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WO2002018914A1 - Appareil de spectroscopie par reflectance dote de miroirs toroidaux - Google Patents

Appareil de spectroscopie par reflectance dote de miroirs toroidaux Download PDF

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Publication number
WO2002018914A1
WO2002018914A1 PCT/US2000/023782 US0023782W WO0218914A1 WO 2002018914 A1 WO2002018914 A1 WO 2002018914A1 US 0023782 W US0023782 W US 0023782W WO 0218914 A1 WO0218914 A1 WO 0218914A1
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WIPO (PCT)
Prior art keywords
sample
light
measurement area
mirror
light reflected
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Ceased
Application number
PCT/US2000/023782
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English (en)
Inventor
Dale Buermann
Abdul Rahim Forouhi
Michael J. Mandella
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N&K Technology Inc
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N&K Technology Inc
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Filing date
Publication date
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Priority to AU2000273373A priority Critical patent/AU2000273373A1/en
Priority to PCT/US2000/023782 priority patent/WO2002018914A1/fr
Publication of WO2002018914A1 publication Critical patent/WO2002018914A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G01N2021/213—Spectrometric ellipsometry

Definitions

  • the present invention generally relates to the characterization of optical properties of materials and the determination of the thickxiess and optical constants n and k of thin films, and in particular to an apparatus without chromatic aberration that uses reflectance spectroscopy to characterize thin films .
  • the thin film properties of interest include:
  • the index of refraction n (E) describes how light is diffracted by a material. In similar materials, n (E) scales with the density of the material.
  • the extinction coefficient, k (E) relates to the absorption of light. A material with a large extinction coefficient absorbs more light than a material with a small extinction coefficient. Transparent materials have an extinction coefficient of zero in the visible range of light.
  • the energy bandgap, E gl represents the minimum photon energy needed for a direct electronic transition from the valence to the conduction band; i.e., for E ⁇ E g , absorption of light due to direct electronic transitions is zero.
  • R (E) depends on the angle of incidence ⁇ of the light upon the film, as well as the film thickness d, the indices of refraction and extinction coefficients n f (E) and k f (E) of the film, n s (E) and k s (E) of the substrate, the band gap energy of the film E , and the interface roughness ⁇ and ⁇ 2 of both the top and the bottom of the film.
  • R theory R tbe ry ( E > ⁇ , d, ⁇ f (E) , k f (E) , U E) , kjE) , E g/ G , O,)
  • the reflectance R (E) To measure the reflectance R (E) , light must be generated by a source and reflected by the sample into a spectrophotometer. Typically, lenses are used to build optical relays that direct the light from the source to the sample, and from the sample to the spectrophotometer. (An optical relay is a device that produces an image at one point from a source at another point.) The many different materials used in the fabrication of coatings have characteristic reflectance peaks that range from the ultraviolet to the infrared. Therefore, the reflectance spectrum of the sample should be measured for wavelengths in the range from about 190 nm to 1100 nm.
  • Fig. 1 shows a prior art apparatus for determining the reflectance R (E) of a material .
  • the apparatus is described in U.S. Pat. No. 5,045,704 by Coates and in literature available from Nanometrics Incorporated of Sunnyvale, California.
  • This apparatus does not suffer from chromatic aberrations because it uses mirrors rather than lenses to direct light from the source to the sample and from the sample to a spectrophotometer.
  • the apparatus has a number of weaknesses.
  • the apparatus uses a beam splitter, so the intensity of the light entering the spectrophotometer is roughly one fourth of the intensity that could be attained by an apparatus with no beam splitter.
  • viewing optics are included so that one may visually examine the area of the thin film being measured.
  • the image viewed is an image projected upon the surface surrounding the entrance aperture of the spectrophotometer.
  • the image is on the order of 500 microns in diameter, and on this scale most surfaces are noticeably rough. Therefore the image has a grainy appearance.
  • a reflectance spectrophotometric apparatus be able to image a small area, on the order of 50 microns in diameter, of the thin film to a spectrophotometer with as little aberration as possible. It is also desirable that the apparatus include hardware for translating the film with respect to the imaging optics so that different regions of the film may be characterized.
