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WO2003071009A1 - Procede et dispositif pour mettre en contact electrique un produit plat dans des installations electrolytiques - Google Patents

Procede et dispositif pour mettre en contact electrique un produit plat dans des installations electrolytiques Download PDF

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Publication number
WO2003071009A1
WO2003071009A1 PCT/DE2003/000408 DE0300408W WO03071009A1 WO 2003071009 A1 WO2003071009 A1 WO 2003071009A1 DE 0300408 W DE0300408 W DE 0300408W WO 03071009 A1 WO03071009 A1 WO 03071009A1
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WO
WIPO (PCT)
Prior art keywords
goods
contact
linear
transport
contacts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/DE2003/000408
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German (de)
English (en)
Inventor
Egon Hübel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to AU2003210140A priority Critical patent/AU2003210140A1/en
Priority to DE10390639T priority patent/DE10390639D2/de
Publication of WO2003071009A1 publication Critical patent/WO2003071009A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
    • C25D17/005—Contacting devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/06—Wires; Strips; Foils
    • C25D7/0614—Strips or foils
    • C25D7/0621—In horizontal cells
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D11/00—Electrolytic coating by surface reaction, i.e. forming conversion layers
    • C25D11/005—Apparatus specially adapted for electrolytic conversion coating
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/22—Secondary treatment of printed circuits
    • H05K3/24—Reinforcing the conductive pattern
    • H05K3/241—Reinforcing the conductive pattern characterised by the electroplating method; means therefor, e.g. baths or apparatus

