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WO2003051784A1 - Holder for tip and method for manufacturing the same, and scribing device and manual cutter that are provided with the holder for tip - Google Patents

Holder for tip and method for manufacturing the same, and scribing device and manual cutter that are provided with the holder for tip Download PDF

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Publication number
WO2003051784A1
WO2003051784A1 PCT/JP2002/013234 JP0213234W WO03051784A1 WO 2003051784 A1 WO2003051784 A1 WO 2003051784A1 JP 0213234 W JP0213234 W JP 0213234W WO 03051784 A1 WO03051784 A1 WO 03051784A1
Authority
WO
WIPO (PCT)
Prior art keywords
holder
tip
bearing
chip
cutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/013234
Other languages
French (fr)
Japanese (ja)
Inventor
Hiroshi Tomimori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Priority to EP02790803A priority Critical patent/EP1466872B1/en
Priority to US10/497,968 priority patent/US20050016351A1/en
Priority to DE60227841T priority patent/DE60227841D1/en
Priority to KR1020047009268A priority patent/KR100609756B1/en
Priority to JP2003552676A priority patent/JP4105631B2/en
Priority to AU2002366314A priority patent/AU2002366314A1/en
Priority to HK05108360.0A priority patent/HK1076443B/en
Publication of WO2003051784A1 publication Critical patent/WO2003051784A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/027Scoring tool holders; Driving mechanisms therefor
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools
    • C03B33/105Details of cutting or scoring means, e.g. tips
    • C03B33/107Wheel design, e.g. materials, construction, shape
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/225Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/10Glass-cutting tools, e.g. scoring tools
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T225/00Severing by tearing or breaking
    • Y10T225/10Methods
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/02Other than completely through work thickness
    • Y10T83/0333Scoring
    • Y10T83/0341Processes
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T83/00Cutting
    • Y10T83/929Tool or tool with support
    • Y10T83/9457Joint or connection
    • Y10T83/9464For rotary tool

