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WO2003056320A2 - Fabrication de motifs biopolymeres par transfert laser - Google Patents

Fabrication de motifs biopolymeres par transfert laser Download PDF

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Publication number
WO2003056320A2
WO2003056320A2 PCT/EP2002/014761 EP0214761W WO03056320A2 WO 2003056320 A2 WO2003056320 A2 WO 2003056320A2 EP 0214761 W EP0214761 W EP 0214761W WO 03056320 A2 WO03056320 A2 WO 03056320A2
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WO
WIPO (PCT)
Prior art keywords
laser
biopolymer
substrate
target
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2002/014761
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English (en)
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WO2003056320A3 (fr
Inventor
Costas Fotakis
George Thireos
Ioanna Zergioti
Dimitris Kafetzopoulos
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Foundation For Research And Technology Hellas (forth)
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Foundation For Research And Technology Hellas (forth)
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Application filed by Foundation For Research And Technology Hellas (forth) filed Critical Foundation For Research And Technology Hellas (forth)
Priority to EP02791868A priority Critical patent/EP1461146A2/fr
Priority to AU2002358177A priority patent/AU2002358177A1/en
Publication of WO2003056320A2 publication Critical patent/WO2003056320A2/fr
Publication of WO2003056320A3 publication Critical patent/WO2003056320A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0046—Sequential or parallel reactions, e.g. for the synthesis of polypeptides or polynucleotides; Apparatus and devices for combinatorial chemistry or for making molecular arrays
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
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    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04515—Control methods or devices therefor, e.g. driver circuits, control circuits preventing overheating
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    • B41J2/04573—Timing; Delays
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Definitions

  • the present invention relates to a method and an apparatus for fabricating precise, micro-dimensioned patterns of biopolymer materials onto solid substrates, such as biopolymer coatings for biosensors or arrays of biopolymer regions for multianalyte assays, by means of laser induced transfer.
  • biopolymers such as proteins, nucleic acids and oligonucleotides
  • biosensors dipstick tests
  • protein and nucleic acid microarray chips microfluidic assay technologies.
  • Laser transfer based method generally referred to as "laser induced forward transfer” (LIFT) have been used for the precise deposition of metals and their oxides, superconductors, ceramics, on solid surfaces for the microfabrication of electronic and optoelectronic devices.
  • LIFT method utilises pulsed lasers to remove by ablating selectively material, which has been previously deposited on a laser- transparent support and transfer it onto a substrate.
  • the receiving substrate is placed usually in parallel and at a close proximity to the thin film source under air or vacuum conditions.
  • Various materials have been used in LIFT applications, together with a variety of laser sources emitting from the near infrared to the ultraviolet.
  • a direct write (DW) technique combining the laser-induced forward transfer (LIFT) method with the matrix assisted pulsed laser evaporation (MAPLE) has been demonstrated by Pique et al., (Applied Physics A 69, p. 279, 1999) and Chrisey, (U.S. pat. 6,177,151), for depositing electronics and sensor materials.
  • the MAPLE DW technique utilises nanosecond laser pulses in a direct-write process capable of transferring materials such as metals, ceramics, and polymers onto polymeric, metallic and ceramic substrates at room temperature.
  • the overall writing resolution for this technique is currently of the order of 10 ⁇ m.
  • a variety of devices have been fabricated, including parallel plate and capacitors, flat inductors, conducting lines, resistors and chemoresistive gas sensors.
  • the MAPLE DW technique always presupposes polymeric matrix material mixed with the transfer material, which under pulsed laser irradiation is more volatile than the transfer material.
  • the main advantage of the LIFT technique over the MAPLE DW is the simplicity of the process since it is not necessary to use any transfer matrix material. Additionally, there is some concern if the matrix preserves the properties of the transfer material and if some chemical reactions are induced during the laser irradiation.
  • the object underlying the present invention is to provide a method and an apparatus for producing precise, micro-dimensioned patterns of biopolymer materials on substrate surfaces at high resolution, wherein patterns include a plurality of single spaced-apart features forming arrays, and repeats of adjacent features forming localized coatings.
  • a further object of the invention is to provide a method and an apparatus for precisely depositing biopolymers by means of laser, wherein the biopolymer material is not damaged during the process, thus, the selection and use of materials assisting transfer is unnecessary.