  • the preferred objects of the present invention are to provide an apparatus for characterizing a thin film sample using reflectance spectroscopy, including ellipsometry, such that :
  • the apparatus is free from chromatic aberration
  • the apparatus has a minimum of non-chromatic aberration
  • the apparatus has as few components as possible; d) the apparatus is capable of displaying a clear image of the portion of the sample under investigation;
  • the apparatus includes hardware for moving the ⁇ sample with respect to the imaging optics;
  • the apparatus allows for light' with an adjustable range of angles of reflection to be collected from the sample.
  • the apparatus is equally accurate at all wavelengths and is insensitive to small changes in alignment
  • the apparatus can be used to make reflectance measurements on localized regions of the sample with a high degree of spatial accuracy
  • angles of reflection of light from the sample may be chosen to optimize subsequent analysis of the sample.
  • An apparatus is used for characterizing optical properties of materials and for determining the thickness and optical constants n and k of thin films.
  • the apparatus comprises a light source that generates a broadband optical beam, optics positioned to image the light source on a sample to be analyzed, and an optical relay to ' collect light reflected from a measurement area of the sample and to deliver the light to a spectroscopic device.
  • the apparatus further comprises a polarizing arrangement to select the appropriate polarization of the light for spectroscopic analysis.
  • a first polarizer is placed in the path of the light reflected from the sample and a second polarizer is placed in the path of the light of the broadband optical beam.
  • the first polarizer is a rotatable polarizer or a rotatable polarization analyzer for selecting a polarization of interest.
  • the polarization of light that enters the spectroscopic device is converted to digital data and output to a computer for analysis .
  • the spectroscopic device is a spectroscopic ellipsometer.
  • the optical relay comprises two toroidal mirrors positioned symmetrically. Because the optical relay uses mirrors, the relay has no chromatic aberration; because of the symmetric placement of the toroidal mirrors, non-chromatic aberrations are largely canceled.
  • the apparatus is equipped with a deflector, preferably a movable deflector, that may be positioned to project an image of the measurement area of the sample to a viewer, preferably a CCD camera.
  • a deflector preferably a movable deflector
  • the deflector may be moved out of the path of the light reflected from the measurement area. Therefore, the apparatus does not suffer from spurious loss of light.
  • the sample is. removably attached to a sample holder that comprises a movable stage.
  • the movable stage allows the sample to be translated with respect to the optical relay, thereby allowing different regions of the sample to be probed. Furthermore, by altering the size and positions of the toroidal mirrors of the optical relay, light with any desired range of angles of reflection from the sample may be received by the spectroscopic device .
  • Fig. 1 shows a prior art spectrophotometric apparatus.
  • Fig. 2a shows a three-dimensional view ⁇ of the preferred embodiment of the apparatus .
  • Fig. 2b shows a close-up view of an illuminated area, a viewing area, and a measurement area of a sample.
  • Fig. 3a is a two-dimensional view of the preferred embodiment of the apparatus.
  • Fig. 3b is a close-up view of an entrance aperture of a spectroscopic device.
  • Fig. 4 is a three-dimensional view of a generic toroidal mirror .
  • Fig. 5 shows first and second optical relays according to the preferred embodiment of the apparatus.
  • Figs. 6a - 6c are spot diagrams corresponding to the second optical relay of the preferred embodiment of the apparatus .
  • Fig. 7 is a detail of the second optical relay according to a second embodiment of the apparatus .
  • Figs. 8a - 8c are spot diagrams corresponding to the second optical relay of the second embodiment of the apparatus .
  • Fig. 2a shows the preferred embodiment of the apparatus.
  • a light source 10 emits light in a broadband optical beam 12.
  • the light of beam 12 has a broad spectrum, and preferably has wavelengths in the range between 190 nm and 1100 nm.
  • Beam 12 is reflected and collimated by a first toroidal mirror 31. Beam 12 is then reflected and focused by a second toroidal mirror 32. Beam 12 strikes an illuminated area 18 of a sample 16.
  • Sample 16 preferably comprises a substrate and at least one thin film deposited onto the substrate.
  • Mirrors 31 and 32 together form a first optical relay 40 for imaging source 10 onto sample 16.