Definitions

  • Chip holder method of manufacturing the same, and chip holder
  • the present invention relates to a tip holder having a cutter tip, a method of manufacturing the same, and a scribing device and a manual cutter having the tip holder.
  • FIG. 1 shows an example of a conventional cutter tip, which is disclosed in Japanese Utility Model Publication No. 62-0237779.
  • the cutter tip 2 has a shape in which the bottom surfaces of two cones are bonded to each other, and the two sharp tips (apexes) are attached to the cutter tip 2 as shown in FIG. It was used as the axis for In addition, as shown in FIGS.
  • the power cutter chip 2 has a shaft in which the slope of the power cutter chip 2 has a concave shape, and a cutter chip which has a generally inclined slope. And there are cutter tips with R chamfers on both ends.
  • the material of the force cutter chip 2 is sintered diamond. In the cutter tip having such a configuration, the frictional resistance between the shaft support portion and the tip holder is low, and the scribe life is extended.
  • An object of the present invention is to provide a tip holder having a longer scribe life and further improving processing efficiency.
  • a tip holder according to the present invention is provided with a cutter tip having a conical shaft formed on both sides of a cutting edge ridge, two holder members, and a cutter tip provided on each of opposing sides of the holder member. It consists of a bearing to support.
  • the shape of the recess of the bearing that supports the cutter tip is a bell shape.
  • the bell shape is a curved surface having a predetermined radius of curvature.
  • the recess is not penetrated through the holder member.
  • the HQ portion is not penetrated through the holder member, and the radius of curvature of the bell shape is 0.1 Dram, assuming that the diameter of the edge of the cutter tip is Dmm. Dram.
  • the recess penetrates the holder member.
  • the recess penetrates one member of the holder, and the radius of curvature of the bell shape is Dmn! ⁇ 2 Dmm.
  • the material of the bearing is a single crystal diamond.
  • the material of the bearing is sintered diamond.
  • a bell-shaped recess is formed in a bearing that supports the power cutter tip,
  • the bearing holding member holding the bearing is attached to a first holder member and a second holder member, and then the first holder member and the second holder member each having a cutter tip and a bearing are combined.
  • the material of the bearing is single crystal diamond.
  • the bell-shaped concave portion is processed by using a YAG laser.
  • the material of the bearing is a sintered diamond.
  • the bell-shaped recess is released! 3 ⁇ 43.
  • the scribing device provides the above-described chip holder according to the present invention, wherein the scribing head moves in the X direction and / or the Y direction relative to the table on which the brittle material substrate is placed. Is provided.
  • the manual cutter according to the present invention includes a cylindrical handle and the above-described tip holder according to the present invention mounted on one end of the handle.
  • the concave portion on the tip holder side that holds the cutter chip having a shape in which the bottom surfaces of the two cones are bonded to each other is a curved surface having a predetermined radius of curvature, the rotational accuracy of the cutter tip is improved.
  • the frictional resistance with the shaft support decreases, and the life of the cutter tip and the tip holder can be extended.
  • FIG. 1 is a diagram showing an example of a conventional cutter tip provided in a tip holder.
  • FIG. 2 is an enlarged view showing details of a bearing portion of a conventional chip holder.
  • FIG. 3 is a diagram showing a die part in a wire drawing machine.
  • FIG. 4 is a front view and a side view of the chip holder.
  • FIG. 5 is an enlarged view of a bearing portion of the chip holder according to the first embodiment of the present invention.
  • FIG. 6 is an enlarged view of a bearing portion of the chip holder according to the second embodiment of the present invention.
  • FIG. 7 is an enlarged view of a bearing portion of the chip holder according to the third embodiment of the present invention.
  • FIG. 8 is a view showing a production example of a bearing for a chip holder according to a third embodiment of the present invention.
  • FIG. 9 is a front view of a scribing apparatus equipped with the chip holder of the present invention.
  • FIG. 10 is a side view of the scribe device of FIG.
  • FIG. 11 is a partial cross-sectional view of a manual cutter equipped with the tip holder of the present invention.
  • FIG. 2 shows details of a conventional cutter tip 2 attached to the lower end of the tip holder 1 and a bearing 3a of the holder 1.
  • Bearings 3a support both sides of the cutter tip.
  • the bearing 3 a is made of sintered diamond, and a conical recess is formed in the shaft support 3 b in contact with the cutter tip 2 so as to follow the shape of the cutter tip 2.
  • the frictional resistance between the cutter tip 2 and the shaft support 3b is reduced, rather than preventing the cutting edge of the cutter tip 2 from being worn out. It was found that increasing the rotational accuracy of 2 was more effective. In other words, in order to extend the life of the cutting edge, it is desirable to increase the rotational accuracy of the cutter tip and to reduce the amount of wear on the shaft of the cutter tip and the bearing of the tip holder.
  • FIG. 3 shows a die portion in a wire drawing machine for continuously drawing the diameter of the wire S.
  • the die part consists of a part called bell (entrance), broach, reduction, bearing, back relief and exit from the entrance side.
  • This die is formed of diamond from the viewpoint of life and machining accuracy.
  • the inner surface machining area of the die is finished in an appropriate shape to obtain machining accuracy, wear resistance and sufficient strength, and the cross-sectional shape is gently curved.
  • the present inventor has adopted a curved bell-shaped shaft support as in the bell portion of the die shown in FIG. 3 instead of the conical recessed shaft support shown in FIG. It has been found that the scribe life of the cutting edge can be prolonged by improving the centripetal force of the cutter tip and further increasing the rotational accuracy by the line contact.
  • FIG. 4 shows a front view (A) and a side view (B) of the chip holder 1 for cutting brittle material.
  • two holder members 1a and 1b are provided in parallel, and the chip 2 is rotatably supported by a bearing (not shown).
  • the holder members la and 1b are integrated with the chip holder 1. It is assembled by inserting the cutter tip 2 into the lower end.
  • the tip holder is manufactured so that the axes of the bearings of the holder members 1a and 1b are aligned with each other.
  • the tip holder is tightened at a predetermined distance to hold the cutter tip 2 rotatably. It can be used as desired.
  • FIG. 5 shows a cross section of the lower end of the chip holder 20 according to the first embodiment of the present invention.
  • the bearing holding member 6 is provided, for example, in circular grooves provided on the lower surfaces of the first holder member 20 a and the second holder member 20 b on mutually opposing surfaces. It is attached to the mouth.
  • the bearing holding member 6 is, for example, a sintered metal of Fe-Cu-Sn, and is formed by sintering into a predetermined cylindrical shape together with a bearing 5a obtained by processing a diamond, for example, a single crystal diamond.
  • the cutter tip 2 has a conical shaft formed on both sides of the cutting edge.
  • the shaft support 5b on the surface of the bearing 5a has a curved bell shape as shown in the bell portion of FIG.
  • the radius of curvature of the curve is approximately in the range of 0.2 to 2.
  • the radius of curvature of the curve is selected from a range of about 0.1 D to D mm.
  • the shaft support 5b forms a non-penetrating recess. That is, the concave portion of the shaft support 5b is not penetrated with respect to the bearing 5a.
  • the solid lubricant is supplied from the force cutter 2 side of the shaft support 5b.
  • Tungsten disulfide and molybdenum disulfide are examples of solid lubricants, and these have a wide range of operating temperatures and are resistant to evaporation.
  • FIG. 6 shows a lower end portion of the chip holder 20 according to the second embodiment of the present invention.
  • the lower portions of the first holder member 20a and the second holder member 20b are formed in circular grooves respectively provided on mutually facing surfaces.
  • the bearing holding member 6 and the bearing 7a are provided.
  • the shaft support portion 7b has a through hole 7d, and the through hole 7d is closed by the bearing holding member 6.
  • FIG. 7 shows the lower end of the chip holder 20 according to the third embodiment of the present invention.
  • circular grooves provided on the lower surfaces of the first holder member 20a and the second holder member 20b, respectively, are provided on the surfaces facing each other.
  • the bearing holding member 6 and the bearing 7a are provided.
  • the shaft support 7 b is a bearing 7 It has a through hole 7d penetrating through a, and a through hole 7c is also formed on the bearing holding member 6 and the holder 11 side so as to match the through hole 7d.
  • These through-holes 7c and 7d are used as inlets for solid lubricant supplied from outside the holder 20.
  • the radius of curvature of the curve of the shaft support 7b is about 36. Also, if the above-mentioned edge ridge diameter is Dmm, the radius of curvature of the curve is approximately Dmn! ⁇ 2 D Select from the range of length.
  • the two holder members 1 a and lb in FIG. 4 are replaced with the first holder member 20 a and the second holder member 20 b of the above-described first to third embodiments. It is a thing.
  • FIG. 8 shows an embodiment of a manufacturing process for manufacturing the bearing 7a from single crystal diamond or sintered diamond.
  • the single crystal diamond X is cut at the upper and lower parts (the shaded part in (a) in Fig. 8) by processing with a skiff machine, etc. Drilling is performed at the center, and a bell-shaped hole is formed as the basis of the shaft support 7b ((b) in Fig. 8). ((C) in Fig. 8) After that, loose particles (diamond grains 2 to 4 ⁇ ) are supplied to the shaft support 7 and the needle-like member 1 having the same tip angle as the shaft support 1 is supplied. 2 is rotated, and the head is further swung to perform a lapping process so as not to break the bell shape ((f) in FIG. 8).
  • diamond particles are first hardened on a cylindrical bearing member 7a 'having a predetermined external dimension (FIG. 8 (d)).
  • discharge machining is performed on the bearing member 7a ', and the bell shape is transferred to the bearing member 7a' ((e in FIG. 8). )).
  • loose abrasive grains are supplied to the surface subjected to the electric discharge machining, and the needle-shaped member 12 having the same tip angle as the shaft support is rotated, and further, the head is swung to make a bell shape.
  • the rubbing process is performed so as not to break (Fig. 8 (f)).
  • Precious stones such as sapphire and ruby may be used for the bearing 7a.
  • the finishing lapping is not limited to the above method, and for example, wire wrapping may be used.
  • the bearings 5 a and 7 a having the predetermined bell-shaped recess as described above are held by the bearing holding member 6 to form the first holder member 20 a. It is attached to the second holder member 20b. Next, the first holder member 20a including the cutter chip 2 and the bearings 5a and 7a is combined with the second holder member 20b.
  • the conventional type shown in Fig. 2 has an average running life distance of 150,000 m, which is the result of the durability evaluation test.
  • the average scrub life was significantly extended, with an average of 300,000 m.
  • the injection of solid lubricant every 10,000 m further increased the tool life by about 20% to 30%.
  • Oil bearing impregnated sintered alloys so-called oilless bearings, are used for bearings 5a, 7b of bearings 5a, 7a that support cutter tip 2, so that regular replenishment of solid lubricant is not required. It is possible to maintain stable scribe performance.
  • the life of the bearings 5a, 7a can also be extended by subjecting the shaft supports 5b, 7b to a coating treatment for surface modification and hardening (for example, defric coating). Becomes possible.
  • 9 and 10 are a front view and a side view of one embodiment of the scribe device.
  • the brittle material substrate 50 placed on the horizontal rotary table 51 is fixed to the horizontal rotary tape holder 51 by vacuum suction means.
  • a pair of parallel guide rails 52 supports the table 51 so as to be movable in the Y direction (a direction perpendicular to the paper surface in FIG. 9), and the ball screw 53 supports the table 51 along the guide rail 52.
  • the guide bar 54 is installed above the table 51 along the X direction (the left-right direction in this figure).
  • the scribe head 55 is provided on the guide bar 54 so as to be slidable in the X direction, and the motor 56 slides the scribe head 55.
  • the tip holder 20 described above rises below the scribe head 55.
  • a pair of CCD cameras 58 is installed above the guide bar 54 to recognize the alignment mark displayed on the brittle material substrate 50 on the table 51.
  • the scribe head 55 has a holder 180 for turning the cutter tip 2 by 180 ° as described above. ° There is built-in means for reversing the force tip.
  • the manual cutter shown in FIG. 11 is also equipped with the above-mentioned holder for small chips.
  • the cylindrical handle (handle) 61 serving as a grip portion of the manual cutter is the same as the glass cutter disclosed in Japanese Utility Model Publication No. Sho 62-23780 by the present applicant.
  • the chip holder 20 according to the present invention described above is mounted.
  • the manual power tool is applied not only to glass but also to brittle materials such as ceramics and semiconductor materials.
  • an oil chamber 63 provided in a hollow portion of the handle, an oil chamber cap 64, and a mechanism 65-73 associated therewith are provided. Since this is a technology not directly related to the present invention, its description is omitted.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mining & Mineral Resources (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Turning (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

A holder for a tip, which holder is provided with a cutter tip having conical shafts at both sides of it. Recessed portions, on the side of the holder for a tip, for supporting rotatably the cutter tip have a bell-shaped form having a curved face with a predetermined curvature radius. Further, the holder for a tip is structured such that a solid lubricant can be supplied from the outside of the holder for a tip. This structure has been able to prolong the work lifetime of the cutter tip of the holder for a tip.

