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WO2002031548A2 - Composant optique comprenant un guide d'ondes - Google Patents

Composant optique comprenant un guide d'ondes Download PDF

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Publication number
WO2002031548A2
WO2002031548A2 PCT/US2001/030510 US0130510W WO0231548A2 WO 2002031548 A2 WO2002031548 A2 WO 2002031548A2 US 0130510 W US0130510 W US 0130510W WO 0231548 A2 WO0231548 A2 WO 0231548A2
Authority
WO
WIPO (PCT)
Prior art keywords
pocket
component
base
ridge
light transmitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2001/030510
Other languages
English (en)
Other versions
WO2002031548A3 (fr
Inventor
Chi Wu
Wenhua Lin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lightcross Inc
Original Assignee
Lightcross Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/784,636 external-priority patent/US20020041748A1/en
Priority claimed from US09/784,814 external-priority patent/US20020064358A1/en
Priority claimed from US09/821,822 external-priority patent/US20020041739A1/en
Application filed by Lightcross Inc filed Critical Lightcross Inc
Priority to AU2001296400A priority Critical patent/AU2001296400A1/en
Publication of WO2002031548A2 publication Critical patent/WO2002031548A2/fr
Publication of WO2002031548A3 publication Critical patent/WO2002031548A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/122—Basic optical elements, e.g. light-guiding paths
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12083—Constructional arrangements
    • G02B2006/12097—Ridge, rib or the like
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12176—Etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3632—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means
    • G02B6/3636—Mechanical coupling means for mounting fibres to supporting carriers characterised by the cross-sectional shape of the mechanical coupling means the mechanical coupling means being grooves
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3692—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier with surface micromachining involving etching, e.g. wet or dry etching steps

Definitions

  • the invention relates to optical networking components.
  • the invention relates to components having one or more waveguides.
  • a variety of communications networks employ optical components having one or more waveguides. Examples of these optical components include Arrayed Waveguide Grating Demultiplexers, Variable Optical Attenuators, and Mach- Zenhder Interferometers.
  • One method for fabricating the waveguides on these optical components employs Flame Hydrolysis Deposition (FHD).
  • FHD Flame Hydrolysis Deposition
  • a first silica layer is deposited on either silicon or quartz substrate, followed by a germanium (Ge) doped silica layer.
  • the germanium doped silica layer is patterned by photo- mask and etched to form a channel waveguide.
  • a third silica cladding layer is then deposited. Since the percentage of germanium doped in silica is difficult to control across an entire wafer, the index of refraction of the waveguides often has poor uniformity.
  • PECVD Plasma Enhanced Chemical Vapor Deposition
  • the index of refraction of the waveguide is determined by the ratio of Oxygen and Nitrogen in the SiON x . Because this ratio is difficult to control across a wafer, the index of refraction of the waveguides often has poor uniformity. A non-uniform index of refractions can degrade performance of an optical component. For instance, the phase difference between the waveguides of an Arrayed Waveguide Grating Demultiplexer can not be kept constant if the index of refraction is not substantially uniform across adjacent waveguides.
  • optical components are often handled by humans and/or machinery during their assembly and installation. Handling of optical components can result in damage to the optical component. For instance, the surfaces of waveguides on optical components can become scratched during handling. Further, dust can land on the surfaces. The scratches and dust can perturb the optical mode, cause scattering of light signals and/or cause optical loss. As a result, there is a need for optical components having waveguides with an increased tolerance to handling.
  • demultiplexers are often designed to produce a particular wavelength of light on a particular output waveguide.
  • optical components and waveguides having a reduced thermal sensitivity include a plurality of waveguides formed on a substrate.
  • the components often include a light barrier positioned over the substrate.
  • a layer of a light transmitting medium covers the light barrier.
  • a plurality of ridges are formed in the light transmitting medium. The ridges serve as the waveguides where light signals are constrained.
  • the light barrier stops light traveling along the waveguides from leaking into the substrate. However, when light escapes from one of the waveguides, the light barrier traps the light within the light transmitting medium. The trapped light can enter other waveguides on the component. Light entering one waveguide from another waveguide is the source of cross talk on the component. There is a need for optical components having reduced cross talk.
  • the one or more waveguides on optical components often end at a facet where light signals enter and/or exit the component. These facets are often coupled with optical fibers in order to provide optical communication between the waveguide and the optical fiber.
  • An optical fiber being coupled with a facet requires precise alignment between the optical fiber and the facet. Optical loss can result when the waveguide is not properly aligned with the optical fiber. As a result, there is a need for optical components that are suitable for aligning with one or more optical fibers.
  • the invention relates to an optical component.
  • the optical component includes a light transmitting medium having a waveguide with a light signal carrying region.
  • the optical component also includes a base having a pocket.
  • the light transmitting medium is positioned on the base such that at least a portion of the light signal carrying region is positioned over the pocket. In some instances, the material in the pocket is positioned adjacent to the light signal carrying region.
  • One embodiment of the optical component includes a base having a pocket and a light transmitting medium having a ridge. The ridge defines a portion of a light signal carrying region in the light transmitting medium.
  • the light transmitting medium is positioned adjacent to the base such that the ridge extends into the pocket.
  • a material in the pocket is a gas.
  • the gas can be exposed to the atmosphere or sealed from the atmosphere.
  • the gas can be sealed from the atmosphere such that the gas is held at a pressure less than 1 atmospheres (arm), .95 atm, .9 atm, .8 atm, .75 atm, .5 atm, .1 atm, .01 atm, .001 atm, .0001 atm, .00001 atm or .000001 atm.
  • an optical component includes a base and a plurality of waveguides defined in a light transmitting medium.
  • the light transmitting medium is positioned adjacent to the base such that the light transmitting medium associated with at least two adjacent waveguides is separated by a gap.
  • Another embodiment of the component includes a base having a support region and an alignment region.
  • a light transmitting medium is positioned over the support region.
  • the light transmitting medium has a light signal carrying region for carrying of light signals.
  • the component also includes a pocket formed in the base. The pocket extends from under the light signal carrying region into the alignment region.
  • the invention also relates to a method of forming an optical component.
  • the method includes obtaining a light transmitting medium positioned over a base having a pocket.
  • the method also includes forming at least a portion of a waveguide in the light transmitting medium.
  • the waveguide is formed with a light signal carrying region that is at least partially positioned over the pocket.
  • Another embodiment of the method includes forming at least a portion of a waveguide in a light transmitting medium.
  • the waveguide is formed with a light signal carrying region.
  • the method also includes positioning the light transmitting medium on a base having a pocket such that at least a portion of the light signal carrying region is positioned over the pocket.
  • Yet another method includes obtaining a base having a pocket and positioning a light transmitting medium having a ridge adjacent to the base such that the ridge extends into the pocket. The ridge defines a portion of a light signal carrying region in the light transmitting medium.
  • Another method includes obtaining a component having a light transmitting medium positioned adjacent to a pocket formed in a base. The method also includes forming a vacuum in the pocket.
  • Still another embodiment of the method includes obtaining a base and a light transmitting medium positioned adjacent to the base.
  • a waveguide is defined in the light transmitting medium.
  • the method also includes forming a surface in the light transmitting medium that intersects the base. The surface extends along at least a portion of a longitudinal length of the waveguide.
  • Figure 1 A is a topview of a portion of a component having a waveguide
  • Figure IB is a cross section of the portion of the component illustrated in Figure 1 A taken at the line labeled A.
  • Figure 2 illustrates a material formed in a pocket of a component.
  • Figure 3A illustrates an optical component having a ridge positioned in a pocket.
  • Figure 3B illustrates an optical component having a ridge extending into a pocket. A layer of material is formed in the pocket.
  • Figure 3C illustrates an optical component having a first ridge extending into a pocket and a second ridge extending away from the pocket.
  • Figure 3D illustrates an optical component having a first ridge extending into a pocket and a second ridge extending away from the pocket. The second ridge has a different width than the first ridge.
  • Figure 3E illustrates an optical component having a first ridge extending into a pocket and a second ridge extending away from the pocket. The first ridge and the second ridge are off center relative to one another. A side of the first ridge is aligned with a side of the second ridge.
