WO2004044644A2

WO2004044644A2 - Method and apparatus for a dynamically reconfigurable waveguide in an ingrated circuit

Info

Publication number: WO2004044644A2
Application number: PCT/US2003/036313
Authority: WO
Inventors: Vitaly Fridman; Leo Finkelstein
Original assignee: INFOTURN Inc
Current assignee: INFOTURN Inc
Priority date: 2002-11-13
Filing date: 2003-11-12
Publication date: 2004-05-27
Anticipated expiration: 2005-05-13
Also published as: AU2003290860A1; WO2004044644A3; AU2003290860A8

Abstract

A re-configurable optical waveguide includes an electro-optic substrate and plurality of electrodes above substrate. Electrodes are forming photonic crystal waveguide with photonic crystal periodic structure which has a slab optical waveguide on the top surface of a substrate and also has refractive index variation areas due to electro-optical effect with a different refractive index from that of the core layer of the slab optical waveguide arranged in a lattice array shape at part of the slab optical waveguide. In this case, the refractive index variation areas are formed of the same material as the material constituting the core layer of the slab optical waveguide. The refractive index variation areas are arranged in the lattice array shape on both the sides of an optical waveguide area, where light is propagated. The refractive index of the core layers of the refractive index variation areas is larger than that of the core layer of an area of the refractive index variation area. Plurality of electrodes is a field emission array with tips density higher than 10+8 per square centimeter. Groups of the tips are united in pixels with size equal to waveguide's width. Different array of pixels are forming variable shape of cladding and, appropriately, variable waveguides, thus light propagates in the different directions according what waveguide is formed. Such kind of waveguide allows implementation of different optical functions simply by changing the arrangement of the patterns. Arrangement of the patterns is controlled with integrated transistor structure.

Description

TITLE Method and Apparatus for a Dynamically Reconfigurable Waveguide in an

Integrated Circuit

FIELD OF THE INVENTION [0001] The present invention relates to waveguides implemented on an integrated circuit. More specifically, the invention relates to a dynamically reconfigurable waveguide implemented in the context of an integrated circuit.

Background

[0002] Optical devices such as optical waveguides are used in conm unications and data processing equipment. These devices are used to transfer information from one location to another, to code and/or switch the information to a particular desired output. The information is usually in the form of a continuous or a pulsing optical signal. [0003] Typical waveguides contain a core made of a material that transmits light of a desired wavelength. The core is usually clad in a material that abuts at least one side of the core. Multiple cores can be used to form switches to switch an optical signal to desired output core. Multiple core waveguides may also be used as filters. In this manner, the use would be to filter one or more optical signals of a particular wavelength. Multiple core waveguides can also be used in multiplexers to combine or separate optical signals of different wavelengths. [0004] Optical cores can be linear. However, they may also curve in order to direct a signal from one location to another within the confines of a small space. [0005] hi many conventional waveguides, light is confined by total internal reflection

(TIR). That is, the impinging light is all reflected with no refraction. Thus, for typical materials, the differences in the reflective indices dictate that the incident optical energy must fall on the core wall at a shallower angle rather than one nearer to the normal. Accordingly, the radius of the core material is typically large to accommodate this property. If the radius of the bend is large compared to the wavelength, much of the light will be lost. [0006] In the TIR methodology, the creation of these bends can be troublesome. In these waveguides, if the direction of an optical signal is to be changed 90 degrees, the core must be fabricated to accommodate this. In typical examples, the core can have a radius of 10 mm or more to avoid losing much of the optical signal to the cladding in the curved section. Consequently, for every 90 degrees of turn incorporated along the length of a device adds approximately this 10 mm to at least one dimension of the device. As such, this property adds added size and complexity to the end device.

[0007] This inhibits the ability to further rrimiaturize the end component. Further, much of the end component may end up as "dead space" due to the restriction in turning radii due to the TIR phenomena.

[0008] Secondly, propagation times are expanded due to the TIR phenomena. The added turns give rise to additional path length for the transmitted optical signal. This leads to further propagation delays.

