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WO2002091809A3 - Procede et dispositif de generation d'un rideau de gaz active pour traitement de surface - Google Patents

Procede et dispositif de generation d'un rideau de gaz active pour traitement de surface Download PDF

Info

Publication number
WO2002091809A3
WO2002091809A3 PCT/IB2002/001482 IB0201482W WO02091809A3 WO 2002091809 A3 WO2002091809 A3 WO 2002091809A3 IB 0201482 W IB0201482 W IB 0201482W WO 02091809 A3 WO02091809 A3 WO 02091809A3
Authority
WO
WIPO (PCT)
Prior art keywords
arc
surface treatment
gas curtain
generating
activated gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2002/001482
Other languages
English (en)
Other versions
WO2002091809A2 (fr
WO2002091809A8 (fr
Inventor
Pavel Koulik
Mikhail Samsonov
Zorina Evguenia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
APIT Corp SA
Original Assignee
APIT Corp SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by APIT Corp SA filed Critical APIT Corp SA
Priority to JP2002588733A priority Critical patent/JP4313046B2/ja
Priority to US10/474,669 priority patent/US7214413B2/en
Priority to EP02769174A priority patent/EP1506699A2/fr
Publication of WO2002091809A2 publication Critical patent/WO2002091809A2/fr
Anticipated expiration legal-status Critical
Publication of WO2002091809A8 publication Critical patent/WO2002091809A8/fr
Publication of WO2002091809A3 publication Critical patent/WO2002091809A3/fr
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/48—Generating plasma using an arc
    • H05H1/484—Arrangements to provide plasma curtains or plasma showers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/40—Surface treatments

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
  • Plasma Technology (AREA)

Abstract

Un dispositif pour le traitement de surface comporte des électrodes (24a, 24b) pour l'amorcement d'un arc électrique de plasma stabilisé (14), un canal stabilisant (12) dans un corps (10) pour confiner l'arc électrique de plasma stabilisé, des conduits (38, 39) dans le corps pour l'introduction uniformément distribuée le long dudit arc d'un gaz de traitement Q1 en amont dudit arc dans une direction essentiellement perpendiculaire à l'axe A dudit arc de manière à former un rideau de gaz activé (8), des moyens d'introduction d'un gaz de traitement complémentaire Q2 en aval dudit arc électrique et un support (28) pour le maintien de l'objet ou du matériau à traiter et pour le positionnement de la surface à traiter dudit objet ou matériau par rapport au corps (10).
PCT/IB2002/001482 2001-05-03 2002-05-03 Procede et dispositif de generation d'un rideau de gaz active pour traitement de surface Ceased WO2002091809A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2002588733A JP4313046B2 (ja) 2001-05-03 2002-05-03 表面処理用の活性ガスカーテンの発生方法および装置
US10/474,669 US7214413B2 (en) 2001-05-03 2002-05-03 Method and device for generating an activated gas curtain for surface treatment
EP02769174A EP1506699A2 (fr) 2001-05-03 2002-05-03 Procede et dispositif de generation d'un rideau de gaz active pour traitement de surface

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP01810433 2001-05-03
EP01810433.1 2001-05-03

Publications (3)

Publication Number Publication Date
WO2002091809A2 WO2002091809A2 (fr) 2002-11-14
WO2002091809A8 WO2002091809A8 (fr) 2004-04-01
WO2002091809A3 true WO2002091809A3 (fr) 2004-12-23

Family

ID=8183890

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2002/001482 Ceased WO2002091809A2 (fr) 2001-05-03 2002-05-03 Procede et dispositif de generation d'un rideau de gaz active pour traitement de surface

Country Status (4)

