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WO2002012925A3 - Micromirror elements, package for the micromirror elements, and protection system therefor - Google Patents

Micromirror elements, package for the micromirror elements, and protection system therefor Download PDF

Info

Publication number
WO2002012925A3
WO2002012925A3 PCT/US2001/024332 US0124332W WO0212925A3 WO 2002012925 A3 WO2002012925 A3 WO 2002012925A3 US 0124332 W US0124332 W US 0124332W WO 0212925 A3 WO0212925 A3 WO 0212925A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromirror elements
micromirrors
package
protection system
system therefor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2001/024332
Other languages
French (fr)
Other versions
WO2002012925A2 (en
Inventor
Andrew G Huibers
Fedor Ilkov
Satyadev Patel
Peter W Richards
John Stockton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Reflectivity Inc
Original Assignee
Reflectivity Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/631,536 external-priority patent/US6529310B1/en
Priority claimed from US09/732,445 external-priority patent/US6523961B2/en
Priority to US10/343,307 priority Critical patent/US6962419B2/en
Priority to EP01959466A priority patent/EP1315993A4/en
Priority to JP2002517555A priority patent/JP3889705B2/en
Priority to AU2001281019A priority patent/AU2001281019A1/en
Application filed by Reflectivity Inc filed Critical Reflectivity Inc
Publication of WO2002012925A2 publication Critical patent/WO2002012925A2/en
Publication of WO2002012925A3 publication Critical patent/WO2002012925A3/en
Priority to KR1020037001542A priority patent/KR100724081B1/en
Anticipated expiration legal-status Critical
Priority to US10/402,777 priority patent/US6960305B2/en
Priority to US10/437,776 priority patent/US7099065B2/en
Priority to US10/857,132 priority patent/US7300162B2/en
Priority to US10/857,059 priority patent/US7167297B2/en
Priority to US10/857,133 priority patent/US7012731B2/en
Priority to US10/857,519 priority patent/US7172296B2/en
Priority to US10/857,055 priority patent/US7006275B2/en
Priority to US10/857,058 priority patent/US7023606B2/en
Priority to US10/857,514 priority patent/US7196740B2/en
Priority to US10/856,174 priority patent/US7018052B2/en
Priority to US10/914,038 priority patent/US7262817B2/en
Priority to US10/986,588 priority patent/US7221498B2/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0067—Packages or encapsulation for controlling the passage of optical signals through the package
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00—Projectors or projection-type viewers; Accessories therefor
    • G03B21/14—Details
    • G03B21/28—Reflectors in projection beam
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/70283—Mask effects on the imaging process
    • G03F7/70291—Addressable masks, e.g. spatial light modulators [SLMs], digital micro-mirror devices [DMDs] or liquid crystal display [LCD] patterning devices
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N5/00—Details of television systems
    • H04N5/74—Projection arrangements for image reproduction, e.g. using eidophor
    • H04N5/7416—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal
    • H04N5/7458—Projection arrangements for image reproduction, e.g. using eidophor involving the use of a spatial light modulator, e.g. a light valve, controlled by a video signal the modulator being an array of deformable mirrors, e.g. digital micromirror device [DMD]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0369—Static structures characterized by their profile
    • B81B2203/0384—Static structures characterized by their profile sloped profile

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Multimedia (AREA)
  • Computer Hardware Design (AREA)
  • Signal Processing (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Projection Apparatus (AREA)
  • Micromachines (AREA)
  • Led Device Packages (AREA)
  • Prostheses (AREA)
  • Transforming Electric Information Into Light Information (AREA)
  • Hybrid Cells (AREA)

Abstract

Micromirrors are provided which are not rectangular in order to minimize light diffraction along a direction of switching and into the acceptance cone of collection optics (115). A light source (114) is placed orthogonal to rows and columns of an array (94) though not orthogonal to any substantial portion of the sides of the micromirrors in the array. The micromirrors of the present invention result in an improved contrast ratio and the light source position results in a more compact system. The micromirrors have the ability to pivot in opposite direction to on and off positions where the movement to the on position is greater than the movement to the off position.
PCT/US2001/024332 1998-09-24 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor Ceased WO2002012925A2 (en)

Priority Applications (17)