Definitions

  • the invention relates to a method for electrical contacting of flat goods in continuous electrolytic systems.
  • the invention further relates to a device for performing the method.
  • the invention is preferably used in the electrochemical treatment of printed circuit boards, conductive foils, wafers and tapes. It is suitable for continuous systems with electrodes that are soluble or insoluble in the electrolyte.
  • Continuous systems with horizontal or vertical transport of the goods are known for the electrochemical treatment of plates or foils or endless belts.
  • the goods are gripped, for example, by means of transport rollers or clamps and conveyed continuously through such systems lying or hanging.
  • the material must be electrically connected to a pole of a bath current source. This connection is made using a contact.
  • the other pole of the bath current source is connected to a counter electrode, an electrolytic cell being formed by the counter electrode, the bath and the bath current source.
  • the invention is fundamentally suitable for all electrochemical processes, namely for electroplating, etching, anodizing and for cathodic reduction. To abbreviate the description, the invention is described below only for electroplating.
  • the material is poled cathodically, that is cathode and the counter electrode is poled anodically, ie anode.
  • cathode and anode are also referred to neutrally as electrodes.
  • DE 196 33 797 A1 a horizontal continuous system is described.
  • Metallic contact rollers are arranged between the anodes in the transport direction of the goods, which are poled cathodically and at the same time ensure the continuous transport of the goods. Because a complete electrical shielding of the contact rollers against the anodes is not possible due to the rotation of the rollers, these rollers are galvanized or metallized just like the material.
  • a demetallization cathode is arranged in the vicinity of each roller. It is disadvantageous that the demetallization is not carried out completely. There is a risk of particle formation due to non-stick layers or metal flakes on the contact roller and on the demetallization cathode.
  • Non-prepublished publication DE 100 43 817 A1 describes a contact electrode which is used to transmit current to the good, in particular for a good with insulated structures to be treated electrolytically hey of the good pressed. A special drive is used for this.
  • the goods are transported step by step or according to the principle of the "flying saw".
  • the object of the present invention is to provide a method and a device which are suitable for electrical contacting of flat and of any weight in continuous systems and which do not have the disadvantages mentioned.
  • they should enable a technically very simple and inexpensive implementation.
  • they should not show any wear during the current transmission to the contact means.
  • Figure la shows in cross section a linear contact, with a rigid contact strip, which is mounted insulated in a rigid or elastic shaft.
  • Figure 1 b shows in cross section a linear contact with an elastic contact strip, which is mounted insulated in a rigid or elastic shaft.
  • Figure 2 shows the basic principle of the movements of the linear contact at different times during the transport of the goods.
  • FIG. 3 shows a further embodiment of the invention at different times during the transportation of the goods.
  • Figure 4 shows a detail of an embodiment of a lifting drive
  • FIGS. 1 a and 1 b each show a linear contact 20 in cross section, which is placed on the good 1 and makes electrical contact with the good for power transmission, the good having an electrically conductive surface.
  • the linear contacts extend parallel to the surface of the goods into the plane of the drawing. With a large length in the drawing plane, the linear contact is referred to as a strip contact, e.g. if it extends across the entire transport path of the goods. A shorter linear contact is called a cuboid contact. If the surface of the linear contact that faces the material is round, the linear contact is referred to as a cylinder contact.
  • the cuboid contact and the cylinder contact are preferably used for edge contacting of the goods.
  • the linear contact 20 consists of a contact strip 23, 24 and a shaft 22 which is fastened to a carrier 21. At least one holder 12 is attached to the opposite side of the carrier and is held by an electromotive or mechanically actuated lifting device 28. This raises and lowers the linear contact in the directions of arrow 8.
  • a lifting device can actuate several linear contacts, for example also linear contacts opposite one another on the top and bottom of the goods. Appropriate levers are used for this.
  • the lifting height is at least so large that the contacting surface 27 no longer electrically contacts the surface of the good 1; this is the case with a lifting height of 1 mm, for example. This means that the electrical and mechanical contact is interrupted until the next touchdown.
  • the most common application of the invention is the bilateral treatment of the goods.
  • the contact force of the linear contact 20 is absorbed by a support 31 on the opposite side.
  • the pad 31 can be provided with a ramp and be arranged in a fixed manner. It is also preferably attached to a lifting device with an elastic holder. As a result of the static friction, it is taken away by the goods when pressed. As with the linear contacts, the return transport takes place by mechanical relaxation.
  • the linear contact 20 can also be lifted off by a corresponding movement of the good itself.
  • a lifting device acts on the means of transport that convey the goods or on the holders of the goods. The lifting device 28 is then not required.
  • the one or more holders 12 are then attached to the fixed housing of the electrolytic system.
  • This type of contacting is advantageous when the material 1 is light and the linear contacts are comparatively heavy, for example in wafer processing, hybrid processing or in films for smart cards that can only be treated on one side.
  • the bath current source 30 is switched off shortly before the linear contact is lifted off the surface of the material and is only switched on again after the next placement. This avoids a possible tear-off spark of the bath current and unnecessary galvanizing of the contacting surface 27.
  • the contact strip 23, 24 can be metallized.
  • a demetallization electrode 29, which is poled cathodically when the linear contact is lifted, for example by means of a polarity reversal device, or the cathodic material are used to demetallize the contact strip.
  • the shaft 22 of the linear contact consists of a rigid or elastic, electrically insulating material.
  • a contact strip 23, 24 is embedded in the shaft 22.
  • the contact strip 23, 24 is connected to the bath current source 30 via insulated and flexible electrical conductors 10 within the linear contact and in the further course via insulated and flexible conductors 26.
