WO2001059487A2

WO2001059487A2 - Waveguide assembly

Info

Publication number: WO2001059487A2
Application number: PCT/US2001/004591
Authority: WO
Inventors: Constance Chang-Hasnain; Mitch Jansen; Robert Stone
Original assignee: Bandwidth 9 Inc
Current assignee: Bandwidth 9 Inc
Priority date: 2000-02-11
Filing date: 2001-02-12
Publication date: 2001-08-16
Anticipated expiration: 2002-08-11
Also published as: WO2001059487A3

Abstract

A waveguide assembly with a vcsel array and a waveguide array with at least one optoelectrical device coupled to the waveguide array is provided. An improved waveguide assembly with a vcsel array and a waveguide array with at least one integrated optoelectrical device is also provided. A laser assembly includes a first mount, a second mount and a vesel array. The vesel array has individual vesel lasers that each have an output facet and produce an output beam. A waveguide array is integrated with at least one optoelectrical device. The waveguide array has a proximal end, a distal end, a first face, an opposing second face and a first plurality of individual waveguides. The waveguide array is sandwiched between the first and second mounts at the first and second faces. The vesel array is positioned adjacent to the waveguide proximal end. Each of individual vesel laser is optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the waveguide array.

Description

WAVEGUIDE ASSEMBLY

BACKGROUND OF THE INVENTIONS

Field of the Invention

This invention relates generally to Vcsel arrays, and more particularly to Vcsel arrays and waveguide arrays.

Description of Related Art

Within recent years the number of electronic applications that employ optical devices has been rapidly increasing. Typically, optical fibers carry light signals that are coupled to a variety of optical d, such as lasers, amplifiers, modulators, splitters, multiplexers/demultiplexers, routers, switches and receivers. As is well known, the use of optical fibers and devices leads to higher data through puts and increased communication channel bandwidths. One drawback in employing optical fibers and optical devices is the need for reliable and accurate coupling between a fiber and an optical device. Typically, the diameter of a single mode fiber is approximately about 7 microns.

The diameter of a waveguide employed in a semiconductor optical device is about 1.5 microns. Therefore, the coupling efficiency is small. One way to overcome coupling mismatch is to employ a fiber lens at the fiber end. Typically, a fiber lens is formed by etching the tip of the fiber end to define a convex shaped portion that acts as a lens.

However, the process of forming a fiber lens is time consuming and requires an alignment accuracy in the order of 1/10^th of micro resulting in a substantially costly optical coupling.

Another drawback in employing optical fibers and optical devices is optical index mismatching. Typically, the refractive index of a fiber material which is about 1.5, is different from the refractive index of a semiconductor optical device which is about 3.3. Therefore light traveling from a fiber to an optical device, or vice versa, experiences optical reflections. Conventional coupling systems employ anti-reflective coating material to provide a more suitable optical matching between the medium that light travels through. In the case of fiber to optical device coupling, because the optical fiber is made of glass, an air gap between the fiber end and the semiconductor surface is provided so that the fiber end would not damage the surface of the semiconductor optical device. Thus, the medium traveled by light comprises optical fiber to air and air to a semiconductor optical device. In order to alleviate reflection, it is necessary to treat the fiber end with an antireflective material that provides appropriate matching between glass and air. Furthermore, in order to alleviate reflection, between air and the semiconductor material, it is necessary to treat the semiconductor surface with an antireflective material that provides appropriate optical matching between air and the semiconductor. The process of treating anti-reflective materials on both optical fiber and semiconductor device is time consuming and leads to additional cost for coupling optical fibers to semiconductor optical devices. The discovery that ultra-high purity glass fibers are efficient and effective transmitters of light signals over long distances has stimulated a broad and sophisticated technology. The glass fiber waveguide itself, as a transmission medium, has become a standard commodity, in much the same way as copper wires became in an earlier generation, but the methods and systems for interconnecting fiber waveguides continue to evolve. Glass fiber interconnection techniques are significantly more demanding than copper wire connectors due in part to the requirement that glass fibers must be connected end to end, and connected with a precision sufficient to exactly align very small fiber waveguide cores to within a few microns, and often within a fraction of a micron. Because fiber waveguides are capable of carrying enormous quantities of information, relative to copper wires, fiber waveguide cables to date typically require only a relatively few number of fibers to match or even exceed the capacity of large bundles of wires in copper cables. However, with the increasing capacity demanded by current and future data and multimedia transmission networks, the number of fibers in a single transmission cable continues to grow. The end to end high precision connection requirement of fiber waveguides precludes simply bundling of large numbers of individual fibers in a cable as was the practice with copper wires. Instead the multiple fibers are organized in a high precision, fixed, spatial relation. A common approach for such arrays are ribbon cables in which a plurality of fibers are organized and molded side by side in a plastic ribbon. Connectors used to interconnect these ribbons are typically made of metal or silicon plates in which high precision v-grooves are etched with high precision parallel grooves. The fibers are placed side by side in one such grooved bottom plate and another mating v-groove plate is placed over the top of the linear array. The top and bottom plates of the connector are assembled together with clamps or an adhesive.

