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WO2003006977A3 - Schichtverbund und mikromechanisches sensorelement, insbesondere gassensorelement, mit diesem schichtverbund - Google Patents

Schichtverbund und mikromechanisches sensorelement, insbesondere gassensorelement, mit diesem schichtverbund Download PDF

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Publication number
WO2003006977A3
WO2003006977A3 PCT/DE2002/002024 DE0202024W WO03006977A3 WO 2003006977 A3 WO2003006977 A3 WO 2003006977A3 DE 0202024 W DE0202024 W DE 0202024W WO 03006977 A3 WO03006977 A3 WO 03006977A3
Authority
WO
WIPO (PCT)
Prior art keywords
gas
sensor element
layered composite
layer
catalytically active
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2002/002024
Other languages
English (en)
French (fr)
Other versions
WO2003006977A2 (de
Inventor
Kurt Ingrisch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to US10/483,134 priority Critical patent/US20040213702A1/en
Priority to EP02745118A priority patent/EP1415144A2/de
Priority to JP2003512696A priority patent/JP2004534253A/ja
Publication of WO2003006977A2 publication Critical patent/WO2003006977A2/de
Publication of WO2003006977A3 publication Critical patent/WO2003006977A3/de
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/0037—NOx
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G01N33/0013—Sample conditioning by a chemical reaction
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Es wird ein Schichtverbund mit einer gassensitiven Schicht (15) und einer damit zumindest bereichsweise stoffschlüssig verbundenen, katalytisch aktiven Schicht (16) vorgeschlagen, wobei die gassensitive Schicht (15) ein erstes Material und die katalytisch aktive Schicht (16) das erste Material und einen katalytisch aktiven Zusatzstoff aufweist. Weiter ist vorgesehen, dass der spezifische elektrische Widerstand der katalytisch aktiven Schicht (16) höher als der der gassensitiven Schicht (15) ist. Daneben wird ein mikromechanisches Sensorelement (5), insbesondere ein Gassensorelement, mit einer dielektrischen Schicht (11), einer darauf angeordneten gassensitiven Schicht (15) und Mitteln (14) zum Erfassen einer Änderung der elektrischen Leitfähigkeit der gassensitiven Schicht (15) unter dem Einfluss eines Gases vorgeschlagen. Dabei ist vorgesehen, dass die nicht von der dielektrischen Schicht (11) eingenommene Oberfläche der gassensitiven Schicht (15) von einer katalytisch aktiven Schicht (16) bedeckt ist, und dass die gassensitive Schicht (15) und die katalytisch aktive Schicht (16) den vorgeschlagenen Schichtverbund bilden.
PCT/DE2002/002024 2001-07-10 2002-06-04 Schichtverbund und mikromechanisches sensorelement, insbesondere gassensorelement, mit diesem schichtverbund Ceased WO2003006977A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US10/483,134 US20040213702A1 (en) 2001-07-10 2002-06-04 Layered composite and micromechanical sensor element, in particular gas sensor element having said layered composite
EP02745118A EP1415144A2 (de) 2001-07-10 2002-06-04 Schichtverbund und mikromechanisches sensorelement, insbesondere gassensorelement, mit diesem schichtverbund
JP2003512696A JP2004534253A (ja) 2001-07-10 2002-06-04 複合層並びに、この複合層を備えたマイクロメカニック式のセンサエレメント、特にガスセンサエレメント

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10133466A DE10133466B4 (de) 2001-07-10 2001-07-10 Schichtverbund und mikromechanisches Sensorelement, insbesondere Gassensorelement, mit diesem Schichtverbund
DE10133466.4 2001-07-10

Publications (2)

Publication Number Publication Date
WO2003006977A2 WO2003006977A2 (de) 2003-01-23
WO2003006977A3 true WO2003006977A3 (de) 2003-04-03

Family

ID=7691265

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2002/002024 Ceased WO2003006977A2 (de) 2001-07-10 2002-06-04 Schichtverbund und mikromechanisches sensorelement, insbesondere gassensorelement, mit diesem schichtverbund

Country Status (5)