[0009] Towards these goals, scientists have long been working towards producing efficient and easily configurable photonic band gap (PBG) materials. These

PBG materials are typically crystalline structures that exclude light transmission in all directions for specific wavelength ranges, just as semiconductors exclude electron propagation for certain energy bands.

[0010] These PBG materials are typically seen as photonic crystals. Photonic crystals are artificial 3-, 2-, or 1 -dimensional structures fabricated in an optical material.

The optical material can be crystal or amorphous.

[0011] The photonic crystals typically exist as unit cells whose dimensions are comparable to the optical wavelength. If the artificial structure has an appropriate symmetry or geometry, it can exhibit a photonic band gap, thus forming a photonic band gap (PBG) material or crystal. Typically, the manufacture of such a photonic crystal is accomplished by nanofabrication of a structure, which has, for example, 2-dimensional periodicity.

[0012] An effort has been undertaken to produce two-dimensional photonic crystal structures by etching holes into thin films of dielectrics and semiconductors. The natural modes of such etched layers - the Bloch waves - exhibit the property that an optical signal can approach a periodic dielectric interface at normal incidence and yet be totally internally reflected.

[0013] Such two-dimensional crystals can be used to produce highly miniature components that can be integrated in large numbers on to one substrate. However, a traditional photonic crystal waveguide, which is created by etching holes, is permanent in nature. As such, a waveguide made in this manner or having this particular structure cannot be dynamically re-configured. SUMMARY OF THE INVENTION [0014] A dynamically re-configurable waveguide is envisioned. The waveguide is made of a baseplate and an electro-optic material coated plate with ground electrode spaced apart from the baseplate.

[0015] An electron emitting array is formed on the baseplate. The array has a plurality of emitters positioned so that electrons emitted from any of the plurality of emitters impinge on a particular section of the electro-optic material coated plate. The emitters having a top portion and a bottom portion, the top portion nearer to the electro- optic material than the bottom portion. The top portion having a smaller dimension than the bottom portion.

[0016] The electrons, when emitted, operate to change the refractive index of the electro-optic material. At least one spacer is operationally positioned between and separating the baseplate and the electro-optic material coated plate. [0017] The emitters can be conical in nature. The density of emitters can be approximately 10+8 per square centimeter, or more. The distance between the adjacent top portions is usually less than a wavelength of a propagated light. [0018] An aspect comprises a plurality of gates. The gates are disposed in a layer above each emitter, and each of the plurality of gates has a dimension of less than half the wavelength of a propagated light.

[0019] The plurality of emitters can be placed into a group, where the group defines a set of controllable emitters. The group can have between approximately one hundred emitters and many thousands of emitters. In one aspect, the group forms a triangular shape.

[0020] The electron emitting array creates, in response to a common applied voltage, a two-dimensional subwavelength periodicity on the electro-optic material coated plate with a different refraction index. The electron emitting array, in response to a common applied voltage which is parallel to polarization vector of the electro-optic material, creates a region in the electro-optic material that is characterized by total internal reflection guiding.

[0021] The electron emitting array, in response to a common applied voltage which is parallel to polarization vector of the electro-optic material, creates a region in the electro-optic material that is characterized by photonic band gap guiding. [0022] In other aspects control circuitry controls the activation of the emitters.

As such, the waveguide is dynamically configurable.

DESCRIPTION OF THE FIGURES

Figure 1 is a sectional diagram of one aspect of the invention.

Figure 2 is a rendition of an electron micrographs of a single Spindt type field emission tip with gate and a section of field emission array.

Figure 3 is a side schematic view detailing the spatial relationships of several portions of an aspect of the invention.

Figure 4 is a side schematic level view of an embodiment of the invention having an integrated transistor structure and control circuitry.

Figure 5 is a schematic diagram detailing the possible linkages of an aspect of the invention.

Figure 6 is a hatch-section of a device according to one aspect of the invention.