While ribbon connectors are capable of very high transmission capacities there is a need for even greater capacity. An approach for addressing this is to stack fiber waveguide ribbons. The interconnection for such stacked arrays requires a similarly stacked connector, which presents new problems in precisely aligning the fiber waveguides in the added or stacking dimension. It has also been recognized that the use of silicon or metal plates in v-groove connectors contributes to a relatively high cost connector. Silicon was originally the material of choice since v-grooves can be formed in silicon with high precision and reliability using crystallographic etch techniques. Significant cost reductions have been proposed by substituting relatively inexpensive plastic materials for silicon. However, there is no corresponding crystallographic etch mechanism if a plastic material is used. The proposals anticipated that v-groove connector parts could be molded or extruded using dimensionally stable plastic materials, and these would provide adequate precision for the connector. These proposals have been successfully implemented, but precision in the alignment of fibers remains an issue, especially as the size and complexity of the connectors grows.

Thus, there is a need for an improved coupling system that provides a reliable, accurate and expedient coupling between optical fibers and semiconductor optical devices. SUMMARY OF THE INVENTION

Accordingly, an object of the present invention is to provide an improved waveguide assembly.

Another object of the present invention is to provide an improved waveguide assembly that includes a vcsel array and a waveguide array.

Yet another object of the present invention is to provide an improved waveguide assembly that includes a vcsel array, a waveguide and at least one optoelectrical device coupled to the waveguide array.

Still another object of the present invention is to provide an improved waveguide assembly that includes a vcsel array and a waveguide array with at least one integrated optoelectrical device.

These and other objects of the present invention are achieved in a waveguide assembly with a vcsel array and a waveguide array. The vcsel array includes individual vcsel lasers that each have an output facet and produce an output beam. The waveguide array includes a proximal end, a distal end and a first plurality of individual waveguides. Each of individual vcsel laser being is optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the waveguide array. At least one optoelectrical device is coupled to the waveguide array. In another embodiment of the present invention, a waveguide assembly includes a vcsel array with individual vcsel lasers that each have an output facet and produce an output beam. A waveguide array is integrated with at least one optoelectrical device. The waveguide array has a proximal end, a distal end and a first plurality of individual waveguides. Each individual vcsel laser is optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the waveguide array.

In yet another embodiment of the present invention, a laser assembly includes a first mount and a second mount. A vcsel array has individual vcsel lasers with output facets. Each individual vcsel laser produces an output beam. A waveguide array has a proximal end, a distal end, a first face, an opposing second face and a first plurality of individual waveguides. The waveguide array is sandwiched between the first and second mounts at the first and second faces. The vcsel array is positioned adjacent to the waveguide proximal end. Each individual vcsel laser is optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the waveguide array.

In still another embodiment of the present invention, a laser assembly includes a first mount, a second mount and a vcsel array. The vcsel array has individual vcsel lasers that each have an output facet and produce an output beam. A waveguide array is integrated with at least one optoelectrical device. The waveguide array has a proximal end, a distal end, a first face, an opposing second face and a first plurality of individual waveguides. The waveguide array is sandwiched between the first and second mounts at the first and second faces.

The vcsel array is positioned adjacent to the waveguide proximal end. Each of individual vcsel laser is optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the waveguide array.