  • the other pole of the bath current source is connected to the anode 5.
  • the present invention requires an elastic linear contact 20 and / or an elastic holder 12, which are slim as shown in the figures.
  • the shaft 22 of the linear contact consists of an elastic, chemically stable and electrically insulating material.
  • the holder 12 can be made of metal or plastic and can be made elastic at least in the transport direction of the goods. A sprung joint can also be used for this.
  • FIG. 1 a shows a linear contact which is equipped with a rigid contact strip 23.
  • the contact strip 23 is preferably made of an electrochemically resistant metal, for example titanium or niobium.
  • the metal can also be provided with an electrically conductive and resistant surface coating, for example made of a noble metal.
  • the rigid contact strip 23 can be resiliently mounted in the shaft 22 by means of at least one spring. If partial areas of the surface of the material 1 to be treated are covered with an insulating resist, the remaining free surface is not reliably contacted by a metallic rigid contact strip 23.
  • the linear contact shown in FIG. 1b is suitable for this.
  • the elastic or rigid and electrically insulating shaft 22 is fastened to the carrier 21.
  • An elastic contact strip 24 is located in this shaft. It consists of the elastic material described below and provided with electrically conductive fillers.
  • the contact strip 24 is of the shaft 22 and thus of an electrically insulating material surround. This insulating material protects the contact strip 24 against undesired metallization with cathodic polarity. Due to the elasticity of the contact strip 24, it is also possible to reliably contact good 1 which is partially provided with resist.
  • the contact strip consists, for example, of stamped and stacked metal plates which have a thickness of, for example, 0.1 mm. The metal plates stacked into a strip are inserted in place of the lower part of the contact strip 24 and fastened in the shaft 22, for example, by positive locking.
  • the metal plates are supported upwards against the remaining elastic and electrically conductive material of the contact strip 24, which thus establishes a common electrical connection of all metal plates to the flexible electrical conductor 10.
  • a movable, metallic contact acts towards the goods.
  • the contact strip can consist of resilient metallic brush strips to adapt to surface unevenness.
  • FIG. 2 shows the basic principle of the movements of a linear contact 20 at different times 3 during the transport of the goods 1 for the electrical contacting thereof in a continuous system.
  • the linear contact is held by an elastic and slim holder 12. This holder connects the linear contact 20 to the lifting device 28.
  • the lifting device which moves the linear contact in the direction of the arrows 8, is manufactured, controlled and driven by means of known techniques in mechanical engineering and automation technology.
  • the transport drive of the good 1, which acts on the good here via the symbolically represented transport rollers 25, is permanently switched on.
  • the transport rollers 25 can be used in any number. Instead of the transport rollers, wheel shafts can also be used to transport the goods. This is advantageous when treating sensitive foils.
  • other means of transport are suitable, such as clips, for example, which grip and transport the goods. Because, according to the invention, these means of transport do not transmit electrical current must, they can consist of non-conductive materials and can be manufactured inexpensively.
  • the goods 1 to be treated are electrically contacted by means of the linear contacts 20.
  • These linear contacts are generally arranged between the transport rollers 25 as strip contacts and extend across the entire transport path of the goods, i.e. perpendicular to the direction of transport.
  • the strip contacts can also be arranged at an angle to this and up to an angle of 90 ° to the transport direction 19. In this case, the material 1 is contacted electrically at the edge or on both edges.
  • An arrangement of linear contacts in the form of strip contacts, cuboid contacts or cylindrical contacts on three or four sides of the goods is also possible.
  • Elongated strip contacts can also be arranged transversely to the transport direction 19 and symmetrically to the center of the transport path of the continuous system and can be made shorter than the width of the transport path in its longitudinal extent.
  • the linear contacts 20 can also be arranged in the region of the end faces of the transport rollers 25 in close succession in the transport direction 19. With this arrangement, too, the goods are contacted at the edge or at the edges.
  • the linear contacts 20 in the design as a cuboid contact or cylinder contact are particularly suitable for this.
  • the linear contacts 20 with the contacting surface 27 are pressed by means of the lifting device 28 from an initial position onto the surface of the good 1 to be contacted electrically.
  • the continuously transported good 1 takes the linear contact 20 in the pressed state on the contacting surface 27 as a result of the static friction in the direction of movement 2.
  • the elastic holder 12 is thereby mechanically bent in the manner shown and mechanically tensioned.
  • the linear contact is lifted off the material again by means of the lifting device 28, as a result of which the holder 12 relaxes again.
  • the linear contact automatically and quickly moves back against the transport direction to the starting position. After that the linear contact is pressed against the surface of the goods again and the process is repeated cyclically.
  • the associated bath current source is switched on with the required polarity.
  • several linear contacts are supplied with treatment current from a bath current source.
  • the linear contacts are switched to the bath power source from time t2 to t5 by means of an electronic or electromechanical switch.
  • the associated bath current source is expediently switched off immediately before the linear contact is lifted off the goods. Wear of the contact strips 23, 24 is thus avoided.
  • An electronic control is used for the synchronization of the movements. Electronic switches and controls are state of the art. They are not shown in the figures. The electrolyte flow devices in such systems are also known and are therefore not shown. FIG.
  • FIG. 2 shows the situation of a linear contact 20 during the electrolytic treatment of the goods 1 at times 3 from t1 to t7.
  • the linear contact 20 is lifted and the device is in a relaxed state.
  • the linear contact establishes the electrical contact with the material by means of the lifting device 28.
  • the linear contact rests on the good 1.
  • the electrolytic bath current is switched on.
  • the transported good 1 takes the contacting surface 27 of the linear contact 20 with it.