Description

明 細 書  Specification

チップ用ホルダー及びその製造方法並びにそのチップ用ホルダーを備える Chip holder, method of manufacturing the same, and chip holder

スクライブ装置及び手動力ッタ一 技術分野  Scribe device and manual force cutter

本発明は、 カッターチップを具備するチップ用ホルダーとその製造方法並び {こ チップホルダーを備えるスクライブ装置と手動カッターに関する。 背景技術  The present invention relates to a tip holder having a cutter tip, a method of manufacturing the same, and a scribing device and a manual cutter having the tip holder. Background art

脆性材料分断用のチップ用ホルダ一においては、 脆性材料を分断するため、 チ ップ用ホルダーの下端部にカッターチップを取り付けて、 脆性材料の表面にスク ライブラインを形成する。 図 1は、 従来のカッターチップの 1例であり、 これは、 実公昭 6 2 - 0 2 3 7 7 9号公報に開示されているものである。 このカツターチ ップ 2は、 図 1の(a )に示チように、 2つの円錐体の底面を相互に貼り合わせた ような形状をなし、 尖った両先端 (頂点)部を当該カッターチップ 2の軸として用 いたものである。 これ以外にも、 図 1の(b )、 (c )および(d )に示すような、 力 ッターチップ 2の軸の {頃斜面が凹状である力ッターチップ、 ί頃斜面が ώ状である カッターチップおよび両先端部に R面取り加工を施したカッターチップがある。 この力ッターチップ 2の材質は焼結ダイヤモンドである。 かかる構成のカッター チップでは、 軸支部でのチップ用ホルダーとの摩擦抵抗が低く、 スクライブ寿命 が長くなっている。  In the chip holder for cutting brittle material, a cutter chip is attached to the lower end of the chip holder to cut the brittle material, and a scribe line is formed on the surface of the brittle material. FIG. 1 shows an example of a conventional cutter tip, which is disclosed in Japanese Utility Model Publication No. 62-0237779. As shown in FIG. 1 (a), the cutter tip 2 has a shape in which the bottom surfaces of two cones are bonded to each other, and the two sharp tips (apexes) are attached to the cutter tip 2 as shown in FIG. It was used as the axis for In addition, as shown in FIGS. 1 (b), (c) and (d), the power cutter chip 2 has a shaft in which the slope of the power cutter chip 2 has a concave shape, and a cutter chip which has a generally inclined slope. And there are cutter tips with R chamfers on both ends. The material of the force cutter chip 2 is sintered diamond. In the cutter tip having such a configuration, the frictional resistance between the shaft support portion and the tip holder is low, and the scribe life is extended.

し力 しながら、 近年、 スクライブ加工を施して得られる例えば液晶表示パネル などにおいて、 最終製品価格の低減の要求に拍車がかかり、 スクライブ加工コス トの低減とスクライブ加工の加工効率の向上が一段と求められている。 チップ用 ホルダーに関してもスクライブ加工に適用できる寿命が更に長いものを開発する 必要が生じた。 発明の開示 In recent years, however, the demand for lowering the final product price has been spurred on, for example, liquid crystal display panels obtained by scribing, and further reductions in scribing costs and improvements in scribing processing efficiency have been further demanded. Have been. As for the chip holder, it was necessary to develop a holder with a longer life that could be applied to scribe processing. Disclosure of the invention

本発明の目的は、 加工効率をさらに高め、 また、 スクライブ寿命が長いチップ 用ホルダーを提供することである。  An object of the present invention is to provide a tip holder having a longer scribe life and further improving processing efficiency.

本発明に係るチップ用ホルダーは、 刃先稜線の両側に円錐状の軸を形成してな るカッターチップと、 2つのホルダー部材と、 このホルダー部材の対向する側に それぞれ設けられ、 カッターチップを軸支する軸受とからなる。 ここで、 軸受の、 カッターチップを軸支する凹部の形状を、 ベル形状とする。 たとえば、 このベル 形状は所定の曲率半径のカーブ面である。  A tip holder according to the present invention is provided with a cutter tip having a conical shaft formed on both sides of a cutting edge ridge, two holder members, and a cutter tip provided on each of opposing sides of the holder member. It consists of a bearing to support. Here, the shape of the recess of the bearing that supports the cutter tip is a bell shape. For example, the bell shape is a curved surface having a predetermined radius of curvature.

前記のチップ用ホルダーにおいて、 たとえば、 前記凹部は、 前記ホルダ一部材 に非貫通である。  In the above-described chip holder, for example, the recess is not penetrated through the holder member.

前記のチップ用ホルダ一において、 たとえば、 前記 HQ部は、 前記ホルダ一部材 に非貫通であって、 前記ベル形状の曲率半径は、 カッターチップの刃先稜線径を Dmmとすると、 0 . l Dram〜Dramである。  In the tip holder, for example, the HQ portion is not penetrated through the holder member, and the radius of curvature of the bell shape is 0.1 Dram, assuming that the diameter of the edge of the cutter tip is Dmm. Dram.

前記のチップ用ホルダーにおいて、 たとえば、 前記凹部は、 前記ホルダー部材 を貫通している。  In the above-described chip holder, for example, the recess penetrates the holder member.

前記のチップ用ホルダーにおいて、 たとえば、 前記凹部は、 前記ホルダ一部材を貫 通していて、 かつ、 前記ベル形状の曲率半径は、 カッターチップの刃先稜線径を Dmmとすると、 Dmn!〜 2 Dmmで ¾>る。  In the tip holder, for example, the recess penetrates one member of the holder, and the radius of curvature of the bell shape is Dmn! ~ 2 Dmm.

前記のチップ用ホルダ一において、 たとえば、 前記軸受の材質が単結晶ダイヤモン ドである。  In the above-mentioned chip holder, for example, the material of the bearing is a single crystal diamond.

前記のチップ用ホルダーにおいて、 たとえば、 前記軸受の材質が焼結ダイャモンド である。  In the above-mentioned chip holder, for example, the material of the bearing is sintered diamond.