Application Number Priority Date Filing Date Title
US10/343,307 US6962419B2 (en) 1998-09-24 2001-03-08 Micromirror elements, package for the micromirror elements, and projection system therefor
EP01959466A EP1315993A4 (en) 2000-08-03 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor
JP2002517555A JP3889705B2 (en) 2000-08-03 2001-08-03 Micromirror device, package for micromirror device, and projection system therefor
AU2001281019A AU2001281019A1 (en) 2000-08-03 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor
KR1020037001542A KR100724081B1 (en) 2000-08-03 2003-02-03 Micromirror array, Projection System, Light Modulation Method, Optical Micromechanical Element and Method for Spatially Modulating a Light Beam
US10/402,777 US6960305B2 (en) 1999-10-26 2003-03-28 Methods for forming and releasing microelectromechanical structures
US10/437,776 US7099065B2 (en) 2000-08-03 2003-05-13 Micromirrors with OFF-angle electrodes and stops
US10/856,174 US7018052B2 (en) 2000-08-30 2004-05-28 Projection TV with improved micromirror array
US10/857,514 US7196740B2 (en) 2000-08-30 2004-05-28 Projection TV with improved micromirror array
US10/857,058 US7023606B2 (en) 2001-08-03 2004-05-28 Micromirror array for projection TV
US10/857,055 US7006275B2 (en) 2000-08-30 2004-05-28 Packaged micromirror array for a projection display
US10/857,132 US7300162B2 (en) 2000-08-30 2004-05-28 Projection display
US10/857,059 US7167297B2 (en) 2000-08-30 2004-05-28 Micromirror array
US10/857,133 US7012731B2 (en) 2000-08-30 2004-05-28 Packaged micromirror array for a projection display
US10/857,519 US7172296B2 (en) 2000-08-30 2004-05-28 Projection display
US10/914,038 US7262817B2 (en) 2000-08-30 2004-08-05 Rear projection TV with improved micromirror array
US10/986,588 US7221498B2 (en) 2000-08-30 2004-11-12 Methods and apparatus for selectively updating memory cell arrays

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US09/631,536 2000-08-03
US09/631,536 US6529310B1 (en) 1998-09-24 2000-08-03 Deflectable spatial light modulator having superimposed hinge and deflectable element
US22924600P 2000-08-30 2000-08-30
US60/229,246 2000-08-30
US09/732,445 US6523961B2 (en) 2000-08-30 2000-12-07 Projection system and mirror elements for improved contrast ratio in spatial light modulators
US09/732,445 2000-12-07

Related Parent Applications (4)

Application Number Title Priority Date Filing Date
US09/631,536 Continuation-In-Part US6529310B1 (en) 1998-09-24 2000-08-03 Deflectable spatial light modulator having superimposed hinge and deflectable element
US09/732,455 Continuation-In-Part US6447558B1 (en) 1999-12-21 2000-12-07 Diesel fuel composition
US09/732,445 Continuation-In-Part US6523961B2 (en) 1998-09-24 2000-12-07 Projection system and mirror elements for improved contrast ratio in spatial light modulators
US10/176,478 Continuation-In-Part US7071520B2 (en) 1999-10-26 2002-06-21 MEMS with flexible portions made of novel materials

Related Child Applications (16)

Application Number Title Priority Date Filing Date
US10/343,307 A-371-Of-International US6962419B2 (en) 1998-09-24 2001-03-08 Micromirror elements, package for the micromirror elements, and projection system therefor
US10343307 A-371-Of-International 2001-08-03
US10/005,308 Continuation-In-Part US6969635B2 (en) 1995-06-19 2001-12-03 Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US10/366,297 Continuation-In-Part US6867897B2 (en) 2000-08-03 2003-02-12 Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
US10/402,777 Continuation-In-Part US6960305B2 (en) 1999-10-26 2003-03-28 Methods for forming and releasing microelectromechanical structures
US10/407,061 Continuation-In-Part US6856447B2 (en) 2000-08-30 2003-04-02 Methods and apparatus for selectively updating memory cell arrays
US10/437,776 Continuation-In-Part US7099065B2 (en) 2000-08-03 2003-05-13 Micromirrors with OFF-angle electrodes and stops
US10/857,514 Continuation US7196740B2 (en) 2000-08-30 2004-05-28 Projection TV with improved micromirror array
US10/857,059 Continuation US7167297B2 (en) 2000-08-30 2004-05-28 Micromirror array
US10/857,058 Continuation US7023606B2 (en) 2001-08-03 2004-05-28 Micromirror array for projection TV
US10/856,174 Continuation US7018052B2 (en) 2000-08-30 2004-05-28 Projection TV with improved micromirror array
US10/857,519 Continuation US7172296B2 (en) 2000-08-30 2004-05-28 Projection display
US10/857,132 Continuation US7300162B2 (en) 2000-08-30 2004-05-28 Projection display
US10/857,133 Continuation US7012731B2 (en) 2000-08-30 2004-05-28 Packaged micromirror array for a projection display
US10/857,055 Continuation US7006275B2 (en) 2000-08-30 2004-05-28 Packaged micromirror array for a projection display
US10/914,038 Continuation US7262817B2 (en) 2000-08-30 2004-08-05 Rear projection TV with improved micromirror array

