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WO2002018783A1 - Pompe microfluidique - Google Patents

Pompe microfluidique Download PDF

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Publication number
WO2002018783A1
WO2002018783A1 PCT/US2001/041971 US0141971W WO0218783A1 WO 2002018783 A1 WO2002018783 A1 WO 2002018783A1 US 0141971 W US0141971 W US 0141971W WO 0218783 A1 WO0218783 A1 WO 0218783A1
Authority
WO
WIPO (PCT)
Prior art keywords
micro
conduit
chamber
fluidic pump
expanding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2001/041971
Other languages
English (en)
Inventor
Robert W. Hower
Hal C. Cantor
Jason R. Mondro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Sensor Technologies Inc
Original Assignee
Advanced Sensor Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Sensor Technologies Inc filed Critical Advanced Sensor Technologies Inc
Priority to EP01977772A priority Critical patent/EP1313949A4/fr
Priority to AU2001296863A priority patent/AU2001296863A1/en
Priority to CA002420948A priority patent/CA2420948A1/fr
Priority to US10/362,344 priority patent/US20040013536A1/en
Publication of WO2002018783A1 publication Critical patent/WO2002018783A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/12—Machines, pumps, or pumping installations having flexible working members having peristaltic action
    • F04B43/14—Machines, pumps, or pumping installations having flexible working members having peristaltic action having plate-like flexible members

