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WO2003078859A3 - Reinforced chemical mechanical planarization belt - Google Patents

Reinforced chemical mechanical planarization belt Download PDF

Info

Publication number
WO2003078859A3
WO2003078859A3 PCT/US2003/007389 US0307389W WO03078859A3 WO 2003078859 A3 WO2003078859 A3 WO 2003078859A3 US 0307389 W US0307389 W US 0307389W WO 03078859 A3 WO03078859 A3 WO 03078859A3
Authority
WO
WIPO (PCT)
Prior art keywords
belt
chemical mechanical
mechanical planarization
processing
processing belt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2003/007389
Other languages
French (fr)
Other versions
WO2003078859A2 (en
Inventor
Jibing Lin
Diane J Hymes
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/097,337 external-priority patent/US6666326B2/en
Priority claimed from US10/112,447 external-priority patent/US20030186630A1/en
Application filed by Lam Research Corp filed Critical Lam Research Corp
Priority to JP2003576832A priority Critical patent/JP2005520335A/en
Priority to AU2003213823A priority patent/AU2003213823A1/en
Priority to KR10-2004-7014272A priority patent/KR20040105766A/en
Priority to EP03711516A priority patent/EP1483182A4/en
Priority to TW092105436A priority patent/TW586158B/en
Publication of WO2003078859A2 publication Critical patent/WO2003078859A2/en
Publication of WO2003078859A3 publication Critical patent/WO2003078859A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B65G15/32—Belts or like endless load-carriers made of rubber or plastics
    • B65G15/34—Belts or like endless load-carriers made of rubber or plastics with reinforcing layers, e.g. of fabric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/02—Backings, e.g. foils, webs, mesh fabrics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D29/00—Producing belts or bands
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2305/00—Condition, form or state of the layers or laminate
    • B32B2305/08—Reinforcements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2413/00—Belts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Belt Conveyors (AREA)

Abstract

A processing belt (150, 160, 170) for use in chemical mechanical planarization (CMP), is provided. The processing belt is reinforced with one of a mesh belt (154) and a woven fabric (164). The processing belt includes a polymeric material (152) encasing the mesh belt to define the processing belt. The processing belt is fabricated so that the mesh belt forms a continuous loop within the polymeric material, and the mesh belt is constructed as a grid of intersecting members (174). The intersecting members are joined at fixed joints (176) to form a rigid support structure for the processing belt.
PCT/US2003/007389 2002-03-12 2003-03-10 Reinforced chemical mechanical planarization belt Ceased WO2003078859A2 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2003576832A JP2005520335A (en) 2002-03-12 2003-03-10 Reinforced chemical mechanical flattening belt
AU2003213823A AU2003213823A1 (en) 2002-03-12 2003-03-10 Reinforced chemical mechanical planarization belt
KR10-2004-7014272A KR20040105766A (en) 2002-03-12 2003-03-10 Reinforced chemical mechanical planarization belt
EP03711516A EP1483182A4 (en) 2002-03-12 2003-03-10 Reinforced chemical mechanical planarization belt
TW092105436A TW586158B (en) 2002-03-12 2003-03-12 Reinforced chemical mechanical planarization belt

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US10/097,337 2002-03-12
US10/097,337 US6666326B2 (en) 2002-03-12 2002-03-12 Reinforced chemical mechanical planarization belt
US10/112,447 US20030186630A1 (en) 2002-03-29 2002-03-29 Reinforced chemical mechanical planarization belt
US10/112,447 2002-03-29

Publications (2)

Publication Number Publication Date
WO2003078859A2 WO2003078859A2 (en) 2003-09-25
WO2003078859A3 true WO2003078859A3 (en) 2004-03-25

Family

ID=28044136

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2003/007389 Ceased WO2003078859A2 (en) 2002-03-12 2003-03-10 Reinforced chemical mechanical planarization belt

Country Status (7)

Country Link
EP (1) EP1483182A4 (en)
JP (1) JP2005520335A (en)
KR (1) KR20040105766A (en)
CN (1) CN1639034A (en)
AU (1) AU2003213823A1 (en)
TW (1) TW586158B (en)
WO (1) WO2003078859A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8491360B2 (en) * 2007-10-26 2013-07-23 Innopad, Inc. Three-dimensional network in CMP pad
TWI713526B (en) * 2016-05-20 2020-12-21 智勝科技股份有限公司 Base layer, polishing pad with base layer and polishing method
KR20220027186A (en) * 2019-08-01 2022-03-07 베른도르프 이노베이션즈 운트 테크놀로지 게엠베하 How to manufacture an endless belt
CN111168503B (en) * 2020-01-17 2021-02-19 三峡大学 A kind of grinding device with adjustable stiffness and using method

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5234551A (en) * 1981-09-24 1993-08-10 Dutt William H Extended nip press belt having an interwoven base fabric and an impervious impregnant
US5906269A (en) * 1994-08-12 1999-05-25 Habasit Globe, Inc. Conveyor belting and method of manufacture
US5938007A (en) * 1996-10-21 1999-08-17 Mitsuboshi Belting Ltd. Conveying belt and method of forming the belt
US6000532A (en) * 1997-03-11 1999-12-14 Huyck Austria Gmbh Textile belt
US6260692B1 (en) * 1996-07-02 2001-07-17 Yokohama Rubber Co., Ltd Conveyor belt

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2014990C1 (en) * 1991-11-06 1994-06-30 Иван Николаевич Щербина Abrasive endless belt
US6736714B2 (en) * 1997-07-30 2004-05-18 Praxair S.T. Technology, Inc. Polishing silicon wafers

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5234551A (en) * 1981-09-24 1993-08-10 Dutt William H Extended nip press belt having an interwoven base fabric and an impervious impregnant
US5906269A (en) * 1994-08-12 1999-05-25 Habasit Globe, Inc. Conveyor belting and method of manufacture
US6260692B1 (en) * 1996-07-02 2001-07-17 Yokohama Rubber Co., Ltd Conveyor belt
US5938007A (en) * 1996-10-21 1999-08-17 Mitsuboshi Belting Ltd. Conveying belt and method of forming the belt
US6000532A (en) * 1997-03-11 1999-12-14 Huyck Austria Gmbh Textile belt

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1483182A4 *

Also Published As

Publication number Publication date
AU2003213823A8 (en) 2003-09-29
EP1483182A2 (en) 2004-12-08
AU2003213823A1 (en) 2003-09-29
EP1483182A4 (en) 2007-04-25
TW200304180A (en) 2003-09-16
TW586158B (en) 2004-05-01
CN1639034A (en) 2005-07-13
WO2003078859A2 (en) 2003-09-25
KR20040105766A (en) 2004-12-16
JP2005520335A (en) 2005-07-07

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