  • Another object of the present invention is to provide said methods and equipment for microfabricating the sensing, reacting or binding surfaces of biological and biochemical assay devices.
  • the invention provides a method for microfabricating patterns of biopolymer materials on solid substrates.
  • the method utilizes an ultrafast pulsed laser at a wavelength the biopolymer absorbs light.
  • the target biopolymer is provided in a coating upon one surface of a laser transparent support.
  • the receiving substrate surface is positioned at a predetermined distance from, and opposite to, the target biopolymer surface.
  • a geometrically shaped laser pulse is subsequently projected through the support, onto the coating and at a defined location, exposing a portion of the coating material to laser energy sufficient to remove, transfer and deposit the said portion upon the receiving surface of the substrate.
  • Transfer of biopolymer materials occurs with high precision and without damage using laser energy densities between 1 mJ/cm 2 and 1 000 mJ/ cm 2 and laser pulses with time duration between 50 femtoseconds and 50 nanoseconds, preferably in the range of from about 50 femtoseconds to about 1 nanosecond, more preferably from about 50 femtoseconds to below 1 picosecond.
  • the method is widely applicable to proteins, nucleic acids, polysaccharides or derivatives thereof.
  • the present invention provides methods for producing extended patterns of biopolymers, such as the sensing or supporting layers of biosensor systems.
  • the invention provides methods for depositing a plurality of biopolymer samples on discrete locations of the substrate, such as arrays of reagent regions for multianalyte assays.
  • an apparatus for producing patters of biopolymers on solid substrates in an automated fashion is described.
  • the methods and the apparatus are of particular utility in producing devices for biological and biochemical assay systems such as biosensors and microarrays.
  • An advantage of the present invention is the precision and uniformity of the deposition method.
  • the use of the ultrafast laser pulses for biopolymer transfer propels materials with low angular divergence, avoids splattering and vaporization, thus, produces features with minimum spread and high spatial resolution.
  • a further advantage of using ultrafast laser pulses is that minimizes the adverse thermal effects of the process and lowers the required energy threshold for transfer, thus, thermally labile biopolymer materials are not damaged during transfer, particularly when using a pulse width of about 1 nanosecond or below, preferably below 1 picosecond.
  • Another advantage of the present invention is the simplicity of the method wherein biopolymers absorb the energy of the ultrafast laser pulses and can be deposited on the substrates without the assistance of any transferring matrix material. Compared to the lithographic methods this method is a "clean", one-step process and it is not limited to oligomer structures only.
  • Another advantage of the present invention is versatility of the method that can be easily adapted and used for depositing a wide variety of biopolymer materials onto various receiving substrates.
  • Figure 1 is a schematic view of an apparatus, embodiment of the present invention. Sequential events of the deposition process are also illustrated, for clarity.
  • the apparatus schematically illustrated in Figure 1 comprises a laser source 1 generating ultrafast pulses, an attenuator 2 adjusting the energy density, a laser beam modulator 3, an aperture 4 for shaping the focal spot of the laser beam, a mirror 6 at the laser wavelength for directing the beam towards the target, an objective lens 7 for focusing the beam onto the target material 10 coated on the lower surface of a laser transparent target holder 9, a target holder 8 (holding a plurality of targets in this schematic illustration), a substrate platform H for holding and positioning the receiving substrate 12, translation stages controlled by drivers 13 for moving the target holder 8 (in the xy plane) and the substrate platform ⁇ (in the x'y ' plane), a computer system 14 coordinating the pulses of the laser and the movement of the translation stages.
  • a CCD camera 5 can also be included for monitoring the deposition process.
  • Transfer biopolymers include, but are not limited to, polypeptides and proteins such as enzymes, antibodies, antigens, protein A, hormones, receptors, lectins, avidin, oligopeptides, nucleic acids such as DNA, RNA, oligonucleotides, polysaccharides, glycoproteins, proteoglycans, glycolipids, lipids, obtained from either biological sources or by chemical synthesis, derivatives thereof, and artificial counterparts such as the peptide nucleic acids.
  • polypeptides and proteins such as enzymes, antibodies, antigens, protein A, hormones, receptors, lectins, avidin, oligopeptides, nucleic acids such as DNA, RNA, oligonucleotides, polysaccharides, glycoproteins, proteoglycans, glycolipids, lipids, obtained from either biological sources or by chemical synthesis, derivatives thereof, and artificial counterparts such as the peptide nucleic acids.
