring 22, 42, 62, 82, 92: shaft hole
24: first seat groove 26: second seat groove
27: first locking hole 28: lubrication oil inlet
29: longitudinal bolt 32: spring
34 : metal reinforcing member 36: sealing lip
41 : fourth seat groove 44 : third seat groove
46: fifth seat groove 47: second locking hole
48: lubrication oil outlet 52 : support body
54 : annular blade 61: seal cover
63, 130: locking bolt 64 : leakage checking hole
65 : coolant channel 66 : sixth seat groove
72 : central bore 74 : seal ring
81: seventh seat groove 83 : coolant outlet
84 : coolant inlet 86, 94: coolant channel
88 : fourth locking hole 89: first screw hole
95 : second screw hole 100: rotary shaft
110 : sealing surface 112 : reinforcing member
200: housing unit 300: flange unit
Best Mode for Carrying Out the Invention
Herein below, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings .
Fig. 1 is an exploded perspective view of a sealing unit for rotary devices according to the present invention. Fig. 2 is a sectional view of the assembled sealing unit for rotary devices
according to the present invention. Fig. 3 is an enlarged sectional view of the portion A of Fig. 2.
As shown in Figs. 1 through 3, the sealing unit according to the present invention comprises a housing unit 200 that is installed in a rotary device having a rotary shaft 100, such as a feed pump. The housing unit 200 comprises cylindrical first, second and third housings 2, 4 and 6 each of which has a shaft hole 22, 42, 62 and which are sequentially fitted over the rotary shaft 100 through the shaft holes and are fastened together by a plurality of longitudinal bolts 29.
The first, second and third housings 2, 4 and 6 are provided on inner surfaces thereof with seat grooves 24, 26, 41, 44, 46 and 66 that define the shaft holes 22, 42 and 62 through which the rotary shaft 100 passes. In a detailed description of the housing unit, the first housing 2 has a shaft hole 22 through which a sleeve 7 passes, with a first seat groove 24 provided on the inner surface of the first housing 2 to communicate with the shaft hole 22 and seat an oil sealing member 3 therein. A second seat groove 26 to seat a bearing 18 therein is formed on the inner surface of the first housing 2 at a position in back of the first seat groove 24. A lubrication oil inlet 28 is formed through a sidewall of the first housing 2 in a radial direction to communicate with the
second seat groove 26, while a plurality of first locking holes 27 are formed through the sidewall of the first housing 2 in axial directions to respectively receive the longitudinal bolts 29. The second housing 4 is a cylindrical body that has a shaft hole 42 through which the rotary shaft 100 passes, with a fourth seat groove 41 having a same design as that of the first seat groove 24 and provided on a rear portion of the inner surface of the second housing 4. A third seat groove 44 to seat another bearing 18 therein is formed on the inner surface of the second housing 4 at a position in front of the fourth seat groove 41. A fifth seat groove 46 to receive therein a seal cover 61 of the third housing 6 is formed on the inner surface of the second housing 4 at a position in back of the fourth seat groove 41. A lubrication oil outlet 48 is formed through a sidewall of the second housing 4 in a radial direction to communicate with the third seat groove 44, while a plurality of second locking holes 47 are formed through the sidewall of the second housing 4 in axial directions to respectively receive the longitudinal bolts 29. Thus, the second housing 4 is arranged in back of the first housing 2 , and is fastened to the first housing 2 by the longitudinal bolts 29.
Furthermore, a leakage checking hole 64 is formed on the second housing 4 to communicate with the fifth seat groove 46, thus allowing a user to check a leakage of oil in the sealing unit . The third housing 6 is a cylindrical body that has a shaft hole 62 through which the rotary shaft 100 passes, with the seal cover 61 received in the fifth seat groove 46 is threaded to a front end of the third housing 6, and a sixth seat groove 66 provided on the inner surface of the third housing 6 to communicate with the shaft hole 62 and seat a plurality of first and second sealing members 5 and 11 therein. A coolant channel 94 having a plurality of manifold ports is formed through a sidewall of the third housing 6 to communicate with the sixth seat groove 66, while a plurality of third locking holes 67 are formed through the sidewall of the third housing 6 in axial directions to respectively receive the longitudinal bolts 29. Thus, the third housing 6 is arranged in back of the second housing 4, and is fastened to the second housing 4 by the longitudinal bolts 29. The sealing unit further includes a flange unit 300 that comprises first and second flanges 8 and 9 fastened together through a screw-type engagement. The flange unit 300 is placed in back of the third housing 6 while being fitted over the outer
surface of the rotary shaft 100, thus covering the housing unit 200.
