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WO2003010489A3 - Method and apparatus for surface roughness measurement - Google Patents

Method and apparatus for surface roughness measurement Download PDF

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Publication number
WO2003010489A3
WO2003010489A3 PCT/IB2002/004174 IB0204174W WO03010489A3 WO 2003010489 A3 WO2003010489 A3 WO 2003010489A3 IB 0204174 W IB0204174 W IB 0204174W WO 03010489 A3 WO03010489 A3 WO 03010489A3
Authority
WO
WIPO (PCT)
Prior art keywords
incidence
surface roughness
light beam
angles
incidence angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2002/004174
Other languages
French (fr)
Other versions
WO2003010489A2 (en
Inventor
Vladimir Ya Mendeleev
Ko Sergei N Skovorod
Andrei Kourilovitch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HOHNER CORP
Original Assignee
HOHNER CORP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HOHNER CORP filed Critical HOHNER CORP
Publication of WO2003010489A2 publication Critical patent/WO2003010489A2/en
Publication of WO2003010489A3 publication Critical patent/WO2003010489A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A method and apparatus for surface roughness measurement are provided, wherein the method and apparatus utilize a light source directing a light beam at an incidence angle θ onto a surface to be measured; a light detector measuring the intensity I(θ) of at least a portion of said light beam reflected from said surface; said light beam movable such that said incidence angle θ is variable over a sequence of angles (θi ...θn) between grazing and normal incidence to said surface, where i is the index counter of the incidence angle in the sequence from O to n, and n is the number of incidence angles; and a processing unit for recording and converting values of said incidence angles and values of intensity signals from said light detector into a surface roughness value for said surface.
PCT/IB2002/004174 2001-07-25 2002-07-25 Method and apparatus for surface roughness measurement Ceased WO2003010489A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US30781901P 2001-07-25 2001-07-25
US60/307,819 2001-07-25

Publications (2)

Publication Number Publication Date
WO2003010489A2 WO2003010489A2 (en) 2003-02-06
WO2003010489A3 true WO2003010489A3 (en) 2003-11-20

Family

ID=23191291

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2002/004174 Ceased WO2003010489A2 (en) 2001-07-25 2002-07-25 Method and apparatus for surface roughness measurement

Country Status (1)

Country Link
WO (1) WO2003010489A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106840048A (en) * 2016-12-17 2017-06-13 江汉大学 Roughness measuring device and method

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6595951B2 (en) * 2016-05-19 2019-10-23 株式会社神戸製鋼所 Method and apparatus for estimating roughness of metal plate

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218144A (en) * 1977-09-09 1980-08-19 The Rank Organisation Limited Measuring instruments
WO2000058713A2 (en) * 1999-03-31 2000-10-05 Semiconductor 300 Gmbh & Co. Kg Device for rapidly measuring angle-dependent diffraction effects on finely structured surfaces

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4218144A (en) * 1977-09-09 1980-08-19 The Rank Organisation Limited Measuring instruments
WO2000058713A2 (en) * 1999-03-31 2000-10-05 Semiconductor 300 Gmbh & Co. Kg Device for rapidly measuring angle-dependent diffraction effects on finely structured surfaces

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
J.C. LE BOSSE ET AL.: "Characterisation of surface roughness by laser light scattering:specularly scattered intensity measuremnt", WEAR, vol. 209, no. 1-2, August 1997 (1997-08-01), switzerland, pages 328 - 337, XP001165782 *
V. YA. MENDELEEV: "Study of the possibility to measure the root-mean-square roughness of a shaded rough surface", OPTICS AND SPECTROSCOPY (TRANSLATED FROM OPTIKA I SPEKTROSKOPIYA,VOL. 89,NO. 3,SEPTEMBER 2000,PP 433-437, vol. 89, no. 3, September 2000 (2000-09-01), Russia, pages 397 - 401, XP001160823 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106840048A (en) * 2016-12-17 2017-06-13 江汉大学 Roughness measuring device and method

Also Published As

Publication number Publication date
WO2003010489A2 (en) 2003-02-06

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