刃先稜線の両側に円錐状の軸を形成してなるカッターチップを具備する本発明 に係るチップ用ホルダーの製造方法において、 力ッターチップを軸支する軸受に ベル形状の凹部を形成し、 次に、 前記軸受を保持させた軸受保持部材を、 第 1の ホルダー部材と第 2のホルダー部材に取り付け、 次に、 カッターチップおよび軸 受を備える第 1のホルダー部材と第 2のホルダー部材をそれぞれ組み合わせる。 前記の製造方法において、 たとえば、 軸受の材質が単結晶ダイヤモンドである。 ここで、 好ましくは、 前記のベル形状の凹部が Y A Gレーザを用いて加工される。 また、 前記の製造方法において、 たとえば、 前記軸受の材質が焼結ダイヤモン ドである。 ここで、 好ましくは、 前記のベル形状の凹部が放! ¾3ェされる。 In the method for manufacturing a tip holder according to the present invention, comprising a cutter tip having a conical shaft formed on both sides of a cutting edge, a bell-shaped recess is formed in a bearing that supports the power cutter tip, The bearing holding member holding the bearing is attached to a first holder member and a second holder member, and then the first holder member and the second holder member each having a cutter tip and a bearing are combined. In the above manufacturing method, for example, the material of the bearing is single crystal diamond. Here, preferably, the bell-shaped concave portion is processed by using a YAG laser. In the above-mentioned manufacturing method, for example, the material of the bearing is a sintered diamond. Here, preferably, the bell-shaped recess is released! ¾3.

また、 本発明に係るスクライブ装置は、 脆性材料基板を载置しているテーブル に対して相対的に X方向及び/又は Y方向に移動するスクライブへッドに本発明 に係る前述のチップ用ホルダーを備える。  Further, the scribing device according to the present invention provides the above-described chip holder according to the present invention, wherein the scribing head moves in the X direction and / or the Y direction relative to the table on which the brittle material substrate is placed. Is provided.

本発明に係る手動用カッターは、 筒状の柄部と、 前記の柄部の一端側に装着さ れた本発明による前述のチップ用ホルダーとからなる。  The manual cutter according to the present invention includes a cylindrical handle and the above-described tip holder according to the present invention mounted on one end of the handle.

本発明は、 2つの円錐体の底面を相互に貼り合わせたような形状のカツターチ ップを保持するチップ用ホルダー側の凹部を、 所定の曲率半径のカーブ面とした ので、 カッターチップの回転精度が上がり、 さらに固体潤滑剤を供給することで 軸支部との摩擦抵抗が減少するために、 カッターチップおよびチップ用ホルダー の寿命を延ばすことができる。 図面の簡単な説明  According to the present invention, since the concave portion on the tip holder side that holds the cutter chip having a shape in which the bottom surfaces of the two cones are bonded to each other is a curved surface having a predetermined radius of curvature, the rotational accuracy of the cutter tip is improved. As the solid lubricant is supplied, the frictional resistance with the shaft support decreases, and the life of the cutter tip and the tip holder can be extended. BRIEF DESCRIPTION OF THE FIGURES

図 1は、 チップ用ホルダーに備えられた従来のカッターチップの例を示した図 である。  FIG. 1 is a diagram showing an example of a conventional cutter tip provided in a tip holder.

図 2は、 従来のチップ用ホルダーの軸受部の詳細を示した拡大図である。  FIG. 2 is an enlarged view showing details of a bearing portion of a conventional chip holder.

図 3は、 伸線機におけるダイス部を示した図である。  FIG. 3 is a diagram showing a die part in a wire drawing machine.

図 4は、 チップ用ホルダーの正面図と側面図である。  FIG. 4 is a front view and a side view of the chip holder.

図 5は、 本発明の実施の形態 1のチップ用ホルダーの軸受部の拡大図である。 図 6は、 本発明の実施の形態 2のチップ用ホルダーの軸受部の拡大図である。 図 7は、 本発明の実施の 態 3のチップ用ホルダーの軸受部の拡大図である。 図 8は、 本発明の実施の形隨 3のチップ用ホルダーの軸受の製作例を示した図 である。  FIG. 5 is an enlarged view of a bearing portion of the chip holder according to the first embodiment of the present invention. FIG. 6 is an enlarged view of a bearing portion of the chip holder according to the second embodiment of the present invention. FIG. 7 is an enlarged view of a bearing portion of the chip holder according to the third embodiment of the present invention. FIG. 8 is a view showing a production example of a bearing for a chip holder according to a third embodiment of the present invention.

図 9は、 本発明のチップ用ホ^^ダーを装着したスクライブ装置の正面図である。 図 1 0は、 図 9のスクライブ装置の側面図である。  FIG. 9 is a front view of a scribing apparatus equipped with the chip holder of the present invention. FIG. 10 is a side view of the scribe device of FIG.

図 1 1は、 本発明のチップ用ホルダーを装着した手動用カッターの部分断面図 である。 発明を実施するための最良の形態 FIG. 11 is a partial cross-sectional view of a manual cutter equipped with the tip holder of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION

以下、 添付の図面を参照して発明の実施の形態を説明する。 なお、 図において 同じ参照記号は同一または同様のものを示す。  Hereinafter, embodiments of the invention will be described with reference to the accompanying drawings. In the drawings, the same reference symbols indicate the same or similar components.

本発明者は、 加工効率を高めて、 スクライブ寿命をさらに長くするため、 従来 のチップ用ホルダーを検討しこ。 図 2は、 チップ用ホルダー 1の下端部に取り付 けられる従来のカッターチップ 2とそのホルダー 1の軸受 3 aの詳細を示す。 軸 受 3 aは、 カッターチップの両側を支える。 軸受 3 aは、 焼結ダイヤモンドから なり、 カッターチップ 2と接触する軸支部 3 bには、 カッターチップ 2の形状に 沿うように、 円錐状の凹部が形成されている。 刃先の寿命テストの実施により、 刃先のスクライブ寿命を延ばすためには、 カッターチップ 2の刃先部分の損耗を 防ぐことよりも、 カッターチップ 2と軸支部 3 bとの摩擦抵抗を減らし、 カツタ 一チップ 2の回転精度を上げることの方が効果的であることがわかった。 すなわ ち、 刃先の寿命を延ばすには、 カッターチップの回転精度を高め、 カッターチッ プの軸やチップ用ホルダーの軸受の摩耗量を小さくすることが望ましい。  The present inventor has studied a conventional chip holder in order to increase the processing efficiency and further extend the scribe life. FIG. 2 shows details of a conventional cutter tip 2 attached to the lower end of the tip holder 1 and a bearing 3a of the holder 1. Bearings 3a support both sides of the cutter tip. The bearing 3 a is made of sintered diamond, and a conical recess is formed in the shaft support 3 b in contact with the cutter tip 2 so as to follow the shape of the cutter tip 2. In order to extend the scribe life of the cutting edge by conducting the life test of the cutting edge, the frictional resistance between the cutter tip 2 and the shaft support 3b is reduced, rather than preventing the cutting edge of the cutter tip 2 from being worn out. It was found that increasing the rotational accuracy of 2 was more effective. In other words, in order to extend the life of the cutting edge, it is desirable to increase the rotational accuracy of the cutter tip and to reduce the amount of wear on the shaft of the cutter tip and the bearing of the tip holder.