  • the holder 12 bends increasingly.
  • the bath power source is switched off at time t5.
  • the linear contact is lifted off the goods.
  • the time t6 corresponds to the time t1.
  • the process is repeated continuously.
  • FIG. 3 shows a further embodiment of the invention which is particularly suitable for the use of cuboid contacts and cylinder contacts.
  • the shaft 22 of the linear contact 20 is made of an elastic material.
  • FIG. 4 shows a preferred embodiment for lifting and placing the linear contact 20 onto the surface of the good 1 to be contacted.
  • the lifting movement is derived directly from the transport drive of the good and controlled by means of cams.
  • Transport rollers or transport wheels 25 convey the goods through the electrolytic treatment space 16 in the direction of the transport direction arrow 19.
  • Each linear contact 20 is fastened to a leg 11 or a bending beam. These are supported or held on one side at the pivot point 9 or the bending point. This point is fixed.
  • the bending beam is pressed in the direction of the arrow 6 by means of a force. This causes the pressing force of the linear contact 20 against the good 1.
  • the force can, for. B. applied by a spring or by gravity.
  • a weight must be arranged on the lower bending beam 11 on the opposite side of the pivot point 9.
  • a cam 7 is attached to the front of the transport rollers 25. This controls the stroke movements of the linear contact.
  • the cam 7 at top dead center 4 opens the electrical contact with the material once per roller revolution in order to relax the linear contact.
  • the cam is equipped with several top dead centers 4. It then resembles a gear wheel. This also applies analogously to the cams 7 on the underside of the goods.
  • the transport rollers 25 are set in motion via a gear drive. This always gives a fixed reference to the cam position. This allows linear contacts arranged one after the other in the transport direction to be lifted off at different times. As a result, the goods 1 are electrically contacted without interruption, even if individual linear contacts have just lifted off. In the illustration in FIG. 4, every fourth linear contact opens simultaneously. The other three linear contacts carry the electrolytic current.
  • the fixed reference of the cam position for the transport of the goods allows a safe synchronization of the electrical or electronic switches for switching the respective linear contacts on and off. This embodiment of the invention is particularly advantageous because no additional drives and control and synchronization elements are required to move the linear contacts.
  • the surface is also contacted on one side.
  • the linear contacts must be supported on the opposite side of the goods.
  • Flat bodies serve as a support 31 for this purpose. They can also consist of elastic materials.
  • Vibrators or vibrators can be used to support the electrochemical process. These act on the linear contacts 20 and vibrate the material 1. This improves the exchange of materials on the surfaces to be treated and in the holes. This allows a higher current density to be used.
  • the bath current is conducted directly at the system via insulated, flexible current strips 26 or high-current strands the linear contacts. Such conductors are almost wear-free.
  • the bath current can be direct current or unipolar or act bipolar pulse current. In the figures, predominantly acting polarity for the electroplating of the good 1 is shown. The polarities in brackets are effective if the linear contact is to be demetallized.
  • a metallic rigid contact strip 23 is very well suited for the full-surface contacting of goods. However, if there is an electrically insulating resist for structure formation on the surface of the good, contacting the conductive surface areas is not possible.
  • the linear contact with a contact strip 24 is used, which consists of an elastic and electrically conductive material.
  • Such materials are e.g. Elastomers, silicones or rubber that have been provided with electrically conductive fillers during their manufacture.
  • the fillers consist e.g. from metal powder, metal flakes and similar particles. Particles of chemically resistant noble metal are preferred. The dimensions of such particles are approximately 1 ⁇ m to 10 ⁇ m in diameter.
  • the possible duration of the electrolytic treatment per cycle depends, among other things, on the transport speed, the dimensions of the electrodes, the current density used, the intensity of the flow of electrolyte against the material and the required exposure time.
  • the duration per cycle or treatment step ranges from 10 milliseconds to one minute.
  • the length of a treatment step in large systems is 1 mm to 250 mm.
  • the length of the treatment steps is matched to the distances between the linear contacts so that all surface areas of the goods are treated electrochemically at the same time in a continuous system.
  • the linear contact 20 can also be arranged obliquely up to an angle of 90 ° to the transport direction of the goods. Such an obliquely arranged linear contact contacts two successive sections of material in the continuous system. The gripping of the linear contact into a gap of goods that follow one another at a distance is thus avoided.
  • the anodes can also be cut accordingly at an angle.
  • the principle of electrical contacting of goods according to the invention can also be applied when using contact electrodes, which are described in the publication DE 100 43 817 A1.
  • the contact electrode is carried by at least one elastic holder.
  • the electrical contacting of goods in continuous systems has the following further features: No electrical sliding contact is required because the current is supplied to the linear contact without wear by means of electrical conductors 26 in the form of flexible current strips or high-current strands.
  • the wear of the sliding contacts according to the prior art is eliminated.
  • the contact strip 23, 24 can be electrically insulated very simply and reliably, in contrast to contact rollers as used in the prior art. Unwanted metallization of the contacts is reliably avoided during electroplating.
  • the invention is also suitable for the electrical contacting of material in electroless chemical plating baths.
  • a contact is used to apply a cathodic potential to the material.
  • the anode is at least one auxiliary electrode that faces the material in the bathroom.
  • the cathodic polarization of the material supports the metallization process.
  • the necessary devices for promoting the circulation of the electrolyte in the electrolytic bath and devices for electrolyte regeneration are state of the art and are therefore not shown in the figures.
  • the figures basically also apply to continuous systems with vertical transport of the goods.
  • the schematic representations represent the top views.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