  • a viewing area 20 is contained within illuminated area 18.
  • Viewing area 20 is preferably on the order of 500 microns or less in diameter.
  • viewing area 20 contains a measurement area 21.
  • Measurement area 21 is preferably on the order of 50 microns or less in diameter.
  • illuminated area 18 is at least as large as viewing area 20, and can be as large as the entire area of sample 16.
  • illuminated area 18 is as small as measurement area 21, and in another embodiment, illuminated area 18 is smaller than measurement area 21.
  • light from source 10 reflected by viewing area 20 forms a reflected beam 22. Reflected beam 22 is collected and collimated by a third toroidal mirror 33.
  • a fourth toroidal mirror 34 then receives beam 22.
  • Beam 22 is reflected and focused by mirror 34.
  • beam 22 is reflected by a deflector 24 and subsequently enters a viewer 28.
  • Viewer 28 receives an image of viewing area 20 and displays an enlarged image of viewing area 20.
  • viewer 28 is a charge-coupled device (CCD) camera.
  • Deflector 24 is a mirror that may be moved into and out of the path of beam 22.
  • deflector 24 is attached to a conventional scanning motor, not shown, so that deflector 24 can be reproducibly moved.
  • deflector 24 is a beam splitter.
  • deflector 24 is moved out of the path of beam 22 so that beam 22 no longer enters viewer 28, but is focused on an entrance aperture 27 of a spectroscopic ellipsometer 26.
  • aperture 27 is small enough to partially block beam 22 as it enters spectroscopic device 26.
  • only light from measurement area 21 enters spectroscopic device 26. That is, measurement area 21 is imaged on aperture 27.
  • the light entering spectroscopic device 26 forms a signal beam 23, as shown in Fig. 3b.
  • Aperture 27 preferably has a diameter of approximately 50 microns. In alternative embodiments, aperture 27 has any desired size.
  • a first polarizer 70 is placed in the path of beam 22 of light reflected from sample 16 and collimated by toroidal mirror 33.
  • Polarizer 70 can be regular linear polarizer plate.
  • Polarizer 70 is preferably adjustable such that the polarization of light it passes for analysis to spectroscopic device 26 can be changed as required by the measurement.
  • polarizer 70 is a rotatable polarization analyzer and can select the s-polarized or the orthogonal p-polarized light for analysis .
  • a second polarizers 72 is placed in the path of broadband optical beam 12 between toroidal mirrors 31 and 32. It should be noted that second polarizer 72 is located in a collimated portion of beam 12. Although from the operational point of view it is preferred that polarizers 70, 72 be at locations where the light passing through them is collimated, this is not necessary.
  • polarizers 70, 72 can be operated together or independently to control or select polarizations of light. In this manner a particular polarization of light in beam 12 to impinge on sample 16 can be set by polarizer 70. Likewise, a particular polarization of light reflected from sample 16 can be selected for analysis in spectroscopic device 26.
  • polarizers 70, 72 can be used to perform standard ellipsometric measurements of sample 16. In this situation spectroscopic device 26 is preferably replaced by a spectroscopic ellipsometer.
  • the spectrum of signal beam 23 is measured by spectroscopic device 26.
  • Spectroscopic device 26 records the intensity of light at the different wavelengths present in signal beam 23, and the result is electronically transmitted to a computer 30.
  • Computer 30 uses a program to compare the measured spectrum of signal beam 23 with a theoretical prediction of the same spectrum based on parameters that model the properties of sample 16. Computer 30 adjusts these parameters to fit the theoretical spectrum to the observed spectrum. Measurement area 21 is then characterized in terms of the parameters that best fit the observed reflected spectrum.
  • Sample 16 is removably attached to a sample holder 14.
  • holder 14 comprises a movable stage 15 and a fixed stage 13.
  • Sample 16 is attached to movable stage 15 of holder 14.
  • Movable stage 14 allows sample 16 to be translated in an x and a y direction, as shown in Fig. 2a, with respect to mirror 33. This translation allows various regions of sample 16 to be probed.
  • holder 14 is a conventional xy-stage.
  • mirrors 33 and 34, deflector 24, viewer 28, and spectroscopic device 26 are mounted on a movable stage, and sample 16 is held fixed.
  • light source 10 is movable.
  • Mirrors 33 and 34 form a second optical relay 42 for directing light from viewing area 20 to aperture 27.
  • Mirror 31 has an optical axis Al normal to the center of mirror 31 and directed outward from the reflecting surface, as shown in Fig. 3a.
  • mirrors 32, 33, and 34 have optical axes A2, A3, and A4, respectively.
