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WO2003067241A2 - Capteur de gaz et son procede de production - Google Patents

Capteur de gaz et son procede de production Download PDF

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Publication number
WO2003067241A2
WO2003067241A2 PCT/EP2003/001118 EP0301118W WO03067241A2 WO 2003067241 A2 WO2003067241 A2 WO 2003067241A2 EP 0301118 W EP0301118 W EP 0301118W WO 03067241 A2 WO03067241 A2 WO 03067241A2
Authority
WO
WIPO (PCT)
Prior art keywords
cover
gas
sensor
wafer
gas sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2003/001118
Other languages
German (de)
English (en)
Other versions
WO2003067241A3 (fr
Inventor
Stefan Felix Raible
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to EP03704543A priority Critical patent/EP1472526A2/fr
Priority to AU2003206838A priority patent/AU2003206838A1/en
Publication of WO2003067241A2 publication Critical patent/WO2003067241A2/fr
Publication of WO2003067241A3 publication Critical patent/WO2003067241A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment

Definitions

  • the invention relates to a gas sensor with at least one sensor region, which is formed by a gas-sensitive material applied to a substrate, and to a method for producing such sensors.
  • the sensor materials of gas sensors are usually sensitive to moisture. They should only be used in an appropriately protected environment.
  • the production of a large number of such sensors by applying the materials to an afer is also only possible using special techniques for separating the individual sensors from the common wafer.
  • the standard methods used for dicing mostly use water that wets the wafer during the dicing process and damages or destroys the gas-sensitive layer. These methods are therefore not directly applicable here.
  • the present invention has for its object to provide a gas sensor that can also be used in a moisture-laden environment, and to propose a rational, inexpensive method for its production.
  • the object is achieved with a gas sensor having at least one sensor area, which is formed by a gas-sensitive material applied to a substrate, which is characterized in accordance with the invention in that at least the sensor area or areas are covered by a gas-permeable but liquid-impermeable cover.
  • the cover can be a diffusion filter, for example made of PTFE, or a plastic film.
  • the cover can be formed from an embossed filter paper. This enables particularly cost-effective production.
  • the cover can additionally be covered with a plastic film which can be removed or destroyed before the sensor is used.
  • a plastic film can be used for this purpose, the adhesion of which can be destroyed by UV light.
  • the method according to the invention for producing gas sensors is characterized in that a multiplicity of sensor regions are applied to a wafer before a gas-permeable but liquid-impermeable but liquid-impermeable cover which has been applied or embossed is applied and then the individual gas sensors are removed from the Wafer package can be cut out.
  • a lattice frame can first be placed on the wafer for support in such a way that the sensor surface rich and possibly existing contact points are located in the spaces between the grids.
  • liquid-impermeable cover Thanks to the liquid-impermeable cover, it is now possible to use standard methods to separate the sensors. The otherwise usually used scribing and breaking of the wafer package can now be dispensed with.
  • the wafer can also be applied to a slotted carrier through which needles can be passed from the rear after being separated for piercing the individual gas sensors.
  • the slots in the carrier also ensure pressure equalization when the wafer and the carrier are bonded and during operation.
  • a plastic film can also be applied to the cover.
  • the cover itself can also be made in different ways.
  • it can itself be a plastic film.
  • it can be made by embossing diffusion filter paper.
  • FIG. 1 shows a schematic illustration of a manufacturing method according to the invention for manufacturing the gas sensor from FIG. 2 with a liquid-impermeable cover applied to a lattice frame; 2 shows a partially sectioned illustration of a gas sensor;
  • FIG. 3 shows a partially sectioned illustration of a second gas sensor
  • Fig. 4 is a partially sectioned illustration of a gas sensor with several sensor areas.
  • FIG. 1 shows a manufacturing method for manufacturing the gas sensor 10 shown in FIG. 2, which has a sensor region 12 arranged on a substrate 11 and four contacts 13.
  • the sensor 10 is provided on its upper side with a liquid-impermeable but gas-permeable cover 14.
  • a support frame 15 serves to support the flat cover 14.
  • the substrate 11 rests on a support 16 which is provided with slots 17 in its surface.
  • a multiplicity of sensor regions are applied to a wafer 11, which forms the substrate.
  • the individual sensor areas are indicated as points in FIG. 1.
  • the wafer 11 is applied with a carrier 16 which has slots 17 in its surface.
  • a carrier frame 15 is placed in such a way that the sensor areas 12 (FIG. 2) and the contacts 13 come to rest in the openings 18 in the grating frame 15.
  • the carrier frame 15 serves as a support for a filter paper 14 and / or a protective film which forms a liquid-tight but gas-permeable cover.
  • the filter paper 14 and / or the film have cutouts which allow access to the contact points 13.
  • the wafer package 20 shown in FIG. 1 is produced.
  • ket 20 can now be applied to adhesive film for further processing (bluetape).
  • the individual gas sensors 10 can then be cut out of this package 20 by standard separation methods (wafer saw) and lifted out for further processing, for example, by means of needles passed through the back of the adhesive film.
  • FIG. 3 shows an alternative embodiment of a gas sensor 30 with a substrate 31 and a sensor area 32, which are glued onto a circuit board 33.
  • the entire substrate 31 with the electrical contacts is covered here by a cover 34, the cover 34 being an embossed diffusion filter paper which is fixed by a ring edge 35, for example by an annular globtop adhesive.
  • the cover 14 could also be formed from an embossed filter paper.
  • the frame support 15 for the cover 14 could then be omitted.
  • Such embossed filter paper can of course also be placed on the wafer 11 according to FIG. 1. There, too, it would have the advantage that no lattice frame 15 would have to be put on.
  • FIG. 4 shows a gas sensor 40 with a plurality of substrates 41, each of which is provided with a sensor area, which can be differently sensitive.
  • the sensor 40 can thus be used to detect different gases. All of the individual substrates 41 are placed on a common carrier 42 and covered by a common cover 44 towards the top. The cover 44 is held by a frame 43 on the carrier 42.
  • the covers 14, 34 and 44 can additionally be provided with a film which ensures even better protection of the sensor against moisture.
  • This film can be used before the sensors 10, 30, 40 are subtracted.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