Country Link
US (1) US20040213702A1 (de)
EP (1) EP1415144A2 (de)
JP (1) JP2004534253A (de)
DE (1) DE10133466B4 (de)
WO (1) WO2003006977A2 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101084623B (zh) 2004-10-29 2012-02-01 北电网络有限公司 带阻滤波器
KR100721261B1 (ko) * 2005-11-30 2007-05-25 전자부품연구원 마이크로 가스 센서, 그의 제조 방법, 그의 패키지 및 그패키지의 제조 방법
DE102006035788A1 (de) * 2006-07-28 2008-01-31 Contros Systems & Solutions Gmbh Vorrichtung zur Erfassung von Meßdaten
US9784708B2 (en) 2010-11-24 2017-10-10 Spec Sensors, Llc Printed gas sensor
DE102011012682A1 (de) 2011-03-01 2012-09-06 Hella Kgaa Hueck & Co. Gassensor, insbesondere füe automobile Anwendungen
EP2533037B1 (de) * 2011-06-08 2019-05-29 Alpha M.O.S. Gassensor vom Chemoresistortyp mit einer mehrstöckigen Architektur
WO2016040771A1 (en) 2014-09-12 2016-03-17 Spec Sensors, Llc Breath sampling devices and methods of breath sampling using sensors
CN105445420B (zh) 2014-09-24 2019-12-06 普因特工程有限公司 微加热器和微传感器及其制造方法
WO2016109781A1 (en) * 2014-12-31 2016-07-07 Spec Sensors, Llc Electronic device covers having gas sensors
WO2016191552A1 (en) 2015-05-26 2016-12-01 Spec Sensors, Llc Wireless near-field gas sensor system and methods of manufacturing the same
US20160370336A1 (en) * 2015-06-18 2016-12-22 Point Engineering Co., Ltd. Micro Heater and Micro Sensor
KR101808239B1 (ko) 2015-09-04 2017-12-13 (주)포인트엔지니어링 마이크로 히터 및 마이크로 센서
KR101805784B1 (ko) 2015-11-11 2017-12-07 (주)포인트엔지니어링 마이크로 히터 및 마이크로 센서 및 마이크로 센서 제조방법
CN116477662B (zh) * 2023-04-27 2024-08-27 深圳市汇投智控科技有限公司 气敏材料、传感器以及制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4224280A (en) * 1977-07-18 1980-09-23 Fuji Electric Co., Ltd. Carbon monoxide detecting device
EP0024679A1 (de) * 1979-08-22 1981-03-11 Siemens Aktiengesellschaft Selektiver Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung des Verunreinigungsgehaltes von Luft auf der Basis von Metalloxidhalbleitern
JPS5999243A (ja) * 1982-11-29 1984-06-07 Toshiba Corp 感ガス素子
US4958514A (en) * 1984-10-13 1990-09-25 Ngk Spark Plug Co., Ltd. Gas sensing element
DE19806308A1 (de) * 1998-02-16 1999-08-26 Siemens Ag Gassensor zur Sauerstoffmessung mit Verwendung und Meßverfahren

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19708770C1 (de) * 1997-03-04 1998-08-27 Siemens Ag Gassensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4224280A (en) * 1977-07-18 1980-09-23 Fuji Electric Co., Ltd. Carbon monoxide detecting device
EP0024679A1 (de) * 1979-08-22 1981-03-11 Siemens Aktiengesellschaft Selektiver Gassensor hoher Empfindlichkeit und Stabilität zum Nachweis und zur Messung des Verunreinigungsgehaltes von Luft auf der Basis von Metalloxidhalbleitern
JPS5999243A (ja) * 1982-11-29 1984-06-07 Toshiba Corp 感ガス素子
US4958514A (en) * 1984-10-13 1990-09-25 Ngk Spark Plug Co., Ltd. Gas sensing element
DE19806308A1 (de) * 1998-02-16 1999-08-26 Siemens Ag Gassensor zur Sauerstoffmessung mit Verwendung und Meßverfahren

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 008, no. 215 (P - 305) 2 October 1984 (1984-10-02) *
SIMON ISOLDE ET AL: "Micromachined metal oxide gas sensors: opportunities to improve sensor performance", SENSORS AND ACTUATORS, vol. B73, no. 1, 25 February 2001 (2001-02-25), pages 1 - 26, XP001120244 *

Also Published As

Publication number Publication date
DE10133466B4 (de) 2007-10-11
US20040213702A1 (en) 2004-10-28
JP2004534253A (ja) 2004-11-11
WO2003006977A2 (de) 2003-01-23
DE10133466A1 (de) 2003-01-30
EP1415144A2 (de) 2004-05-06

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