  • Mirrors 31, 32, 33 and 34 are toroidal mirrors, meaning that each mirror has two different radii of curvature.
  • the plane containing beams 12 and 22 is called the tangential plane.
  • the plane orthogonal to the tangential plane that contains optical axis Al is the sagittal plane of mirror 31.
  • mirrors 32, 33, and 34 each has its own sagittal plane.
  • Fig. 4 shows a generic toroidal mirror having two radii of curvature: a radius of curvature in the tangential plane, R t , and a radius of curvature in the sagittal plane, R s .
  • Fig. 5 shows a detail of optical relays 40 and 42.
  • optical relay 40 comprises toroidal mirrors 31 and 32. In an alternative embodiment, optical relay 40 comprises a single toroidal mirror. In other embodiments, optical relay 40 comprises any standard optics, such as an optical fiber and a lens, to image light source 10 on sample 16. In all of these embodiments, light from source 10 strikes sample 16 with an average angle of incidence of central "
  • Fig. 5 shows the path of beam 22 as it leaves viewing area 20 and enters optical relay 42.
  • Beam 22 has an angle of incidence of ⁇ upon mirror 33.
  • the ratio of the sagittal to the tangential radius of curvature, R s /R t , for mirror 33 is given by:
  • Beam 22 has an angle of incidence ⁇ ' upon mirror 34.
  • the sagittal and tangential radii of curvature R s ' and R t ' of mirror 34 are related by:
  • optical axis A3 is anti-parallel to optical axis A4; that is, optical axes A3 and A4 are parallel and point in opposite directions.
  • Beam 22 is a parallel beam between mirrors 33 and 34; in other words, mirror 33 creates an image at infinity. As shown in Fig. 5, the center of beam 22 travels a distance s from sample 16 to the center of mirror 33.
  • the sagittal radius of curvature of mirror 33 is given by:
  • beam 22 travels a distance s ' from the center of mirror 34 to aperture 27.
  • the sagittal radius of curvature of mirror 34 is therefore given by:
  • s ⁇ s', and mirrors 33 and 34 are not identical.
  • measurement area 21 is magnified as it is imaged on aperture 27.
  • a reduced image of measurement area 21 is present at aperture 27.
  • Mirror 33 has a length L, and the center of mirror 33 has a lateral distance p from the center of viewing area 20.
  • Mirror 34 is a distance D from mirror 33.
  • the sample numerical aperture may be defined as:
  • N .A . saraple sin [ ( ⁇ max - ⁇ min ) /2 ]
  • This numerical aperture represents the spread of angles of the cone of rays emerging from sample 16 imaged by optical relay 42.
  • relay 42 comprises mirrors and no lenses
  • relay 42 is free from chromatic aberration.
  • the symmetrical arrangement of mirrors 33 and 34 in the preferred embodiment of optical relay 42 allow mirror 34 to partially cancel the nonchromatic aberrations of mirror 33.
  • the extent of the aberration that remains can be estimated from an idealized model .
  • the f-number is related to N.A. sample , for N.A. sample much less than 1, by
  • Fig. 6a shows a resultant spot diagram.
  • Each cross of Fig. 6a represents a pencil of light arriving at aperture 27 via different points on mirror 33 and mirror 34. If no aberrations were present, only a single cross would appear at the center of Fig. 6a.
  • Fig. 6a The spot diagram of Fig. 6a was generated mathematically using the laws of geometrical optics. However, the wave nature of light must also be taken into account.
  • an Airy disk 60 is included in Fig. 6a. In a physical system, each cross of Fig. 6a is blurred out to approximately the size of Airy disk 60 due to diffraction effects .
  • the diameter of Airy disk 60 depends on the wavelength of light involved, and is equal to
  • Coordinate axes are set up on sample 16 with the origin at the center of measurement area 21.
  • the x-axis points out of the page of Fig. 5, the y-axis points to the right. See also Fig. 2 for the directions of the x- and y-axes.
  • the aberrations of the preferred embodiment of optical relay 42 may be compared to the aberrations of a second embodiment of optical relay 42.
  • Fig. 7 shows the second embodiment of optical relay 42, which comprises only one toroidal mirror 51.
  • Beam 22 travels a distance d 2 from sample 16 to mirror 51 and a distance d 2 from mirror 51 to aperture 27.
  • Beam 22 has an angle of incidence ⁇ upon mirror 51.
  • Airy disk 60 is also shown in Figs. 8a-8c.
  • Figs. 8a-8c The spread of spots in Figs. 8a-8c is considerably larger than the spread in Figs. 6a-6c, respectively. Therefore the two- mirror arrangement of the preferred embodiment, Fig. 5, has less aberration than the single mirror arrangement of the second embodiment, Fig. 7. Evidently in the preferred embodiment, mirror 34 partially cancels some of the aberration caused by mirror 33.