Definitions

  • the present invention relates to mechanical pumps. More specifically, the present invention relates to mechanical micro-fluidic pumps for use in moving fluids.
  • actuators are the driving mechanism behind pumps that force fluid through a passageway, channel, port, or the like, and can possibly function as valves in micro-fluidic devices. These actuators work by various types of actuation forces applied to a flexible mechanism, valve or other similar device. Actuation occurs through methods using various forces such as electrostatic, piezoresistive, pneumatic, electrophoretic, magnetic, acoustic, and thermal gas expansion.
  • Electrostatic actuation of a membrane is one of the fastest methods for pumping solutions through a system. Piezoresistive actuation is also very fast, utilizing hybrids of thick and thin films to produce a resonant structure affecting pumping of solutions. While these devices exhibit very fast actuation rates, they require very high voltages, from 100V to 200V, and 50V to 500V respectively. Additionally, electrostatic and piezoresistive actuation require specialized valves that direct fluid flow in a particular direction. As a result, these pumps require three chips to be separately machined and bonded together to produce the device.
  • Pneumatic actuation requires an external pressurized gas source to actuate the membranes that cause fluid flow. While this method is feasible in a laboratory setting where pressurized gas is available, it is impractical for in-the- field utilization.
  • Electrophoretic actuation utilizes electrodes within a solution to impart a motive force to charged molecules within the solution. Neutral molecules are then 'dragged' along with the charged particles. This method is amenable to size reduction; however, it does have critical side effects such as the chromatographic phenomenon that causes a separation of molecules based upon charge. Additionally the high voltages necessary to induce fluid transport are incompatible with standard CMOS circuitry. Ultrasonic actuation occurs through flexural plate waves. This methodology however, is inefficient and causes mixing due to enhanced diffusion.
  • Thermal gas expansion relies on the expansion of trapped air in the system to move fluid through the conduits 56. This is accomplished by selectively producing hydrophobic and hydrophilic regions on the chip.
  • a pulsating micro chamber including a walled chamber.
  • the walled chamber further includes at least one pulsating portion actuable to pulse and change an interior volume of the walled chamber.
  • the present invention further provides for a micro-fluidic pump including a micro conduit for carrying fluid therethrough and at least one actuating mechanism for peristaltically moving fluids through the micro conduit.
  • the actuating mechanism includes a closed pocket adjacent to the conduit, a flexible mechanism defining a portion of a wall of the micro conduit, and an expanding mechanism disposed within the pocket for expanding a volume of the pocket and thereby flexing the flexible mechanism into the micro conduit thereby changing the volume of the conduit.
  • Figure 1 is a diagram showing peristaltic firing pattern for micro-fluidic pump actuation
  • Figure 2 is a cross-sectional schematic view of the micro-fluidic device with approximate dimensions
  • Figure 3 is a temperature profile through each layer identified in Figure 2;
  • Figure 4 is a temperature profile to the cross-section of the device of the present application.
  • Figure 5 is a CAD layout of the micro-actuator of the present invention.
  • Figure 7 shows three micro-fluidic actuators in succession, thus creating a micro pump of the present invention
  • Figure 8A and 8B show a perspective view of the pulsating micro chamber of the present invention.
  • Figure 9 is schematic diagram of an embodiment of a micro-fluidic pump. DETAILED DESCRIPTION OF THE INVENTION
  • the present invention provides for a pulsating micro-chamber 46 and a micro-fluidic pump generally shown at 22.
  • the present invention is useful in all applications where small quantities of fluids need to be dispensed, mixed, reacted, heated or cooled, or the reaction products inspected. Such applications occur in clinical and diagnostic testing, environmental or forensic testing, analytical chemistry, fine chemistry, biological sciences, and combinatorial synthesis.
  • the micro-fluidic pump can be used in a micro-fluidic system that has a simplified network of tubes and pumps, usually associated with present liquid delivery systems capable of performing such processes.
  • An estimated maximum flow-rate based on the thermal dissipation of the actuator and the volume pumped is approximately 300-500 ⁇ L/min. This rate however, is not limiting and thus can be decreased or increased without departing from the spirit of the present invention.
  • closed cavity 11 is meant to include, but is not limited to, a sealed cavity that contains a liquid or solid expanding mechanism
  • heating mechanism 12 as used herein is meant to include, but is not limited to, a heating device or element 12 that is incorporated with the actuator 10 of the present invention.
  • the heating mechanism 12 generates heat to induce expansion of the expanding mechanism 14.
  • the heating mechanism 12 is disposed adjacently to the flexible mechanism 18 in order to turn on and off as well as maintaining on and off selective expansion of the expanding mechanism 14.
  • the heating mechanism 12 is formed of materials including, but not limited to, polysilicon, elemental metal, suicide, or any other similar heating elements known to those of skill in the art.
  • the heating mechanism is encased in a medium such as Si0 2 .
  • the chamber encompassing the micro-actuator is etched out of glass in a nearly hemispherical shape.
  • a variety of conformations of spherically cut patterns i.e. 1/3 of a sphere, Vz of a sphere, etc.
  • the pulsating micro-chamber 46 includes the wall . 50 defining the chamber 46.
  • the wall further includes at least one pulsating portion 52 actuable to pulse and change the interior volume 48 of the chamber defined by the wall 50.
  • the pulsating portion 52 can be a part or portion of the wall 50 or can be added to the wall 50 in order to provide a pulsating portion 52 thereof.
  • the wall 50 can include an opening therethrough and a membrane or other flexible material disposed over the opening (Figure 8).
  • the pulsating portion 52 of the pulsating micro-chamber 46 changes the interior volume 48 of the chamber 46.
  • the volume can be decreased or increased depending upon the mode of actuation.
  • the pulsating portion 52 is actuated by either being heated or cooled. If heated, the pulsating portion 52 expands and thus decreases the interior volume 48 of the chamber 46. If cooled, then the pulsating portion contracts and thus increases the volume 48 of the chamber 46.
