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WO2001009662A3 - Microscopie interferometrique confocale a balayage a champ proche - Google Patents

Microscopie interferometrique confocale a balayage a champ proche Download PDF

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Publication number
WO2001009662A3
WO2001009662A3 PCT/US2000/021090 US0021090W WO0109662A3 WO 2001009662 A3 WO2001009662 A3 WO 2001009662A3 US 0021090 W US0021090 W US 0021090W WO 0109662 A3 WO0109662 A3 WO 0109662A3
Authority
WO
WIPO (PCT)
Prior art keywords
field
mask
confocal microscopy
measurement
field confocal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2000/021090
Other languages
English (en)
Other versions
WO2001009662A2 (fr
Inventor
Henry Allen Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zetetic Institute
Original Assignee
Zetetic Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zetetic Institute filed Critical Zetetic Institute
Priority to EP00953800A priority Critical patent/EP1203257B1/fr
Priority to DE60016761T priority patent/DE60016761T2/de
Priority to AT00953800T priority patent/ATE285081T1/de
Priority to JP2001514618A priority patent/JP2003506741A/ja
Publication of WO2001009662A2 publication Critical patent/WO2001009662A2/fr
Publication of WO2001009662A3 publication Critical patent/WO2001009662A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/18—SNOM [Scanning Near-Field Optical Microscopy] or apparatus therefor, e.g. SNOM probes
    • G01Q60/22—Probes, their manufacture, or their related instrumentation, e.g. holders
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0068—Optical details of the image generation arrangements using polarisation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10534—Heads for recording by magnetising, demagnetising or transfer of magnetisation, by radiation, e.g. for thermomagnetic recording
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
    • G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
    • G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
    • G11B11/10532—Heads
    • G11B11/10541—Heads for reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/0045—Recording
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/004—Recording, reproducing or erasing methods; Read, write or erase circuits therefor
    • G11B7/005—Reproducing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1356—Double or multiple prisms, i.e. having two or more prisms in cooperation
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1372—Lenses
    • G11B7/1374—Objective lenses
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
    • G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
    • G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
    • G11B7/1387—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector using the near-field effect

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Microscoopes, Condenser (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Optical Head (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

La présente invention concerne un système de microscopie optique interférométrique à champ proche, qui comprend: un diviseur de faisceaux disposé de façon qu'il divise un faisceau d'entrée en un faisceau de mesure et un faisceau de référence; un masque disposé de façon qu'il reçoit le faisceau de mesure, le masque comprenant au moins une ouverture d'une dimension inférieure à la longueur d'onde d'un faisceau d'entrée, l'ouverture de masque étant configurée pour coupler au moins une partie du faisceau de mesure avec un échantillon de manière à définir un faisceau sonde à champ proche, l'échantillon interagissant avec le faisceau sonde à champ proche pour définir un faisceau signal à champ proche; un détecteur comprenant un élément sensible à l'énergie optique; un dispositif optique disposé de façon qu'il amène au moins une partie du faisceau de référence et au moins une partie du faisceau signal à champ proche à se croiser à l'emplacement de l'élément détecteur.
PCT/US2000/021090 1999-08-02 2000-08-02 Microscopie interferometrique confocale a balayage a champ proche Ceased WO2001009662A2 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP00953800A EP1203257B1 (fr) 1999-08-02 2000-08-02 Microscopie interferometrique confocale a balayage a champ proche
DE60016761T DE60016761T2 (de) 1999-08-02 2000-08-02 Interferometrische konfokale nahfeld-abtastmikroskopie
AT00953800T ATE285081T1 (de) 1999-08-02 2000-08-02 Interferometrische konfokale nahfeld- abtastmikroskopie
JP2001514618A JP2003506741A (ja) 1999-08-02 2000-08-02 走査干渉計近視野共焦点顕微鏡

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14719699P 1999-08-02 1999-08-02
US60/147,196 1999-08-02

Publications (2)

Publication Number Publication Date
WO2001009662A2 WO2001009662A2 (fr) 2001-02-08
WO2001009662A3 true WO2001009662A3 (fr) 2001-08-02

Family

ID=22520628

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/021090 Ceased WO2001009662A2 (fr) 1999-08-02 2000-08-02 Microscopie interferometrique confocale a balayage a champ proche