ところで、 図 3は、 線材 Sの径を連続的に線引きするための伸線機におけるダ イス部を示している。 そのダイス部は、 入口側から、 ベル(エントランス)、 アブ ローチ、 リダクション、 ベアリング、 バックリリーフおよびェクジットと称する 部位からなり、 寿命および加工精度の面からこのダイスはダイャモンドで形成さ れている。 そのダイスの内面加工領域は、 加工精度、 耐磨耗性および十分な強度 を得るために適切な形状に仕上げられており、 その断面形状は緩やかにカーブし ている。  Meanwhile, FIG. 3 shows a die portion in a wire drawing machine for continuously drawing the diameter of the wire S. The die part consists of a part called bell (entrance), broach, reduction, bearing, back relief and exit from the entrance side. This die is formed of diamond from the viewpoint of life and machining accuracy. The inner surface machining area of the die is finished in an appropriate shape to obtain machining accuracy, wear resistance and sufficient strength, and the cross-sectional shape is gently curved.

本発明者は、 図 2に示した円錐状の凹部の軸支部に替えて、 図 3に示したダイ スにおけるベル部にあるようなカーブしたベル形状の軸支都を採用して、 安定し た線接触により、 カッターチップの求心力を向上させ、 回転精度を更に上げるこ とにより、 刃先のスクライブ寿命の長寿命化が図れることを見出した。  The present inventor has adopted a curved bell-shaped shaft support as in the bell portion of the die shown in FIG. 3 instead of the conical recessed shaft support shown in FIG. It has been found that the scribe life of the cutting edge can be prolonged by improving the centripetal force of the cutter tip and further increasing the rotational accuracy by the line contact.

図 4は、 脆性材料分断用のチップ用ホルダー 1の正面図 (A) およびその側面 図 (B ) を示している。 チップ用ホルダーの下部には 2つのホルダ一部材 1 a、 1 bが並行して設けられ、 図示しない軸受けによりチップ 2が回転可能に支承さ れている。 図 4では、 ホルダー部材 l a、 1 bがチップ用ホルダー 1に一体とし て形成されており、 下端にカッターチップ 2を嵌めこんで組み立てられる。 ホル ダ一部材 1 a 、 1 bはの軸受部の軸芯は一直線となるようにチップ用ホルダーが 製作されていて、 所定の距離を隔てて締めつけてカッターチップ 2を回転可能に 保持させることにより所望の用 に用いることが可能となる。 FIG. 4 shows a front view (A) and a side view (B) of the chip holder 1 for cutting brittle material. At the lower part of the chip holder, two holder members 1a and 1b are provided in parallel, and the chip 2 is rotatably supported by a bearing (not shown). In FIG. 4, the holder members la and 1b are integrated with the chip holder 1. It is assembled by inserting the cutter tip 2 into the lower end. The tip holder is manufactured so that the axes of the bearings of the holder members 1a and 1b are aligned with each other.The tip holder is tightened at a predetermined distance to hold the cutter tip 2 rotatably. It can be used as desired.

図 5は、 本発明の実施形態 1のチップ用ホルダー 2 0の下端部の断面を示して いる。 図 5に示すように、 第 1のホルダ一部材 2 0 aと第 2のホルダ一部材 2 0 bの下部の、 互いに対向する面にそれぞれ設けられた円形の溝に、 軸受保持部材 6が例えば口一付けされて取り付けられる。 この軸受保持部材 6は、 例えば F e - C u - S nの焼結金属であり、 例えば単結晶ダイャモンドであるダイャモンド を加工した軸受 5 aとともに所定の円柱形状に焼き固められて形成されている。 カッターチップ 2は、 刃先稜線の両側に円錐状の軸を形成してなる。 軸受 5 aの 表面の軸支部 5 bは、 図 3のベル部にあるようなカーブしたベル形状にしている。 例えば、 カッターチップ 2の刃先稜線径が 2讓 のとき、 前記カーブの曲率半径 はおよそ 0 . 2 〜 2圏 である。 また、 上記の刃先稜線径を Dmmとすると、 カー ブの曲率半径はおよそ 0 . 1 D隱〜 Dmmの長さの範囲より選択される。  FIG. 5 shows a cross section of the lower end of the chip holder 20 according to the first embodiment of the present invention. As shown in FIG. 5, the bearing holding member 6 is provided, for example, in circular grooves provided on the lower surfaces of the first holder member 20 a and the second holder member 20 b on mutually opposing surfaces. It is attached to the mouth. The bearing holding member 6 is, for example, a sintered metal of Fe-Cu-Sn, and is formed by sintering into a predetermined cylindrical shape together with a bearing 5a obtained by processing a diamond, for example, a single crystal diamond. . The cutter tip 2 has a conical shaft formed on both sides of the cutting edge. The shaft support 5b on the surface of the bearing 5a has a curved bell shape as shown in the bell portion of FIG. For example, when the cutting edge 2 of the cutter tip 2 has a diameter of 2 ridges, the radius of curvature of the curve is approximately in the range of 0.2 to 2. Also, assuming that the diameter of the cutting edge is Dmm, the radius of curvature of the curve is selected from a range of about 0.1 D to D mm.

その軸支部 5 bは、 非貫通の凹部を形成している。 すなわち、 軸支部 5 bの凹 部は軸受 5 aに対して非貫通である。 この場合、 固体潤滑剤は、 軸支部 5 bの力 ッタ一チシプ 2側から供給される。 固 潤滑剤としては二硫化タングステンや二 硫ィ匕モリブデンなどがあり、 これらは、 広い使用温度、 難蒸発性などの 敷を有 してレヽる。  The shaft support 5b forms a non-penetrating recess. That is, the concave portion of the shaft support 5b is not penetrated with respect to the bearing 5a. In this case, the solid lubricant is supplied from the force cutter 2 side of the shaft support 5b. Tungsten disulfide and molybdenum disulfide are examples of solid lubricants, and these have a wide range of operating temperatures and are resistant to evaporation.

また、 図 6は本発明の実施形態 2のチップ用ホルダー 2 0の下端部を示してい る。 実施形態 1のチップ用ホルダ一の下端部と同様に、 第 1のホルダー部材 2 0 aと第 2のホルダ一部材 2 0 bの下部の、 互いに対向する面にそれぞれ設けられ た円形の溝に、 軸受保持部材 6と軸受 7 aを設ける。 軸支持部 7 bは、 貫通孔 7 dを有し、 その貫通孔 7 dが軸受保持部材 6によって塞がれている。  FIG. 6 shows a lower end portion of the chip holder 20 according to the second embodiment of the present invention. Similarly to the lower end portion of the chip holder 1 of the first embodiment, the lower portions of the first holder member 20a and the second holder member 20b are formed in circular grooves respectively provided on mutually facing surfaces. The bearing holding member 6 and the bearing 7a are provided. The shaft support portion 7b has a through hole 7d, and the through hole 7d is closed by the bearing holding member 6.