  • Figure 3F illustrates an optical component having a first ridge extending into a pocket and a second ridge extending away from the pocket. The first ridge and the second ridge are off center relative to one another. A side of the first ridge is not aligned with a side of the second ridge.
  • Figure 3G illustrates an optical component having a first ridge extending into a pocket and a second ridge extending away from the pocket. The sides of the first ridge and the second ridge are contoured.
  • Figure 3H is a topview of a component having a waveguide with a first region, a second region and third region.
  • the first region includes a ridge that extends away from the pocket.
  • the second region includes a ridge that extends into the pocket.
  • the third region includes a first ridge that extends into the pocket and a second ridge that extends away from the pocket.
  • Figure 31 is a cross section of the component shown in Figure 3H taken along the line labeled A.
  • Figure 3J is a cross section of the component shown in Figure 3H taken along the line labeled A.
  • the interface of the different regions has a slanted side.
  • Figure 3K is a topview of a component having a waveguide with a first region, a second region and third region. A portion of the waveguide tapers at the transition between adjacent regions.
  • Figure 3L is a topview of an optical component having a waveguide with a taper that serves as mode transformer.
  • Figure 3M is a cross section of the component shown in Figure 3L taken along the line labeled A.
  • Figure 3N is a bottom view of the waveguide shown in Figure 3L.
  • Figure 30 is a topview of an optical component having waveguide with a taper that serves as a mode transformer.
  • the waveguide includes a first ridge that tapers and a second ridge that tapers.
  • Figure 4A through Figure 4C illustrate an optical component having an alignment region configured to provide alignment between an optical fiber and a facet of a waveguide.
  • Figure 4D through Figure 4F illustrate the alignment region providing alignment between the facet and an optical fiber.
  • Figure 4G illustrates a waveguide ending in a facet that is angled at less than ninety degrees relative to a longitudinal axis of the waveguide. The facet is perpendicular to the top side of the waveguide.
  • Figure 4G illustrates a component having a plurality of waveguides that each end in a facet.
  • the angle of the facet on a waveguides is the opposite of the angle on the adjacent facet.
  • Figure 5 A is a cross section of a component having a plurality of waveguides.
  • Figure 5B is a top view of a component having a plurality of waveguides. Each waveguide is illustrated as being associated with a different pocket.
  • Figure 5C is a top view of component having a plurality of waveguides where a pocket is associated with more than one waveguide.
  • Figure 6A is a cross section of a component having a plurality of waveguides formed over a base.
  • the waveguides are formed of a light transmitting medium that includes one or more surfaces extending from the base away from the base.
  • Figure 6B is a topview of a component having a plurality of waveguides formed over a base.
  • the waveguides are formed of a light transmitting medium that includes one or more surface extending from the base away from the base.
  • Figure 6C is a cross section of a component having a plurality of waveguides formed over a base.
  • the waveguides are formed of a light transmitting medium that includes one or more surface extending from the base away from the base.
  • the base includes a layer of material formed over a substrate.
  • Figure 6D is a cross section of a component having a plurality of waveguides positioned on a base having a light barrier that is continuous across a substrate
  • Figure 7A through Figure 7F illustrates a method for forming a component according to the present invention.
  • Figure 8A through Figure 8F illustrate a method of forming an optical component having a ridge positioned in a pocket.
  • Figure 9A through Figure 9H illustrate a method of forming an optical component having an alignment region configured to align an optical fiber with a facet of a waveguide.
  • Figure 10A through Figure 101 illustrate another embodiment of a method for forming an optical component having an alignment region configured to align an optical fiber with a facet of a waveguide.
  • Figure 1 1 A through Figure 1 ID and Figure 1 IF through Figure 1 IM illustrate method of forming an optical component having a waveguide with an angled facet.
  • Figure 12A through Figure 12E illustrate a method for forming a pocket having a gas under vacuum.
  • Figure 13 illustrates an optical component having supports for supporting the waveguide over a pocket.
  • the invention relates to a component having a waveguide.
  • One embodiment of the component includes a light transmitting medium positioned on a base having a pocket.
  • the light transmitting medium includes a light signal carrying region configured to constrain light signals.
  • the light transmitting medium is positioned adjacent to a base having a pocket such that the light signal carrying region is at least partially positioned over the pocket.
  • the light transmitting medium is silica.
  • the uniformity of index of refraction of silica is better than that of germanium doped silica and SiONx layers.
  • waveguides according to the present invention have an improved index of refraction uniformity.
  • waveguides according to the present invention can provide optical components with an improved performance.
  • a first ridge defines a portion of the light signal carrying region. The light transmitting medium is positioned adjacent to the base such that the first ridge extends into the pocket. Because the first ridge extends into the pocket, the first ridge is protected from damage that can result from handling.
  • light transmitting medium includes a second ridge that defines a second portion of the light signal carrying region. At least a portion of the second ridge can be positioned over the first ridge.
  • the first ridge and the second ridge can be selected so as to improve various functions of the optical component. For instance, the first ridge and the second ridge can be shaped so as to improve the symmetrical nature of the light signal carrying region for improved optical fiber coupling. Further, the first ridge and the second ridge can be selected for use with a curved waveguide having reduced optical loss. Additionally, the first and/or second ridge can be tapered so as to form a mode transformer. In some instances, a material in the pocket is sealed from the atmosphere.
  • the material in the pocket can be held under vacuum.
  • the vacuum can serve as a thermal insulator positioned adjacent to the light signal carrying region.
  • the vacuum provides thermal insulation to a portion of the waveguide.
  • the thermal sensitivity of the waveguide can be reduced.
  • the optical component can include a plurality of waveguides defined in the light transmitting medium. Additionally, the light transmitting medium can be positioned adjacent to the base such that the light transmitting medium associated with adjacent waveguides is separated by a gap. The gap holds a medium that causes light signals from the light transmitting medium to be reflected back into the light transmitting medium.
  • the optical component can have a reduced cross talk.
  • the component can include a base having a support region and an alignment region.
  • a waveguide is positioned in the support region. The waveguide ends at a facet positioned at an interface of the support region and the alignment region.
  • a pocket extends under the waveguide, past the facet and into the alignment region of the base. The portion of the pocket in the alignment region is sized to receive an optical fiber such that the optical fiber is aligned with the facet.
  • Figure 1 A is a topview of a portion of a component having a waveguide.
  • Figure I B is a cross section of the portion of the component 10 illustrated in Figure 1 A taken at the line labeled A.
  • the component 10 includes a light transmitting medium 14 formed on a base 15. Suitable light transmitting media include, but are not limited to silica.
  • the base 15 includes one or more surfaces 36 that define a pocket.
  • the light transmitting medium 14 includes a ridge having a base 22, a top 24 and opposing sides 26.
  • the ridge defines a portion of a light signal carrying region 25.
  • the profile a light signal being carried in the light signal carrying region is illustrated by the line labeled B.
  • the pocket can hold a material that reflects light signals from the light signal carrying region back into the light signal carrying region.
  • the pocket can hold a gas such as air or another medium with an index of refraction that is less than the index of refraction of silica.
  • the drop in index of refraction causes reflection of a portion of the light signals that are incident on the material in the pocket. Accordingly, the material in the pocket constrains the light signals to the light signal carrying region.
  • Figure 1 A shows the periphery of the pocket 30 relative to the periphery of the ridge 32.
  • the periphery of the pocket 30 is illustrated as a dashed line.
  • the ridge is positioned over the pocket and the periphery of the pocket 30 traces the periphery of the ridge 32.
  • the distance between the ridge base 22 and the periphery of the pocket 30 can be substantially constant along the length of at least a portion of the waveguide.
  • the pocket and the ridge can be constructed such that the periphery of the pocket 30 extends beyond the periphery of the ridge 32.
  • the pocket and waveguide 12 are constructed such that the periphery of the pocket 30 is substantially the same size as the periphery of the ridge 32.
  • the pocket and the ridge are constructed such that the periphery of the pocket 30 is smaller than the periphery of the ridge 32.
