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WO2002063322A1 - Organe de deplacement d"elements, procede de commande d"organe de deplacement d"elements, procede d"inspection de circuits integres, manipulateur de circuits integres et dispositif d"inspection de circuits integres - Google Patents

Organe de deplacement d"elements, procede de commande d"organe de deplacement d"elements, procede d"inspection de circuits integres, manipulateur de circuits integres et dispositif d"inspection de circuits integres Download PDF

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Publication number
WO2002063322A1
WO2002063322A1 PCT/JP2002/000811 JP0200811W WO02063322A1 WO 2002063322 A1 WO2002063322 A1 WO 2002063322A1 JP 0200811 W JP0200811 W JP 0200811W WO 02063322 A1 WO02063322 A1 WO 02063322A1
Authority
WO
WIPO (PCT)
Prior art keywords
exchanger
member exchanger
inspector
handler
drive shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2002/000811
Other languages
English (en)
Japanese (ja)
Inventor
Hiroaki Fujimori
Masami Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to KR10-2004-7018862A priority Critical patent/KR100521956B1/ko
Priority to JP2002563014A priority patent/JPWO2002063322A1/ja
Priority to DE60216380T priority patent/DE60216380T2/de
Priority to EP02711273A priority patent/EP1286168B1/fr
Publication of WO2002063322A1 publication Critical patent/WO2002063322A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49004—Electrical device making including measuring or testing of device or component part

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)

Abstract

Organe de déplacement d"éléments qui comporte un arbre d"entraînement constitué de deux arbres. Un système (4) d"entraînement faisant tourner l"arbre d"entraînement est relié à une extrémité des arbres de l"arbre d"entraînement ; et des mécanismes (5, 6) de transfert, qui comportent des parties (5a, 6a) de retenue pour retenir des circuits intégrés, sont connectés à l"autre extrémité des arbres de l"arbre d"entraînement, ce qui permet d"actionner indépendamment les mécanismes (5, 6) de transfert.
PCT/JP2002/000811 2001-02-08 2002-01-31 Organe de deplacement d"elements, procede de commande d"organe de deplacement d"elements, procede d"inspection de circuits integres, manipulateur de circuits integres et dispositif d"inspection de circuits integres Ceased WO2002063322A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR10-2004-7018862A KR100521956B1 (ko) 2001-02-08 2002-01-31 집적회로 검사 방법, 집적회로 핸들러 및 집적회로 검사장치
JP2002563014A JPWO2002063322A1 (ja) 2001-02-08 2002-01-31 部材の受け渡し装置、部材の受け渡し装置の制御方法、ｉｃ検査方法、ｉｃハンドラ及びｉｃ検査装置
DE60216380T DE60216380T2 (de) 2001-02-08 2002-01-31 Glied-wechsler, verfahren zur steuerung des glied-wechslers, ic-untersuchungsverfahren, ic-handhabungsvorrichtung und ic-untersuchungsvorrichtung
EP02711273A EP1286168B1 (fr) 2001-02-08 2002-01-31 Organe de deplacement d'elements, procede de commande d'organe de deplacement d'elements, procede d'inspection de circuits integres, manipulateur de circuits integres et dispositif d'inspection de circuits integres

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001-32191 2001-02-08
JP2001032191 2001-02-08

Publications (1)

Publication Number Publication Date
WO2002063322A1 true WO2002063322A1 (fr) 2002-08-15

Family

ID=18896164

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/000811 Ceased WO2002063322A1 (fr) 2001-02-08 2002-01-31 Organe de deplacement d"elements, procede de commande d"organe de deplacement d"elements, procede d"inspection de circuits integres, manipulateur de circuits integres et dispositif d"inspection de circuits integres

Country Status (7)

Country Link
US (1) US6984973B2 (fr)
EP (1) EP1286168B1 (fr)
JP (1) JPWO2002063322A1 (fr)
KR (2) KR100521956B1 (fr)
DE (1) DE60216380T2 (fr)
TW (1) TW531480B (fr)
WO (1) WO2002063322A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014070918A (ja) * 2012-09-27 2014-04-21 Orion Mach Co Ltd 環境試験装置