DETAILED DESCRIPTION [0023] A dynamically configurable waveguide and the method of manufacture is hereby described. A waveguide is created in an electro-optic material. In this manner, this allows for a PBG material, where the gap could be opened or closed at will. Further, the gap may be tunable. The range of forbidden wavelengths at a specific location in the structure can be adjusted by a local electric field. The electric field may be produced with circuitry placed around the electro-optic material In some cases, with his structure, the band gap can be eliminated altogether.

[0024] The invention envisions an integrated optical processor made of a slab of the material, and surrounded by a mesh of wires. Each of the mesh of wires can produce a localized electric field. In this manner, the electric field from the wires not only may be used to configure the waveguides, but the integrated optical circuit could be changed at any time. The optical circuit may even be programmed to "learn" which particular configurations which operate better for a given situation.

[0025] The wires can be made with field emission arrays. These allow for high- precision computer control of an electron beam in location, time and direction of motion. This enables the generation of specific waveguide geometries and any selective deformation needed to serve the intended optical purpose. In this manner, the optical behavior of the waveguide structures can be tailored to meet the desired needs. [0026] By applying a strong electrical field to the electro-optical substrate, the optical path in the substrate, and hence its properties, can be set electrically. This allows the optical transmission characteristic to be shifted, the direction of the light to be varied, and in some cases the intensity to be varied.

[0027] In an electro-optical material, when an electric field is applied parallel to the polarization vector, this produces a local refractive index decrease in the material. This relationship can be quantified by the following:

where n is the effective refractive index, n_e is the extraordinary index of refraction, r₃₃ is the electro-optic coefficient, and E₃ is the applied field component along the spontaneous polarization of the ferro-electric optical material.

[0028] Thus, when electric field is applied along the spontaneous polarization, this results in an effective decrease of the effective refraction index. Using this property, we can create waveguides by creating 2-dimensional periodic cladding around these waveguides. As such, total internal reflection guiding can be achieved. [0029] Due to: 1) the lower effective refraction index around the waveguide; and

2) subwavelength periodicity, the propagated light sees a series of layers. These layers have alternating high- and low-refractive indices.

[0030] Multiple reflection and refraction can occur at the interfaces between the layers. This property, along with interference, allows the propagated light to be reflected back. This can happen for wavelengths approximately equal to twice the period. [0031] The width of the reflectance band is defined by the wavelengths between which the reflectance increases as layers are added. Generally, in this manner low absorption and high reflectivity are obtained.

[0032] For the propagated light in some wavelengths, the effective index as determined with numerical methods is complex in nature, having a real and an imaginary portion. The imaginary part does not imply any heat dissipation because the alternate layers are made of transparent materials. This signifies that waves cannot propagate. The value is inversely proportional to the penetration depth.

[0033] In addition to the TIR property, photonic band gap guiding is also present.

This is due to the presence subwavelength periodicity. Both of these effects are achieved by applying external electric field with periodically structured field emission arrays. [0034] Figure 1 is a sectional diagram of one aspect of the invention. In this concept, a field emission array (FEA) is used to achieve the appropriate interaction. The FEA is a large number of small tapered structures. In one embodiment, the structures are conical tips with periodicity about λ, sitting beneath λ/2 width gates. When a voltage differential is applied between tip and gate, the electric field at the tip much higher than that at the gate. The electric field at the tip initiates a cold cathode emission. This results in a cloud of electrons hovering over the tip.

[0035] Once liberated, these electrons stream to a proximately placed anode.

This anode can be the electro-optic polymer film on a silicon substrate, for example. The liberated electrons migrate to the anode and produce an associated external electric field. [0036] Figure 2 is a rendition of an electron micrographs of a single Spindt type field emission tip with gate and a section of field emission array. The field emission arrays can be made up of an insulating layer sandwiched between two conductors. An array of holes is present in the top conducting film and in an associated insulating layer. [0037] Figure 3 is a side schematic view detailing the spatial relationships of several portions of an aspect of the invention. The top conductor is referred to as the gate, and the lower conductor is referred to the base. These arrays can be manufactured on any flat, smooth, ultra-vacuum-compatible substrate, either insulating or conductive. [0038] The emitter tips can be fabricated in the array of holes using thin film deposition techniques. They can be fabricated with sub-micron hole spacing, with packing densities of over 10⁸ tips/cm².