  • the increase in volume can create a lower pressure therein and cause a vacuum effect to draw fluids into the chamber 46 therein.
  • vaporizing and/or condensing of the expanding mechanism 14 occurs in the closed cavity 11 to cause expansion and/or contraction.
  • the actuating mechanism 10 of the micro fluidic pump 22 of the present invention causes a change in volume within the conduit 56.
  • the volume can be either increased or decreased depending upon the mode of actuation.
  • the actuating mechanism 10 can either be activated or deactivated to cause actuation.
  • the heating mechanism 12 of the actuating mechanism 10 is initially activated, then the heat created induces the expansion of the expanding mechanism 14 via vaporization of the expanding mechanism within the closed cavity 11.
  • the expanding mechanism 14 then causes the flexible mechanism 18 to expand into the micro conduit 56 and thus cause a decrease in volume within the micro conduit 56.
  • the heating mechanism 12 can be in an activated state to keep the expansion mechanism 14 in an expanded state.
  • the flexible mechanism 18 contracts and increases the volume within the micro conduit 56 via condensation of the expanding mechanism 14 in the closed cavity 11.
  • the increase in volume can create a lower pressure therein and cause a vacuum effect to draw fluids into and through the micro conduit 56.
  • control of the individual actuators 10 of the pump 22 is under computer control or integrated circuitry.
  • the peristaltic firing pattern is depicted in Figure 1.
  • each actuator 10 must expand and contract within 14.9 ms.
  • Mathematical models indicate that the actuators 10 can supersede this requirement.
  • square wave pulses of energy are applied to the actuator 10. In this manner, the energy applied to the heating mechanism 12 is minimized to prevent overheating of the solution.
  • optical or electronic beam (E- beam) photo masks are used and silicon wafers containing micro pumps are fabricated.
  • the micro-fluidic chips are to have a 2-sided alignment of wafers, micro-machining and silicon processing.
  • an arbitrary waveform generator, and/or computer controlled digital-to-analog (d/a) and analog-to- digital (a/d) PCI computer cards for example, the PCIMI016XH, National Instruments
  • the micro fluidic pumps are controlled to have optimal operating parameters (i.e. stimulatory waveform patterns) to generate peristaltic pumping action.
  • Electronic control of the peristaltic pumps 22 is optimized to maximize flow rates, maximize pressure head, and minimize power utilization and heat generation.
  • the maximum pressure produced by the pumps 22 at different pumping rates is determined by testing the capabilities of the pumps to cause flow through the system. To effect testing, the effluent from the micro-fluidic chip is connected to a vertical tube, and the maximal height the medium can achieve provides a measure of the maximal pressure-head developed. Alternatively, a small pressure sensor is used to verify pressure generation throughout the device.
  • an important aspect of the micro- fluidic pump 22 is the actuating mechanism 10.
  • the pump 22 has three actuating mechanisms 10. Each one produces a pulse and works in tandem with the other actuating mechanisms 10 to produce peristaltic pumping action.
  • the actuating mechanisms 10 are operatively connected to each other through the micro conduit 56.
  • the actuating mechanism 10 of the micro-fluidic pumps 22 is designed such that it can be fabricated using minimal micro-machining and employs planar fabrication techniques.
  • the micro-fluidic actuator 10 is based upon electrically activated pneumatic actuation of the flexible mechanism 18 made by being micro-screen-printed, spin coated, dispensed, or the like.
  • the advantage of pneumatic actuation is that large deflections can be achieved for the flexible mechanism 18.
  • the expanding mechanism 14 is heated and converted into vapor to provide the driving force.
  • the expanding mechanism 14 is vaporized under the flexible mechanism 18 to provide the pneumatic actuation. This actuation occurs without the requirement of utilizing external pressurized gas.
  • the fluid being pumped serves the purpose of acting as a heat sink to condense the gas back to liquid and hence return the flexible mechanism 18 to is relaxed state when the heating mechanism 12 is inactivated.
  • a temperature sensor 16 is integrated adjacent to the actuator 10 to monitor the temperature of the micro-fluidic integrated heating mechanism 12 and hence, expanding mechanism 14.
  • the heating mechanism 12 requires very low power to achieve sufficient temperatures for fluid vaporization.
  • miniature inkjet nozzles that require temperatures in excess of 330° G, utilize 20 ⁇ second pulses of 16 mA to heat the fluid and fire an ink droplet.
  • lower power would be required to vaporize the liquid in the present micro-fluidic pump application.
  • it is necessary to utilize low power devices and circuitry to conserve energy and allow the use of very small, lightweight batteries.
  • the expanding mechanism 14 component imposes a pressure upon the flexible mechanism 18 causing it to expand and be displaced above the heating mechanism 12 and reduce the volume of the chamber 20.
  • This methodology can be utilized to displace fluid between the flexible mechanism 18 and the walls of the chamber 20 (pumping action), to occlude fluid flow through the chamber 20 (valving action), to provide direct contact to the glass substrate to effect heat transfer, or to provide the driving force for locomotion of a physical device (i.e., as in a walking caterpillar and/or a swimming paramecium with a flapping flagella, in which case the glass chamber 20 encompassing the micro-actuator 10 would not be used).
  • the heat flux through each of the layers composing the device is calculated using existing boundary conditions.
  • the boundary conditions are body temperature (for the heat sink) and the temperature required to vaporize the expanding mechanism 14 (for the heat source). These values however, vary according to the appropriate application. Thus, the values can be considerably lower.
  • the temperature of the saturated liquid hydrogel, at 1 ATM, is assumed to be 100° C.
  • the heat flux to the air, through the back of the heating mechanism 12, is calculated to be 1263 W/K-m 2 .
  • the total heat flux through the device is calculated to be 46,955 W/K-m 2 with a total flux from the heating mechanism 12 of 48,218 W/K-m 2 (i.e. 97% efficiency of focused heat transfer).
  • the temperature of the inactive state hydrogel varies between 86° and 94° C.