図 7は、 本発明の実施形態 3のチップ用ホルダー 2 0の下端部を示している。 実施形態 2のチップ用ホルダ一の下端部と同様に、 第 1のホルダー部材 2 0 aと 第 2のホルダー部材 2 0 bの下部の、 互いに対向する面にそれぞれ設けられた円 形の溝に、 軸受保持部材 6と軸受 7 aを設ける。 ここで、 軸支部 7 bは、 軸受 7 aを貫通する貫通孔 7 dを有しており、 更にその貫通孔 7 dに合致するように、 軸受保持部材 6及びホルダ一 1側においても貫通孔 7 cが形成されている。 この 貫通孔 7 c及び貫通孔 7 dは、 ホルダー 2 0の外側から供給される固体潤滑剤の 投入口として用いられる。 FIG. 7 shows the lower end of the chip holder 20 according to the third embodiment of the present invention. Similarly to the lower end portion of the chip holder 1 of the second embodiment, circular grooves provided on the lower surfaces of the first holder member 20a and the second holder member 20b, respectively, are provided on the surfaces facing each other. The bearing holding member 6 and the bearing 7a are provided. Here, the shaft support 7 b is a bearing 7 It has a through hole 7d penetrating through a, and a through hole 7c is also formed on the bearing holding member 6 and the holder 11 side so as to match the through hole 7d. These through-holes 7c and 7d are used as inlets for solid lubricant supplied from outside the holder 20.

またこの場合、 軸支部 7 bは例えば、力ッターチップ 2の刃先稜線径が 3 の とき、 前記カーブの曲率半径はおよそ 3 6 である。 また、 上記の刃先稜線 径を Dmmとするとカーブの曲率半径はおよそ Dmn!〜 2 D蒙の長さの範囲より選択 される。  Further, in this case, for example, when the diameter of the ridgeline of the cutting edge of the force cutter tip 2 is 3, the radius of curvature of the curve of the shaft support 7b is about 36. Also, if the above-mentioned edge ridge diameter is Dmm, the radius of curvature of the curve is approximately Dmn! ~ 2 D Select from the range of length.

本発明のチップ用ホルダーは、 図 4の 2つのホルダ一部材 1 a、 l bそれぞれ を上述の実施形態 1から 3の第 1のホルダー部材 2 0 a、 第 2のホルダ一部材 2 0 bに置き換えたものである。  In the chip holder of the present invention, the two holder members 1 a and lb in FIG. 4 are replaced with the first holder member 20 a and the second holder member 20 b of the above-described first to third embodiments. It is a thing.

図 8は、 単結晶ダイヤモンドあるいは焼結ダイヤモンドから軸受 7 aを製造す る場合の製造工程の一実施形態を示す。 単結晶ダイャモンド Xから軸受 7 aを製 作する場合は、 単結晶ダイヤモンド Xは、 上下の部分( (図 8の(a )の斜線部)を スカイフ盤などによる加工でカットされ、 Y A Gレーザにより、 その中心に孔明 けが行われ、 軸支部 7 bの基となるベル形状を有する穴が形成される (図 8の ( b ) ) 。 そして、 軸受 7 aの所定の外形寸法となるように Y A Gレーザで丸く加 ェされる (図 8の(c ) ) 。 その後、 軸支部 7 に、 遊離 ©粒 (ダイヤモンド砥粒 2〜4 μ Γη) を供給し、 軸支部と同じ先端角度の針状部材 1 2を回転させ、 さら に首振り運動させてベル形状を崩さないようにラッピング加工が行われる (図 8 の(f ) ) 。 FIG. 8 shows an embodiment of a manufacturing process for manufacturing the bearing 7a from single crystal diamond or sintered diamond. When the bearing 7a is manufactured from the single crystal diamond X, the single crystal diamond X is cut at the upper and lower parts (the shaded part in (a) in Fig. 8) by processing with a skiff machine, etc. Drilling is performed at the center, and a bell-shaped hole is formed as the basis of the shaft support 7b ((b) in Fig. 8). ((C) in Fig. 8) After that, loose particles (diamond grains 2 to 4 μΓη ) are supplied to the shaft support 7 and the needle-like member 1 having the same tip angle as the shaft support 1 is supplied. 2 is rotated, and the head is further swung to perform a lapping process so as not to break the bell shape ((f) in FIG. 8).

また、 焼結ダイヤモンドである軸受 7 aを製作する場合は、 最初に所定の外 形寸法を有する円柱状の軸受部材 7 a 'にダイヤモンド粒子が焼き固められる (図 8の(d ) ) 。 次に、 予めベル形状に成形された放電用電極 1 1を用いて、 軸 受部材 7 a 'に対して放電加工を行い、 軸受部材 7 a 'にベル形状を転写する (図 8の(e ) ) 。 その後、 放電加工された面に、 遊離砥粒 (ダイヤモンド砥粒 2 〜 4 /z m) を供給し、 軸支部と同じ先端角度の針状部材 1 2を回転させ、 さらに 首振り運動させてベル形状を崩さないようにラッビング加工が行われる (図 8の ( f ) ) 。 軸受 7 aにはサファイアやルビーなどの貴石を用いてもよい。 また、 仕上げの ラッピング加工は、 前記方法に限らず、 例えばワイヤラッピング加工を用いても 良い。 In the case of producing a sintered diamond bearing 7a, diamond particles are first hardened on a cylindrical bearing member 7a 'having a predetermined external dimension (FIG. 8 (d)). Next, using the discharge electrode 11 formed in a bell shape in advance, discharge machining is performed on the bearing member 7a ', and the bell shape is transferred to the bearing member 7a' ((e in FIG. 8). )). After that, loose abrasive grains (diamond abrasive grains 2 to 4 / zm) are supplied to the surface subjected to the electric discharge machining, and the needle-shaped member 12 having the same tip angle as the shaft support is rotated, and further, the head is swung to make a bell shape. The rubbing process is performed so as not to break (Fig. 8 (f)). Precious stones such as sapphire and ruby may be used for the bearing 7a. Further, the finishing lapping is not limited to the above method, and for example, wire wrapping may be used.

本発明のチップ用ホルダーの製造においては、 上記のように所定のベル形状の 凹部が形成された軸受 5 a , 7 aは軸受保持部材 6に保持されて第 1のホルダ一 部材 2 0 aと第 2のホルダー部材 2 0 bに取り付けられる。 次に、 カッターチッ プ 2及び軸受 5 a , 7 aを備える第 1のホルダー部材 2 0 aと第 2のホルダー部 材 2 0 bが組み合わされる。  In the manufacture of the chip holder of the present invention, the bearings 5 a and 7 a having the predetermined bell-shaped recess as described above are held by the bearing holding member 6 to form the first holder member 20 a. It is attached to the second holder member 20b. Next, the first holder member 20a including the cutter chip 2 and the bearings 5a and 7a is combined with the second holder member 20b.

チップ用ホルダーについて、 刃先荷重を 1 . 0 k gとしてスクライブテス トを 行なうと、 図 2の従来のタイプでは、 耐久性評価テスト結果である走行寿命距離 が平均 1 5万 mであるのに対し、 本発明のものでは平均 3 0万 mと大幅にスクラ イブ寿命が長くなつた。 さらに、 1万 m毎に固形潤滑剤を投入することで、 刃先 寿命が更に約 2 0 %から 3 0 %延びた。  When a scribing test is performed on the insert holder with a cutting edge load of 1.0 kg, the conventional type shown in Fig. 2 has an average running life distance of 150,000 m, which is the result of the durability evaluation test. In the case of the present invention, the average scrub life was significantly extended, with an average of 300,000 m. In addition, the injection of solid lubricant every 10,000 m further increased the tool life by about 20% to 30%.