[0039] In such an emitter structure, the emission level is controlled by adjusting the voltage of the gate layer relative to the emitter tips. Due to the small scales involved, a small voltages (typically less than 100 volts) can be used to control the emission from each tip.

[0040] With these types of operations, slectron emitting capacities of up to 100 microamps have been demonstrated with single tips. This can result in capacities of 5000 amps/cm² or upwards for arrays, depending upon geometries.

[0041] Many features are found in these structures. With high current densities, and the inherent small size and small mass of microfabricated devices, the field emission arrays have excellent characteristics for creating waveguides on the electro-optic substrates. Further, low power consumption, clean operation, no use of expendables, high efficiency, long lifetime, and a large operational temperature range (from approximately -270 degrees C to over 400 degrees C.) can also define these structures. [0042] To create waveguides using field emission arrays on the electro-optic substrates, the tips are grouped. Each group can be made up of any numbers of tips.

Typically, the groups number from hundreds to thousands tips.

[0043] The size of the group is defined by the width of the waveguide. One highly usable grouping is in the form of a triangle.

[0044] The triangle grouping is very usable for at least two reasons. First, a unit lattice of the tips' periodicity is in a regular triangle array. This is compatible with a trianglular grouping. Second, a grouping with triangle form allows the creation of waveguides having 60 degree inherent angles. This in turn allows greater miniaturization and provides fewer insertion loses.

[0045] As mentioned before, both the gate and the cathode driver work best with a high output drive voltage, in some cases up to 100 volts. A low voltage logic can be integrated on the same chip to support a row line scanning and a column line pulse width modulation conversion function, respectively.

[0046] Thus, an array of tip grouping is envisioned. In this case, an actively addressed group retains on/off information within the group between frame scans. This reduces the necessary refresh rate if the actively "on" or "off group state does not need to be modified on the subsequent configuration of the waveguide.

[0047] In one case, a field emission array is constructed with an integrated transistor structure to form the basis of a group latch sub-system. A transistor can be used to isolate the group latch element from the electro-optic substrate row and column address lines. In this manner, an addressing of each group is created.

[0048] Figure 4 is a side schematic level view of an embodiment of the invention having an integrated transistor structure and control circuitry. Using this structure, it is possible to modulate the field emission current density by adjusting the vertical

MOSFET (VMOS) gate voltage. Such structures as described in this specification may be implemented in semiconductor devices or chips.

[0049] The row connections can be connected to the extraction gates, and the columns are, in this case, connected to the cathode. The rows can be scanned sequentially from top to bottom. During each row select time, the column connections are used to impart intensity information to the group. The group intensity can also be modulated in time.

[0050] Turning now to the substrate, the velocity of light in the material is determined by the interaction of the electric field component of light with the charges (electronic and nuclear) of the material. The effect is quantitatively defined by the index of refraction, n, of the material. This index of refraction is equal to the ratio of the speed of light in a vacuum to the speed of light in the material.

[0051] Assume that an electric field is applied to a material with sufficient magnitude to change the charge (e.g., electronic) distribution of the material. This changes the velocity of light in the material, and as such alters the index of refraction of the material.

[0052] In one embodiment, polymer electro-optic materials have some advantages over crystalline electro-optic materials. First, the polymer has exceptional bandwidth.

[0053] Second, the polymer has a low permittivity relative to crystalline electro- optic materials, such as ferroelectric lithium niobate. This can allow the positioning several individual waveguides close to one another absent significant frequency crosstalk between these waveguides, relative to the crystalline electro-optic material. [0054] Third, polymer usage is very relevant to high-density packaging and integration with very large scale integration (VLSI) semiconductor electronics. Polymeric electro-optic materials can be deposited onto and will adhere to many substrates including semiconductor electronics. Additionally, these polymers can be fabricated on flexible substrates, such as Mylar. His allows the fabrication of conformal devices.

