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WO2003040882A3 - Monitoring and controlling independent systems in a factory - Google Patents

Monitoring and controlling independent systems in a factory Download PDF

Info

Publication number
WO2003040882A3
WO2003040882A3 PCT/US2002/035415 US0235415W WO03040882A3 WO 2003040882 A3 WO2003040882 A3 WO 2003040882A3 US 0235415 W US0235415 W US 0235415W WO 03040882 A3 WO03040882 A3 WO 03040882A3
Authority
WO
WIPO (PCT)
Prior art keywords
equipment
monitoring
factory
allows
diverse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2002/035415
Other languages
French (fr)
Other versions
WO2003040882A2 (en
Inventor
Steven M Lurcott
Glenn M Tom
Ray Dubois
James A Dietz
Oliver A Zitzmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Original Assignee
Advanced Technology Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials Inc filed Critical Advanced Technology Materials Inc
Priority to AU2002336720A priority Critical patent/AU2002336720A1/en
Publication of WO2003040882A2 publication Critical patent/WO2003040882A2/en
Publication of WO2003040882A3 publication Critical patent/WO2003040882A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B21/00—Systems involving sampling of the variable controlled
    • G05B21/02—Systems involving sampling of the variable controlled electric
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/20—Pc systems
    • G05B2219/25—Pc structure of the system
    • G05B2219/25204—Translate between different communication protocols
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31457—Factory remote control, monitoring through internet
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2223/00—Indexing scheme associated with group G05B23/00
    • G05B2223/06—Remote monitoring
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P80/00—Climate change mitigation technologies for sector-wide applications
    • Y02P80/40—Minimising material used in manufacturing processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/80—Management or planning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Testing And Monitoring For Control Systems (AREA)
  • General Factory Administration (AREA)

Abstract

A method and apparatus (400) are provided for remotely configuring, operating and monitoring equipment (320, 330) in a manufacturing facility. An interface (230) is provided that allows a remote user to establish a connection with desired equipment (320, 330) in order to configure, operate or monitor the equipment (320,330). The disclosed interface (230) performs any required translation between the diverse equipment (320, 330) and protocols of different equipment manufacturers. A web-based connection to remote equipment allows a variety of diverse equipment systems to be accessed and controlled in a uniform manner. Historical data can be analyzed following a failure using pattern recognition techniques to identify data patterns that suggest an imminent failure.
PCT/US2002/035415 2001-11-05 2002-11-05 Monitoring and controlling independent systems in a factory Ceased WO2003040882A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002336720A AU2002336720A1 (en) 2001-11-05 2002-11-05 Monitoring and controlling independent systems in a factory

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US33782101P 2001-11-05 2001-11-05
US60/337,821 2001-11-05

Publications (2)

Publication Number Publication Date
WO2003040882A2 WO2003040882A2 (en) 2003-05-15
WO2003040882A3 true WO2003040882A3 (en) 2003-09-12

Family

ID=23322166

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/035415 Ceased WO2003040882A2 (en) 2001-11-05 2002-11-05 Monitoring and controlling independent systems in a factory

Country Status (2)

Country Link
AU (1) AU2002336720A1 (en)
WO (1) WO2003040882A2 (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3981349B2 (en) * 2003-10-09 2007-09-26 株式会社森精機製作所 Remote control system
WO2005054968A1 (en) * 2003-11-26 2005-06-16 Tokyo Electron Limited Intelligent system for detection of process status, process fault and preventive maintenance
US20070070894A1 (en) * 2005-09-26 2007-03-29 Fan Wang Method to determine a scheduling priority value for a user data connection based on a quality of service requirement
DE102005051580A1 (en) * 2005-10-27 2007-05-03 Vega Grieshaber Kg Communication module for a measuring device comprises a first interface connected to a measuring device, a second interface connected to a data bank and a web client
DE102006004633A1 (en) * 2006-01-31 2007-08-16 Phoenix Contact Gmbh & Co. Kg Distributed automation system
US7894934B2 (en) * 2006-12-05 2011-02-22 Veyance Technologies, Inc. Remote conveyor belt monitoring system and method
US20080288120A1 (en) * 2007-05-14 2008-11-20 General Electric Company Methods and Systems for Modifying Turbine Control Systems
AU2009329794A1 (en) * 2008-12-23 2011-08-11 Chung Lam Li System, method and computer program for pattern based intelligent control, monitoring and automation
TWI494887B (en) * 2014-03-28 2015-08-01 Yun Han Wu Online gems forming system and of gems
WO2016174594A1 (en) * 2015-04-27 2016-11-03 Abb Technology Ltd. Method for condition monitoring and providing a service to a robot
US10067905B2 (en) * 2015-05-26 2018-09-04 Plasmability, Llc Digital interface for manufacturing equipment
CN115145789B (en) * 2022-07-01 2023-05-16 北京瑞风协同科技股份有限公司 Complex equipment test integrated system
CN115292140B (en) * 2022-09-01 2023-08-15 摩尔线程智能科技(北京)有限责任公司 Method, apparatus and computer readable medium for monitoring system startup
CN117329448A (en) * 2023-10-17 2024-01-02 江苏超微半导体科技有限公司 An integration method of ultrapure gas delivery system for semiconductor manufacturing

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5801965A (en) * 1993-12-28 1998-09-01 Hitachi, Ltd. Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
US6038486A (en) * 1996-11-29 2000-03-14 Scan Technology Co., Ltd. Control method for factory automation system
US6263255B1 (en) * 1998-05-18 2001-07-17 Advanced Micro Devices, Inc. Advanced process control for semiconductor manufacturing

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5801965A (en) * 1993-12-28 1998-09-01 Hitachi, Ltd. Method and system for manufacturing semiconductor devices, and method and system for inspecting semiconductor devices
US6038486A (en) * 1996-11-29 2000-03-14 Scan Technology Co., Ltd. Control method for factory automation system
US6263255B1 (en) * 1998-05-18 2001-07-17 Advanced Micro Devices, Inc. Advanced process control for semiconductor manufacturing

Also Published As

Publication number Publication date
AU2002336720A1 (en) 2003-05-19
WO2003040882A2 (en) 2003-05-15

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