カッターチップ 2を軸支する軸受 5 a , 7 aの軸支部 5 b , 7 bに油を含浸処 理した焼結合金、 いわゆるオイレスベアリングを用いることにより、 固体潤滑剤 の定期的な補充が不要となり安定したスクライブ性能を維持させることが出来る。 また、 軸支部 5 b , 7 bに表面改質 ·硬化用のコ一ティング処理を施す (例えば、 デフリックコーティング処理など) ことによつても、 軸受部 5 a , 7 aの寿命を 延ばすことが可能となる。  Oil bearing impregnated sintered alloys, so-called oilless bearings, are used for bearings 5a, 7b of bearings 5a, 7a that support cutter tip 2, so that regular replenishment of solid lubricant is not required. It is possible to maintain stable scribe performance. The life of the bearings 5a, 7a can also be extended by subjecting the shaft supports 5b, 7b to a coating treatment for surface modification and hardening (for example, defric coating). Becomes possible.

次に、 上述のチップ用ホルダーを装着したスクライブ装置について説明する。 図 9と図 1 0は、 スクライブ装置の 1つの実施形態の正面図と側面図である。 こ のスクライブ装置において、 水平回転テーブル 5 1に载置された脆性材料基板 5 0を真空吸着手段によって水平回転テープノレ 5 1に固定する。 平行な一対の案内 レール 5 2は、 このテーブル 5 1を Y方向 (図 9において紙面に直交する方向) に移動可能に支承し、 ボールネジ 5 3は、 案内レール 5 2に沿ってテーブル 5 1 を移動させる。 ガイドバー 5 4は、 X方向 (この図における左右方向) に沿って テーブル 5 1の上方に架設される。 スクライブヘッド 5 5は、 このガイドバー 5 4に X方向に摺動可能に設けられ、 モータ 5 6は、 このスクライブヘッド 5 5を 摺動させる。 上述のチップ用ホルダー 2 0は、 スクライブヘッド 5 5の下部に昇 B : :: : 降可能かつ首振り自在に設けられ、 その下端に、 カッターチップ 2が回転可能に 装着される。 一対の C C Dカメラ 5 8がガイドバ一 5 4の上方に設置され、 テー ブル 5 1上の脆性材料基板 5 0に表示されたアラインメントマークを認識する。 また、 このスクライブヘッド 5 5内には、 1本のスクライブラインの形成が完了 するたびに、 前述のごとく、 カッターチップ 2を 1 8 0 ° 反転させるベくチッ プ用ホルダ 2 0を 1 8 0 ° 反転させる力ッダーチップ反転手段が內蔵されてい る。 Next, a scribing device equipped with the above-described chip holder will be described. 9 and 10 are a front view and a side view of one embodiment of the scribe device. In this scribing device, the brittle material substrate 50 placed on the horizontal rotary table 51 is fixed to the horizontal rotary tape holder 51 by vacuum suction means. A pair of parallel guide rails 52 supports the table 51 so as to be movable in the Y direction (a direction perpendicular to the paper surface in FIG. 9), and the ball screw 53 supports the table 51 along the guide rail 52. Move. The guide bar 54 is installed above the table 51 along the X direction (the left-right direction in this figure). The scribe head 55 is provided on the guide bar 54 so as to be slidable in the X direction, and the motor 56 slides the scribe head 55. The tip holder 20 described above rises below the scribe head 55. B: ::: mounted for later possible and swing, at its lower end, the cutter tip 2 is mounted rotatably. A pair of CCD cameras 58 is installed above the guide bar 54 to recognize the alignment mark displayed on the brittle material substrate 50 on the table 51. In addition, every time the formation of one scribe line is completed, the scribe head 55 has a holder 180 for turning the cutter tip 2 by 180 ° as described above. ° There is built-in means for reversing the force tip.

また、 図 1 1に示す手動用カッターでは、 上述のチッ少用ホルダーも装着して いる。 この手動用カッターの握り部である筒状の柄 (ハンドル) 6 1は、 本出願 人による実公昭 6 2 - 2 3 7 8 0号公報に開示したガラス切りと同じであり、 そ の下部に、 上述の本発明によるチップ用ホルダ一 2 0を装着している。 手動用力 ッタ一はガラスのみならず、 セラミックス、 半導体材料などの脆性材料にも適用 される。 ここでは、 さらに、 カッターチップ 2に油を供給するために、 柄の中空 部に設けた油室 6 3、 油室のキャップ 6 4、 及び、 それに付随する機構 6 5〜7 3を備えるが、 これは本発明には直接に関連しない技術であるので、 説明を省略 する。  The manual cutter shown in FIG. 11 is also equipped with the above-mentioned holder for small chips. The cylindrical handle (handle) 61 serving as a grip portion of the manual cutter is the same as the glass cutter disclosed in Japanese Utility Model Publication No. Sho 62-23780 by the present applicant. The chip holder 20 according to the present invention described above is mounted. The manual power tool is applied not only to glass but also to brittle materials such as ceramics and semiconductor materials. Here, in order to supply oil to the cutter tip 2, an oil chamber 63 provided in a hollow portion of the handle, an oil chamber cap 64, and a mechanism 65-73 associated therewith are provided. Since this is a technology not directly related to the present invention, its description is omitted.

なお、 本発明は、 複数の実施の形態により説明されたが、 本発明はこれらの実 施の形態に限定されるものではない。  Although the present invention has been described with reference to a plurality of embodiments, the present invention is not limited to these embodiments.