La présente invention concerne la mise en contact électrique d'un produit plat dans des installations électrolytiques continues. Elle concerne en particulier le traitement électrochimique de cartes de circuits imprimés et de films conducteurs. Le produit (1) est mis en contact électrique par des contacts linéaires élastiques (20). Les surfaces (27) matérialisant le contact sont appliquées contre la surface du produit (1) pour permettre la transmission de courant. Au cours du traitement électrochimique, une petite partie des contacts linéaires (20) est entraînée par le produit (1) transporté en continu, en raison des frottements d'adhérence, et enserrée mécaniquement. Après une étape de traitement, les contacts linéaires (20) sont séparés de la surface du produit (1), ce qui leur permet de se relâcher contre la direction de transport. Un traitement électrochimique continu a lieu grâce à plusieurs contacts linéaires qui matérialisent le contact à différents instants. Les contacts linéaires sont connectés à une source de courant pour bain par des conducteurs électriques flexibles (26). La présence de balais de contact n'est pas nécessaire.
PCT/DE2003/000408 2002-02-17 2003-02-12 Procede et dispositif pour mettre en contact electrique un produit plat dans des installations electrolytiques Ceased WO2003071009A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2003210140A AU2003210140A1 (en) 2002-02-17 2003-02-12 Method and device for electrically contacting a flat product in electrolytic installations
DE10390639T DE10390639D2 (de) 2002-02-17 2003-02-12 Verfahren und Vorrichtung zur elektrischen Kontaktierung von flachem Gut in elektrolytischen Anlagen