  • the actual temperature distribution is exponential, but the temperatures at the interface of each layer are identical to that predicted by the linear model.
  • Figure 3 depicts the temperatures between each layer.
  • Figure 4 depicts how the temperature varies through the device at a specific distance.
  • the blue line square markers in Figure 3, tight dashed line in Figure 4 indicates the temperature profile of the fully contracted (liquid state) actuator 10, while the red line (diamond markers in Figure 3, solid line in Figure 4) indicates fully expanded (vapor state).
  • the green line (triangle markers in Figure 3, loose dashed line in Figure 4) represents the temperature profile of the partially expanded actuator 10.
  • This type of hydrogel is but just one example. Photocurable and liquid hydrogels for instance, can also be used.
  • flexible mechanism 18 actuation and hydrogel vaporization it is necessary to raise the temperature of the hydrogel from body temperature to the boiling point, 120°C at 2 ATM.
  • Thermodynamic models indicate that approximately 8.03 x 10 "7 J of heat transfer is required to raise the temperature of the hydrogel from 37°C to 120°C (1.08 x 10 "7 J) and vaporize all of the water (6.95 x 10 "7 J). This is consistent with the sum of enthalpy equation.
  • a circular actuator 10 with a diameter of 300 ⁇ m is required to deliver 4.9 nL quantities of liquid per actuation of the flexible mechanism 18.
  • the heating mechanism 12 is laid out as a square that encompasses the majority of the circular hydrogel area without extending past the edge of the chamber 20. However, other shapes can be employed, such as circular, rectangular, or triangular layouts in which the area of hydrogel is encompassed as much as possible. In order to provide efficient micro-actuation in 150 ⁇ s, requirements for the heating mechanism 12 power output and electrical resistance were calculated.
  • the resistance of the poly-silicon heating mechanism 12 was calculated to between 450 to 500 ⁇ , based upon utilizing a 5V power supply. Actuation requires a 150 ⁇ s pulse of approximately 11 mA of current, providing the 777 nJ of energy required. In order to achieve a pumping rate of 10 ⁇ L/minute, approximately 677 ⁇ W of power is required. In previous work, poly-silicon structures at a thickness of 6000 A or 0.6 ⁇ m, having a resistance of 15 ⁇ /elemental square have been produced. To provide the required resistance, 5 poly-silicon heating mechanism 12 lines are arranged in parallel (See figure 5). The poly-silicon heating mechanism 12 elements have a width of 5 ⁇ m. The total resistance of the heating mechanism 12 is 450 ⁇ .
  • FIG. 5 is a schematic CAD layout of one embodiment with an actuator 10 including a poly-silicon heating mechanism 12. Because of its high thermal conductivity the silicon substrate acts as a heat sink. To reduce thermal conduction to the silicon substrate, a window in the silicon, located beneath the heating mechanism 12, provides the hydrogel with an isolated platform. This window is only slightly larger than the heating mechanism 12 to maintain some thermal conduction to the substrate. The opposite side of this window is exposed to air, which has a very low heat transfer coefficient, compared to any fluids being pumped. After the actuator 10 is energized, thermal conduction to the silicon provides decreased time to condense the liquid in the hydrogel. This decreased constriction time provides improved pumping rates. If the window is significantly larger than the actuator 10, there is no heat conduction path to the substrate, hence increasing condensation time and decreasing the maximal flow rate.
  • the solid or non-solid hydrogel is presented as a cylinder with diameter of 280 ⁇ m and height of 0.5 - 1 ⁇ m.
  • the actuation chamber 20 encompasses the entire cavity etched in the glass substrate.
  • the cavity can be redesigned before mask generation to account for undercut of the glass. As glass is chemically etched, the etchant undercuts the mask making the cavity larger than the photo mask size.
  • Fabrication of this device is based upon the development of a process flow.
  • the fabrication process utilizes bulk silicon micro-machining techniques to produce the isolation windows, and thick film screen printing techniques for mass dispensing, spin coating, expandable mechanism, such as thick film screen printing, or dispensing of actuation membranes.
  • a polymeric hydrogel (or hydrocarbon) can be utilized to provide a physically supportive structure that withstands the application of flexible mechanism 18 as well as to provide the aqueous component required for actuation.
  • Several commercially available materials meet these requirements.
  • a hydrogel is selected that contains approximately 30% aqueous component that vaporizes near 100°C.
  • HEMA hydroxyethylmethacrylate
  • PVP polyvinylpyrrolidone
  • hydrocarbons can be used since they possess lower boiling points than aqueous hydrogels, and therefore require less power to effect pneumatic actuation.
  • Dispensing hydrogel (or hydrocarbon) into the desired location is accomplished utilizing one of three methods.
  • a promising method for patterning the hydrogel is to utilize a photopatternable-crosslinking hydrogel.
  • the hydrogel is cross-linked by incorporating an UV photo-initiator polymerizing agent within the hydrogel that cross-links when exposed to UV radiation.
  • the hydrogel would be evenly spun on the entire wafer using standard semiconductor processing techniques.
  • a photographic mask is then placed over the wafer, followed by exposure to UV light. After the cross-linking reaction is completed, excess (non-cross-linked hydrogel) is washed from the surface.
  • the second method involves dispensing liquid hydrogel into well-rings created around the poly-silicon heating mechanism 12. These wells have the ability to retain a liquid in a highly controlled manner.
  • Two photopatternable polymers have been utilized to create microscopic well-ring structures, SU-8 and a photopatternable polyimide. These well-rings can be produced in any height from 2 ⁇ m to 50 ⁇ m, sufficient to contain the liquid hydrogel. Once the hydrogel solidifies, flexible mechanisms can be deposited over them. This can be accomplished in an automated manner utilizing commercially available dispensing equipment.
  • a pre-solidified hydrogel is used that has been cut into the desire size and shape. This is facilitated by extruding the hydrogel in the desired radius and slicing it with a microtome to the desired height, or by spinning the hydrogel to the desired thickness and cutting it into cylinders of the desired radius. Utilizing micro-manipulators, the patterned gel is placed in the desired area. This process can also be automated.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