Claims

請 求 の 範 囲 The scope of the claims 1 . 刃先稜線の両側に円錐状の軸を形成してなるカッターチップと、 1. A cutter tip having a conical shaft formed on both sides of the edge of the cutting edge, 2つのホルダー部材と、  With two holder members, このホルダー部材の対向する側にそれぞれ設けられ、 カッターチップを軸支す る軸受とからなり、  It is provided on the opposite side of this holder member, and comprises a bearing for supporting the cutter tip, 前記軸受の、 カッターチップを軸支する凹部の形状を、 べノ ^状としたことを 特徵とするチップ用ホルダー。  A tip holder characterized in that the shape of the concave portion for supporting the cutter tip of the bearing is a bent shape. 2 . 前記のベ/ 状は所定の曲率半径のカーブ面であることを特徵とする請求 項 1に記載のチップ用ホルダー。 2. The chip holder according to claim 1, wherein the convex shape is a curved surface having a predetermined radius of curvature. 3 . 前記凹部は、 前記ホルダ一部材に非貫通である請求項 1または 2に記載の チップ用ホルダー。  3. The chip holder according to claim 1, wherein the concave portion does not penetrate the holder member. 4 . 前記凹部は、 前記ホルダー部材に非貫通であって、 前記曲率半径は、 カツ タ一チップの刃先稜線径を Dmmとすると、 0 . 1 D瞧〜 D隱である請求項 2に記 載のチップ用ホルダー。  4. The concave portion is non-penetrating through the holder member, and the radius of curvature is 0.1 D 瞧 to D hidden when the diameter of the edge of the cutter tip is Dmm. Holder for chips. 5 . 前記凹部は、 前記ホルダー部材を貫通している請求項 1または 2に記載の チップ用ホルダー。  5. The chip holder according to claim 1, wherein the recess penetrates the holder member. 6 . 前記凹部は、 前記ホルダ一部材を貫通していて、 かつ、 前記曲率半径は、 カッターチップの刃先稜線径を Dmm とすると、 Dran!〜 2 Dmmである請求項 2に 記載のチップ用ホルダー。  6. The concave portion penetrates the holder member, and the radius of curvature is Dran! 3. The chip holder according to claim 2, which has a thickness of 2 to 2 Dmm. 7 . 前記軸受の材質が単結晶ダイャモンドであることを特徴とする請求項 1か ら 6のいずれかに記載のチップ用ホルダー。  7. The chip holder according to claim 1, wherein a material of the bearing is a single crystal diamond. 8 . 前記軸受の材質が焼結ダイャモンドであることを特徴とする請求項 1から 6のいずれかに記載のチップ用ホルダー。  8. The chip holder according to any one of claims 1 to 6, wherein the material of the bearing is sintered diamond. 9 . 刃先稜線の両側に円錐状の軸を形成してなるカッターチッブを具備するチ ップ用ホルダーの製造方法において、  9. A method for manufacturing a chip holder comprising a cutter chip having a conical shaft formed on both sides of a cutting edge ridge, 前記力ッターチップを軸支する軸受にベル形伏の凹部を形成する工程と、 前記軸受を保持させた軸受保持 miを、 第 1のホルダー部材と第 2のホルダー 部材に取り付ける工程と、 Forming a bell-shaped concave portion in a bearing that supports the force-titter chip; and holding the bearing holding mi holding the bearing with a first holder member and a second holder. Attaching to the member, 前記力ッタ一チップぉよび前記軸受を備える第 1のホルダ一部材と第 2のホル ダ一部材をそれぞれ組み合わせる工程と  Assembling a first holder member and a second holder member each including the force cutter chip and the bearing; を具備することを特徴とするチップ用ホルダーの製造方法。  A method for producing a chip holder, comprising: 1 0 . 前記軸受の材質が単結晶ダイヤモンドであることを特徴とする請求項9 に記載のチップ用ホルダ一の製造方法。 10. The method for manufacturing a tip holder according to claim 9 , wherein the material of the bearing is single crystal diamond. 1 1 . 前記所定のベル形状の凹部が Y AGレーザを用いて加工されることを特 徵とする請求項 1 0に記載のチップ用ホルダ一の製造方法。  11. The method for manufacturing a chip holder according to claim 10, wherein the predetermined bell-shaped concave portion is processed using a YAG laser. 1 2 . 前記軸受の材質が焼結ダイヤモンドであることを特徴とする請求項 9に 記載のチップ用ホルダーの製造方法。  12. The method for manufacturing a chip holder according to claim 9, wherein the material of the bearing is sintered diamond. 1 3 . 前記所定のベル形状の凹部が放 ¾¾Bェされることを特徴とする請求項 1 2に記載のチップ用ホルダーの製造方法。  13. The method for manufacturing a chip holder according to claim 12, wherein the predetermined bell-shaped concave portion is released. 1 4 . スクライブへッドが脆 '性材料基板を載置しているテーブルに対して相対 的に X方向及び Zまたは Y方向に移動する機能を備えるスクライブ装置において、 前記スクライブへッドが請求項 1カゝら 8のいずれかに記載のチップ用ホルダ一 を具備することを特徵とするスクライブ装置。  14. A scribing apparatus having a function of moving a scribe head in the X direction and the Z or Y direction relative to a table on which a brittle material substrate is placed, wherein the scribe head is claimed. Item 9. A scribing device comprising the tip holder according to any one of Items 1 to 8 above. 1 5 . 筒状の柄部と、 前記の柄部の一端側に固定されたチップ用ホルダ一とを 具備する手動カッターにおいて、  15. A manual cutter comprising a cylindrical handle and a tip holder fixed to one end of the handle, 前記チップ用ホルダーが請求項 1カゝら 8のいずれかに記載のチップ用ホルダー を具備することを特徵とする手動用力ッター。  A manual power cutter, wherein the tip holder comprises the tip holder according to any one of claims 1 to 8.
PCT/JP2002/013234 2001-12-18 2002-12-18 Holder for tip and method for manufacturing the same, and scribing device and manual cutter that are provided with the holder for tip Ceased WO2003051784A1 (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
EP02790803A EP1466872B1 (en) 2001-12-18 2002-12-18 Holder for tip and method for manufacturing the same, and scribing device and manual cutter that are provided with the holder for tip
US10/497,968 US20050016351A1 (en) 2001-12-18 2002-12-18 Holder for tip and method for manufacturing the same, and scribing device and manual cutter that are provided with the holder for tip
DE60227841T DE60227841D1 (en) 2001-12-18 2002-12-18 TOP HOLDER AND MANUFACTURING METHOD THEREFOR AS WELL AS SHARPENER AND HANDCUTTER WITH THE TOP HOLDER
KR1020047009268A KR100609756B1 (en) 2001-12-18 2002-12-18 Tip holder, manufacturing method and scribe device and manual cutter
JP2003552676A JP4105631B2 (en) 2001-12-18 2002-12-18 CHIP HOLDER, MANUFACTURING METHOD THEREOF, AND SCRIBBING DEVICE AND MANUAL CUTTER WITH THE CHIP HOLDER
AU2002366314A AU2002366314A1 (en) 2001-12-18 2002-12-18 Holder for tip and method for manufacturing the same, and scribing device and manual cutter that are provided with the holder for tip
HK05108360.0A HK1076443B (en) 2001-12-18 2002-12-18 Holder for tip and method for manufacturing the same, and scribing device and manual cutter that are provided with the holder for tip

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JP2001384231 2001-12-18
JP2001-384231 2001-12-18

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US (1) US20050016351A1 (en)
EP (1) EP1466872B1 (en)
JP (1) JP4105631B2 (en)
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AT (1) ATE402125T1 (en)
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JP2016023091A (en) * 2014-07-16 2016-02-08 トーヨー産業株式会社 Glass cutting tool
JP2016204229A (en) * 2015-04-27 2016-12-08 トーヨー産業株式会社 Wheel holder only for glass cutting
KR20170122111A (en) * 2016-04-26 2017-11-03 미쓰보시 다이야몬도 고교 가부시키가이샤 Scribe head unit
KR102375182B1 (en) * 2016-04-26 2022-03-16 미쓰보시 다이야몬도 고교 가부시키가이샤 Scribe head unit

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JP4105631B2 (en) 2008-06-25
EP1466872A1 (en) 2004-10-13
CN1604877A (en) 2005-04-06
CN1298645C (en) 2007-02-07
HK1076443A1 (en) 2006-01-20
TWI239322B (en) 2005-09-11
DE60227841D1 (en) 2008-09-04
KR100609756B1 (en) 2006-08-08
US20050016351A1 (en) 2005-01-27
ATE402125T1 (en) 2008-08-15
KR20040074089A (en) 2004-08-21
TW200301229A (en) 2003-07-01
AU2002366314A1 (en) 2003-06-30
JPWO2003051784A1 (en) 2005-04-28
EP1466872A4 (en) 2006-03-29
EP1466872B1 (en) 2008-07-23

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