[0055] This compatibility of electro-optic polymers with a variety of materials is helpful in the development of opto-chips. These polymers are highly suited for the development of integrated opto-electronics packages where control, drive, and interface electronics are directly integrated with polymeric electro-optic devices. A final advantage of polymeric electro-optic materials is the potential for high electro-optic coefficient and lower operating voltages.

[0056] The first step in manufacturing a device envisioned involves spin casting an unpoled polymer film. An approriate solvent is chosen to lead to an appropriate viscosity, compatible with chromophore and polymers. The solvent should capable of being completely removed from the final film.

[0057] Spin casting should be carried out in a sterile environment. This is since dust particles can lead to significant light scattering and optical loss in the device. [0058] For macroscopic electro-optic activity to be finite (non-zero), chromophores must exhibit net acentric order, i.e. they must be oriented to yield a dipolar chromophore lattice. Such acentric (or non-centrosymmetric) order is introduced by electric field poling. The poling field typically has some symmetry, i.e., such as applied along the z-laboratory axis. In one embodiment, the strength of the field is up to lOOV/μm and poling temperature is up to 200 degrees C for about 1 hour. [0059] Electro-optic activity induced by electric field poling should be stable at temperatures encountered in device fabrication and operation. This implies long term stability for operating temperatures as high as 125 degrees C and short term stability for temperatures approaching 200 degrees C.

[0060] Two strategies for achieving this high thermal stability of poling-induced electro-optic activity can be pursued. The first is to prepare the chromophore/polymer composite materials where the polymer is a high glass transition temperature (T_g) polymer such as polyimide. Acentric chromophore order is induced by poling the chromophore/polymer composite material near its glass transition temperature. Cooling the material to room temperature, in the presence of the electric poling field, locks in the poling-induced electro-optic activity.

[0061] The second approach is to make use of covalent coupling of chromophore and polymer and to effect some sort of lattice hardening during the later stages of poling. Since poling and lattice hardening are both temperature-dependent processes, optimum electro-optic activity and lattice hardening are usually achieved using a protocol wherein temperature and electric field are increased in a series of steps. An initial temperature jump increases chromophore mobility and permits the chromophores to reorient in the presence of the applied electric field.

[0062] The increase in temperature drives further crosslinking. This ultimately stops chromophore reorientation in the field, thus requiring another temperature increase. Application of an electric field that is too strong to a soft lattice can cause material damage and increase optical loss. Thus, a stepped protocol also greatly reduces poling- induced optical loss.

[0063] Optical losses associated with electric field poling can be diverse. A major, but avoidable, component of poling-induced loss is associated with surface damage of polymer films arising from applying too high a voltage (particularly with corona poling) to a polymer film that is too soft. This component of poling-induced loss can be reduced to insignificant values by employing stepped poling protocols where field strength is increased in a stepwise manner as the polymer lattice is hardened. [0064] Another component of poling-induced loss that is also easily avoided is that of chromophore migration and phase separation occurring during the poling of composite materials. Covalent attachment of the chromophore to the polymer normally eliminates this type of loss.

[0065] Thus, poling-induced optical losses can be reduced to insignificant values

(e.g. « 1 dB/cm) by careful control of spin casting and poling conditions. Maintenance of material homogeneity is critical, including contamination by dust particles, and by avoiding phase separation during spin casting, poling, and lattice hardening.

[0066] Integration of electro-optic polymer with VLSI semiconductor electronic circuitry should be accomplished with avoidance optical loss associated with the underlying irregular topology of VLSI wafers. Such an optical loss can be reduced through the use of planarizing polymers.

[0067] Figure 5 is a schematic diagram detailing the possible linkages of an aspect of the invention. The next step in preparing the electro-optic polymer substrate is the input/output fiber coupling. The optimum optical mode pattern in fiber is usually nearly circular while that in electro-optic polymer waveguide is a relatively flat ellipse.

This mismatch in mode shapes and difference in index of refraction of the fiber and electro-optic polymer means that two waveguides cannot be simply joined together.

