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WO2003058286A3 - Composants monolithiques de guidage optique - Google Patents

Composants monolithiques de guidage optique Download PDF

Info

Publication number
WO2003058286A3
WO2003058286A3 PCT/IL2003/000031 IL0300031W WO03058286A3 WO 2003058286 A3 WO2003058286 A3 WO 2003058286A3 IL 0300031 W IL0300031 W IL 0300031W WO 03058286 A3 WO03058286 A3 WO 03058286A3
Authority
WO
WIPO (PCT)
Prior art keywords
micro
actuators
attenuators
optical
components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IL2003/000031
Other languages
English (en)
Other versions
WO2003058286A2 (fr
Inventor
Dan Haronian
Ran Vered
Eitan Efron
Rahav Cohen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GALAYOR NETWORKS Inc
Original Assignee
GALAYOR NETWORKS Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GALAYOR NETWORKS Inc filed Critical GALAYOR NETWORKS Inc
Priority to AU2003235773A priority Critical patent/AU2003235773A1/en
Publication of WO2003058286A2 publication Critical patent/WO2003058286A2/fr
Anticipated expiration legal-status Critical
Publication of WO2003058286A3 publication Critical patent/WO2003058286A3/fr
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3502—Optical coupling means having switching means involving direct waveguide displacement, e.g. cantilever type waveguide displacement involving waveguide bending, or displacing an interposed waveguide between stationary waveguides
    • G02B6/3508—Lateral or transverse displacement of the whole waveguides, e.g. by varying the distance between opposed waveguide ends, or by mutual lateral displacement of opposed waveguide ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/264—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting
    • G02B6/266—Optical coupling means with optical elements between opposed fibre ends which perform a function other than beam splitting the optical element being an attenuator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3586—Control or adjustment details, e.g. calibrating
    • G02B6/3588—Control or adjustment details, e.g. calibrating of the processed beams, i.e. controlling during switching of orientation, alignment, or beam propagation properties such as intensity, size or shape
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
    • G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
    • G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/3552—1x1 switch, e.g. on/off switch
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3594—Characterised by additional functional means, e.g. means for variably attenuating or branching or means for switching differently polarized beams

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Optical Integrated Circuits (AREA)

Abstract

La présente invention se rapporte à de nouveaux composants de guides d'ondes optiques, commandés via des micro-actionneurs qui déplacent une section suspendue des guides d'ondes, et, en particulier, à des atténuateurs optiques variables et à des coupleurs optiques. L'invention concerne également des procédés qui permettent d'aligner et de verrouiller les micro-actionneurs dans deux ou trois dimensions, de façon à pouvoir maintenir les réglages des atténuateurs variables. Les micro-actionneurs précités servent également à assurer un alignement correct entre les différents orifices des guides d'ondes et des fibres dans les circuits intégrés optiques. L'invention concerne aussi des composants supplémentaires basés sur des micro-actionneurs, parmi lesquels des commutateurs multipolaires, des atténuateurs optiques variables numériques, des dispositifs de protection d'entrée et des puces de protection de ligne multifonctionnelles. Les composants et systèmes précités peuvent être réalisés sous forme monolithique, permettant de réaliser de la sorte des économies de coût et d'espace. L'invention se rapporte enfin à des procédés de gravure de substrats permettant d'obtenir des faces précisément verticales.
PCT/IL2003/000031 2002-01-10 2003-01-10 Composants monolithiques de guidage optique Ceased WO2003058286A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003235773A AU2003235773A1 (en) 2002-01-10 2003-01-10 Monolithic optical control components

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
US34737602P 2002-01-10 2002-01-10
US60/347,376 2002-01-10
US36096102P 2002-02-28 2002-02-28
US60/360,961 2002-02-28
US38643102P 2002-06-07 2002-06-07
US60/386,431 2002-06-07
US40474302P 2002-08-21 2002-08-21
US60/404,743 2002-08-21

Publications (2)

Publication Number Publication Date
WO2003058286A2 WO2003058286A2 (fr) 2003-07-17
WO2003058286A3 true WO2003058286A3 (fr) 2005-06-23

Family

ID=27502753

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2003/000031 Ceased WO2003058286A2 (fr) 2002-01-10 2003-01-10 Composants monolithiques de guidage optique

Country Status (2)

Country Link
AU (1) AU2003235773A1 (fr)
WO (1) WO2003058286A2 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6895161B2 (en) 2002-09-30 2005-05-17 Rosemount Inc. Variable optical attenuator
US7197225B2 (en) 2003-05-06 2007-03-27 Rosemount Inc. Variable optical attenuator
US7450812B2 (en) 2003-05-06 2008-11-11 Rosemount Inc. Compensated variable optical attenuator
US7177505B2 (en) 2004-03-04 2007-02-13 Rosemount Inc. MEMS-based actuator devices using electrets
US7642628B2 (en) 2005-01-11 2010-01-05 Rosemount Inc. MEMS packaging with improved reaction to temperature changes
US7298954B2 (en) * 2005-06-16 2007-11-20 Xerox Corporation Waveguide shuttle MEMS variable optical attenuator
TWI400499B (zh) * 2007-07-16 2013-07-01 Corning Inc 使用雷射軟化玻璃凸塊微調準

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3931518A (en) * 1974-11-11 1976-01-06 Bell Telephone Laboratories, Incorporated Optical fiber power taps employing mode coupling means
US4013000A (en) * 1975-11-20 1977-03-22 Bell Telephone Laboratories, Incorporated Optical crossbar switching network
US4150870A (en) * 1976-07-23 1979-04-24 Thomson-Csf Adjustable distributor device for shared transmission of radiant energy
US5612815A (en) * 1995-01-10 1997-03-18 Commissariat A L'energie Atomique Optical device for optomechanical application
US6122084A (en) * 1998-03-03 2000-09-19 At&T Corp. High dynamic range free-space optical communication receiver
US6212314B1 (en) * 1998-07-08 2001-04-03 Lucent Technologies Integrated opto-mechanical apparatus

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3931518A (en) * 1974-11-11 1976-01-06 Bell Telephone Laboratories, Incorporated Optical fiber power taps employing mode coupling means
US4013000A (en) * 1975-11-20 1977-03-22 Bell Telephone Laboratories, Incorporated Optical crossbar switching network
US4150870A (en) * 1976-07-23 1979-04-24 Thomson-Csf Adjustable distributor device for shared transmission of radiant energy
US5612815A (en) * 1995-01-10 1997-03-18 Commissariat A L'energie Atomique Optical device for optomechanical application
US6122084A (en) * 1998-03-03 2000-09-19 At&T Corp. High dynamic range free-space optical communication receiver
US6212314B1 (en) * 1998-07-08 2001-04-03 Lucent Technologies Integrated opto-mechanical apparatus

Also Published As

Publication number Publication date
WO2003058286A2 (fr) 2003-07-17
AU2003235773A8 (en) 2003-07-24
AU2003235773A1 (en) 2003-07-24

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