  • biopolymer Prior to transfer the biopolymer is applied onto the lower surface of the target support. Most biopolymers are soluble in aqueous solutions. Other volatile solvents including, but not limited, to ethanol, acetone, diethylether, chloroform, and their mixtures, can also be used if necessary to obtain the biopolymer in solution of suspension.
  • the transfer biopolymer is applied onto the surface of the target holder in solution, optionally, with a variety of compounds selected from the following functional groups:
  • Buffers such as carbonate, formate, acetate, citrate, phosphate, borate, dimethylarsinate, ethanolamine, triethanolamine, trimethylamine, triethylamine, imidazole, histidine, pyridine, collidine tris(hydroxymethyl)aminomethane, N-2- hydroxyethylpiperazine-N'-2-ethanesulfonic acid, 2-(N-morpholino)ethanesulphonic acid, 1,3-bis[tris (hydroxymethyl) methylaminojpropane, 3-(N-morpholino)-2- hydroxypropane-sulfonic acid, 1 ,4-piperazinediethanesulfonic acid, at concentrations of 10-100 mM, to maintain the pH of the solution.
  • Buffers such as carbonate, formate, acetate, citrate, phosphate, borate, dimethylarsinate, ethanolamine, triethanolamine, trimethylamine, triethylamine, imidazole,
  • Detergents such as dodecyl sulfate, lauroyl sarcosine, deoxycholate, sulfosalicylate, diiodo.salicylate, cetyldimethylethylammonium bromide, 3-[3- cholamidopropyl9-dimethylammonio]-1 -propane sulfonate, alkyl-glucosides, alkyl- thioglucosides, alkyl-maltosides, alkyl-thiomaltosides, polyoxyethylene esters, polyoxyethylene ethers, polyoxyethelenesorbitan esters, alkyl-N- hydroxyethylglucamides, at 0,1-10 % weight per volume, to solubilize insoluble biopolymers.
  • Chaotropic agents such trichloroacetic acid, perchlorate, urea, guanidine hydrochloride, guanidine thiocyanate, formamide, glyoxal, used at concentations 0,5-5 M, when the biopolymers are intended denatured.
  • Reductants such as dithiothreitol, dlthioerythritol, ⁇ -mercaptoethanol, at a concentaration range 5-50 mM, to prevent oxidation of thiols.
  • Chelating agents such as ethylenediamine tetraacetic acid, ethyleneglycobis( ⁇ - aminoethyl)ether tertaacetic, at 1-20 mM acid to bind unwanted bivalent metals.
  • Stabilizers such as glycerol and other polyols, glucose, N-acetyl glucosamine, sorbitol, ascorbic acid, sucrose, trehalose, at concentration range 5-20 % weight per volume, to maintain biological activity and conformation of the biopolymers.
  • Polymers able to imbibe or retain water generally referred to as hygrogels, such as agarose, alginates, dextran, poly(ethyleneglycol), polyethylenimine, polyacrylic acid, polyacrylamide, poly(1-vinyl-2-pyrrolidon), poly(hydroxyethyl-methacrylate), poly ⁇ [tris(hydroxymethyl)-methyl]acrylate ⁇ , usually at a concentration range 1-10% weight per volume, to provide an aqueous microenvironment to biopolymers.
  • hygrogels such as agarose, alginates, dextran, poly(ethyleneglycol), polyethylenimine, polyacrylic acid, polyacrylamide, poly(1-vinyl-2-pyrrolidon), poly(hydroxyethyl-methacrylate), poly ⁇ [tris(hydroxymethyl)-methyl]acrylate ⁇ , usually at a concentration range 1-10% weight per volume, to provide an aqueous microenvironment to biopolymers.
  • Inorganic salts such as sodium chloride, ammonium sulfate, and organic compounds and solvents such as dimethylsulphox.de, to modulate the ionic strength of the solution and the solubility of the biopolymers.
  • Specific enzyme inhibitors such as (4-amidinophenyl)methanesulfonyl fluoride, leupeptin, 3,4-dichloroisocoumarin, N-[N-(L-3-trans-carboxirane-2-carbonyl)-L- leucylj-agmatine, phenylmethylsulfonyl fluoride, N-ethylmaleimide, benzamidine for proteases, ethylenediamine tetraacetic acid for deoxynucleases, typically at concentrations 0.1-1 mM, to protect enzyme degradable biopolymers.