The first flange 8 is provided on an inner surface thereof with a seventh seat groove 81 that has a same diameter as that of the sixth seat groove 66 of the third housing 6. The first flange 8 further includes, on an outer part thereof, a coolant inlet 84, a coolant outlet 83, a plurality of fourth locking holes 88 to respectively receive the longitudinal bolts 29 therein, and a plurality of first screw holes 89. The second flange 9 has a shaft hole 92 through which the rotary shaft 100 passes, with the coolant channel 94 formed on a side surface of the second flange 9 to communicate with both the coolant inlet 84 and the coolant outlet 83. A plurality of second screw holes 95 is provided on the second flange 9 to correspond to the first screw holes 89 of the first flange 8.
The sleeve 7 is a cylindrical body that has a predetermined outer diameter to be fitted into the shaft holes of both the housing unit 200 and the flange unit 300. A central bore 72 through which the rotary shaft 100 passes is defined in the sleeve 7. The sleeve 7 is inserted into the shaft holes of both the housing unit 200 and the flange unit 300.
The rotary shaft 100 passes through the central bore 72, with a plurality of seal rings 74 installed in the central bore 72 to enhance the sealing effect.
The sealing members 3, 5 and 11 include an oil sealing member 3 that is placed in each of the first and fourth seat grooves 24 and 41 of the first and second housings 2 and 4, a plurality of base rings 10, 12 and 13 that are installed in the sixth seat groove 66 of the third housing 6, and the first and second sealing members 5 and 11 that are interposed between the base rings. The plurality of sealing members 3, 5 and 11 are preferably installed so that the sealing surfaces provided by the inner surfaces of the sealing members 3, 5 and 11 are in contact with the outer surface of the sleeve 7. In the present invention, the oil sealing members 3 and the first and second sealing members 5 and 11 are preferably made of elastic materials, such as PTFE+carbon, PTFE+carbon+graphite, PTFE+polyimide, PTFE+polyimide+graphite, PTFE+polyimide+carbon. An oil sealing member 3 is installed in the first seat groove 24 to be in contact with the outer surface of the sleeve 7, thus preventing external dust and contaminants from coming into contact with the inner lubrication oil . The oil sealing member 3 is preferably constructed to have an inner diameter that is
slightly smaller than the size of the sleeve 7, thus providing an enhanced sealing effect .
Each of the oil sealing members 3 is a circular ring having a '"c '-shaped cross-section, with a plurality of sealing lips 36 provided along an outer surface of a lower horizontal part of each of the oil sealing members 3 to come into contact with the outer surface of the sleeve 7. A spring 32 is placed around an inner surface of the lower horizontal part of each of the oil sealing members 3. A metal reinforcing member 34 having a r ' - shaped cross-section is placed in each of the oil sealing members 3 to come into contact with inner surfaces of both a vertical part and an upper horizontal part of each of the oil sealing members .3 , thus preventing deformation of each of the oil sealing members 3. Therefore, the contact force of the sealing lips 36 increases by the tensile force of the spring 32, while each of the oil sealing members 3 maintains a desired shape thereof by the metal reinforcing member 34. Thus, the oil sealing members 3 are improved in the durability and expected life span thereof. The first sealing member 5 comprises an annular support body 52, with an annular blade 54 provided along an inner surface of the support body 52 while being curved to have a curved surface. The first sealing member 5 is placed in the sixth seat groove 66
of the third housing 6 so that the annular blade 54 comes into contact with the outer surface of the sleeve 7 to prevent a leakage of fluid.