L'invention concerne un capteur de gaz (10) comprenant une zone de détection (12) qui est constituée d'une matière sensible au gaz et appliquée sur un substrat (11). Au moins la ou les zone(s) de détection (12) est/sont recouverte(s) d'un couvercle (14) perméable au gaz mais imperméable au liquide.
PCT/EP2003/001118 2002-02-05 2003-02-05 Capteur de gaz et son procede de production Ceased WO2003067241A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP03704543A EP1472526A2 (fr) 2002-02-05 2003-02-05 Capteur de gaz et son procede de production
AU2003206838A AU2003206838A1 (en) 2002-02-05 2003-02-05 Gas sensor and method for producing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2002104458 DE10204458A1 (de) 2002-02-05 2002-02-05 Gassensor
DE10204458.9 2002-02-05

Publications (2)

Publication Number Publication Date
WO2003067241A2 true WO2003067241A2 (fr) 2003-08-14
WO2003067241A3 WO2003067241A3 (fr) 2004-03-11

Family

ID=27588331

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2003/001118 Ceased WO2003067241A2 (fr) 2002-02-05 2003-02-05 Capteur de gaz et son procede de production

Country Status (4)

Country Link
EP (1) EP1472526A2 (fr)
AU (1) AU2003206838A1 (fr)
DE (1) DE10204458A1 (fr)
WO (1) WO2003067241A2 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2391622A (en) * 2002-07-31 2004-02-11 Amgas Ltd Protecting gas sensors from condensation
GB2422432A (en) * 2005-01-22 2006-07-26 Draeger Safety Ag & Co Kgaa Gas sensor
EP1950281A1 (fr) * 2007-01-29 2008-07-30 Fp Sensor Systems GmbH Dispositif de mesure destiné à la détermination de l'activité d'un processus de fermentation
WO2017055806A1 (fr) * 2015-09-30 2017-04-06 Cambridge Cmos Sensors Limited Capteur de gaz à région perméable aux gaz
TWI670480B (zh) * 2018-01-31 2019-09-01 研能科技股份有限公司 氣體檢測裝置
US20210239665A1 (en) * 2014-06-09 2021-08-05 Biometry Inc. Mini point of care gas chromatographic test strip and method to measure analytes
US20220041436A1 (en) * 2019-01-31 2022-02-10 Robert Bosch Gmbh Method for producing a plurality of sensor devices, and sensor device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005073716A1 (fr) 2004-01-27 2005-08-11 H2Scan Corporation Configuration de capteur de gaz isole
DE102006060113A1 (de) * 2006-12-20 2008-06-26 Appliedsensor Gmbh Sensor und Herstellungsverfahren eines Sensors
DE102009047299A1 (de) * 2009-11-30 2011-07-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 Gassensor zur Erfassung eines Gases in einer Flüssigkeit
DE102015201822A1 (de) 2015-02-03 2016-08-04 Robert Bosch Gmbh Sensorvorrichtung, Sensorsystem und Verfahren

