[go: up one dir, main page]

WO2003015128A3 - An electromechanical switch and method of fabrication - Google Patents

An electromechanical switch and method of fabrication Download PDF

Info

Publication number
WO2003015128A3
WO2003015128A3 PCT/US2002/024927 US0224927W WO03015128A3 WO 2003015128 A3 WO2003015128 A3 WO 2003015128A3 US 0224927 W US0224927 W US 0224927W WO 03015128 A3 WO03015128 A3 WO 03015128A3
Authority
WO
WIPO (PCT)
Prior art keywords
cantilever arm
switch
air gap
substrate
cantilever
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2002/024927
Other languages
French (fr)
Other versions
WO2003015128A2 (en
Inventor
Michael Pedersen
Mehmet Ozgur
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corp for National Research Initiatives
Original Assignee
Corp for National Research Initiatives
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corp for National Research Initiatives filed Critical Corp for National Research Initiatives
Priority to AU2002355553A priority Critical patent/AU2002355553A1/en
Publication of WO2003015128A2 publication Critical patent/WO2003015128A2/en
Publication of WO2003015128A3 publication Critical patent/WO2003015128A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/16—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes
    • H01G5/18—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture using variation of distance between electrodes due to change in inclination, e.g. by flexing, by spiral wrapping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
    • H01G5/40—Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0018—Special provisions for avoiding charge trapping, e.g. insulation layer between actuating electrodes being permanently polarised by charge trapping so that actuating or release voltage is altered
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0072—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stoppers or protrusions for maintaining a gap, reducing the contact area or for preventing stiction between the movable and the fixed electrode in the attracted position

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

A micro-electro-mechanical (MEM) switch (100) formed on a substrate (120) allows switching of various types of electrical conductor structures. The switch (100) contains a tilting cantilever arm (116), which tilts around central points of attachment (117A, 117B). At least two conducting electrodes (123A, 123B) on the cantilever arm (116) and the substrate (120) air gap capacitors, which when electrically charged provide electrostatic attraction forces that cause the cantilever arm (116) to deflect and tilt until conducting electrodes (123A, 123B) near the tips of the cantilever arm (116) make electrical contact with fixed electrodes (111A, 111B) on the underlying substrate (120). The air gap capacitors on either side of the cantilever (116) points allow the switch (100) to be driven into both ON and OFF states. Holes (121) in the cantilever arm near the air gap capacitors allow air within the gap to escape, thereby reducing damping and increasing the mechanical bandwidth of the switch.
PCT/US2002/024927 2001-08-07 2002-08-07 An electromechanical switch and method of fabrication Ceased WO2003015128A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002355553A AU2002355553A1 (en) 2001-08-07 2002-08-07 An electromechanical switch and method of fabrication

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US31022301P 2001-08-07 2001-08-07
US60/310,223 2001-08-07
US20819302A 2002-07-31 2002-07-31
US10/208,193 2002-07-31

Publications (2)

Publication Number Publication Date
WO2003015128A2 WO2003015128A2 (en) 2003-02-20
WO2003015128A3 true WO2003015128A3 (en) 2003-09-25

Family

ID=26902982

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/024927 Ceased WO2003015128A2 (en) 2001-08-07 2002-08-07 An electromechanical switch and method of fabrication

Country Status (2)

Country Link
AU (1) AU2002355553A1 (en)
WO (1) WO2003015128A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107424875A (en) * 2017-07-24 2017-12-01 中北大学 A kind of cross SP3T switch

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE382188T1 (en) * 2003-10-31 2008-01-15 Nxp Bv MICROELECTROMECHANICAL HIGH FREQUENCY SYSTEMS AND METHOD FOR PRODUCING SUCH SYSTEMS
WO2006046194A1 (en) 2004-10-27 2006-05-04 Koninklijke Philips Electronics N. V. Reduction of air damping in mems device
EP2326347A4 (en) * 2008-09-12 2013-03-06 Xbiotech Inc TARGETING PATHOGENIC MONOCYTES
US8570705B2 (en) * 2010-01-15 2013-10-29 Wispry, Inc. MEMS sprung cantilever tunable capacitors and methods
DE102010013611A1 (en) * 2010-03-22 2011-09-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Hybrid actuator element e.g. electrostatic actuator, for actuating high temperature prevail or aggressive fluid in fluid system, has deflection element and housing part that comprise sintering layers, and arms made of ceramic layers
US8916996B2 (en) * 2011-07-29 2014-12-23 General Electric Company Electrical distribution system
CN103943420B (en) * 2014-04-15 2017-06-23 清华大学 MEMS relay, cantilever switch and forming method thereof
CN104064407B (en) * 2014-06-12 2016-04-20 清华大学 MEMS switch
CN114758928A (en) * 2017-07-24 2022-07-15 中北大学 Straight plate type practical radio frequency MEMS switch
CN108648964B (en) * 2018-06-15 2020-06-09 中北大学 A radio frequency MEMS switch based on electrode structure without release holes
DE102023209781A1 (en) * 2023-10-06 2025-04-10 Robert Bosch Gesellschaft mit beschränkter Haftung Micromechanical switch

