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WO2002019509A3 - Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same - Google Patents

Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same Download PDF

Info

Publication number
WO2002019509A3
WO2002019509A3 PCT/US2001/026775 US0126775W WO0219509A3 WO 2002019509 A3 WO2002019509 A3 WO 2002019509A3 US 0126775 W US0126775 W US 0126775W WO 0219509 A3 WO0219509 A3 WO 0219509A3
Authority
WO
WIPO (PCT)
Prior art keywords
comb drive
fingers
comb
gap
drive assembly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2001/026775
Other languages
French (fr)
Other versions
WO2002019509A2 (en
Inventor
Kenneth M Hays
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of WO2002019509A2 publication Critical patent/WO2002019509A2/en
Publication of WO2002019509A3 publication Critical patent/WO2002019509A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H02N1/008—Laterally driven motors, e.g. of the comb-drive type

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  • Micromachines (AREA)

Abstract

A MEMS comb drive assembly and associated methods of fabrication are provide that are capable of gap variance between adjacent interdigitated comb drive fingers during comb drive operation. Gap variance allows for an increase in motive force by increasing the average capacitance variation of the comb structure as the distance between the comb fingers varies. The comb drive assembly includes first and second comb drive members that each comprise a series of comb drive fingers. The comb drive fingers will characteristically have cross-sections that vary in area along any lengthwise position of the comb drive finger. This variance in cross-sectional area provides for a gap differential between adjacent interdigitated comb drive fingers when the comb drive assembly is operational. As the gap varies during comb drive operation, the average variance in capacitance between opposing comb drive fingers increase, thereby increasing the motive force capabilities of the comb drive assembly. In one embodiment of the invention, the comb drive fingers are configured as wedge shaped structures in a plan view; moreover the comb drive fingers are frusto wedge shaped structures in a plan view. The wedge shaped configuration allows for the comb drive fingers of opposing comb drive members to be interdigitated such that the gap between adjacent comb fingers varies as the fingers are placed into motion. The frusto wedge shaped embodiment allows for the end of the body of the comb finger furthest from the base of the comb drive member to be truncated, so that ends of the comb drive fingers do not repeatedly contact the base of the opposing comb drive member during normal operation. In a further embodiment of the invention the comb drive assembly is a rotary comb drive assembly capable of imparting rotary motion to a torsional resonance plate. The invention further provides for methods of fabricating comb drive fingers.
PCT/US2001/026775 2000-08-28 2001-08-28 Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same Ceased WO2002019509A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64962500A 2000-08-28 2000-08-28
US09/649,625 2000-08-28

Publications (2)

Publication Number Publication Date
WO2002019509A2 WO2002019509A2 (en) 2002-03-07
WO2002019509A3 true WO2002019509A3 (en) 2002-05-16

Family

ID=24605589

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/026775 Ceased WO2002019509A2 (en) 2000-08-28 2001-08-28 Comb drive assembly having comb drive fingers with varying cross-sections and methods of making same

Country Status (1)

Country Link
WO (1) WO2002019509A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7012322B2 (en) 2003-12-22 2006-03-14 Honeywell International Inc. Method for reducing harmonic distortion in comb drive devices
US7036373B2 (en) 2004-06-29 2006-05-02 Honeywell International, Inc. MEMS gyroscope with horizontally oriented drive electrodes
FR2888394A1 (en) * 2005-07-08 2007-01-12 Commissariat Energie Atomique CAPACITIVE DEVICE WITH OPTIMIZED CAPACITIVE VOLUME
EP1998345A1 (en) 2007-05-31 2008-12-03 Infineon Technologies SensoNor AS Method of manufacturing capacitive elements for a capacitive device
FR2955096B1 (en) * 2010-01-12 2012-01-06 Flowdit MICRO-ELECTROMECHANICAL ACTUATOR MADE IN A SUBSTRATE AND MICROVALVE USING THE ACTUATOR
AT11920U3 (en) 2010-08-12 2012-03-15 Oesterreichische Akademie Der Wissenschaften METHOD FOR PRODUCING A MEMS DEVICE WITH HIGH ASPECT RATIO, AND CONVERTER AND CONDENSER
US10523134B2 (en) * 2015-03-12 2019-12-31 Mems Drive, Inc. Comb drive with non-parallel overlapping comb fingers
DE102023209764A1 (en) 2023-10-05 2025-04-10 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein MEMS with a comb drive and method of manufacturing the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5025346A (en) * 1989-02-17 1991-06-18 Regents Of The University Of California Laterally driven resonant microstructures
US6000280A (en) * 1995-07-20 1999-12-14 Cornell Research Foundation, Inc. Drive electrodes for microfabricated torsional cantilevers

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
GIANCHANDANI Y B ET AL: "A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Devices", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, no. 2, 1 June 1992 (1992-06-01), pages 77 - 85, XP000304539, ISSN: 1057-7157 *

Also Published As

Publication number Publication date
WO2002019509A2 (en) 2002-03-07

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