  • the width of the pocket 18 can be larger than 150 % of the width of the ridge base 22, larger than 250 % of the width of the ridge base 22, larger than 300 % of the width of the ridge base 22, larger than 400 % of the width of the ridge base 22 or larger than 500 % of the width of the ridge base 22. Additionally or alternatively, the width of the pocket can be smaller than 1000 % of the width of the ridge base 22, smaller than 800 % of the width of the ridge base 22, smaller than 600 % of the width of the ridge base 22, smaller than 500 % of the width of the ridge base 22, smaller than 400 % of the width of the ridge base 22, smaller than 300 % of the width of the ridge base 22 or smaller than 150 % of the width of the ridge base 22.
  • the base 15 can include a substrate 34 such as a silicon substrate 34. As shown in Figure 1 A, the substrate 34 can have one or more surfaces 36 that define a pocket 18 in the substrate 34. Alternatively, one or more layers of material 38 can be formed in the pocket 18 as shown in Figure 2.
  • the layer of material 38 can be opaque or can be a light transmitting medium such as silica.
  • the light transmitting medium can be inverted so the ridge 20 is positioned in the pocket 18 as shown in Figure 3 A. Positioning the ridge 20 in the pocket 18 protects the ridge 20 from physical damage. For example, the position of the ridge 20 in the pocket 18 can protect the ridge 20 from damage that can occur during the handling of the component 10.
  • a layer of material 38 can be formed in the pocket as shown in Figure 3B.
  • the light transmitting medium can have a first ridge 20A that extends into the pocket 18 and a second ridge 20B that extends away from the pocket 18 as illustrated in Figure 3C.
  • the first ridge 20A and the second ridge 20B are shaped so as to provide a substantially square light signal carrying region 25.
  • the profile a light signal being carried in the light signal carrying region 25 is illustrated by the line labeled B.
  • the light signal illustrated in Figure 3C is more symmetrical than the light signal illustrated in Figure IB.
  • the performance of the waveguide is less polarization dependent.
  • the profile is closer to a round shape than the profile of the light signal shown in Figure IB. Increasing the roundness of the profile brings the profile closer to the profile in an optical fiber.
  • the coupling efficiency between an optical fiber and the waveguide 12 of Figure 3C can be improved over the coupling efficiency of an optical fiber and the waveguide 12 of Figure I B.
  • the light signal carrying region of the waveguide illustrated in Figure 3C can be provided with a substantially square shape by forming the first ridge 20A and the second ridge 20B with the same width and such that the distance between the top of the first ridge 20A and the top of the second ridge 20B is substantially the same as the ridge widths.
  • the first ridge 20A and the second ridge 20B can have about the same height, the height of the first ridge 20A and the second ridge 20B can be different.
  • the first ridge 20A and the second ridge 20B need not have the same width as illustrated in Figure 3D.
  • the different widths can be used to match the profile of the light signal to other waveguides 12.
  • the light signal profile illustrated in Figure 3D is close to the light signal profile illustrated in Figure IB.
  • Waveguides 12 having matched profiles have a better coupling efficiency.
  • the first ridge 20A and the second ridge 20B need not be centered relative to one another as shown in Figure 3E and Figure 3F.
  • the off center ridges allow the profile of the light signal to be shifted in a particular direction.
  • Figure 3E and Figure 3F show the second ridge 20B shifted in the direction of the arrow labeled A relative to the first ridge 20A.
  • the profile of the light signal also shifts in the direction of the arrow labeled A.
  • the ability to shift the profile in a particular direction can be an advantage in particular circumstances.
  • the optical loss associated with curved waveguides can be reduced when the light signal profile is shifted toward the inside of a curve. Accordingly, the waveguide 12 illustrated in Figure 3E is suitable for use in curved waveguides 12.
  • Figure 3E shows a side 26 of the second ridge 20B aligned with a side of the second ridge 20A, however, the second ridge could be shifted further in the direction of the arrow labeled A.
  • the sides 26 of the first ridge 20A and the second ridge 20B need not be vertical.
  • the sides 26 of the first ridge 20A and the second ridge 20B can be contoured.
  • the sides can be slanted as shown in Figure 3G.
  • the use of a slant can increase the number of sides of the waveguide 12.
  • the waveguide 12 of Figure 3G has the shape of a polygon.
  • the increased number of sides 26 can bring the shape of the light signal ca ⁇ ying region 25 closer to a circular shape and can accordingly increase the coupling efficiency with an optical fiber.
  • the contour of the sides 26 can also be a curve. In some instances, the sides are curved so the shape of the light signal carrying region further approaches the shape of the light signal carrying region of an optical fiber.
  • the first ridge 20A and the second ridge 20B are both illustrated with contoured sides 26, both ridges need not have contoured sides 26. For instances, one or more of the sides 26 can be vertical relative to the base.
  • first ridge 20A and the second ridge 20B of Figure 3E are shown as being centered relative to one another, the first ridge 20A and the second ridge 20B can be off center. Further, the first ridge 20 A and the second ridge 20B of Figure 3E can have the same widths or different widths and the same heights or different heights.
  • contoured ridge sides 26 is not limited to optical components having a first ridge 20A and a second ridge 20B and can be extended to embodiments of the optical component having a single ridge.
  • the component 10 can have a three dimensional waveguide.
  • Figure 3H is a topview of a component 10 having a first waveguide 12A with a first region 42A, a second region 42B and a third region 42C.
  • Figure 31 is a cross section of the component shown in Figure 3H taken along the line labeled A.
  • the first region 42A includes a ridge that extends away from the pocket.
  • the second region 42B includes a ridge 20 that extends into the pocket.
  • the third region 42C includes a first ridge 20A that extends into the pocket and a second ridge that extends away from the pocket.
  • the light signal travels through the first region 42A, the second region 42B and the third region 42C as illustrated by the arrow labeled B.
  • a second waveguide 12B crosses over the first waveguide 12 A.
  • the second waveguide 12B has a ridge that extends away from a pocket.
  • the second waveguide 12B crosses the first waveguide 12A at the second region 42B. This arrangement can reduce the effects of the second waveguide 12B on a light signal traveling along the first waveguide 12A.
  • Prior waveguide intersections are constructed so the entire light signal carrying region 25 from the first waveguide 12A is shared with the second waveguide 12B at the intersection of the first waveguide 12A and the second waveguide 12B.
  • the ridge 20 of the first waveguide 12 A in the second region 42B extends into the pocket 18 and the ridge 20 of the second waveguide 12B extends away from a pocket 18, only a portion of the light signal carrying region 25 from the first waveguide 12A is shared with the second waveguide 12B at the intersection of the first waveguide 12A and the second waveguide 12B. Because the illustrated construction reduces the shared portion of the light signal carrying region 25 at the intersection, the effects of the second waveguide 12B on a light signal traveling along the first waveguide 12A are reduced. As a result, the optical loss, interference and cross talk associated with waveguide intersections can be reduced. Hence, the construction can provide improved transition performance.
  • the third region 42C can act as a transition region from the first region 42A to the third region 42C. For instance, the presence of the third region 42C reduces the reflection and/or optical loss that would occur as a result of an abrupt transition from the first region 42A to the second region 42B.
  • the third region 42C is illustrated between the first region 42A and the second region 42B, the first region 42A and a second region 42B can be directly connected to one another without the third region 42C. Further, the third region 42C can be positioned between two first regions 42 A or between two second regions 42B.
  • the side 26 of the waveguide that provides the transition between different regions, 42A, 42B, 42C can be contoured.
  • the transition between different regions 42A, 42B, 42C can be curved or can be slanted as shown in Figure 3J.
  • the contour can reduce the amount of reflection that occurs at the transition between regions.
  • the contour is formed so the size and shape of the light signal carrying region remains substantially constant along the waveguide. Accordingly, the size and shape of the light signal carrying region is substantially constant in the transition between different regions 42A, 42B, 42C.
  • the constant size and shape of the light signal carrying region can reduce excitation of higher order modes and/or the amount of reflection that occurs at the transition between regions 42A, 42B, 42C.
  • the transition between regions can be tapered as shown in Figure 3 .
  • the taper can reduce the excitation of higher order modes at the transition. Additionally, the taper can also reduce reflection at the transition.
  • the taper is only shown on the top of the component, one or more tapers can be formed on the bottom of the component.
  • the tapers illustrated in Figure 3K can be combined with the contours shown in Figure 31 or can be employed without the contours shown in Figure 31.