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
US6127744A (en) * 1998-11-23 2000-10-03 Raytheon Company Method and apparatus for an improved micro-electrical mechanical switch

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4570139A (en) * 1984-12-14 1986-02-11 Eaton Corporation Thin-film magnetically operated micromechanical electric switching device
US5051643A (en) * 1990-08-30 1991-09-24 Motorola, Inc. Electrostatically switched integrated relay and capacitor
US6127744A (en) * 1998-11-23 2000-10-03 Raytheon Company Method and apparatus for an improved micro-electrical mechanical switch

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107424875A (en) * 2017-07-24 2017-12-01 中北大学 A kind of cross SP3T switch

Also Published As

Publication number Publication date
AU2002355553A1 (en) 2003-02-24
WO2003015128A2 (en) 2003-02-20

Similar Documents

Publication Publication Date Title
US6608268B1 (en) Proximity micro-electro-mechanical system
US6127744A (en) Method and apparatus for an improved micro-electrical mechanical switch
US6734770B2 (en) Microrelay
US6307169B1 (en) Micro-electromechanical switch
WO2003015128A3 (en) An electromechanical switch and method of fabrication
EP1093141A3 (en) Non-volatile mems micro-relays using magnetic actuators
KR100485787B1 (en) Micro Electro Mechanical Structure RF swicth
WO2003028059A8 (en) Mems switches and methods of making same
EP1075703A1 (en) Method and apparatus for an improved single pole double throw micro-electrical mechanical switch
EP1785391A3 (en) Multi-stable electromechanical switches and methods of fabricating same
WO2004038819A3 (en) Piezoelectric switch for tunable electronic components
SE0302437D0 (en) Film actuator based RF MEMS switching circuits
CA2183477A1 (en) Variable Capacitor
WO1999050863A3 (en) Fabricating and using a micromachined magnetostatic relay or switch
CN108439325A (en) Micro Electronic Mechanical System device and adjust its movable member shape method
CA2347764A1 (en) Semi-bifurcated electrical contacts
RU2004126853A (en) LOW VOLTAGE CIRCUIT BREAKER
EP0978893B1 (en) Single-pole single-throw microelectro-mechanical switch with active off-state control
WO2003034457A3 (en) High cycle mems device
WO2005015594A3 (en) Bistable micromechanical switch, actuating method and corresponding method for realizing the same
WO2005069330A1 (en) Electro-mechanical micro-switch device
WO2003059805A3 (en) Micro device
EP0794543A3 (en) Electromechanical switch
KR100678346B1 (en) MEMS RF Switch
JP2003217423A (en) High output micromachining switch

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NO NZ OM PH PL PT RO RU SD SE SG SI SK SL TJ TM TN TR TT TZ UA UG UZ VN YU ZA ZM ZW

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BY BZ CA CH CN CO CR CU CZ DE DM DZ EC EE ES FI GB GD GE GH HR HU ID IL IN IS JP KE KG KP KR LC LK LR LS LT LU LV MA MD MG MN MW MX MZ NO NZ OM PH PL PT RU SD SE SG SI SK SL TJ TM TN TR TZ UA UG UZ VN YU ZA ZM

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ UG ZM ZW AM AZ BY KG KZ RU TJ TM AT BE BG CH CY CZ DK EE ES FI FR GB GR IE IT LU MC PT SE SK TR BF BJ CF CG CI GA GN GQ GW ML MR NE SN TD TG

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR IE IT LU MC NL PT SE SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
REG Reference to national code

Ref country code: DE

Ref legal event code: 8642

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Country of ref document: JP