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WO2003046663A3 - Caracterisation de la repartition d'angle d'eclairage d'une installation d'eclairage par projection - Google Patents

Caracterisation de la repartition d'angle d'eclairage d'une installation d'eclairage par projection Download PDF

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Publication number
WO2003046663A3
WO2003046663A3 PCT/EP2002/013430 EP0213430W WO03046663A3 WO 2003046663 A3 WO2003046663 A3 WO 2003046663A3 EP 0213430 W EP0213430 W EP 0213430W WO 03046663 A3 WO03046663 A3 WO 03046663A3
Authority
WO
WIPO (PCT)
Prior art keywords
illumination
lighting system
projection lighting
light source
measured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2002/013430
Other languages
German (de)
English (en)
Other versions
WO2003046663A2 (fr
Inventor
Nils Dieckmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Carl Zeiss SMT GmbH
Original Assignee
Carl Zeiss SMT GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss SMT GmbH filed Critical Carl Zeiss SMT GmbH
Priority to AU2002356748A priority Critical patent/AU2002356748A1/en
Priority to JP2003548036A priority patent/JP2005510861A/ja
Publication of WO2003046663A2 publication Critical patent/WO2003046663A2/fr
Publication of WO2003046663A3 publication Critical patent/WO2003046663A3/fr
Priority to US10/855,252 priority patent/US6985218B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70066—Size and form of the illuminated area in the mask plane, e.g. reticle masking blades or blinds
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70075—Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70133—Measurement of illumination distribution, in pupil plane or field plane
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70141—Illumination system adjustment, e.g. adjustments during exposure or alignment during assembly of illumination system
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70191—Optical correction elements, filters or phase plates for controlling intensity, wavelength, polarisation, phase or the like
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
    • G03F7/70591—Testing optical components

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

Selon l'invention, afin de permettre la détermination d'au moins une grandeur caractéristique qui est représentative de la répartition d'angle d'éclairage d'une source de lumière servant à éclairer un objet dans une installation d'éclairage par projection, en particulier en microlithographie, un élément filtrant (8) est tout d'abord mis en place (28) au niveau du plan pupillaire d'une optique d'éclairage de l'installation d'éclairage par projection. L'élément filtrant (8) a une fonction de filtrage variant dans la direction azimutale par rapport à l'axe optique de l'optique d'éclairage. Ensuite, l'intensité d'éclairage de la source de lumière est mesurée (29) dans un plan sur la trajectoire de faisceau dirigée vers le plan pupillaire. On fait alors tourner (30) l'élément filtrant (8) autour de l'axe optique et l'intensité d'éclairage de la source de lumière est à nouveau mesurée (31). Pour finir, la/les grandeur(s) caractéristique(s) sont calculées (32) à partir de la fonction de filtrage, de l'angle de rotation et des intensités d'éclairage mesurées. Ce procédé permet une détermination rapide et précise de la grandeur caractéristique.
PCT/EP2002/013430 2001-11-30 2002-11-28 Caracterisation de la repartition d'angle d'eclairage d'une installation d'eclairage par projection Ceased WO2003046663A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU2002356748A AU2002356748A1 (en) 2001-11-30 2002-11-28 Characterization of the illumination angle distribution of a projection lighting system
JP2003548036A JP2005510861A (ja) 2001-11-30 2002-11-28 投影照明システムの照明角度分布の特性化
US10/855,252 US6985218B2 (en) 2001-11-30 2004-05-27 Method of determining at least one parameter that is characteristic of the angular distribution of light illuminating an object in a projection exposure apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10158921.2 2001-11-30
DE10158921A DE10158921A1 (de) 2001-11-30 2001-11-30 Verfahren zum Bestimmen von mindestens einer Kenngröße, die für die Beleuchtungswinkelverteilung einer der Beleuchtung eines Gegenstandes dienenden Lichtquelle einer Projektionsbelichtungsanlage charakteristisch ist

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/855,252 Continuation US6985218B2 (en) 2001-11-30 2004-05-27 Method of determining at least one parameter that is characteristic of the angular distribution of light illuminating an object in a projection exposure apparatus

Publications (2)

Publication Number Publication Date
WO2003046663A2 WO2003046663A2 (fr) 2003-06-05
WO2003046663A3 true WO2003046663A3 (fr) 2003-12-18