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4539685B2 (ja) * 2007-06-22 2010-09-08 セイコーエプソン株式会社 部品搬送装置及びｉｃハンドラ
US8911477B2 (en) * 2007-10-23 2014-12-16 Roger P. Jackson Dynamic stabilization member with end plate support and cable core extension
JP2013053991A (ja) * 2011-09-06 2013-03-21 Seiko Epson Corp ハンドラー及び部品検査装置
JP6040530B2 (ja) * 2012-01-17 2016-12-07 セイコーエプソン株式会社 ハンドラーおよび検査装置
WO2014118924A1 (fr) * 2013-01-30 2014-08-07 日鍛バルブ株式会社 Équipement d'inspection de pièce à travailler
CN104860061A (zh) * 2015-06-07 2015-08-26 蒋海兵 一种自动输送系统及其使用方法
JP6517324B2 (ja) 2015-08-03 2019-05-22 日鍛バルブ株式会社 エンジンバルブの軸接部の探傷検査方法および装置
KR102312491B1 (ko) * 2015-08-11 2021-10-15 (주)테크윙 반도체소자 테스트용 핸들러
KR102432981B1 (ko) * 2017-11-03 2022-08-18 (주)테크윙 전자부품의 테스트를 지원하는 핸들러용 픽킹장치
CN108177976A (zh) * 2018-01-26 2018-06-19 苏州三屹晨光自动化科技有限公司 旋转取料机构及旋转取料机械手
TWI658979B (zh) * 2018-07-31 2019-05-11 卡德爾股份有限公司 管線取料裝置與方法
US12032017B2 (en) 2019-12-13 2024-07-09 Shandong Caiju Electronic Technology Co., Ltd. Chip detection device, chip detection system, and control method
CN114751195A (zh) * 2021-01-11 2022-07-15 北京小米移动软件有限公司 料材取放装置、载板、料材测试系统及料材测试方法
CN119608590B (zh) * 2025-02-11 2025-05-13 杭州长川科技股份有限公司 串测装置及测试分选机
CN120347799B (zh) * 2025-06-20 2025-10-03 磐吉奥科技股份有限公司 一种单一机械臂多工位协同作业装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11281708A (ja) * 1998-03-26 1999-10-15 Ando Electric Co Ltd デバイス測定機構
JPH11326451A (ja) * 1998-05-22 1999-11-26 Matsushita Electron Corp 電子部品の測定装置及びそれを用いた測定方法及び電子部品の搬送方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3333301A1 (de) * 1983-09-15 1985-03-28 Otto Hänsel GmbH, 3000 Hannover Vorrichtung zum einlegen von suesswarenstuecken, wie pralinen, bonbons, schokoladetabletten od. dgl. in schachteln oder verpackungseinsaetze
FR2573006B1 (fr) * 1984-11-13 1988-02-26 Dubuit Mach Machine a imprimer
US5330043A (en) * 1993-05-25 1994-07-19 Delta Design, Inc. Transfer apparatus and method for testing facility
JP3357237B2 (ja) * 1996-02-17 2002-12-16 株式会社リコー テスティングマシン
JPH10249757A (ja) * 1997-03-18 1998-09-22 Komatsu Ltd 搬送用ロボット
JPH11188671A (ja) * 1997-12-26 1999-07-13 Daihen Corp ２アーム方式の搬送用ロボット装置
ATE387285T1 (de) * 1998-10-19 2008-03-15 Yamazaki Mazak Corp Einheit zum halten eines werkstückes mittels vakuum und vakuumkopf

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11281708A (ja) * 1998-03-26 1999-10-15 Ando Electric Co Ltd デバイス測定機構
JPH11326451A (ja) * 1998-05-22 1999-11-26 Matsushita Electron Corp 電子部品の測定装置及びそれを用いた測定方法及び電子部品の搬送方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1286168A4 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014070918A (ja) * 2012-09-27 2014-04-21 Orion Mach Co Ltd 環境試験装置

Also Published As

Publication number Publication date
DE60216380D1 (de) 2007-01-11
US20020195313A1 (en) 2002-12-26
KR100530410B1 (ko) 2005-11-22
US6984973B2 (en) 2006-01-10
DE60216380T2 (de) 2007-09-20
EP1286168A4 (fr) 2005-08-10
EP1286168A1 (fr) 2003-02-26
KR20020087960A (ko) 2002-11-23
JPWO2002063322A1 (ja) 2004-06-10
KR20040111686A (ko) 2004-12-31
EP1286168B1 (fr) 2006-11-29
KR100521956B1 (ko) 2005-10-14
TW531480B (en) 2003-05-11

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