  • Preservatives such as sodium azide, methylisothiazone, 2- [(ethylmercurio)thio]benzoic acid, bromonitrodioxane, at concentrations 0,01-0,1 % weight per volume, to protect biodegradable biopolymers.
  • Dyes such as 1-anilinonaphthalene-8-sulfonic acid, 3-hydroxy-4-[2-sulfo-4-(4- sulfophenylazo)phenylazo-2,7-naphthalenedisulfonic acid, 2,7-diamino-10-ethyl- phenyi-phenanthridini ⁇ m bromide, to facilitate the monitoring of the coating and deposition process.
  • the above compounds are selected with regard to the function they serve and their compatibility with the receiving substrates.
  • the hydrogel of choice should not possess any competing amine groups.
  • the biopolymer solution is applied on the lower surface of the support to form a uniform coating by a variety of techniques such as dispensing, spin-on-disk, spraying, followed by evaporation of the solvent.
  • the working concentration of the biopolymer in the solution depends on the solubility of the biopolymer, the viscosity of the solution, the hydrophobicity of the support, and the technique used for coating. Single or multiple applications can be used and the final thickness of the biopolymer coating can be between 100nm and 10 ⁇ m.
  • the target support should be of high optical and surface quality and composed of a material that does not absorb at the wavelength in use.
  • Materials such as fused silica, sapphire, magnesium and calcium fluoride can be used in a wide range of wavelengths from UV to IR.
  • the efficiency of the laser light coupling into the materials depends on the materials optical properties, the wavelength, and the time duration of the incident light.
  • the laser wavelength source is selected with regard to the absorption spectrum of the biopolymer and preferably with the shortest pulse duration available in order to minimize the thermal effects of the process and prevent damage of the deposited material.
  • a variety of pulsed laser sources are available in the full spectral range from UV to IR and can be utilized in this method including, but not limited to, excimer lasers at wavelengths 248 nm (KrF) and 308 nm (XeCI) with pulse duration 30 ns and pulse repetition frequency up to 100 Hz, excimer laser at wavelength 248 nm (KrF) with pulse duration 0.5 ps and pulse repetition frequency up to 10 Hz, Nd:YAG and Nd:Glass lasers at wavelengths 1064 nm, 532 nm, 355 nm, 266 nm with pulse duration 6 ns and 0.5 ps and pulse repetition frequency up to 10 Hz and Ti:sapphire laser at wavelength 800 nm, and 400 nm with pulse duration 150 fs and pulse repetition frequency up to 1000 Hz.
  • excimer lasers at wavelengths 248 nm (KrF) and 308 nm (XeCI) with pulse duration 30 ns and pulse repetition
  • the pulsed laser beam is projected onto the target material by any means known in the art of laser optics including but not limited to mirrors, refractive and reflective lenses.
  • the pulsed laser energy can be adjusted by means of an attenuator in order to obtain energy densities above the transfer energy threshold and below an energy density of 1000 mJ/cm 2 to avoid any damage or vaporization of the biopolymer material.
  • the pulsed laser beam shape and dimensions onto the target material can be adjusted by means of a variable aperture with any special shape such as, rectangular or triangular or circular etc. in order to expose the target biopolymer material in an area so that, a precise and defined portion of the material is transferred onto the substrate.
  • an optical system is projecting the aperture projection on a large-reduction basis onto the target material.
  • the receiving substrate should be placed in parallel and in close proximity with the target substrate.
  • the distance between the lower side of the target material and the upper side of the receiving substrate is varied from 1 ⁇ m to 500 ⁇ m with 1 ⁇ m resolution.
  • the pulsed laser beam, the target material and the substrate can be positioned in relation to each other and can be controlled and moved with respect to each other by means of translation stages and computer controlled translation stage drivers.
  • This is a well-known technology in the field of laser micromachining i.e. laser cutting, drilling etc.
  • the laser beam is directed onto the target material and irradiates the target material with sufficient energy to remove and transfer a selected portion of the biopolymer material onto the substrate.
  • Repeating the transfer process at different target and substrate position i.e. pixel by pixel step and repeat operation by means of a PC and the translation stages driver results in the production of patterns such as a plurality of single spaced apart features, forming arrays, and repeat of adjacent features, forming localized coatings.
  • a plurality of targets with different biopolymer materials could be used resulting in a plurality of distinct deposits.