  • Figure 3K shows each transition having a taper, one or more of the transitions can have a taper while other transitions do not have tapers.
  • a ridge having a taper can also serve as a mode transformer as illustrated in Figure 3L through Figure 3N.
  • Figure 3L is a topview of the optical component 10.
  • Figure 3M is a cross section of the optical component 10 shown in Figure 3L taken along the line labeled A.
  • Figure 3N is a bottom view of the light transmitting medium 14 shown in Figure 3L.
  • the dashed line labeled A in Figure 3M illustrates the location where the taper of the first ridge begins.
  • the dashed line labeled B illustrates the location of the base of the second ridge 20B and the dashed line labeled C illustrates the location of the base of the first ridge 20A.
  • the optical component 10 includes a waveguide 12 having a first region 42A and a third region 42C.
  • the height of the second ridge 20B is the same in the first region 42A and in the third region 42C.
  • the height of the light signal carrying region 25 is larger in the third region 42C than in the first region 42A.
  • the change in the size of the light signal carrying region 25 can cause the mode distribution to be different in the first region 42A than in the third region 42C.
  • the first region 42A can have the dimensions of a single mode region while the third region 42C can have the dimensions of a multi-mode region.
  • Figure 3M illustrates the terminal end of the first ridge 20A.
  • the end of the first ridge 20A tapers.
  • the taper can serve as a mode transformer positioned at the interface of the first region 42 A and the third region 42C.
  • the second ridge 20B can also be tapered at the interface of the third region 42C and the first region 42A as shown in Figure 30.
  • Figure 30 could be the topview of the optical component 10.
  • Figure 3M could be the cross section of the optical component 10 shown in Figure 30 taken along the line labeled A.
  • Figure 3N could be a bottom view of the light transmitting medium 14 shown in Figure 30.
  • the taper of the first ridge 20 A is positioned over the taper of the second ridge 20B so the first ridge 20A and the second ridge 20B taper at about the same location on the waveguide 12.
  • the taper of the second ridge 20B reduces the width of the light signal carrying region 25 in the first region 42A below the width of the light signal carrying region 25 in the third region 42C.
  • the first ridge 20A and the second ridge 20B are shown tapering in the same direction, the first ridge and the second ridge can taper in opposite directions.
  • the taper rate of the first ridge 20A and the second ridge 20B can be the same or different.
  • the taper of the first ridge 20 A is shown as terminating the first ridge 20A, the first ridge 20A can extend past the taper.
  • the first ridge 20A can taper to a smaller width.
  • the first ridge 20A can have a different height past the taper.
  • One end of the taper can terminate at a facet.
  • the first ridge need not include a straight region.
  • the facet can be coupled to an optical fiber.
  • the tapers can optionally be combined with the contours discussed with respect to Figure 31.
  • the light transmitting medium 14 illustrated in Figure 3L through Figure 30 can be inverted so the second ridge extends into the pocket. Accordingly, the taper of the first ridge need not be positioned in the pocket.
  • FIG. 4A through Figure 4C illustrate a component 10 having an alignment region 48 for aligning an optical fiber 46 with a facet 44.
  • Figure 4A is a topview of an optical component 10 having an alignment region 48.
  • Figure 4B is a cross section of Figure 4 A taken at the line labeled B.
  • Figure 4C is a cross section of the component 10 illustrated in Figure 4 A taken along the line labeled A.
  • the dashed line labeled B shows the location of the base of the ridge.
  • the base 15 includes a support region 47 adjacent to an alignment region 48.
  • the layer of material 38 is positioned over the support region 47 but not positioned over the alignment region 48.
  • the alignment region 48 is positioned adjacent to the facet 44 and extends away from the support region 47 at a substantially right angle relative to the facet 44.
  • the pocket 18 extends from under the light signal carrying region 25 and into the alignment region 48.
  • the alignment region 48 is configured to align the optical fiber 46 in a desired orientation relative to the facet 44 as illustrated in Figure 4D through Figure 4F.
  • Figure 4D through Figure 4F correspond to Figure 4A through Figure 4C with the optical fiber 46 received within the pocket 18.
  • the illustrated optical fiber 46 has a cladding although the alignment region can be employed in conjunction with optical fibers without a cladding.
  • the position of the cladding relative to the waveguide 12 is illustrated by a dashed line.
  • the pocket 18 is sized so as to receive the optical fiber 46 such that the optical fiber 46 has a particular orientation relative to the facet 44. For instance, the pocket 18 can be centrally positioned relative to the facet 44.
  • the center of the optical fiber 46 is aligned with the center of the facet 44
  • the depth of the pocket 18 can be selected to position the height of the optical fiber 46 relative to the waveguide 12. For instance, a deeper and wider pocket 18 causes the optical fiber 46 to sit lower relative to the waveguide 12 while a narrow shallow pocket 18 can raise the optical fiber 46 relative to the waveguide 12.
  • the pocket 18 in the self-alignment region 48 is shown as having a v-shape, the pocket 18 can have other shapes that provide self-alignment.
  • the pocket 18 can have a semi-circular shape with the deepest part of the semi-circle centered relative to the facet.
  • the semi-circle can have a shape that is complementary to the shape of the optical fiber 46 so the optical fiber fits snugly in the pocket 18.
  • a pocket 18 that is snug on the optical fiber 46 reduces the possible range of movement of the optical fiber 46 relative to the waveguide 12.
  • the pocket 18 is shown as having a substantially rectangular shape, the pocket can have other shapes including, but not limited to, semicircular, semi-oval and a v-shape.
  • Figure 4A illustrates a component 10 having a v-shaped pocket 18.
  • An optical fiber can be coupled with the facet by positioning an index of refraction matching oil and/or an index of refraction matching epoxy between the facet and the optical fiber. Additionally, the optical fiber can be coupled with the pocket to further immobilize the optical fiber relative to the alignment region.
  • the alignment region presumes that the optical fiber is preferably centered relative to the facet, however, the alignment region can also be configured to align an optical fiber such that the optical fiber is not centered relative to the waveguide.
  • the alignment region can also be associated with waveguides having a ridge that extends into the pocket or with a waveguide having a first ridge that extends into the pocket and a second ridge that extends away from the pocket.
  • Figure 4A through Figure 4F illustrate the facet 44 as being perpendicular to a longitudinal axis, L, of the waveguide 12 at the end of the waveguide.
  • the facet 44 can be angled relative to the longitudinal axis L as shown by the angle labeled ⁇ in Figure 4G.
  • the facet is substantially perpendicular relative to the base.
  • the angle can cause light that is reflected by the facet to be reflected out of the waveguide as illustrated by the arrow labeled A. Directing the reflected light out of the waveguide prevents the reflected light from resonating within the waveguide and accordingly improves performance of the waveguide, Reducing the angle ⁇ can result in increased insertion losses. As a result, there is a balance between increased insertion losses and reduced resonance.
  • Suitable angles ⁇ include, but are not limited to, less than 90 degrees, less than 89 degrees, 45-90 degrees, 60-89 degrees, 70-88 degrees, 80-87 degrees, 81-86 degrees, 81.5-84.5 degrees, 82-84 degrees or 82.5-83.5 degrees.
  • the direction of the facet angle on adjacent waveguides can be alternated so as to provide a zig zag configuration of facets as illustrated in Figure 4H.
  • the component can also be constructed so the facet direction is alternated less frequently than every facet.
  • the angle ⁇ is presumed to be an absolute value measurement, in that a facet positioned at an angle of 271 degrees relative to the longitudinal axis is presumed to be positioned at an angle of 89 degrees. Accordingly, each of the facets in Figure 4H are considered to have the same angle ⁇ although they are angle in opposing directions.
  • the optical fiber When the waveguide facet 44 is angled, the optical fiber also has a facet that is angled relative to the longitudinal axis of the optical fiber.
  • the angle of the optical fiber facet is complementary to the angle of the facet on the waveguide. The complementary angles allow the optical fiber to be coupled to waveguide with the longitudinal axis of the waveguide aligned with the longitudinal axis of the optical fiber.
  • an angled facet can be formed at an edge of a component when an alignment region is not formed. Further, the component can include angled facets when the ridge extends into the pocket.
  • the pocket 18 can be filled with a gas such as air.
  • the gas can be under vacuum.
