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WO2003089957A3 - Micro piezoelectric actuator and method for fabricating same - Google Patents

Micro piezoelectric actuator and method for fabricating same Download PDF

Info

Publication number
WO2003089957A3
WO2003089957A3 PCT/KR2003/000785 KR0300785W WO03089957A3 WO 2003089957 A3 WO2003089957 A3 WO 2003089957A3 KR 0300785 W KR0300785 W KR 0300785W WO 03089957 A3 WO03089957 A3 WO 03089957A3
Authority
WO
WIPO (PCT)
Prior art keywords
actuators
axis
gimbals
membranes
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2003/000785
Other languages
French (fr)
Other versions
WO2003089957A2 (en
Inventor
Kyu-Ho Hwang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
M2N Inc
Original Assignee
M2N Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/KR2002/000701 external-priority patent/WO2002084753A1/en
Application filed by M2N Inc filed Critical M2N Inc
Priority to AU2003223125A priority Critical patent/AU2003223125A1/en
Publication of WO2003089957A2 publication Critical patent/WO2003089957A2/en
Publication of WO2003089957A3 publication Critical patent/WO2003089957A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/004—Angular deflection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
    • H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end
    • H10N30/2043—Cantilevers, i.e. having one fixed end connected at their free ends, e.g. parallelogram type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)

Abstract

An optical switching device includes a mirror (90), a first and a second actuator (60, 61) for adjusting a tilt angle of the mirror (90) on the x-axis, a third and a fourth actuators (260, 261) for adjusting tilt angles of the first and the second actuators (60, 61) on the y-axis, gimbals (160) for supporting the first and the second actuators (60, 61) and a driving substrate for applying a driving signal to the actuators. Each of the actuators has membranes (60a, 60b, 260a, 260b), a piezoelectric layer (65) formed on each of the membranes (60a, 60b, 260a, 260b) and a connecting part (22, 42) having two elastic bodies (22b, 42b) coupled to the membranes (60a, 60b, 260a, 260b) and a connecting member (22a, 42a) coupled between the two elastic bodies (22b, 42b). The gimbals (160) include a groove (75) thereon in a lateral direction to prevent the gimbals (160) from being bent when the piezoelectric layers (65) are constricted or expanded. The optical switching device controls the tilting of the mirror (90) on the x-axis independently of the tilting thereof on the y-axis.
PCT/KR2003/000785 2002-04-17 2003-04-17 Micro piezoelectric actuator and method for fabricating same Ceased WO2003089957A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003223125A AU2003223125A1 (en) 2002-04-17 2003-04-17 Micro piezoelectric actuator and method for fabricating same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/KR2002/000701 WO2002084753A1 (en) 2001-04-17 2002-04-17 Micro piezoelectric actuator and method for fabricating same
KRPCT/KR02/00701 2002-04-17

Publications (2)

Publication Number Publication Date
WO2003089957A2 WO2003089957A2 (en) 2003-10-30
WO2003089957A3 true WO2003089957A3 (en) 2003-12-04

Family

ID=29244672

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2003/000785 Ceased WO2003089957A2 (en) 2002-04-17 2003-04-17 Micro piezoelectric actuator and method for fabricating same

Country Status (3)

Country Link
KR (1) KR20040103977A (en)
AU (1) AU2003223125A1 (en)
WO (1) WO2003089957A2 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4550653B2 (en) * 2005-04-15 2010-09-22 富士通株式会社 Micro movable element and optical switching device
DE102007027428A1 (en) * 2007-06-14 2008-12-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Component with a vibration element
DE102009026506A1 (en) 2009-05-27 2010-12-02 Robert Bosch Gmbh Micromechanical component and production method for a micromechanical component
CN103180239B (en) * 2010-07-05 2016-01-06 艾伦·迈克 Piezoelectric based microelectromechanical lens actuation system
KR102235703B1 (en) * 2014-02-12 2021-04-05 삼성디스플레이 주식회사 Display device and method of manufacturing a display device
DE102017200055A1 (en) * 2017-01-04 2018-07-05 Robert Bosch Gmbh MEMS sensor device and method for manufacturing a MEMS sensor device
CN109723945B (en) * 2019-01-10 2021-04-06 北京机械设备研究所 Precise pointing platform based on flexible parallelogram mechanism
WO2024261200A1 (en) 2023-06-20 2024-12-26 OQmented GmbH Mems device having a holding structure comprising a spring structure, inner frame structure and/or lever structure
DE102023116051A1 (en) * 2023-06-20 2024-12-24 OQmented GmbH MEMS DEVICE WITH A LEVER STRUCTURE

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6198565B1 (en) * 1998-11-16 2001-03-06 Victor Company Of Japan, Limited Light deflection element and display apparatus using same
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
WO2002024570A1 (en) * 2000-09-25 2002-03-28 Bookham Technology Plc Micro electro-mechanical systems

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6201629B1 (en) * 1997-08-27 2001-03-13 Microoptical Corporation Torsional micro-mechanical mirror system
US6198565B1 (en) * 1998-11-16 2001-03-06 Victor Company Of Japan, Limited Light deflection element and display apparatus using same
WO2002024570A1 (en) * 2000-09-25 2002-03-28 Bookham Technology Plc Micro electro-mechanical systems

Also Published As

Publication number Publication date
WO2003089957A2 (en) 2003-10-30
KR20040103977A (en) 2004-12-09
AU2003223125A1 (en) 2003-11-03
AU2003223125A8 (en) 2003-11-03

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