Country Link
US (1) US7214413B2 (fr)
EP (1) EP1506699A2 (fr)
JP (1) JP4313046B2 (fr)
WO (1) WO2002091809A2 (fr)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080149267A1 (en) * 2006-12-26 2008-06-26 Taylor Made Golf Company, Inc. Methods for fabricating composite face plates for use in golf clubs and club-heads for same
US20060070677A1 (en) * 2004-09-28 2006-04-06 Tokai Rubber Industries, Ltd. Hose with sealing layer, direct-connect assembly including the same, and method of manufacturing the same
JP4865208B2 (ja) * 2004-11-12 2012-02-01 シャープ株式会社 大気圧プラズマ処理装置
EP1701598B1 (fr) * 2005-03-09 2010-05-05 Askair technologies AG Procédé de commande d'un dispositif à plasma à circulation directe
US20100252047A1 (en) * 2009-04-03 2010-10-07 Kirk Seth M Remote fluorination of fibrous filter webs
EP2549523A4 (fr) * 2010-03-16 2016-03-30 Mizuho Information & Res Inst Système, procédé et programme pour prédire une forme finie résultant d'un traitement par plasma
JP2013131670A (ja) * 2011-12-22 2013-07-04 Panasonic Corp 半導体基板の表面エッチング装置、およびそれを用いて表面に凹凸形状を形成する半導体基板の表面エッチング方法、並びに、ガスノズルユニット
EP2804450B1 (fr) * 2013-05-16 2022-05-04 Kjellberg-Stiftung Pièce isolante en plusieurs parties pour une torche à arc plasma, torche et agencements associés dotés de celle-ci et procédé associé
US10441349B2 (en) 2015-10-29 2019-10-15 Covidien Lp Non-stick coated electrosurgical instruments and method for manufacturing the same
US10368939B2 (en) 2015-10-29 2019-08-06 Covidien Lp Non-stick coated electrosurgical instruments and method for manufacturing the same
US10709497B2 (en) 2017-09-22 2020-07-14 Covidien Lp Electrosurgical tissue sealing device with non-stick coating
US11432869B2 (en) 2017-09-22 2022-09-06 Covidien Lp Method for coating electrosurgical tissue sealing device with non-stick coating
US11207124B2 (en) 2019-07-08 2021-12-28 Covidien Lp Electrosurgical system for use with non-stick coated electrodes
US11369427B2 (en) 2019-12-17 2022-06-28 Covidien Lp System and method of manufacturing non-stick coated electrodes
KR102862558B1 (ko) * 2020-12-24 2025-09-22 가부시키가이샤 티마이크 활성 가스 생성 장치
CN114567959A (zh) * 2022-02-15 2022-05-31 中科等离子体科技(合肥)有限公司 一种电弧等离子体发生器
US12458997B2 (en) 2022-11-21 2025-11-04 Covidien Lp Application of non-stick coatings onto jaws of electrosurgical tissue sealing instruments

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3786306A (en) * 1971-03-03 1974-01-15 Soudure Electr Procedes Arcos Plasma curtain of two or more plasmas
US4335160A (en) * 1978-11-21 1982-06-15 Neary Michael P Chemical process
WO1999046964A1 (fr) * 1998-03-10 1999-09-16 Ist Instant Surface Technology S.A. Procede de traitement de surface d'un materiau ou d'un objet et dispositif pour la mise en oeuvre du procede

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3786303A (en) * 1971-04-12 1974-01-15 Sperry Rand Corp Cathode ray tube dual mode horizontal deflection control amplifier
JP2801003B2 (ja) * 1987-06-26 1998-09-21 株式会社日立製作所 有機物除去装置
KR910016054A (ko) * 1990-02-23 1991-09-30 미다 가쓰시게 마이크로 전자 장치용 표면 처리 장치 및 그 방법
US6372298B1 (en) * 2000-07-21 2002-04-16 Ford Global Technologies, Inc. High deposition rate thermal spray using plasma transferred wire arc

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3786306A (en) * 1971-03-03 1974-01-15 Soudure Electr Procedes Arcos Plasma curtain of two or more plasmas
US4335160A (en) * 1978-11-21 1982-06-15 Neary Michael P Chemical process
WO1999046964A1 (fr) * 1998-03-10 1999-09-16 Ist Instant Surface Technology S.A. Procede de traitement de surface d'un materiau ou d'un objet et dispositif pour la mise en oeuvre du procede

Also Published As

Publication number Publication date
EP1506699A2 (fr) 2005-02-16
WO2002091809A2 (fr) 2002-11-14
US7214413B2 (en) 2007-05-08
JP4313046B2 (ja) 2009-08-12
JP2005505098A (ja) 2005-02-17
WO2002091809A8 (fr) 2004-04-01
US20040115872A1 (en) 2004-06-17

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