  • the vacuum serves to provide thermal insulation to the waveguide and can increase reflection of the light signals from the light signal carrying region.
  • the pocket 18 can be filled with a material having an index of refraction less than the index of refraction of the light transmitting medium 14.
  • the light transmitting medium 14 is a silica material
  • the pocket 18 can be filled with a low dielectric constant, K, material having an index of refraction that is less than the index of refraction of silica.
  • Suitable low K materials have a K less than about 1.5. Examples of low K materials include, but are not limited to, SiCOH.
  • the pocket can also be filled with a material having reflective properties.
  • the pocket can be filled with a reflective metal.
  • Figure 1 A through Figure 4G illustrate a component 10 having a single waveguide
  • the component 10 can include a plurality of waveguides as shown in Figure 5A.
  • An example of an optical component 10 including a plurality of waveguides is a de-multiplexer having an arrayed waveguide grating.
  • a different pocket 18 can be associated with each waveguide.
  • Figure 5B is a topview of a component 10 where a portion of each ridge 20 is associated with a different pocket 18.
  • the pockets 18 under different ridge 20 can be in communication.
  • Figure 5C illustrates a component 10 having a pocket 18 that extends under more than one ridge 20. The portion of the base 15 that defines the side of the pocket 18 supports the light transmitting medium 14 over the base 15.
  • the light transmitting medium associated with adjacent waveguides can be separated by a gap 39 as shown in Figure 6A and Figure 6B.
  • Figure 6B is a topview of an optical component having two waveguides positioned adjacent to one another.
  • Figure 6A is a cross section of the component shown in Figure 6B taken at the line labeled A.
  • the gap 39 is partially defined by the base and one or more surfaces of the light transmitting medium 14 that intersect with the base.
  • the one or more surfaces are shown as intersecting the base remote from a lateral side of the base although the one or more surfaces can intersect the base at a lateral side of the base so the lateral side 41 and the surface together define the lateral side of the component.
  • the ridge of the waveguides can be centrally positioned between two surfaces 40 or can be off center relative to the surfaces 40. In some instances, the one or more surfaces are substantially perpendicular to the base.
  • the light transmitting medium 14 may include surfaces 40 that intersect the base without forming a gap 39.
  • the surfaces 40 can provide isolation of the waveguides from one another and accordingly help reduce the amount of cross talk between adjacent waveguides.
  • Light signals that exit the light signal carrying region can be reflected off the surface back into the waveguide or transmitted through the surface.
  • Light signals transmitted through the surface can exit the gap into the atmosphere or be reflected off another surface of the groove. As a result, the amount of light that exits the light signal carrying region and enters another light signal carrying region is reduced. As a result, cross talk between adjacent waveguides is also reduced.
  • the base 15 extends away from the surface at an angle, ⁇ , less than 180 degrees. In other instances, the base 15 extends away from the surface at an angle, ⁇ , less than 170 degrees, less than 140 degrees and less than 100 degrees.
  • the base 15 preferably extends away from the surface at about 90 degrees. Accordingly, the base 15 serves as the bottom of the gap 39.
  • the gap 39 holds a medium that causes light signals from the light transmitting medium 14 to be reflected back into the light transmitting medium 14.
  • the gap can hold ambient air.
  • the low index of refraction of the ambient air causes reflection of the light signals are the surface 40.
  • the gap can be filled with other media such as solids.
  • the surface extends along at least a portion of the longitudinal length of the waveguides.
  • the longitudinal length is parallel to the direction of propagation of the light signals along the waveguide.
  • the surface does not extend along the entire longitudinal length of the waveguide. For instance, when two waveguides intersect, the surface may intersect with the surface of another waveguide before the intersection of the light signal carrying regions associated with the waveguides.
  • the surface 40 substantially traces the waveguide.
  • the intersection of the surface 40 with the base can be substantially equidistant from a reference location that extends along the longitudinal length of the waveguide.
  • a suitable reference point is the base of the ridge.
  • Figure 6C illustrates an embodiment of the component having a layer of material 38 positioned in the pocket.
  • the surfaces 40 extend through the layer of material 38.
  • the surfaces can also extend into the substrate.
  • Figure 6D illustrates waveguides positioned on a base having a light barrier 99 that is continuous across a substrate.
  • the light barrier serves to reflect light signals from the waveguides 12 back into the waveguides 12.
  • the surfaces 40 isolate the waveguides from one another.
  • the surfaces illustrated in the light transmitting medium of Figure 6A through Figure 6C can be employed in conjunction with other waveguide types such as channel waveguides.
  • the surfaces can be formed in the light transmitting medium associated with the waveguide illustrated in Figure 3A and Figure 3B.
  • Figure 7A to Figure 7E illustrate a method for forming a component 10 having two waveguides.
  • the method can be easily adapted to forming a component 10 having a single waveguide.
  • a mask is formed on a substrate 34 so the portions of the substrate 34 where pockets 18 are to be formed are exposed.
  • a suitable substrate 34 includes, but is not limited to, a silicon substrate 34.
  • An etch is performed on the masked substrate 34 to form pockets 18 having the desired depth in the substrate 34.
  • the pockets are illustrated as having a substantially rectangular shape, the pockets can be provided with a v-shape by performing a wet etch along the ⁇ 1 1 1> crystal orientation of the substrate,
  • Air can be left in the pockets 18 or another material such as a low K material can be deposited in the pockets 18.
  • the masks is then removed to provide the component 10 illustrated in Figure 7 A.
  • a layer of material 38 can optionally be deposited over the substrate 34 as illustrated in Figure 7B.
  • the layer of material 38 can be deposited so the layer of material 38 is positioned in the pockets 18. Accordingly, the layer of material 38 will have one or more surfaces 36 that define the pocket 18.
  • the layer of material 38 and the substrate serve as the base 15.
  • a light transmitting medium 14 is positioned adjacent to the base.
  • the light transmitting medium 14 can be grown on the base.
  • wafer bonding techniques can be employed to bond the light transmitting medium 14 of a wafer to the base 15.
  • a suitable wafer includes, but is not limited to, a silicon on insulator wafer or a silica wafer as shown in Figure 7C.
  • a silica wafer typically includes a silicon layer 52 positioned over the silica. This silicon layer is removed to provide the component 10 shown in Figure 7D. Suitable methods for removing the silicon layer include, but are not limited to, etching, buffing, polishing, lapping, detachment through H implantation and subsequent annealing.
  • Silica remains as the light transmitting medium 14. The light transmitting medium 14 can be masked so as to protect regions where a ridge 20 is to be formed. The component 10 is then etched and the mask removed so as to provide the component 10 shown in Figure 7E.
  • the component of Figure 7E can be further treated so as to form the surfaces 40 discussed with respect to Figure 6A through Figure 6D.
  • the component can be masked such that the regions where a gap(s) is to be formed is exposed.
  • the component is masked so a side of the mask is aligned with the desired locations of the one or more surfaces 40.
  • the exposed regions can then be etched and the mask removed so as to form the one or more surfaces 40 as shown in Figure 7F.
  • the surfaces are formed to the desired depth. Material(s) to be formed in the gap can be formed in the gap before and/or after removal of the mask.
  • the sequence of forming the ridges and the one or more surfaces can be reversed from what is illustrated in Figure 7E and Figure 7F.
  • a suitable layer of material 38 includes, but is not limited to, light transmitting media such as silica. Accordingly, the layer of material 38 and the light transmitting medium 14 can both be silica. Additionally, the substrate 34 can also be constructed from a light transmitting medium such as silicon.
  • Figure 8A through Figure 8F illustrate a method of forming a component
  • a substrate 34 is provided as shown in Figure 8A.
  • the substrate 34 is masked and etched to provide pockets 18 in the substrate 34 as shown in Figure 8B.
  • a light transmitting medium 14 is also provided as shown in Figure 8C. Suitable light transmitting media 14 include, but are not limited to, the silica of a silica wafer 50.
  • a silica wafer 50 typically includes a silicon layer 52 positioned adjacent to a layer of silica.
  • the silica wafer 50 is masked and etched so as to form ridges 20 in the light transmitting medium as shown in Figure 8D. Any tapers to be included in the ridge can also be formed during the etch.
