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WO2001012350A1 - Nettoyage de surfaces au moyen d'un plasma haute pression par decharge luminescente sans equilibre thermique - Google Patents

Nettoyage de surfaces au moyen d'un plasma haute pression par decharge luminescente sans equilibre thermique Download PDF

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Publication number
WO2001012350A1
WO2001012350A1 PCT/US2000/020377 US0020377W WO0112350A1 WO 2001012350 A1 WO2001012350 A1 WO 2001012350A1 US 0020377 W US0020377 W US 0020377W WO 0112350 A1 WO0112350 A1 WO 0112350A1
Authority
WO
WIPO (PCT)
Prior art keywords
workpiece
plasma
generated
electrodes
electric field
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2000/020377
Other languages
English (en)
Inventor
John Reece Roth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Tennessee Research Foundation
Original Assignee
University of Tennessee Research Foundation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University of Tennessee Research Foundation filed Critical University of Tennessee Research Foundation
Priority to AU64953/00A priority Critical patent/AU6495300A/en
Publication of WO2001012350A1 publication Critical patent/WO2001012350A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61L—METHODS OR APPARATUS FOR STERILISING MATERIALS OR OBJECTS IN GENERAL; DISINFECTION, STERILISATION OR DEODORISATION OF AIR; CHEMICAL ASPECTS OF BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES; MATERIALS FOR BANDAGES, DRESSINGS, ABSORBENT PADS OR SURGICAL ARTICLES
    • A61L2/00—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor
    • A61L2/02—Methods or apparatus for disinfecting or sterilising materials or objects other than foodstuffs or contact lenses; Accessories therefor using physical phenomena
    • A61L2/14—Plasma, i.e. ionised gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents

Definitions

  • This gradation in the binding energy of the adsorbed monolayers makes it relatively easy to remove the outermost monolayers by detergents, solvents, acid baths, or other chemical means.
  • chemical means are not sufficiently energetic to remove the last few, and most tightly bound monolayers.
  • These remaining monolayers are often machining oils, in the case of metals, and plasticizers, in the case of polymers or plastics. Only a few such monolayers are required to adversely affect the surface free energy, the water droplet contact angle, and the wettability of the surface. The usual result of the presence of such monolayers is to reduce the wettability and adhesion of other materials to the surface of the workpiece.
  • Figures 6a and 6b are elevational views comparing the contact angle and wettability of conventionally cleaned and plasma cleaned mild steel surfaces.
  • the duration of workpiece exposure is related to changes in, and may be adjusted by changing, the plasma density (power density).
  • a given cleaning effect water contact angle
  • a given cleaning effect water contact angle
  • a higher power density plasma on the order of 100 milliwatts/cm 1
  • This will also depend on the initial state of cleanliness of the surface, with the dirtier surfaces taking somewhat longer to clean than those surfaces that are less dirty.
  • the applied voltage will be less critical than the plasma power density.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Epidemiology (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

L'invention porte sur un appareil permettant le nettoyage au plasma d'une pièce d'usinage (26). Cet appareil comprend des électrodes (11, 12) métalliques, parallèles, appariées, utilisées pour générer le plasma afin de nettoyer la pièce. Les électrodes sont chacune connectées aux phases opposées de la sortie d'une source (5) d'énergie haute fréquence. Un réseau (6) d'accord approprié permet d'accorder la charge d'impédance des électrodes. La région contenant les électrodes est entourée d'une enceinte (27) adaptée pour renfermer une atmosphère de travail. Un orifice d'admission (28) est prévu pour la réception du gaz de travail, et un orifice d'évacuation (29) correspondant est prévu pour évacuer le gaz de travail.
PCT/US2000/020377 1999-08-16 2000-07-27 Nettoyage de surfaces au moyen d'un plasma haute pression par decharge luminescente sans equilibre thermique Ceased WO2001012350A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU64953/00A AU6495300A (en) 1999-08-16 2000-07-27 Cleaning surfaces with a thermal-non-equilibrium glow discharge plasma at high pressure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US37469099A 1999-08-16 1999-08-16
US09/374,690 1999-08-16

Publications (1)

Publication Number Publication Date
WO2001012350A1 true WO2001012350A1 (fr) 2001-02-22

Family

ID=23477827

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/020377 Ceased WO2001012350A1 (fr) 1999-08-16 2000-07-27 Nettoyage de surfaces au moyen d'un plasma haute pression par decharge luminescente sans equilibre thermique

Country Status (2)