The second sealing member 11 is a circular ring having a c ' - shaped cross-section, with a sealing surface 110 provided along an outer surface of a lower horizontal part of the second sealing member 11 to come into contact with the outer surface of the sleeve 7. A reinforcing member 112 having a λ '-shaped cross-section is placed in the second sealing member 11 to prevent deformation of the second sealing member 11.
Each of the first, second and third base rings 10, 12 and 13 is an circular ring, with a cooling channel 120 provided along an, outer surface of each of the first, second and third base rings 10, 12 and 13 to communicate with the coolant channel 94, and a plurality of O-rings placed in each of the first, second and third base rings 10, 12 and 13 to provide a desired sealing effect. The first, second and third base rings 10, 12 and 13 are installed to be aligned with the first sealing member 5 placed in the sixth seat groove 66, thus supporting the first sealing member 5 and enhancing the sealing effect of the first sealing member 5.
The second sealing member 11 is seated along the inner surface of the second base ring 12.
In the present invention, the first and second sealing members 5 and 11 may be installed while the positions thereof are changed with each other when necessary, and each may be changed in the number thereof such that one or more sealing members as each of the first and second sealing members may be installed as desired.
As shown in FIG. 4, the first and second sealing members 5 and 11 may be installed so that the annular blade 54 and the sealing surface 110 face each other to provide stability against vacuum states of both ends of the rotary shaft 100. Thus, even when the sealing surface is drawn by the vacuum pressure applied thereto from the both ends of the rotary shaft, the desired sealing effect is provided. The above-mentioned parts of the sealing unit are assembled with each other as follows.
An oil sealing member 3 is placed in the first seat groove 24 of the first housing 2, while a bearing 18 is placed in the second seat groove 26 of the first housing 2. Another bearing 18 is placed in the third seat groove 44 of the second housing 4, while another oil sealing member 3 is placed in the fourth seat groove 41 of the second housing 4. Furthermore, the first sealing member 5, the first base ring 10, the second sealing member 11, the second base ring 12 and the
third base ring 13 are sequentially placed in the sixth seat groove 66 of the third housing 6.
In the meantime, the second flange 9 is placed to be in contact with a rear surface of the first flange 8 so that the second screw holes 95 are aligned with the first screw holes 89. Thereafter, the first and second flanges 8 and 9 are fastened together by a plurality of locking bolts 130, so that the assembling of the flange unit 300 is accomplished. Thereafter, the second housing 4, the third housing 6 and the flange unit 300 are sequentially placed in back of the first housing 2, and are fastened together by tightening the plurality of longitudinal bolts 29 through the locking holes 27, 47, 67 and 88, thus being integrated with each other. Thereafter, a V- ring 15 and a collar 14 are sequentially installed in front of the first housing 2, and thus, the assembling of the parts of the sealing unit for rotary devices according to the present invention is accomplished.
After the above-mentioned assembling of the parts of the sealing unit is accomplished, the rotary shaft 100 is fitted into the central bore 72 of the sleeve 7, and then, a coolant pipe is coupled to each of the coolant inlet 84 and the coolant outlet 83. Thus, the sealing unit is completely installed on the rotary shaft.
Furthermore, a lubrication oil supply unit (not shown) is coupled to both the lubrication oil inlet 28 and the lubrication oil outlet 48, while a leakage sensing unit (not shown) is coupled to the leakage checking hole 64.
Industrial Applicability
As described above, the present invention provides a sealing unit for rotary devices. The sealing unit is installed on a rotary shaft of a variety of rotary devices having rotary shafts, such as gearboxes, chemical pumps, agitators, mixers, speed change gears, dryers, and compressors, thus supporting a rotating motion of the rotary shaft and preventing a leakage of fluid. The sealing unit has a remarkably improved sealing effect, and a simple construction to be easily manufactured, assembled and repaired. Furthermore, the cooling efficiency of the sealing unit is enhanced, thus improving the durability and lengthening the life span of the sealing unit.