  • the working area could be monitored through an imaging system, including but not limited to a CCD camera and an optical microscope.
  • a wide variety of materials can be used as receiving substrates. They can be any solid fibrous or porous, preferably planar, material including, but not limited to, glass, silicon, metals, polystyrene, nylon, polyacrylamide, polyester, cellulose, dextran, agarose, or a derivative thereof, if necessary chemically treated or properly coated in order to bind the deposited biopolymers.
  • the present invention will be further explained with reference to the following examples that are specific applications indented to illustrate, but in no way to restrict, the present application.
  • the protein Ribonuclease I is transferred at defined positions on a sensochip used for surface plasmon resonance measurements.
  • the device produced is used for studying the binding of the Human Placental Ribonuclease Inhibitor to the immobilized Ribonuclease I.
  • Bovine Pancreas Ribonuclease were dissolved in 330 ⁇ l of an aqueous solution containing 100 mM ammonium formate at pH 8,10 % (v/v) methanol, 2,5 % (w/v) trehalose and 0.05 % (w/v) agarose and then applied to form a coating on the surface of a fused silica disk (25.4 mm diameter and 1 mm thick), by the spin on disk technique (at 250 rpm, for 20 sec). The coating was left overnight to dry at ambient temperature in a ventilated fume hood.
  • the apparatus used for transferring the protein material utilized a Nd:Glass pulsed laser operating at 266 nm with pulse duration 0.5 picosecond.
  • the laser beam was focused through a high power image projection micro-machining system based on the inverse microscope principle.
  • the system was performing mask projection on a large-reduction basis (X30) onto the target.
  • the estimated depth of focus was 2 ⁇ m and the laser spot size could be varied between 1 and 250 ⁇ m.
  • the energy density of the laser could be adjusted by means of the attenuator at values between 50mJ/cm 2 and 550mJ/cm 2 .
  • the target area could be viewed through an imaging system including a CCD camera and microscope lenses.
  • the fused silica disk was placed opposite to the sensochip surface so that the distance between the protein coating and the activated dextran coating was 20 ⁇ m.
  • the laser beam was focused onto the coating of the target protein, the energy density was adjusted at 50 mJ/cm 2 and the laser beam geometrical shape was a rectangular spot of 250 ⁇ m x 250 ⁇ m.
  • the irradiated coating material was ejected and deposited onto the dextran coating of the substrate. Each laser shot resulted into an approximately 250 ⁇ m square spot of 1 ⁇ m thick.
  • the transfer process was repeated at different target and substrate locations by means of computer controlled translation stages in order to form two uniformly coated regions of 2mm X 2mm at positions corresponding to the openings of the microfluidic system used for further treatment and analysis.
  • the double-stranded DNA samples obtained by the polymerase chain reaction method were solubilized at 3-5 mg/ml concentration in a solution containing 10 mM sodium citrate pH 8, 15mM sodium chloride, 1mM EDTA, and 0.05 % (w/v) agarose for facilitating coating.
  • the solutions of the DNA samples were applied on the fused silica disks (25.4 mm diameter and 1 mm thick) by a pipette and were left to dry at a ventilated fume hood to form a coating of approximately 0.5 ⁇ m thick.
  • the laser transparent support was irradiated from the back side using a KrF pulsed excimer laser operating at 248 nm with pulse duration 0.5 ps.
  • the laser energy density was adjusted at 100 mJ/cm 2 onto the coating and the spot was was 100 ⁇ m x 100 ⁇ m.
  • the irradiated coating material was ejected and deposited onto the nitrocellulose coated glass substrate.
  • the distance between the targets and the substrate was adjusted at 20 ⁇ m.
  • Each laser shot resulted into an approximately 200 ⁇ m square spot of 0.5 ⁇ m thick and different DNA samples was deposited at discrete substrate regions on the microscope slide.

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Abstract

L'invention concerne un procédé et un appareil permettant de microusiner avec précision des motifs de biopolymères sur des substrats solides par transfert laser. Ledit procédé consiste à utiliser des impulsions laser ultrarapides pour transférer du matériau biopolymère cible, dont les dimensions sont fonction du point focal du laser, d'une surface d'un support transparent sur la surface opposée du substrat de réception. La répétition du processus de transfert à différentes positions de cible et de substrat permet de produire des motifs élargis tels que des réseaux de caractéristiques ou des revêtements localisés. L'appareil est conçu pour produire de manière automatisée les motifs de biopolymères sur des substrats solides. Le procédé et l'appareil sont particulièrement utiles pour produire des dispositifs destinés à des systèmes de dosage biologique et biochimique tels que biocapteurs et jeux ordonnés de microéchantillons.