[0068] This problem can be solved by preparing the electro-optic polymer substrate with a thickness of polymer film close to that of the future waveguide's width.

Further, the introduction of an optical mode pattern close to the circular should be performed.

[0069] Mismatch due to a difference in the refraction index difference can be reduced. This may be accomplished by attaching a fiber to the base substrate in a V- groove and performing a spin casting process with the attached fibers. In this case, the air gap between the fiber and the polymer is eliminated.

[0070] Figure 6 is a hatch-section of a device according to one aspect of the invention. In this case, the prepared electro-optic polymer substrate is connected to field emission array substrate. The structure can also have spacers and sealing walls. These may be performed with a laser-assisted vacuum packaging process.

[0071] The control of each group may be accomplished by turning "on" or "off," an appropriate signal or signals. In this manner, the waveguide image can be created. [0072] The invention may be employed or used in a number of fields. These include inclusion in logic elements in a completely optical or hybridized optical logic circuit, use in a re-configurable processor employing optical channels, use in any re-configurable optical semiconductor logic device, use as wavelength conversion elements in wavelength division multiplexing and/or demultiplexing switching systems for telecommunications, external modulation of optical signals for digital signal transmission, variable optical attenuation purposes, use in an N-by-N crossbar switch used in telecommunications, tunable lasers, coding, decoding, and encryption for communication security purposes, or a optical add drop multiplexer. Of course, any portion of a system using an optical path may be implemented, including any logic function implemented on a semiconductor device. [0073] The ideas presented above may be used to provide additional functionality for secure communications. The described systems can be used to provide configurable and programmable optical technology. This may be used to help enable secure methods of transferring encryption keys and data with additional encryption over that ordinarily available using the keys alone.

[0074] Some typical secure communication methodologies use double blind random key generation algorithms to foil attacks. The data is first encrypted using the key and transmitted over the medium to the location. The decryption key is transmitted separately from data to keep it safe.

[0075] Some typical attacks happen when a both a part of the data and the encryption algorithm is known. This allows, given sufficient computing power, the ability to extract the key and hence the that data and any other data sent using that key. When a key becomes known, then any data sent encrypted with that key may be compromised. Accordingly, in these encryption systems, the key transfer is done on a limited basis.

[0076] The configurable waveguide technology can provide a way of transferring both the key and the data with additional security. An ability to detect tampering can also be implemented when using a dedicated fiber transport. The ability to reconfigure the path can be used to change the phase shift of the key transmission's color of light ("lambda") with respect to the data. An additional level of security may be found by changing the lambda over which the key is sent. By using similar reconfigurable system at the other end the key can be extracted and the data decrypted. [0077] If the line carrying the key link is tapped, it will most likely be disrupted.

This disruption can change the phase shift of the key with respect to the data and make extraction of the information impossible. Thus, such tampering in the link will can make the data undecipherable at the receiving end. This might provide an indication to the receiver that data has been tampered with.

[0078] The present ideas may be helpful to interconnection issues as well. Most typical systems and groups of systems use interconnection to couple chips, boards, and systems together. Typically, these connections are performed with metal wires. Interconnection using metal wiring presents several performance issues. First, the interconnections typically only allow a single or a small number of signals to be present at one time. Noise and cross talk through the electro-magnetic fields produced in the metal interconnects presents design issues as well. Further, the resistive nature of the metal interconnects leads to power dissipation and a resultant excess heat generation. [0079] The presently described invention can use configurable light guides as data carriers. Accordingly, many more datastreams can be defined per channel, noise and interconnect issues diminish greatly, and the resistive component of the carrier medium is greatly reduced. These characteristics, in turn, can enhance the capability of the electronic systems to interact in a more efficient manner.

[0080] This description is provided only as example. It is to be understood that various modifications to the preferred embodiments will be readily apparent to those skilled in the art.