Claims
1. A sealing unit for rotary devices that is installed on a rotary shaft of a rotary device to support a rotating motion of the rotary shaft and prevent leakage of fluid, the sealing unit comprising: a housing unit (200) comprising a plurality of housings sequentially arranged, each of the housings being provided on an inner surface thereof with a seat groove that defines a shaft hole in a central portion of each of the housings; a flange unit (300) mounted to a rear end of the housing unit (200) and comprising a plurality of flanges, each of the flanges having a shaft hole at a central portion thereof; a sleeve (7) inserted into the shaft holes of both the housing unit (200) and the flange unit (300) , the sleeve having a central bore (72) through which the rotary shaft (100) passes; a plurality of sealing members and a plurality of base rings that are placed in the seat grooves so that sealing surfaces thereof are in contact with an outer surface of the sleeve (7) ; and a collar (14) mounted to a front end of the housing unit (200) to prevent the sleeve (7) from being removed.
2. The sealing unit for rotary devices according to claim 1, wherein the flange unit (300) comprises a first flange (8) and a second flange (9) , in which: the first flange (8) is provided on an inner surface thereof with a seventh seat groove (81) that has a same diameter as that of a seat groove of a housing (6) placed in the rear end of the housing unit (200) , and is provided on an outer part thereof with a coolant inlet (84) , a coolant outlet (83) , a fourth locking hole (88) , and a first screw hole (89) ; and the second flange (9) is provided on a side surface thereof with a coolant channel (94) to communicate with both the coolant inlet (84) and the coolant outlet (83) , and is provided with a second screw hole (95) to correspond to the first screw hole (89) of the first flange (8) , wherein the first flange (8) and the second flange (9) are assembled into a single body by a locking bolt passing through both the first screw hole (89) and the second screw hole (95) , and are mounted to the end of the housing unit (200) through the fourth locking hole (88) while being fitted over the outer surface of the sleeve (7) .
3. The sealing unit for rotary devices according to claim 1 or 2, wherein the housing unit (200) comprises a first housing (2) , a second housing (4) and a third housing (6) , in which: the first housing (2) has a shaft hole (22) through which the sleeve (7) passes, with a first seat groove (24) provided on an inner surface of the first housing to communicate with the shaft hole (22) and seat an oil sealing member (3) therein, a second seat groove (26) formed at a position in back of the first seat groove (24) to seat a bearing (18) therein, a lubrication oil inlet (28) formed through a sidewall of the first housing to communicate with the second seat groove (26) , and a first locking hole (27) formed through the sidewall of the first housing in an axial direction; the second housing (4) has a shaft hole (42) through which the sleeve (7) passes, with a fourth seat groove (41) having a same design as that of the first seat groove (24) and provided on ,a rear portion of an inner surface of the second housing (4) , a third seat groove (44) formed at a position in front of the fourth seat groove (41) to seat another bearing (18) therein, a fifth seat groove (46) formed at a position in back of the fourth seat groove (41) to receive therein a seal cover (61) of the third housing (6) , a lubrication oil outlet
(48) formed through a sidewall of the second housing (4) to communicate with the third seat groove (44) , a leakage checking hole (64) formed on the second housing to communicate with the fifth seat groove (46) , and a second locking hole (47) formed through the sidewall of the second housing in an axial direction; and the third housing (6) has a shaft hole (62) through which the sleeve (7) passes, with the seal cover (61) threaded to a front end of the third housing (6) to be received in the fifth seat groove (46) , a sixth seat groove (66) provided on an inner surface of the third housing to communicate with the shaft hole (62) and seat the plurality of first and second sealing members
(5) and (11) therein, the coolant channel (94) having a plurality of manifold ports and formed through a sidewall of' the third housing to communicate with the sixth seat groove (66) , and a third locking hole (67) formed through the sidewall of the third housing in an axial direction, wherein the first, second and third housings (2) , (4) and
(6) are arranged sequentially, and are fastened to each other along with the flanges by a longitudinal bolt (29) that passes through the first, second and third locking holes (27), (47) and (67).