Publications (2)

Publication Number Publication Date
WO2002012925A2 WO2002012925A2 (en) 2002-02-14
WO2002012925A3 true WO2002012925A3 (en) 2002-09-06

Family

ID=27397927

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/024332 Ceased WO2002012925A2 (en) 1998-09-24 2001-08-03 Micromirror elements, package for the micromirror elements, and protection system therefor

Country Status (8)

Country Link
EP (1) EP1315993A4 (en)
JP (5) JP3889705B2 (en)
KR (1) KR100724081B1 (en)
CN (5) CN100412604C (en)
AT (1) ATE354814T1 (en)
AU (1) AU2001281019A1 (en)
DE (10) DE20122371U1 (en)
WO (1) WO2002012925A2 (en)

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US7006275B2 (en) 2000-08-30 2006-02-28 Reflectivity, Inc Packaged micromirror array for a projection display
US7023606B2 (en) 2001-08-03 2006-04-04 Reflectivity, Inc Micromirror array for projection TV
US7075702B2 (en) 2003-10-30 2006-07-11 Reflectivity, Inc Micromirror and post arrangements on substrates
US7286278B2 (en) 2000-12-07 2007-10-23 Texas Instruments Incorporated Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
US7787721B2 (en) 2004-10-29 2010-08-31 Fujitsu Limited Mirror, mirror unit, and optical switch
US9030751B2 (en) 2010-10-05 2015-05-12 Samsung Electronics Co., Ltd. Fluidic lens

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Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7262817B2 (en) 2000-08-30 2007-08-28 Texas Instruments Incorporated Rear projection TV with improved micromirror array
US7012731B2 (en) 2000-08-30 2006-03-14 Reflectivity, Inc Packaged micromirror array for a projection display
US7018052B2 (en) 2000-08-30 2006-03-28 Reflectivity, Inc Projection TV with improved micromirror array
US7300162B2 (en) 2000-08-30 2007-11-27 Texas Instruments Incorporated Projection display
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AU2001281019A1 (en) 2002-02-18
DE20122618U1 (en) 2006-11-23
DE20122373U1 (en) 2005-05-19
ATE354814T1 (en) 2007-03-15
CN100412603C (en) 2008-08-20
JP2004506230A (en) 2004-02-26
CN100412602C (en) 2008-08-20
CN1444738A (en) 2003-09-24
JP3768514B2 (en) 2006-04-19
JP2005099793A (en) 2005-04-14
JP3889757B2 (en) 2007-03-07
EP1315993A2 (en) 2003-06-04
CN1567021A (en) 2005-01-19
KR100724081B1 (en) 2007-06-04
DE20122370U1 (en) 2005-05-19
JP2005122145A (en) 2005-05-12
CN1567018A (en) 2005-01-19
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DE20122614U1 (en) 2006-09-14
JP3889759B2 (en) 2007-03-07
CN100412604C (en) 2008-08-20
EP1315993A4 (en) 2005-07-13
CN1567019A (en) 2005-01-19
DE20122372U1 (en) 2005-05-19
CN1567020A (en) 2005-01-19
WO2002012925A2 (en) 2002-02-14
JP2006178447A (en) 2006-07-06
DE20122616U1 (en) 2006-09-14
DE60126849D1 (en) 2007-04-05
CN100371763C (en) 2008-02-27
JP3889705B2 (en) 2007-03-07
DE20122617U1 (en) 2006-09-14
DE20122371U1 (en) 2005-05-19
CN100392467C (en) 2008-06-04
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JP2005122146A (en) 2005-05-12
KR20030036665A (en) 2003-05-09

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