  • the spectrum of light reflected by sample 16 enters spectroscopic device 26 as signal beam 23. It is well known in the art how to obtain a value for the absolute reflectance R (E) of sample 16 given the reflected spectrum gathered by spectroscopic device 26. Techniques include replacing sample 16 with a reference sample with a known reflectance, then comparing the reflected spectrum of the reference sample with the reflected spectrum of sample 16.
  • Computer 30 uses a computer program to compare the data with a theoretical model of the data.
  • the computer program compares the measured absolute reflectance R(E) with a theoretical reflectance R theory (E) .
  • the theoretical model depends on an index of refraction n(E) and an extinction coefficient k(E) of sample 16, as well as on angles ⁇ min and ⁇ ⁇ .
  • the computer program determines the functions n(E) and k(E) that best describe sample 16.
  • sample 16 comprises at least one thin film, and the theoretical model depends on a thickness, an index of refraction, and an extinction coefficient of each film.
  • the computer program determines the values of the thickness, the extinction coefficient, and the index of refraction of each film that best fit the data.
  • sample 16 has only one thin film and a substrate at measurement area 21.
  • n(E) and k(E) refer to an index of refraction and an extinction coefficient, respectively, of the thin film.
  • R heor ( E ) ma Y depend on other parameters, as well. When ⁇ max ⁇ 10°, R theory (E) is expressed as follows.
  • An analogous complex index of refraction is defined for the substrate, N S (E),. as well as for the ambient medium through which beams 12 and 22 travel, N a (E) .
  • the preferred ambient medium is air.
  • the theoretical reflectance, for ⁇ ma ⁇ 10° and one thin film, is
  • the computer program also ' incorporates an interface roughness of each surface of each film of measurement area 21 into the calculation of R theory (E) .
  • R theory (E) the difference between R theory (E) and R(E) , the interface roughnesses are thereby also determined.
  • the computer program uses mathematical parametrizations of n(E) and of k(E) .
  • Each parametrization preferably depends on at least three parameters A, B, and C, where A is a probability term related to the probability that an electron will undergo a transition from an initial to a final state in the sample, B is an energy term related to the difference between the initial and final energies of an electron in the sample, and C is a lifetime term related to the time that an electron in the sample will remain in the final state.
  • A is a probability term related to the probability that an electron will undergo a transition from an initial to a final state in the sample
  • B is an energy term related to the difference between the initial and final energies of an electron in the sample
  • C is a lifetime term related to the time that an electron in the sample will remain in the final state.
  • the extinction coefficient k(E) may be parametrized as:
  • k(E) A (E - E g ) 2 / (E 2 - B E + C) where E g is a bandgap energy of sample 16.
  • E g is a bandgap energy of sample 16.
  • the computer program uses the parametrization or parametrizations most suited to the materials that compose sample 16.
  • the index of refraction n(E) can be determined from k(E) using the well known dispersion relations .
  • the computer program uses any standard curve-fitting routine to find the parameters that best describe the data. It will be clear to one practiced in the art how to generalize the above discussion to include a plurality of thin films .
  • the computer program is therefore easily used to determine the index of refraction, the extinction coefficient, and thickness of each film present at measurement area 21.
  • measurement area 21 has > no thin films; in this case, the computer program determines an index of refraction and an extinction coefficient of the material present at measurement area 21.
  • source 10 emit a broadband beam (a beam containing a wide spectrum of light) .
  • relay 42 contains no components with chromatic aberration, each part of the spectrum of beam 22 is focused equally onto aperture 27. Therefore if there is a slight misalignment of mirror 33 or mirror 34, beam 22 may walk across aperture 27, causing a change in overall measured intensity, but the measured relative intensities of the different wavelengths of the spectrum will remain unchanged.
  • mirror 34 partially cancels the aberrations of mirror 33, viewing area 20 and measurement area 21 are both accurately imaged by optical relay 42. This precise imaging permits measurements to be made on samples that comprise a pattern of different thin films, where measurements are desired only on small areas in predetermined locations . Measurement area 21 can be made to coincide with any predetermined location on sample 16 by using viewer 28 and controlling the position of movable stage 15.