4. The sealing unit for rotary devices according to claim 3, wherein the sealing members comprise: an oil sealing member (3) that is a circular ring having a c -shaped cross-section, with a plurality of sealing lips (36) provided along an outer surface of a lower horizontal part of the oil sealing member to come into contact with the outer surface of the sleeve (7) , a spring (32) placed around an inner surface of the lower horizontal part, and a metal reinforcing member (34) having a λ r '-shaped cross-section and placed in the oil sealing member to come into contact with inner surfaces of both a vertical part and an upper horizontal part of the oil sealing member, thus preventing deformation of the oil sealing member, the oil sealing member (3) being placed in each of the first and fourth seat grooves (24) and (41) of the first and second housings (2) and (4) ; a first sealing member (5) that comprises an annular support body (52) , with an annular blade (54) provided along an inner surface of the support body (52) while being curved to a direction to have a curved surface, the first sealing member (5) being placed in the sixth seat groove (66) of the third housing (6) so that the annular blade (54) comes into contact with the outer surface of the sleeve (7) ; and a second sealing member (11) that is a circular ring having a vc -shaped cross-section, with a sealing surface (110) provided along an outer surface of a lower horizontal part of the second sealing member to come into contact with the outer surface of the sleeve (7) , and a reinforcing member (112) having a ' -shaped cross-section and placed in the second sealing member to prevent deformation of the second sealing member.
5. The sealing unit for rotary devices according to claim 4, wherein the annular blade (54) , provided along the inner surface of the support body (52) of the first sealing member
(5) , is integrated with the first sealing member into a single body.
6. The sealing unit for rotary devices according to claim
4, wherein each of the plurality of base rings comprises a circular ring with a cooling channel (120) provided along an outer surface of each of the base rings to communicate with the coolant channel (94) , and a base ring (10) of the plurality of base rings is installed to be aligned with the first sealing member (5) placed in the sixth seat groove (66) .
7. The sealing unit for rotary devices according to claim 4, wherein the first and second sealing members (5) and (11) are installed so that the annular blade (54) and the sealing surface (110) face each other.
8. The sealing unit for rotary devices according to claim 4, wherein a base ring (12) of the plurality of base rings seats the second sealing member (11) therein.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2003-0023001A KR100496990B1 (en) | 2003-04-11 | 2003-04-11 | a sealing unit for a rotary device |
| KR10-2003-0023001 | 2003-04-11 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2004090392A1 true WO2004090392A1 (en) | 2004-10-21 |
Family
ID=33157289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/KR2004/000835 Ceased WO2004090392A1 (en) | 2003-04-11 | 2004-04-10 | A sealing unit for a rotary device |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR100496990B1 (en) |
| WO (1) | WO2004090392A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2419646A (en) * | 2004-10-18 | 2006-05-03 | Aes Eng Ltd | A modular gland member for use in a mechanical seal |
| CN102734151A (en) * | 2012-07-06 | 2012-10-17 | 白银鸿浩化工机械制造有限公司 | Non-contact seal of pulp pump |
| DE102013106407A1 (en) * | 2013-06-19 | 2014-12-24 | Hermann Aumüller | sealing arrangement |
| TWI802925B (en) * | 2021-07-02 | 2023-05-21 | 南韓商世利可股份有限公司 | Rotating shaft sealing device and processing apparatus for semiconductor substrate using the same |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100756029B1 (en) * | 2006-03-16 | 2007-09-07 | 주식회사 신원기계부품 | Rotary and reciprocating seals for vacuum pressure equipment |