PCT/EP2002/014761 2001-12-28 2002-12-24 Fabrication de motifs biopolymeres par transfert laser Ceased WO2003056320A2 (fr)

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EP02791868A EP1461146A2 (fr) 2001-12-28 2002-12-24 Fabrication de motifs biopolymeres par transfert laser
AU2002358177A AU2002358177A1 (en) 2001-12-28 2002-12-24 Fabrication of biopolymer patterns by means of laser transfer

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GR20010100603A GR1004059B (el) 2001-12-31 2001-12-31 Κατασκευη βιοπολυμερικων σχηματων μεσω εναποθεσης με λειζερ.

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EP2035541A4 (fr) * 2006-05-31 2010-11-24 Univ Johns Hopkins Usinage par ablation laser de motifs biomoleculaires sur des substrats
WO2011107599A1 (fr) * 2010-03-04 2011-09-09 INSERM (Institut National de la Santé et de la Recherche Médicale) Station de bioimpression, ensemble comprenant une telle station de bioimpression et procédé de bioimpression
GR20120100368A (el) * 2012-07-11 2014-02-24 Εθνικο Μετσοβιο Πολυτεχνειο, Αμεση ακινητοποιηση βιομοριων σε τραχειες επιφανειες με χρηση λειζερ
WO2016097619A1 (fr) * 2014-12-17 2016-06-23 Universite de Bordeaux Procede d'impression par laser et dispositif pour sa mise en oeuvre
EP2919008A4 (fr) * 2012-12-07 2016-06-29 Snu R&Db Foundation Procédé permettant d'isoler des molécules biochimiques sur un substrat de type micropuce
WO2017004615A1 (fr) * 2015-07-02 2017-01-05 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Isolement de microniches à partir de suspension solide et phase solide dans des microbiomes en phase liquide à l'aide de transfert vers l'avant induit par laser
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US9859247B2 (en) 2012-11-09 2018-01-02 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Method for bonding bare chip dies
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WO2018167399A1 (fr) * 2017-03-15 2018-09-20 Universite de Bordeaux Equipement et procede pour le depot de particules sur une cible
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US10471538B2 (en) 2015-07-09 2019-11-12 Orbotech Ltd. Control of lift ejection angle
EP3439786A4 (fr) * 2016-04-05 2019-12-18 The Government of the United States of America, as represented by the Secretary of the Navy Traitement de particules solides de la taille du micromètre pour dépôt rapide sur des surfaces de substrat avec répartition de particule uniforme
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US10688692B2 (en) 2015-11-22 2020-06-23 Orbotech Ltd. Control of surface properties of printed three-dimensional structures
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EP3240885B1 (fr) 2014-12-31 2024-11-13 Fluidigm Canada Inc. Échantillons biologiques structurés pour analyse par un cytomètre de masse

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WO2005080625A1 (fr) * 2004-02-18 2005-09-01 Boston Scientific Scimed, Inc. Procede de revetement par vaporisation explosive induite par laser, systeme associe et dispositif fabrique par la mise en oeuvre de ce procede
US8034609B2 (en) 2006-05-31 2011-10-11 The Johns Hopkins University Ablation based laser machining of biomolecule patterns on substrates
EP2035541A4 (fr) * 2006-05-31 2010-11-24 Univ Johns Hopkins Usinage par ablation laser de motifs biomoleculaires sur des substrats
US9629989B2 (en) 2010-03-04 2017-04-25 Institut National De La Sante Et De La Recherche Medicale (Inserm) Bioprinting station, assembly comprising such bioprinting station and bioprinting method
US9039998B2 (en) 2010-03-04 2015-05-26 Institut National De La Sante Et De La Recherche Medical (Inserm) Bioprinting station, assembly comprising such bioprinting station and bioprinting method
WO2011107599A1 (fr) * 2010-03-04 2011-09-09 INSERM (Institut National de la Santé et de la Recherche Médicale) Station de bioimpression, ensemble comprenant une telle station de bioimpression et procédé de bioimpression