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4638286A (en) * 1985-03-26 1987-01-20 Enron Corp. Reactive gas sensor
US5209275A (en) * 1987-07-09 1993-05-11 Junkosha Co., Ltd. Liquid dispensing apparatus and method by sensing the type of liquid vapors in the receiver
GB2208006A (en) * 1987-08-11 1989-02-15 Emi Plc Thorn Gas sensing device
DE4339737C1 (de) * 1993-11-22 1995-01-19 Siemens Ag Gassensor
DE19549147C2 (de) * 1995-12-29 1998-06-04 Siemens Ag Gassensor
US5798556A (en) * 1996-03-25 1998-08-25 Motorola, Inc. Sensor and method of fabrication
GB9805867D0 (en) * 1998-03-20 1998-05-13 Aromascan Plc Sensor manufacture
US6041643A (en) * 1998-07-27 2000-03-28 General Electric Company Gas sensor with protective gate, method of forming the sensor, and method of sensing
FR2798996A1 (fr) * 1999-09-23 2001-03-30 Suisse Electronique Microtech Capteur electrochimique a autodiagnostic

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2391622B (en) * 2002-07-31 2005-07-27 Amgas Ltd Condensation filter
GB2391622A (en) * 2002-07-31 2004-02-11 Amgas Ltd Protecting gas sensors from condensation
GB2422432A (en) * 2005-01-22 2006-07-26 Draeger Safety Ag & Co Kgaa Gas sensor
GB2422432B (en) * 2005-01-22 2007-11-28 Draeger Safety Ag & Co Kgaa Gas sensor
US7406854B2 (en) 2005-01-22 2008-08-05 Dräger Safety AG & Co. KGaA Gas sensor
EP1950281A1 (fr) * 2007-01-29 2008-07-30 Fp Sensor Systems GmbH Dispositif de mesure destiné à la détermination de l'activité d'un processus de fermentation
US20210239665A1 (en) * 2014-06-09 2021-08-05 Biometry Inc. Mini point of care gas chromatographic test strip and method to measure analytes
US12117429B2 (en) * 2014-06-09 2024-10-15 Biometry Inc. Mini point of care gas chromatographic test strip and method to measure analytes
WO2017055806A1 (fr) * 2015-09-30 2017-04-06 Cambridge Cmos Sensors Limited Capteur de gaz à région perméable aux gaz
US11022576B2 (en) 2015-09-30 2021-06-01 Sciosense B.V. Gas sensor with a gas permeable region
CN108369208A (zh) * 2015-09-30 2018-08-03 Ams传感器英国有限公司 具有气体可渗透区域的气体传感器
TWI670480B (zh) * 2018-01-31 2019-09-01 研能科技股份有限公司 氣體檢測裝置
US20220041436A1 (en) * 2019-01-31 2022-02-10 Robert Bosch Gmbh Method for producing a plurality of sensor devices, and sensor device
US12195330B2 (en) * 2019-01-31 2025-01-14 Robert Bosch Gmbh Method for producing a plurality of sensor devices, and sensor device

Also Published As

Publication number Publication date
AU2003206838A1 (en) 2003-09-02
DE10204458A1 (de) 2003-08-14
WO2003067241A3 (fr) 2004-03-11
EP1472526A2 (fr) 2004-11-03

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