Country Status (2)

Country Link
JP (1) JP2003506741A (fr)
WO (1) WO2001009662A2 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1303780A2 (fr) * 2000-07-27 2003-04-23 Zetetic Institute Reseaux a sources multiples pour microscopie a champ proche
NL1024404C2 (nl) * 2003-09-30 2005-03-31 Univ Delft Tech Optische microscoop en werkwijze voor het vormen van een optisch beeld.
DE102006028409A1 (de) * 2006-06-19 2007-12-20 Polytec Gmbh Rastermikroskop zur optischen Vermessung eines Objekts
NL2007177A (en) * 2010-09-13 2012-03-14 Asml Netherlands Bv Alignment measurement system, lithographic apparatus, and a method to determine alignment of in a lithographic apparatus.
US8913237B2 (en) * 2012-06-26 2014-12-16 Kla-Tencor Corporation Device-like scatterometry overlay targets
US9189705B2 (en) * 2013-08-08 2015-11-17 JSMSW Technology LLC Phase-controlled model-based overlay measurement systems and methods
CN115356897B (zh) * 2022-08-19 2024-07-02 华中科技大学 一种三维图案化掩模或晶圆散射近场的快速计算方法
CN117608168B (zh) * 2023-07-24 2024-07-02 吉通科技（广州）有限公司 改进的一种提高光刻机分辨率的方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659429A (en) * 1983-08-03 1987-04-21 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
US5371588A (en) * 1993-11-10 1994-12-06 University Of Maryland, College Park Surface profile and material mapper using a driver to displace the sample in X-Y-Z directions
EP0757271A2 (fr) * 1995-08-04 1997-02-05 International Business Machines Corporation Appareil interférométrique à champ proche et procédé
US5602820A (en) * 1995-08-24 1997-02-11 International Business Machines Corporation Method and apparatus for mass data storage
US5760901A (en) * 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4659429A (en) * 1983-08-03 1987-04-21 Cornell Research Foundation, Inc. Method and apparatus for production and use of nanometer scale light beams
US5371588A (en) * 1993-11-10 1994-12-06 University Of Maryland, College Park Surface profile and material mapper using a driver to displace the sample in X-Y-Z directions
EP0757271A2 (fr) * 1995-08-04 1997-02-05 International Business Machines Corporation Appareil interférométrique à champ proche et procédé
US5602820A (en) * 1995-08-24 1997-02-11 International Business Machines Corporation Method and apparatus for mass data storage
US5760901A (en) * 1997-01-28 1998-06-02 Zetetic Institute Method and apparatus for confocal interference microscopy with background amplitude reduction and compensation

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
"PHASE CONTRAST AND AMPLITUDE PSEUDOHETERODYNE INTERFERENCE NEAR FIELD SCANNING OPTICAL MICROSCOPY", APPLIED PHYSICS LETTERS,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 62, no. 10, 8 March 1993 (1993-03-08), pages 1044 - 1046, XP000345970, ISSN: 0003-6951 *
BAUER A ET AL: "Magnetic Domain Imaging with a Scanning Near-Field Optical Microscope using a Modified Sagnac Interferometer", JOURNAL OF MICROSCOPY., vol. 194, May 1999 (1999-05-01) - June 1999 (1999-06-01), OXFORD, GB, pages 507 - 511, XP000978165, ISSN: 0022-2720 *
COURJON D ET AL: "New Optical Near Field Developments: Some Perspectives in Interferometry", ULTRAMICROSCOPY, vol. 61, 1995, AMSTERDAM, NL, pages 117 - 125, XP000978339 *
PILEVAR S ET AL: "Reflection Near Field Scanning Optical Microscopy: An Interferometric Approach", ULTRAMICROSCOPY, vol. 61, 1995, AMSTERDAM, NL, pages 233 - 236, XP000978294 *
POHL D W ET AL: "NEAR-FIELD OPTICS: LIGHT FOR THE WORLD OF NANO", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 12, no. 3, 1 May 1994 (1994-05-01), pages 1441 - 1446, XP000464719, ISSN: 0734-211X *

Also Published As

Publication number Publication date
JP2003506741A (ja) 2003-02-18
WO2001009662A2 (fr) 2001-02-08

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