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Abstract

L'invention concerne un appareil utilisé pour caractériser, à l'aide d'une spectrophotométrie par réflectance, un échantillon présentant un certain nombre de couches minces. L'appareil fait appel à deux miroirs toroïdaux (33, 34) situés dans un relais optique pour diriger la lumière réfléchie par l'échantillon vers un dispositif spectroscopique. Ensuite, un ordinateur analyse le spectre réfléchi pour caractériser les propriétés optiques de l'échantillon (16). Le relais optique permet d'obtenir une gamme d'angles de réflexion depuis l'échantillon et ne présente aucune aberration chromatique. Pour obtenir des mesures fondées sur la polarisation, l'appareil peut également faire appel à des éléments de polarisation (70) et le dispositif spectroscopique (26) peut être un ellipsomètre spectral. L'échantillon est monté sur un étage mobile de sorte que les différentes zones de l'échantillon puissent être caractérisées. De plus, un déflecteur et un oculaire sont employés pour permettre à l'utilisateur de l'appareil de visualiser la zone de l'échantillon en étude.
PCT/US2000/023782 2000-08-29 2000-08-29 Appareil de spectroscopie par reflectance dote de miroirs toroidaux Ceased WO2002018914A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2000273373A AU2000273373A1 (en) 2000-08-29 2000-08-29 Reflectance spectroscopic apparatus with toroidal mirrors
PCT/US2000/023782 WO2002018914A1 (fr) 2000-08-29 2000-08-29 Appareil de spectroscopie par reflectance dote de miroirs toroidaux

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PCT/US2000/023782 WO2002018914A1 (fr) 2000-08-29 2000-08-29 Appareil de spectroscopie par reflectance dote de miroirs toroidaux

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10310602A1 (de) * 2003-03-11 2004-09-23 Olympus Biosystems Gmbh Zwischen wenigstens zwei optischen Systemen abbildende optische Abbildungsanordnung mit wenigstens einem torischen Spiegel
WO2011022745A1 (fr) * 2009-08-26 2011-03-03 Technische Universität Graz Dispositif optique pour ellipsométrie
US12498317B1 (en) * 2024-03-23 2025-12-16 J.A. Woollam Co., Inc. Sample alignment system in reflectometers, ellipsometers, spectrophotometers and the like

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5347364A (en) * 1992-01-23 1994-09-13 Jasco Corporation Total reflection measuring apparatus
US5608526A (en) * 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
US5771094A (en) * 1997-01-29 1998-06-23 Kla-Tencor Corporation Film measurement system with improved calibration
US5880831A (en) * 1997-12-09 1999-03-09 N & K Technology, Inc. Reflectance spectrophotometric apparatus with optical relay

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5347364A (en) * 1992-01-23 1994-09-13 Jasco Corporation Total reflection measuring apparatus
US5608526A (en) * 1995-01-19 1997-03-04 Tencor Instruments Focused beam spectroscopic ellipsometry method and system
US5771094A (en) * 1997-01-29 1998-06-23 Kla-Tencor Corporation Film measurement system with improved calibration
US5880831A (en) * 1997-12-09 1999-03-09 N & K Technology, Inc. Reflectance spectrophotometric apparatus with optical relay

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10310602A1 (de) * 2003-03-11 2004-09-23 Olympus Biosystems Gmbh Zwischen wenigstens zwei optischen Systemen abbildende optische Abbildungsanordnung mit wenigstens einem torischen Spiegel
WO2011022745A1 (fr) * 2009-08-26 2011-03-03 Technische Universität Graz Dispositif optique pour ellipsométrie
US12498317B1 (en) * 2024-03-23 2025-12-16 J.A. Woollam Co., Inc. Sample alignment system in reflectometers, ellipsometers, spectrophotometers and the like

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