GR20120100368A (el) * 2012-07-11 2014-02-24 Εθνικο Μετσοβιο Πολυτεχνειο, Αμεση ακινητοποιηση βιομοριων σε τραχειες επιφανειες με χρηση λειζερ
US9859247B2 (en) 2012-11-09 2018-01-02 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Method for bonding bare chip dies
US10883136B2 (en) 2012-12-07 2021-01-05 Snu R&Db Foundation Method of isolating biochemical molecules on microarray substrate
EP2919008A4 (fr) * 2012-12-07 2016-06-29 Snu R&Db Foundation Procédé permettant d'isoler des molécules biochimiques sur un substrat de type micropuce
US9925797B2 (en) 2014-08-07 2018-03-27 Orbotech Ltd. Lift printing system
US10193004B2 (en) 2014-10-19 2019-01-29 Orbotech Ltd. LIFT printing of conductive traces onto a semiconductor substrate
US11707881B2 (en) 2014-12-17 2023-07-25 Universite de Bordeaux Device for laser printing biological components
JP2018507793A (ja) * 2014-12-17 2018-03-22 ユニヴェルシテ・ドゥ・ボルドー レーザー印刷方法およびその方法を実施する装置
US11045996B2 (en) 2014-12-17 2021-06-29 Universite de Bordeaux Method for laser printing biological components, and device for implementing said method
US10112388B2 (en) 2014-12-17 2018-10-30 Université De Bordeaux Laser printing method and device for implementing said method
FR3030360A1 (fr) * 2014-12-17 2016-06-24 Univ Bordeaux Procede d'impression par laser et dispositif pour sa mise en oeuvre
WO2016097619A1 (fr) * 2014-12-17 2016-06-23 Universite de Bordeaux Procede d'impression par laser et dispositif pour sa mise en oeuvre
EP3240885B1 (fr) 2014-12-31 2024-11-13 Fluidigm Canada Inc. Échantillons biologiques structurés pour analyse par un cytomètre de masse
US10633758B2 (en) 2015-01-19 2020-04-28 Orbotech Ltd. Printing of three-dimensional metal structures with a sacrificial support
US11691436B2 (en) 2015-07-02 2023-07-04 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Isolation of microniches from solid-phase and solid suspension in liquid phase microbiomes using laser induced forward transfer
WO2017004615A1 (fr) * 2015-07-02 2017-01-05 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Isolement de microniches à partir de suspension solide et phase solide dans des microbiomes en phase liquide à l'aide de transfert vers l'avant induit par laser
US10471538B2 (en) 2015-07-09 2019-11-12 Orbotech Ltd. Control of lift ejection angle
US10688692B2 (en) 2015-11-22 2020-06-23 Orbotech Ltd. Control of surface properties of printed three-dimensional structures
WO2017103007A1 (fr) * 2015-12-16 2017-06-22 Institute Of Communication And Computer Systems (Iccs)- National Technical University Of Athens (Ntua) Procédé d'activation de réactions click par transfert de molécules induit par laser
GB2545443A (en) * 2015-12-16 2017-06-21 Inst Of Communication And Computer Systems(Iccs)-National Technical Univ Of Athens (Ntua) Method for activating click reactions through laser induced forward transfer of molecules
EP3439786A4 (fr) * 2016-04-05 2019-12-18 The Government of the United States of America, as represented by the Secretary of the Navy Traitement de particules solides de la taille du micromètre pour dépôt rapide sur des surfaces de substrat avec répartition de particule uniforme
US11013602B2 (en) 2016-07-08 2021-05-25 Mako Surgical Corp. Scaffold for alloprosthetic composite implant
CN110431020A (zh) * 2017-03-15 2019-11-08 波尔多大学 用于在目标上沉积颗粒的设备和方法
FR3063932A1 (fr) * 2017-03-15 2018-09-21 Universite de Bordeaux Equipement et procede pour le depot de particules sur une cible
WO2018167399A1 (fr) * 2017-03-15 2018-09-20 Universite de Bordeaux Equipement et procede pour le depot de particules sur une cible
US11881466B2 (en) 2017-05-24 2024-01-23 Orbotech Ltd. Electrical interconnection of circuit elements on a substrate without prior patterning

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AU2002358177A1 (en) 2003-07-15
WO2003056320A3 (fr) 2004-03-04
GR1004059B (el) 2002-11-15

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