[0074] Thus, while preferred embodiments of the invention have been disclosed, it will be readily apparent to those skilled in the art that the invention is not limited to the disclosed embodiments. Correspondingly,

Claims

We claim:

1. An apparatus for a dynamically re-configurable waveguide, comprising: a baseplate; an electro-optic material coated plate with ground electrode spaced apart from the baseplate; an electron emitting array formed on the baseplate, the array comprising a plurality of emitters positioned so that electrons emitted from any of the plurality of emitters impinge on a particular section of the electro-optic material coated plate; the emitters having a top portion and a bottom portion, the top portion nearer to the electro-optic material than the bottom portion; the electrons, when emitted, operating to change the refractive index of the electro-optic material; and at least one spacer operationally positioned between and separating the baseplate and the electro-optic material coated plate.

2. The apparatus of claim 1 wherein the emitters are conical in nature.

3. The apparatus of claim 1 wherein the density of emitters is approximately 10+8 per square centimeter.

4. The apparatus of claim 1 wherein the density of emitters is more than 10+8 per square centimeter.

5. The apparatus of claim 1 wherein the distance between the adjacent top portions is less than a wavelength of a propagated light.

6. The apparatus of claim 1 wherein the electron emitting array comprises a plurality of gates, the gates disposed in a layer above each emitter, each of the plurality of gates having a dimension of less than half the wavelength of a propagated light.

7. The apparatus of claim 1 wherein the a plurality of emitters are placed into a group, the group defining a set of controllable emitters.

8. The apparatus of claim 7 wherein the group has approximately one hundred emitters.

9. The apparatus of claim 7 wherein the group has more than one hundred emitters.

10. The apparatus of claim 7 wherein the group forms a triangular shape.

11. The apparatus of claim 1 wherein said electron emitting array creates, in response to a common applied voltage, a two-dimensional subwavelength periodicity on the electro-optic material coated plate with a different refraction index.

12. The apparatus of claim 1 wherein said electron emitting array, in response to a common applied voltage which is parallel to polarization vector of the electro-optic material, creates a region in the electro-optic material that is characterized by total internal reflection guiding.

13. The apparatus of claim 1 wherein said electron emitting array, in response to a common applied voltage which is parallel to polarization vector of the electro-optic material, creates a region in the electro-optic material that is characterized by photonic band gap guiding.

14. The apparatus of claim 1 wherein said electron emitting array adaptively creates, in response to a signal, a waveguide in the electro-optic material.

15. A semiconductor chip having a reconfigurable optical waveguide, the chip comprising: a wave guide layer comprising electro-optic material, the wave guide layer having a first refractive index absent the presence of an electric field; a first electric conducting layer relatively close to the wave guide layer; a second electric conducting layer positioned apart from the first electric conducting layer, the second conducting layer comprising a plurality of electrical contacts, a current flowing between the plurality of electrical contacts and the first electric conducting layer producing an electric field associated with each of the plurality of electric contacts conducting electricity; and wherein the refractive index of associated portions of the wave guide layer change in response to the electric field associated with each of the plurality of electric contacts.

16. The apparatus of claim 15 wherein the contacts are conical in nature.

17. The apparatus of claim 15 wherein the density of the contacts is approximately 10+8 per square centimeter.

18. The apparatus of claim 15 wherein the density of the contacts is more than 10+8 per square centimeter.

19. The apparatus of claim 15 wherein the distance between top portions of adjacent contacts is less than a wavelength of a propagated light.

20. The apparatus of claim 15 further comprising a plurality of gates, the gates disposed in a layer above each of the plurality of contacts, each of the plurality of gates having a dimension of less than half the wavelength of a propagated light.

21. The apparatus of claim 15 wherein the plurality of contacts are placed into a group, the group defining a set of controllable contacts.

22. The apparatus of claim 21 wherein the group has approximately one hundred contacts.

23. The apparatus of claim 21 wherein the group has more than one hundred contacts.

24. The apparatus of claim 21 wherein the group forms a triangular shape.

25. The apparatus of claim 15 wherein said plurality of contacts creates, in response to a common applied voltage, a two-dimensional subwavelength periodicity on the electro-optic material with a different refraction index.