  • the ridges 20 are formed so as to be complementary to the pockets when the light transmitting medium is inverted.
  • the silica wafer 50 is inverted and positioned over the substrate 34 with the ridges positioned in the pockets 18 as shown in Figure 8E. Wafer bonding techniques are employed to bond the silica wafer 50 to the substrate 34.
  • the silicon layer 52 can be removed to provide the component 10 shown in Figure 8F. Suitable methods for removing the silicon layer 52 include, but are not limited to, etching, buffing, polishing, lapping, detachment through H implantation and subsequent annealing, Although the method illustrated in Figure 8A through Figure 8F shows fabrication of an optical component 10 having a plurality of waveguides, the method is easily adapted for formation of an optical component having one waveguide.
  • the component can be provided with a silicon light transmitting medium by employing a silicon on insulator wafer in place of the silica wafer.
  • a silicon on insulator wafer typically includes a layer of silica positioned between two silicon layers. The ridges can be defined in one of the silicon layers and that silicon layer can be bonded to the substrate. The other silicon layer and the silica layer can optionally be removed.
  • a silicon wafer can be bonded directly to the substrate. In some instances, a portion of the silicon wafer is removed to provide a light transmitting medium having the desired thickness.
  • the top of the second light transmitting medium 14 in Figure 8F can be masked and etched to provide the component with the second ridge. Any tapers to be formed in the second ridge can also be formed during the same etch employed to form the second ridge.
  • the composition of the etching medium employed during the etch that forms the side 26 can be changed during the etch.
  • the change in the etching medium can be controlled so as to produce the desired slant.
  • an additional mask and etch step may be required to form the slant.
  • the slant shown in Figure 3J can be constructed with an additional mask and etch.
  • a cladding layer can be formed over the component of Figure 7E, Figure 7F or Figure 8F.
  • the cladding layer can provide added protection to the optical component.
  • the light transmitting medium is silicon
  • an example of a suitable cladding layer is a layer of silica.
  • Figure 9A through Figure 9H illustrates a method for forming an optical component having an alignment region 48.
  • Figure 9A is a cross section of an optical component 10 taken along the length of the waveguide. The location of the base of the ridge is illustrated as a dashed line extending along the length of the waveguide 32.
  • Figure 9B is a cross section of the component 10 shown in Figure 9A taken at the line labeled A.
  • the component 10 illustrated in Figure 9A can be fabricated using the method of Figure 7A through Figure 7E or Figure 8 A through Figure 8F.
  • the component 10 is fabricated to have a waveguide 12 that extends all the way to the edge of the component.
  • a mask 54 is formed on the component 10 such that the ridge 32 of the waveguide 12 over the alignment region 48 remains exposed as evident in Figure 9B.
  • Figure 9C is a cross section of the optical component 10 taken along the length of the waveguide 12 and
  • Figure 9D is a cross section of the component 10 shown in Figure 9C taken at the line labeled A.
  • the etch is performed so as to bring the ridge 32 flush with the side of the component 10 as evident in Figure 9D. Accordingly, the etch results in the formation of an upper region of the facet 44 A.
  • a mask 54 is formed over a region of the component 10 as illustrated in
  • Figure 9E and Figure 9F Figure 9E is a cross section of an optical component 10 taken along the length of the waveguide 12 and Figure 9F is a cross section of the component 10 shown in Figure 9C taken at the line labeled A.
  • the region of the component 10 where the self-alignment region will be formed remains exposed.
  • the exposed region is etched to provide the optical component illustrated in Figure 9G and Figure 9H.
  • Figure 9G is a cross section of an optical component taken along the length of the waveguide and Figure 9H is a cross section of the component shown in Figure 9G taken at the line labeled A.
  • the region is etched until the self-alignment region 48 is exposed. Accordingly, the etch forms a lower region of the facet.
  • FIG. 9G and Figure 9H An alternative method for forming the component illustrated in Figure 9G and Figure 9H is forming the light transmitting medium 14 on the base such that the edge of the light transmitting medium 14 is not aligned with the edge of the base. Accordingly, the light transmitting medium 14 is formed so as to leave the alignment region 48 exposed.
  • This arrangement can be achieved by bonding the silica wafer 50 such that the base 15 extends beyond the edge of the silica wafer 50.
  • Figure 10A through Figure 101 illustrate another embodiment of a method for forming an optical component 10 having an alignment region 48 configured to align an optical fiber with a facet 44 of a waveguide 12.
  • the method of Figure 10A through Figure 10F allows the alignment region 48 to be formed with a single etch. Accordingly, the need to achieve perfect alignment of subsequently formed masks is eliminated.
  • Figure 10A is a topview of an optical component 10.
  • Figure 1 OB is a cross section of the component 10 shown in Figure 10A taken at the line labeled A
  • Figure 10C is a cross section of the component 10 shown in Figure 10A taken at the line labeled B.
  • the component 10 of Figure 10A through Figure 10C could be fabricated using the method of Figure 7A through Figure 7E or Figure 8A through Figure 8F.
  • the component 10 is fabricated with the ridge 32 of the waveguide 12 extending over the alignment region 48.
  • the ridge 32 of the waveguide 12 and the ridge 32 over the alignment region 48 can be concurrently formed during a single etch.
  • a mask 54 is formed such that at least a portion of the alignment region 48 remains exposed as shown in Figure 10D through Figure 10F.
  • Figure 10D is a topview of the optical component 10.
  • Figure 10E is a cross section of the component 10 shown in Figure 10D taken at the line labeled A
  • Figure 1 OF is a cross section of the component 10 shown in Figure 10D taken at the line labeled B.
  • the mask 54 can overlap the ridge 32 over the alignment region 48 or can be aligned with the edge of the ridge 32 over the alignment region 48.
  • FIG. 10G is a topview of the optical component 10.
  • Figure 1 OH is a cross section of the component 10 shown in Figure 10G taken at the line labeled A
  • Figure 101 is a cross section of the component shown in Figure 10G taken at the line labeled B.
  • the etch is performed until the pocket 18 in the alignment region 48 is exposed. Accordingly, the etch forms the entire side of the facet 44.
  • a flange 90 is formed adjacent to the facet 44 of the waveguide because the mask overlapped the ridge over the alignment region. Reducing the amount of overlap reduces the thickness of the flange. Additionally, the flange 90 can be eliminated by aligning the mask 54 with the edge of the ridge 32 over the alignment region 48.
  • the pocket positioned adjacent to the light signal carrying region in the methods of Figure 9A through Figure 9H and/or Figure 10A through Figure 101 can also extend into the alignment region.
  • a single pocket serves to hold a material that reflects light from the light signal ca ⁇ ying region and to align an optical fiber with the facet. Because a single pocket serves both purposes, the pocket in the alignment region is centered relative to the facet by centering the ridge over the pocket. As a result, there is no need for an additional step of aligning a pocket with the facet.
  • Figure 9A through Figure 9H and/or Figure 10A through Figure 101 is easily adapted to form an angled facet by forming the mask(s) at an angle relative to the longitudinal axis of the ridge.
  • Figure 1 1 A through Figure 1 1 D illustrate a method of forming the component 10 illustrated in Figure 9C and Figure 9D with a facet that is angled relative to the direction of propagation of light signals traveling along the waveguide.
  • the component 10 in Figure 1 1 A is a topview of a component 10.
  • the illustrated component 10 could be fabricated according to the method illustrated in Figure 7A through Figure 7D.
  • Figurer 10B is a sideview of the component 10 of Figure 1 1 A taken along the line labeled A.
  • a mask 54 is formed on the component 10 as shown in Figure 1 1A.
  • the mask 54 covers the region where the ridge is to be formed.
  • a side of the mask 54 has an angle ⁇ less than ninety degrees relative to the longitudinal axis of the waveguide, or less than ninety degrees relative to the direction of propagation of light signals traveling along the waveguide.
  • An etch is performed on the exposed regions of the component 10 and the mask 54 removed to provide the component 10 illustrated in Figure 1 1C and Figure 1 I D.
  • the etch concurrently forms the sides of the ridge 32 and an upper region of a facet 44A.
  • the angle ⁇ of the mask results in the upper region of the facet 44A having an angle ⁇ .
  • a facet 44 having an angle ⁇ can improve performance of the component 10.