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2002107941 DE10207941A1 (de) 2002-02-17 2002-02-17 Verfahren und Vorrichtung zur elektrischen Kontaktierung von flachem Gut in elektrolytischen Anlagen
DE10207941.2 2002-02-17

Publications (1)

Publication Number Publication Date
WO2003071009A1 true WO2003071009A1 (fr) 2003-08-28

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2003/000408 Ceased WO2003071009A1 (fr) 2002-02-17 2003-02-12 Procede et dispositif pour mettre en contact electrique un produit plat dans des installations electrolytiques

Country Status (4)

Country Link
AU (1) AU2003210140A1 (fr)
DE (2) DE10207941A1 (fr)
TW (1) TW200304506A (fr)
WO (1) WO2003071009A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005028718A2 (fr) 2003-09-04 2005-03-31 Atotech Deutschland Gmbh Systeme d'alimentation en courant dans un dispositif de traitement electrochimique
WO2007014779A3 (fr) * 2005-08-03 2007-04-12 Schmid Gmbh & Co Geb Dispositif pour traiter des substrats, en particulier pour effectuer un depot electrolytique sur des cartes de circuits imprimes, et procede correspondant

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4385967A (en) * 1981-10-07 1983-05-31 Chemcut Corporation Electroplating apparatus and method
DE4123985A1 (de) * 1991-07-19 1993-01-21 Hoellmueller Maschbau H Vorrichtung zur elektrolytischen behandlung von leiterplatten oder dergleichen, insbesondere zur elektrolytischen beschichtung mit kupfer
US6071400A (en) * 1996-03-29 2000-06-06 Atotech Deutschland Gmbh Method and device for the electrochemical treatment with treatment liquid of an item to be treated
DE10019713A1 (de) * 2000-04-20 2001-10-31 Atotech Deutschland Gmbh Vorrichtung und Verfahren zur elektrischen Kontaktierung von elektrolytisch zu behandelndem Gut in Durchlaufanlagen
DE10043815A1 (de) * 2000-09-06 2002-04-04 Egon Huebel Verfahren und Vorrichtung zur elektrischen Kontaktierung von zu behandelndem Gut in elektrolytischen Anlagen
DE10043817A1 (de) * 2000-09-06 2002-04-04 Egon Huebel Anordnung und Verfahren für elektrochemisch zu behandelndes Gut
DE10043816C1 (de) * 2000-09-06 2002-05-16 Egon Huebel Vorrichtung zur elektrochemischen Behandlung von Gut

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4385967A (en) * 1981-10-07 1983-05-31 Chemcut Corporation Electroplating apparatus and method
DE4123985A1 (de) * 1991-07-19 1993-01-21 Hoellmueller Maschbau H Vorrichtung zur elektrolytischen behandlung von leiterplatten oder dergleichen, insbesondere zur elektrolytischen beschichtung mit kupfer
US6071400A (en) * 1996-03-29 2000-06-06 Atotech Deutschland Gmbh Method and device for the electrochemical treatment with treatment liquid of an item to be treated
DE10019713A1 (de) * 2000-04-20 2001-10-31 Atotech Deutschland Gmbh Vorrichtung und Verfahren zur elektrischen Kontaktierung von elektrolytisch zu behandelndem Gut in Durchlaufanlagen
DE10043815A1 (de) * 2000-09-06 2002-04-04 Egon Huebel Verfahren und Vorrichtung zur elektrischen Kontaktierung von zu behandelndem Gut in elektrolytischen Anlagen
DE10043817A1 (de) * 2000-09-06 2002-04-04 Egon Huebel Anordnung und Verfahren für elektrochemisch zu behandelndes Gut
DE10043816C1 (de) * 2000-09-06 2002-05-16 Egon Huebel Vorrichtung zur elektrochemischen Behandlung von Gut

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005028718A2 (fr) 2003-09-04 2005-03-31 Atotech Deutschland Gmbh Systeme d'alimentation en courant dans un dispositif de traitement electrochimique
DE10340888B3 (de) * 2003-09-04 2005-04-21 Atotech Deutschland Gmbh Stromversorgungseinrichtung in einer Vorrichtung zur elektrochemischen Behandlung
US7815777B2 (en) 2003-09-04 2010-10-19 Atotech Deutschland Gmbh Power supply device in a device for electrochemical treatment
WO2007014779A3 (fr) * 2005-08-03 2007-04-12 Schmid Gmbh & Co Geb Dispositif pour traiter des substrats, en particulier pour effectuer un depot electrolytique sur des cartes de circuits imprimes, et procede correspondant

Also Published As

Publication number Publication date
TW200304506A (en) 2003-10-01
AU2003210140A1 (en) 2003-09-09
DE10390639D2 (de) 2005-01-05
DE10207941A1 (de) 2003-09-04

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