L'invention concerne une pompe microfluidique (22) qui comprend une microchambre pulsatoire (46) qui contient une chambre pourvue de parois (50). La chambre pourvue de parois comprend au moins une partie pulsatoire (52) pouvant être actionnée afin de produire des pulsations et de modifier un volume intérieur de la chambre pourvue de parois. Un mécanisme de manoeuvre (10) déplace de manière péristaltique des fluides dans un microconduit (56). Le mécanisme de manoeuvre comprend une poche fermée (11) adjacente au conduit. Un mécanisme flexible (18) définit une partie d'une paroi du microconduit (56). Selon cette invention, un mécanisme d'expansion (14), qui se présente comme un fluide, est disposé dans la poche (11) afin d'agrandir le volume de la poche et ainsi plier le mécanisme flexible (18) dans le microconduit afin de modifier le volume du conduit (56).
PCT/US2001/041971 2000-08-31 2001-08-31 Pompe microfluidique Ceased WO2002018783A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP01977772A EP1313949A4 (fr) 2000-08-31 2001-08-31 Pompe microfluidique
AU2001296863A AU2001296863A1 (en) 2000-08-31 2001-08-31 Micro-fluidic pump
CA002420948A CA2420948A1 (fr) 2000-08-31 2001-08-31 Pompe microfluidique
US10/362,344 US20040013536A1 (en) 2001-08-31 2001-08-31 Micro-fluidic pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US22937900P 2000-08-31 2000-08-31
US60/229,379 2000-08-31