Country Link
AU (1) AU6495300A (fr)
WO (1) WO2001012350A1 (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1921655A1 (fr) * 2006-11-10 2008-05-14 Dublin City University Source à plasma avec une pluralité d'électrodes déphasées
EP2075353A1 (fr) * 2007-12-17 2009-07-01 Technische Universiteit Delft Procédé pour le traitement d'une zone de surface en acier
EP2154704A1 (fr) * 2005-05-11 2010-02-17 Dublin City University Source plasma pour une pluralité d'électrodes déphasées
WO2011110343A1 (fr) * 2010-03-10 2011-09-15 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V Appareil, en particulier, appareil de cuisine ou table de laboratoire et dispositif désodorisant
EP2387907A1 (fr) * 2010-05-19 2011-11-23 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Appareil, particulièrement un appareil de cuisine ou table de laboratoire
WO2011144344A3 (fr) * 2010-05-19 2012-02-16 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Appareil destiné à au moins partiellement stériliser une surface contaminée
US20130149472A1 (en) * 2008-12-11 2013-06-13 Ford Global Technologies, Llc Surface Treatment For Polymeric Part Adhesion
WO2013090340A1 (fr) * 2011-12-12 2013-06-20 Applied Quantum Energy Llc Appareil et procédés de stérilisation de poudre par plasma
CN106001004A (zh) * 2016-07-08 2016-10-12 北京睿昱达科技有限公司 一种辉光放电等离子体光伏板清洁装置及光伏板清洁方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4465547A (en) * 1983-09-29 1984-08-14 General Electric Company Method of bonding a poly (vinylidene fluoride) solid to a solid substrate
US4555303A (en) * 1984-10-02 1985-11-26 Motorola, Inc. Oxidation of material in high pressure oxygen plasma
US4804431A (en) * 1987-11-03 1989-02-14 Aaron Ribner Microwave plasma etching machine and method of etching
US5162633A (en) * 1988-06-29 1992-11-10 Hitachi, Ltd. Microwave-excited plasma processing apparatus
US5272417A (en) * 1989-05-12 1993-12-21 Tadahiro Ohmi Device for plasma process
US5403453A (en) * 1993-05-28 1995-04-04 The University Of Tennessee Research Corporation Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
US5414324A (en) * 1993-05-28 1995-05-09 The University Of Tennessee Research Corporation One atmosphere, uniform glow discharge plasma
US5938854A (en) * 1993-05-28 1999-08-17 The University Of Tennessee Research Corporation Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4465547A (en) * 1983-09-29 1984-08-14 General Electric Company Method of bonding a poly (vinylidene fluoride) solid to a solid substrate
US4555303A (en) * 1984-10-02 1985-11-26 Motorola, Inc. Oxidation of material in high pressure oxygen plasma
US4804431A (en) * 1987-11-03 1989-02-14 Aaron Ribner Microwave plasma etching machine and method of etching
US5162633A (en) * 1988-06-29 1992-11-10 Hitachi, Ltd. Microwave-excited plasma processing apparatus
US5272417A (en) * 1989-05-12 1993-12-21 Tadahiro Ohmi Device for plasma process
US5403453A (en) * 1993-05-28 1995-04-04 The University Of Tennessee Research Corporation Method and apparatus for glow discharge plasma treatment of polymer materials at atmospheric pressure
US5414324A (en) * 1993-05-28 1995-05-09 The University Of Tennessee Research Corporation One atmosphere, uniform glow discharge plasma
US5938854A (en) * 1993-05-28 1999-08-17 The University Of Tennessee Research Corporation Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2154704A1 (fr) * 2005-05-11 2010-02-17 Dublin City University Source plasma pour une pluralité d'électrodes déphasées
US7886690B2 (en) 2005-05-11 2011-02-15 Dublin City University Plasma source
WO2008055993A1 (fr) * 2006-11-10 2008-05-15 Dublin City University Source de plasma avec pluralité d'électrodes déphasées
EP1921655A1 (fr) * 2006-11-10 2008-05-14 Dublin City University Source à plasma avec une pluralité d'électrodes déphasées
EP2075353A1 (fr) * 2007-12-17 2009-07-01 Technische Universiteit Delft Procédé pour le traitement d'une zone de surface en acier
US20130149472A1 (en) * 2008-12-11 2013-06-13 Ford Global Technologies, Llc Surface Treatment For Polymeric Part Adhesion
WO2011110343A1 (fr) * 2010-03-10 2011-09-15 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V Appareil, en particulier, appareil de cuisine ou table de laboratoire et dispositif désodorisant
EP2387907A1 (fr) * 2010-05-19 2011-11-23 Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. Appareil, particulièrement un appareil de cuisine ou table de laboratoire
WO2011144344A3 (fr) * 2010-05-19 2012-02-16 Max-Planck-Gesellschaft Zur Foerderung Der Wissenschaften E.V. Appareil destiné à au moins partiellement stériliser une surface contaminée
WO2013090340A1 (fr) * 2011-12-12 2013-06-20 Applied Quantum Energy Llc Appareil et procédés de stérilisation de poudre par plasma
US8771595B2 (en) 2011-12-12 2014-07-08 Applied Quantum Energy Llc Plasma powder sterilization apparatus and methods
US8871145B2 (en) 2011-12-12 2014-10-28 Applied Quantum Energy Llc Plasma powder sterilization apparatus and methods
US9694095B2 (en) 2011-12-12 2017-07-04 Applied Quantum Energy Llc Plasma powder sterilization apparatus and methods
CN106001004A (zh) * 2016-07-08 2016-10-12 北京睿昱达科技有限公司 一种辉光放电等离子体光伏板清洁装置及光伏板清洁方法

Also Published As

Publication number Publication date
AU6495300A (en) 2001-03-13

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