| KR101304791B1 (en) * | 2011-11-28 | 2013-09-05 | 주식회사 포스코 | Device for Sealing Driving Shaft |
| KR102045873B1 (en) | 2018-04-23 | 2019-11-18 | 씰링크 주식회사 | Sealing apparatus capable of rotational motion |
| KR102098604B1 (en) * | 2018-03-14 | 2020-04-08 | 씰링크 주식회사 | Sealing apparatus capable of linear and rotational motion |
| WO2019177329A1 (en) * | 2018-03-14 | 2019-09-19 | 씰링크 주식회사 | Rotating sealing device |
| KR102378581B1 (en) * | 2020-06-19 | 2022-03-24 | 씰링크 주식회사 | Rotating shaft sealing device and processing apparatus for semiconductor substrate using the same |
| KR102411880B1 (en) * | 2020-10-13 | 2022-06-22 | 씰링크 주식회사 | Sealing device capable of linear motion and processing apparatus for semiconductor substrate using the same |
| CN114551203B (en) * | 2020-11-25 | 2024-09-27 | 李喜张 | Linear motion sealing device and semiconductor substrate processing apparatus using the same |
| TWI866383B (en) * | 2023-08-09 | 2024-12-11 | 準力機械股份有限公司 | Relay device for grinding disk cooling system of wafer grinding equipment |
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| JPS5572664A (en) * | 1978-11-28 | 1980-05-31 | Toshiba Corp | Water sealing device for hydraulic machine shaft |
| JPH044365A (en) * | 1990-04-23 | 1992-01-08 | Tanken Seiko Kk | Mechanical seal |
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| JPH0654965U (en) * | 1993-01-12 | 1994-07-26 | 佐竹化学機械工業株式会社 | Rotating shaft sealing device |
| JPH07332216A (en) * | 1994-06-09 | 1995-12-22 | Meidensha Corp | Sealing part structure of shaft |
| US5647598A (en) * | 1995-07-19 | 1997-07-15 | Vaudolon; Jean-Pierre | Stuffing box seal having braided packings and lip seal rings in combination with a shaft sleeve |
| JPH1113894A (en) * | 1997-06-19 | 1999-01-22 | Nippon Pillar Packing Co Ltd | Mechanical seal |
| JP2000283297A (en) * | 1999-03-31 | 2000-10-13 | Kurimoto Ltd | Shaft sealing device for rotating equipment |
-
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- 2003-04-11 KR KR10-2003-0023001A patent/KR100496990B1/en not_active Expired - Lifetime
-
2004
- 2004-04-10 WO PCT/KR2004/000835 patent/WO2004090392A1/en not_active Ceased
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5572664A (en) * | 1978-11-28 | 1980-05-31 | Toshiba Corp | Water sealing device for hydraulic machine shaft |
| JPH044365A (en) * | 1990-04-23 | 1992-01-08 | Tanken Seiko Kk | Mechanical seal |
| JPH044366A (en) * | 1990-04-23 | 1992-01-08 | Seiko Epson Corp | Sealing mechanism for power shaft introducing section |
| JPH0654965U (en) * | 1993-01-12 | 1994-07-26 | 佐竹化学機械工業株式会社 | Rotating shaft sealing device |
| JPH07332216A (en) * | 1994-06-09 | 1995-12-22 | Meidensha Corp | Sealing part structure of shaft |
| US5647598A (en) * | 1995-07-19 | 1997-07-15 | Vaudolon; Jean-Pierre | Stuffing box seal having braided packings and lip seal rings in combination with a shaft sleeve |
| JPH1113894A (en) * | 1997-06-19 | 1999-01-22 | Nippon Pillar Packing Co Ltd | Mechanical seal |
| JP2000283297A (en) * | 1999-03-31 | 2000-10-13 | Kurimoto Ltd | Shaft sealing device for rotating equipment |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2419646A (en) * | 2004-10-18 | 2006-05-03 | Aes Eng Ltd | A modular gland member for use in a mechanical seal |
| GB2419646B (en) * | 2004-10-18 | 2010-01-20 | Aes Eng Ltd | A modular gland member for use in a mechanical seal |
| US8011668B2 (en) | 2004-10-18 | 2011-09-06 | Aes Engineering Ltd | Close coupled mechanical seal |
| CN102734151A (en) * | 2012-07-06 | 2012-10-17 | 白银鸿浩化工机械制造有限公司 | Non-contact seal of pulp pump |
| DE102013106407A1 (en) * | 2013-06-19 | 2014-12-24 | Hermann Aumüller | sealing arrangement |
| DE102013106407B4 (en) * | 2013-06-19 | 2019-09-12 | Tobias Müller | sealing arrangement |
| TWI802925B (en) * | 2021-07-02 | 2023-05-21 | 南韓商世利可股份有限公司 | Rotating shaft sealing device and processing apparatus for semiconductor substrate using the same |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100496990B1 (en) | 2005-06-23 |
| KR20040089287A (en) | 2004-10-21 |
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