Publications (1)

Publication Number Publication Date
WO2002018783A1 true WO2002018783A1 (fr) 2002-03-07

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/041971 Ceased WO2002018783A1 (fr) 2000-08-31 2001-08-31 Pompe microfluidique

Country Status (4)

Country Link
EP (1) EP1313949A4 (fr)
AU (1) AU2001296863A1 (fr)
CA (1) CA2420948A1 (fr)
WO (1) WO2002018783A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10255325B4 (de) * 2002-11-27 2005-09-29 Robert Bosch Gmbh Vorrichtung und Verfahren zur Bestimmung eines Siedepunkts einer Flüssigkeit
EP1916420A1 (fr) * 2006-10-28 2008-04-30 Sensirion AG Pompe à cellules multiples
EP1918586A1 (fr) * 2006-10-28 2008-05-07 Sensirion AG Pompe multicellulaire et dispositif d'alimentation de fluide
CN115479016A (zh) * 2022-09-05 2022-12-16 常州威图流体科技有限公司 一种流体蠕动泵

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Publication number Priority date Publication date Assignee Title
US5096388A (en) * 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
WO1994019609A1 (fr) * 1993-02-23 1994-09-01 Erik Stemme Pompe volumetrique du type a diaphragme
US5659171A (en) * 1993-09-22 1997-08-19 Northrop Grumman Corporation Micro-miniature diaphragm pump for the low pressure pumping of gases
US5705018A (en) * 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump

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JPH05229122A (ja) * 1992-02-25 1993-09-07 Seiko Instr Inc インクジェットプリントヘッドおよびインクジェットプリントヘッドの駆動方法
GB2266751A (en) * 1992-05-02 1993-11-10 Westonbridge Int Ltd Piezoelectric micropump excitation voltage control.
TW344713B (en) * 1995-01-13 1998-11-11 Canon Kk Liquid ejecting head, liquid ejecting device and liquid ejecting method
JP3542460B2 (ja) * 1996-06-07 2004-07-14 キヤノン株式会社 液体吐出方法及び液体吐出装置
DE19802368C1 (de) * 1998-01-22 1999-08-05 Hahn Schickard Ges Mikrodosiervorrichtung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5096388A (en) * 1990-03-22 1992-03-17 The Charles Stark Draper Laboratory, Inc. Microfabricated pump
WO1994019609A1 (fr) * 1993-02-23 1994-09-01 Erik Stemme Pompe volumetrique du type a diaphragme
US5659171A (en) * 1993-09-22 1997-08-19 Northrop Grumman Corporation Micro-miniature diaphragm pump for the low pressure pumping of gases
US5705018A (en) * 1995-12-13 1998-01-06 Hartley; Frank T. Micromachined peristaltic pump
US6007309A (en) * 1995-12-13 1999-12-28 Hartley; Frank T. Micromachined peristaltic pumps

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Title
See also references of EP1313949A4 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10255325B4 (de) * 2002-11-27 2005-09-29 Robert Bosch Gmbh Vorrichtung und Verfahren zur Bestimmung eines Siedepunkts einer Flüssigkeit
EP1916420A1 (fr) * 2006-10-28 2008-04-30 Sensirion AG Pompe à cellules multiples
EP1918586A1 (fr) * 2006-10-28 2008-05-07 Sensirion AG Pompe multicellulaire et dispositif d'alimentation de fluide
US8807962B2 (en) 2006-10-28 2014-08-19 Sensirion Ag Multicellular pump and fluid delivery device
US9605665B2 (en) 2006-10-28 2017-03-28 Sensirion Holding Ag Multicellular pump and fluid delivery device
CN115479016A (zh) * 2022-09-05 2022-12-16 常州威图流体科技有限公司 一种流体蠕动泵

Also Published As

Publication number Publication date
AU2001296863A1 (en) 2002-03-13
CA2420948A1 (fr) 2002-03-07
EP1313949A4 (fr) 2004-11-24
EP1313949A1 (fr) 2003-05-28

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