  • the method of Figure 9E through Figure 9H can be employed using another mask having a side angled relative to the direction of propagation to complete fabrication of the lower region of the facet 44A and the alignment region 48.
  • Figures 1 I F through Figure 1 I M illustrate another method of forming an optical component with an angled facet.
  • the illustrated method allows for formation of the facet without the need to align sequentially formed masks.
  • the method is suitable for use in forming a component without an alignment region although the method can be adapted to formation of an optical component having an alignment region.
  • Figure 1 I F is a topview of a component 10.
  • the illustrated component 10 could be fabricated according to the method illustrated in Figure 7A through
  • Figure 7D Figurer 1 1 G is a sideview of the component 10 of Figure 1 1A taken along the line labeled A.
  • a mask 54 is formed on the component 10 as shown in Figure 1 IF.
  • the mask 54 covers the region where the ridge is to be formed presuming that the ridge is to extend to the side of the component.
  • An etch is performed and the mask 54 removed to provide the component shown in Figure 11H and Figure 1 11.
  • Figure 1 1 H is a topview of the component 10 and Figure 1 II is a sideview of the component 10 of Figure 1 1H taken along the line labeled A. The etch results in formation of the sides of the ridge.
  • the base of the ridge is illustrated as a dashed line in Figure 1 11.
  • a second mask 54 is formed to provide the component shown in Figure shown in Figure 1 1 J and Figure 1 I K.
  • Figure 11 J is a topview of the component 10
  • Figure 1 IK is a sideview of the component 10 of Figure 1 U taken along the line labeled A.
  • a side 140 of the mask where the facet will be formed is angled at less than ninety degrees relative to the longitudinal axis of the waveguide.
  • the side of the mask that is not located where the mask will be formed can have any angle relative to the longitudinal axis or can be angled so as to account for facets to be formed on other waveguides.
  • the side of the mask can have a zig zag pattern over a plurality of waveguides to provide facets as illustrated in Figure 4H.
  • etch is performed and the second mask 54 removed to provide the component illustrated in Figure 1 1 L and Figure 1 1 M.
  • Figure 1 1 L is a topview of the component 10
  • Figure 1 I M is a sideview of the component 10 of Figure 1 1 L taken along the line labeled A.
  • the etch results in the formation of the entire facet. Accordingly, the etch can be performed completely through the component. Alternatively, the etch can be formed through the light transmitting medium 14 and into the base 15.
  • Non-etch based methods can be employed to remove the remaining portions of the base. For instance, the remaining portions of the base can be removed by etching, milling or cutting. Alternatively, another base etch can be employed to remove the remaining portions of the base.
  • the etch employed to remove the remaining portions of the base can cruder than the etch employed to form the facet.
  • Different mask and etch steps can be performed during the formation of the pockets on the base 15 to provide a pocket having a different shape in the alignment region than adjacent to the light signal carrying region(s).
  • the shape of the pocket adjacent to the light signal carrying regions can be selected to optimize carrying of the light signal while the pocket in the alignment region can be shaped to optimize alignment of the optical fiber and the facet.
  • the alignment region is fabricated such that enough of the pocket is exposed to provide alignment of an optical fiber relative to the waveguide.
  • the above methods can be employed to expose a region of the base which is larger than the desired size of the alignment region.
  • Cutting techniques such as milling and/or laser cutting can be used to cut through the exposed base such that an alignment region having the desired shape is formed.
  • an etch can be performed through the base so as to form an alignment region having the desired shape.
  • U.S. Patent application serial number (not yet assigned); filed on October 16, 2000; and entitled "Formation of a Smooth Vertical Surface on an Optical Component” teaches a suitable method for severing the exposed base. These techniques result in formation of the edge of the component.
  • FIG. 12A through Figure 12C teach a method for forming a pocket holding a gas under vacuum.
  • Figure 12A is a topview of a base 15 having a pocket 18 formed in a substrate 34.
  • the component 10 includes two or more sealing members 60 that extend across the pocket 18.
  • the sealing members 60 can be portions of the base 15 that are masked as the pocket 18 is formed.
  • a light transmitting medium 14 is formed on the base as shown in Figure 12B.
  • the light transmitting medium 14 can be formed on the base 15 by employing wafer bonding techniques to bond a wafer to the base. During the bonding process the sealing members are bonded to the light transmitting medium 14. The air in the pocket during the wafer bonding process remains sealed in the pocket.
  • a mask 54 is formed over the regions of the light transmitting medium 14 where ridges 32 are desired as shown in Figure 12B. An etch is performed so as to form the sides of the ridge 32 and the mask 54 removed to provide the component 10 shown in Figure 12C. Although the outline of the pocket is not necessarily visible in a topview of the component, the outline of the pocket is illustrated as a dashed line in Figure 12C.
  • the vacuum can be formed in the pocket before, during or after formation of the ridge.
  • the vacuum can be formed by heating the component 10 to react the oxygen in the sealed pocket(s) 18 with the light transmitting medium 14 and/or the base 15.
  • the oxygen in the air can react with the silicon to form silica.
  • Heating the component can be for the purpose of catalyzing the reaction or can be part of a fabrication step such as bonding the light transmitting medium 14 to the base 15.
  • the reaction of the oxygen results in a vacuum because the amount of gas in the pocket 18 is reduced.
  • the light transmitting medium can be selected so as to catalyze the reaction between the gas in the pocket 18 and the layer of material 38.
  • a vacuum can also be formed in the pocket by forming the light transmitting medium adjacent to the base in a chamber held under vacuum.
  • the pressure in the pocket can be substantially the same as the pressure in the chamber. Suitable pressures for the chamber include, but are not limited to, pressures less than 1 atmospheres (atm), .95 atm, .9 atm, .8 atm, .75 atm, .5 atm, .1 atm, .01 atm, .001 atm, .0001 atm, .00001 atm or .000001 atm.
  • the pressure in the pocket can be reduced further by heating the component 10 to react the material in the pocket 18 with the light transmitting medium 14 or the sides of the pocket 18. The heating of the component 10 can be part of the bonding process or can be and independent step.
  • the above methods of forming a vacuum can be employed to provide the material in the pocket 18 with a pressure of less than about 1 atmospheres (atm), .95 atm, .9 atm, .8 atm, .75 atm, .5 atm, .1 atm, .01 atm, .001 atm, .0001 atm, .00001 or .000001 atm.
  • Figure 12D illustrates the position of a sealing member 60 positioned adjacent to the facet of a waveguide 12.
  • the sealing member is positioned so a portion of the sealing member and the facet form a continuous surface.
  • Positioning sealing members adjacent to the facet 44 can increase the portion of the waveguide adjacent to a pocket 18 under vacuum.
  • Each pocket 18 must include at least two sealing members 60 in order for the vacuum to be formed.
  • the sealing members 60 are preferably positioned adjacent to the ends of the waveguide 12 in order to increase the portion of the waveguide 12 adjacent to a pocket 18 under vacuum.
  • the pocket is divided into a plurality of sub-pockets.
  • the sealing members can help support the ridge over the pocket. Accordingly, more than two sealing members can be advantageous in longer waveguides.
  • the sealing members can be periodically positioned along the length of the waveguide 32.
  • the sealing member can be an adhesive such as an epoxy, glue or other sealing material that transitions from a fluid to a solid.
  • the fluid sealing member can be positioned in selected portion of the pocket before the light transmitting medium 14 is formed over the base.
  • a fluid epoxy can be injected into the pocket after the light transmitting medium 14 is formed over the base. Injecting the fluid epoxy into the pocket can be advantageous when forming the optical component with a ridge in the pocket because the fluid can flow around the ridge to seal the pocket.
  • a fluid sealing member Once a fluid sealing member is positioned in the pocket, the fluid can transition into a solid material that is bonded to the pocket 18 and the light transmitting medium 14.
  • Suitable fluid sealing members include, but are not limited to, epoxies that cure at room temperature or upon heating. Additionally, the fluid preferably transforms to an air-tight or gas impermeable solid in order to preserve the vacuum in the pocket 18. In some instances, the solid form of the material has thermally insulating properties in order to provide additional thermal isolation of the waveguide.
  • the sealing member can also be a material that retains an amorphous state such as a putty.