Family

ID=7707621

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/013430 Ceased WO2003046663A2 (fr) 2001-11-30 2002-11-28 Caracterisation de la repartition d'angle d'eclairage d'une installation d'eclairage par projection

Country Status (5)

Country Link
US (1) US6985218B2 (fr)
JP (1) JP2005510861A (fr)
AU (1) AU2002356748A1 (fr)
DE (1) DE10158921A1 (fr)
WO (1) WO2003046663A2 (fr)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003249967A1 (en) * 2003-07-07 2005-01-28 Carl Zeiss Smt Ag Lighting device for a microlithographic projection exposure system
DE102004063314A1 (de) * 2004-12-23 2006-07-13 Carl Zeiss Smt Ag Filtereinrichtung für die Kompensation einer asymmetrischen Pupillenausleuchtung
DE102005004216A1 (de) * 2005-01-29 2006-08-03 Carl Zeiss Smt Ag Beleuchtungssystem, insbesondere für eine Projektionsbelichtungsanlage in der Halbleiterlithographie
US20080092944A1 (en) * 2006-10-16 2008-04-24 Leonid Rubin Semiconductor structure and process for forming ohmic connections to a semiconductor structure
WO2008092653A2 (fr) * 2007-01-30 2008-08-07 Carl Zeiss Smt Ag Système d'éclairage d'un appareil d'exposition par projection pour microlithographie
DE102009016456A1 (de) 2008-06-03 2009-12-24 Carl Zeiss Smt Ag Beleuchtungsoptik für die Mikrolithografie
DE102012205181B4 (de) 2012-03-30 2015-09-24 Carl Zeiss Smt Gmbh Messvorrichtung zum Vermessen einer Beleuchtungseigenschaft
WO2017144265A1 (fr) * 2016-02-25 2017-08-31 Asml Netherlands B.V. Homogénéisateur de faisceau, système d'éclairage et système de métrologie
DE102018201009A1 (de) 2018-01-23 2019-07-25 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithographie
DE102018201010A1 (de) 2018-01-23 2019-07-25 Carl Zeiss Smt Gmbh Beleuchtungsoptik für die Projektionslithographie

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5863712A (en) * 1996-01-16 1999-01-26 Hitachi, Ltd. Pattern forming method, projection exposure system, and semiconductor device fabrication method
JPH1187232A (ja) * 1997-07-18 1999-03-30 Canon Inc 露光装置及びそれを用いたデバイスの製造方法
US6333777B1 (en) * 1997-07-18 2001-12-25 Canon Kabushiki Kaisha Exposure apparatus and device manufacturing method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6128068A (en) * 1991-02-22 2000-10-03 Canon Kabushiki Kaisha Projection exposure apparatus including an illumination optical system that forms a secondary light source with a particular intensity distribution
US6285443B1 (en) * 1993-12-13 2001-09-04 Carl-Zeiss-Stiftung Illuminating arrangement for a projection microlithographic apparatus
US6741394B1 (en) * 1998-03-12 2004-05-25 Nikon Corporation Optical integrator, illumination optical apparatus, exposure apparatus and observation apparatus
JP3937580B2 (ja) * 1998-04-30 2007-06-27 キヤノン株式会社 投影露光装置及びそれを用いたデバイスの製造方法
DE10062579A1 (de) * 1999-12-15 2001-06-21 Nikon Corp Optischer Integrierer,optische Beleuchtungseinrichtung, Photolithographie-Belichtungseinrichtung,und Beobachtungseinrichtung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5863712A (en) * 1996-01-16 1999-01-26 Hitachi, Ltd. Pattern forming method, projection exposure system, and semiconductor device fabrication method
JPH1187232A (ja) * 1997-07-18 1999-03-30 Canon Inc 露光装置及びそれを用いたデバイスの製造方法
US6333777B1 (en) * 1997-07-18 2001-12-25 Canon Kabushiki Kaisha Exposure apparatus and device manufacturing method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 08 30 June 1999 (1999-06-30) *

Also Published As

Publication number Publication date
JP2005510861A (ja) 2005-04-21
US6985218B2 (en) 2006-01-10
AU2002356748A8 (en) 2003-06-10
WO2003046663A2 (fr) 2003-06-05
AU2002356748A1 (en) 2003-06-10
US20040257559A1 (en) 2004-12-23
DE10158921A1 (de) 2003-06-26

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