26. The apparatus of claim 15 wherein said plurality of contacts, in response to a common applied voltage which is parallel to polarization vector of the electro-optic material, creates a region in the electro-optic material that is characterized by total internal reflection guiding.

27. The apparatus of claim 15 wherein said plurality of contacts, in response to a common applied voltage which is parallel to polarization vector of the electro-optic material, creates a region in the electro-optic material that is characterized by photonic band gap guiding.

28. The apparatus of claim 15 wherein said plurality of contacts adaptively creates, in response to a signal, a waveguide in the electro-optic material.

29. An apparatus for a dynamically re-configurable waveguide, comprising: a baseplate; an electro-optic material coated plate with ground electrode spaced apart from the baseplate; an array of electric field generating structures formed on the baseplate, the array comprising a plurality of structures positioned so that an electric field formed from any of the plurality of structures impinge on a particular section of the electro-optic material coated plate; the structures having a top portion and a bottom portion, the top portion nearer to the electro-optic material than the bottom portion; the electric field operable to change the refractive index of the electro-optic material; and at least one spacer operationally positioned between and separating the baseplate and the electro-optic material coated plate.

30. The apparatus of claim 29 wherein the structures are conical in nature.

31. The apparatus of claim 29 wherein the density of structures is approximately 10+8 per square centimeter.

32. The apparatus of claim 29 wherein the density of structures is more than 10+8 per square centimeter.

33. The apparatus of claim 29 wherein the distance between the adjacent top portions is less than a wavelength of a propagated light.

34. A semiconductor chip having a reconfigurable optical waveguide, the chip comprising: a wave guide layer comprising electro-optic material, the wave guide layer having a first refractive index absent the presence of an electric field; a first electric conducting layer relatively close to the wave guide layer; a second electric conducting layer positioned apart from the first electric conducting layer, the second conducting layer comprising a plurality of electrical contacts, a current flowing between the plurality of electrical contacts and the first electric conducting layer producing an electric field associated with each of the plurality of electric contacts conducting electricity; a control circuitry coupled to the plurality of emitters; wherein the refractive index of associated portions of the wave guide layer change in response to the electric field associated with each of the plurality of electric contacts; and the current associated with a particular waveguide operable in response to a signal from the control circuitry.

35. A method for selectively routing light energy in a semiconductor device, the method comprising: creating an electric field in a structure within the semiconductor device, the electric field impinging upon a particular section of an electro-optic material within the semiconductor device; changing, at least in part from the step of creating the electric field, a refractive index of the electro-optic material; and forming a light path in the electro-optic material as a result of the step of changing the refractive index of the electro optic material.

36. The method of claim 35 wherein the structure creating the electric field is formed on a baseplate.

37. The method of claim 36 wherein the electro-optic material is coated on a plate with a ground electrode spaced apart from the baseplate.

38. The method of claim 37 wherein at least one spacer is positioned between and separates the baseplate and the electro-optic material.

39. The method of claim 35 wherein the structure comprises an array of structures, and the structures have a top portion and a bottom portion, the top portion nearer to the electro-optic material than the bottom portion.

40. The method of claim 39 wherein the top portion has a smaller dimension than the bottom portion.

41. A method for selectively routing light energy in a semiconductor device, the method comprising: creating a stream of electrons from an emitter within the semiconductor device, the electron stream impinging upon a particular section of an electro-optic material within the semiconductor device; changing, at least in part from the step of creating the stream of electrons, a refractive index of the electro-optic material; and forming a light path in the electro-optic material as a result of the step of changing the refractive index of the electro optic material.

42. The method of claim 41 wherein the emitter creating the electron stream is formed on a baseplate.

43. The method of claim 42 wherein the electro-optic material is coated on a plate with a ground electrode spaced apart from the baseplate.

44. The method of claim 43 wherein at least one spacer is positioned between and separates the baseplate and the electro-optic material.

45. The method of claim 41 wherein the emitter is one of an array of emitters, and the emitters have a top portion and a bottom portion, the top portion nearer to the electro- optic material than the bottom portion.

46. The method of claim 45 wherein the top portion has a smaller dimension than the bottom portion.