  • the sealing member can be a combination of the base and a sealing material that transitions from a fluid to a solid as shown in Figure 12E.
  • Two portions of the base extending across a pocket can be spaced apart.
  • a well 92 is formed between the spaced apart portions of the base.
  • a fluid sealing material can be positioned in the well 92 before the light transmitting medium 14 is formed adjacent to the base.
  • the fluid sealing material can be delivered into the well 92 after the light transmitting medium 14 is formed adjacent to the base.
  • the portion of the base extending across the pocket and/or the sealing material can bond with the light transmitting medium 14.
  • the well 92 serves to retain the sealing material is an isolated region of the pocket.
  • a vacuum can be formed using another gas in the pocket.
  • the wafer bonding can be performed in a chamber filled with a gas other than air.
  • the pocket will be filled with a gas other than air.
  • the gas can be selected to catalyze reaction between the gas and the sides of the pocket and accordingly increase the level of vacuum.
  • the chamber can be under vacuum to provide additional vacuum to the pocket.
  • a waveguide 12 can include one or more support ridges 94 as shown in Figure 13.
  • the one or more support ridges extend outward from the ridge 32 of the waveguide 12.
  • the support ridge 94 preferably extends across the light signal ca ⁇ ying region and can extend across the pocket 18.
  • the support ridges 94 are sized and positioned to overcome the effects of a vacuum in the pocket 18 on the ridge 32 of the waveguide 12.
  • the one or more support ridges 94 can also be used when a vacuum is not formed in the pocket.
  • the support ridges 94 need not have the same width as the ridges 12 of the waveguide 32. Further, a narrower support ridge is typically associated with less optical loss than a broader support ridge.
  • the support ridges 94 can be used in conjunction with or in place of sealing members configured to provide support to the ridge.
  • the support ridges can be formed concurrently with the ridges of the waveguide.
  • Waveguides according to the present invention can be used in conjunction with optical components 10 that employ waveguides.
  • the waveguides can be with switches, filters, tunable filters, modulators, gain equalizers, fibers dispersion compensators and arrayed waveguide gratings.
  • the waveguide 12 can be used in conjunction with the switch described in U.S. Patent number 5581643.
  • Suitable light transmitting media for use with the waveguide include, but are not limited to, silica, silicon, GaAs, SiGe, InP, LiNb0 3 , Si0 2 , polymers, liquid crystal, SiNx and SiONx. These materials can also be used as the layer of material 38 formed in the pockets.
  • Suitable substrates include, but are not limited to, silicon, GaAs, InP, LiNb03, silica, sapphire, plastic, graphite and steel.
  • etches employed in the methods described above result in formation of a facet 44 that will be in optical communication with the waveguide 12 and/or in formation of the sides of a waveguide 12. These etches are preferably provide a smooth facet 44 and waveguide sides in order to reduce scatter and reflection. Suitable etches for forming these surfaces include, but are not limited to, reactive ion etches, the Bosch process, the methods taught in U.S. Patent application serial number 09/690959; filed on October 16, 2000; Entitled “Formation of a Smooth Vertical Surface on an Optical Component” and incorporated herein in its entirety and U.S. Patent application serial number
  • the substrate 34 and the second light transmitting medium 14 can be the same material.
  • the substrate 34 and the light transmitting medium 14 can both be silicon.
  • the layer of material 38 need not be positioned in the pocket.
  • the transition from the base to the light transmitting medium is often not physically visible.
  • the line labeled D in Figure I B illustrates the division between the base and the light transmitting medium.
  • the line labeled D in Figure 3A also illustrates the division between the base and the light transmitting medium. However, these lines may not be physically observable when the light transmitting medium 14 and the substrate 34 or base 15 are constructed from the same material.
  • Embodiments of the component where the second light transmitting medium 14 and the base 15 are the same material can be advantageous because light signals that escape from a light signal carrying region 25 can enter the substrate 34 or the base 15 through the gap between the pockets. Accordingly, these light signals are drained from the waveguides and are less likely to be a source of cross talk by entering other waveguides.
  • This drain effect can be achieved with other component constructions. For instance, the drain of light signals results from a base that does not reflect all of the light signals that are incident on the base from the adjacent second light transmitting medium. Accordingly, when the drain effect can be achieved when the index of refraction of the light transmitting medium 14 is at most equal to the index of refraction of the substrate 34 or the layer of material.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Optical Integrated Circuits (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

L'invention concerne un composant optique qui comprend un support de transmission de lumière comportant un guide d'ondes possédant une région porteuse du signal lumineux. Ce composant optique comprend également une base pourvue d'une poche. Le support de transmission de la lumière est placé sur la base de façon qu'au moins une portion de la région porteuse du signal lumineux soit placée au-dessus de la poche.
PCT/US2001/030510 2000-10-10 2001-09-28 Composant optique comprenant un guide d'ondes Ceased WO2002031548A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2001296400A AU2001296400A1 (en) 2000-10-10 2001-09-28 Optical component having a waveguide

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
US23953400P 2000-10-10 2000-10-10
US60/239,534 2000-10-10
US72376400A 2000-11-28 2000-11-28
US09/723,764 2000-11-28
US09/784,636 2001-02-15
US09/784,636 US20020041748A1 (en) 2000-10-10 2001-02-15 Component having a reduced thermal sensitivity
US09/784,814 2001-02-15
US09/784,814 US20020064358A1 (en) 2000-10-10 2001-02-15 Component having reduced cross talk
US09/821,822 US20020041739A1 (en) 2000-10-10 2001-03-29 Waveguide having light barrier that serves as alignment groove
US09/821,822 2001-03-29
US09/940,674 2001-08-27
US09/940,674 US20020048433A1 (en) 2000-10-10 2001-08-27 Optical component having a protected ridge

Publications (2)

Publication Number Publication Date
WO2002031548A2 true WO2002031548A2 (fr) 2002-04-18
WO2002031548A3 WO2002031548A3 (fr) 2002-10-03

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AU (1) AU2001296400A1 (fr)
WO (1) WO2002031548A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015157645A1 (fr) * 2014-04-11 2015-10-15 Huawei Technologies Co., Ltd. Guide d'ondes à oxyde a arête suspendue

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JP2004287093A (ja) * 2003-03-20 2004-10-14 Fujitsu Ltd 光導波路、光デバイスおよび光導波路の製造方法
EP1899755B1 (fr) * 2005-07-07 2013-01-23 Nokia Corporation Fabrication de guides d'ondes optiques par formation de rainures au moyen de rouleaux
US9766484B2 (en) 2014-01-24 2017-09-19 Cisco Technology, Inc. Electro-optical modulator using waveguides with overlapping ridges
JP7207087B2 (ja) * 2019-03-28 2023-01-18 住友大阪セメント株式会社 光導波路素子
JP7196736B2 (ja) * 2019-03-29 2022-12-27 住友大阪セメント株式会社 光導波路素子、及び光導波路デバイス
CN115145060A (zh) * 2021-03-30 2022-10-04 Tdk株式会社 电光器件

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US3563630A (en) * 1966-12-07 1971-02-16 North American Rockwell Rectangular dielectric optical wave-guide of width about one-half wave-length of the transmitted light
US3893231A (en) * 1974-12-19 1975-07-08 Us Navy Technique for fabricating vacuum waveguide in the x-ray region
US5163118A (en) * 1986-11-10 1992-11-10 The United States Of America As Represented By The Secretary Of The Air Force Lattice mismatched hetrostructure optical waveguide
DE19653094A1 (de) * 1996-12-20 1998-06-25 Alsthom Cge Alcatel Photonisches Bauelement mit elektrischen Leiterbahnen
JPH1164657A (ja) * 1997-08-25 1999-03-05 Hitachi Cable Ltd 分岐導波路及びその製造方法
JP3496829B2 (ja) * 1998-10-15 2004-02-16 インターナショナル・ビジネス・マシーンズ・コーポレーション 光導波路デバイス

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015157645A1 (fr) * 2014-04-11 2015-10-15 Huawei Technologies Co., Ltd. Guide d'ondes à oxyde a arête suspendue

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AU2001296400A1 (en) 2002-04-22
WO2002031548A3 (fr) 2002-10-03

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