BRIEF DESCRIPTION OF THE FIGURES Figure 1 (a) is a schematic diagram of one embodiment of a waveguide assembly of the present invention with a vcsel array coupled to a waveguide array.

Figure 1(b) is a schematic diagram of one embodiment of a waveguide assembly of the present invention with a vcsel array coupled to an arrayed waveguide grating.

Figure 2 is a perspective view of a waveguide array, suitable for use with the waveguide assembly of the present invention, that includes a first plurality of individual waveguides, coupled to first coupling waveguide, and a second portion of individual waveguides from the first plurality of waveguides coupled to a second coupling waveguide.

Figure 3 is a perspective view of a waveguide array, suitable for use with the waveguide assembly of the present invention, that includes a first plurality of individual waveguides with one of the individual waveguides coupled to a second plurality of waveguides in the waveguide array. Figure 4 is a perspective view of a waveguide array similar to the one illustrated in Figure 3 that also includes a second individual waveguide of first plurality of waveguides coupled to a first waveguide in the second plurality of waveguides.

Figure 5 is a perspective view of the Figure 1(a) waveguide assembly that also includes a lens array positioned between the vcsel array and the waveguide array.

Figure 6 is a perspective view of the Figure 1(a) waveguide assembly where a proximal face of the waveguide array is angled.

Figure 7 is a schematic diagram of one embodiment of a waveguide assembly of the present invention with a vcsel array coupled to a waveguide array where the waveguide array includes a plurality of waveguides that extend from one end to the other without a coupling waveguide.

Figure 8 is a schematic diagram of the Figure 7 waveguide assembly that includes a lens array.

Figure 9 is a schematic diagram of the Figure 7 waveguide assembly with an angled proximal face.

Figure 10 is a perspective view of cantilever vcsel array that can be used with the present invention.

Figure 11 is an exploded diagram illustrating one embodiment of the present invention with the waveguide assembly positioned between two mounts. Figure 12 is a non-exploded, perspective view of the Figure 11 waveguide assembly.

Figure 13 is a perspective view of the Figure 11 waveguide assembly with wirebonds that are coupled to the vcsel array.

DETAILED DESCRIPTION Referring now to Figure 1(a), a waveguide assembly 10 includes a vcsel array 12 and a waveguide array 14. Vcsel array 12 has any number of individual vcsel lasers 16 that each have an output facet and produce an output beam. Waveguide array 14 includes a proximal ςnd 18, a distal end 20 and a first plurality of individual waveguides 22. Each individual vcsel laser 16 is optically coupled to an individual waveguide 22 at proximal end 18 of waveguide array 14. Preferably, waveguide array 14 is sizes so that the optical wave remains guided and the optical power does not become dispersed.

At least one optoelectrical device 24 is coupled to waveguide array 14. Alternatively, optoelectrical device 24 can be included as an integral part of waveguide array 14. Vcsel array 12 can be formed on a single substrate.

Additionally, vcsel array 12 and waveguide array 14 can be positioned on a single support member 25. Suitable support members 25 include but are not limited to, ceramic, plastic, metal and semiconductor with or without alignment aids such as marks or steps. Vcsel array 12 can be butt-coupled to waveguide array 14. Vcsel array 12 can include any number of individual Vcsel lasers 16.

In one embodiment, Vcsel array 12 includes 32 individual Vcsel lasers 16.

Vcsel array 12 can be made by methods well known in the art as disclosed in Vertical-Cavity Surface Emission Lasers, by C. Wilmsen, H. Jenkins, and L. Coldren. Optoelectrical device 24 can be one or more of a modulator, a detector, an attenuator, a filter, a circulator, polarization rotator, isolator or switch, and combinations thereof. A modulator allows external control of the light intensity, phase or polarization of light traversing through the modulator. A detector returns an electrical signal that is proportional to the intensity of the light. A filter optically transmits only a given range of wavelengths. A circulator can have at least three ports, and can have more than three. A polarization rotator rotates the axis of polarization of light traversing waveguide 14 by a specified amount. An isolator permits light to travel through it in only one direction and is essentially a one-way door. A switch re-directs input light in a single waveguide to one or many output waveguides. A plurality of individual optoelectrical devices 24 can be included. Each of an individual optoelectrical device 24 can be coupled to an individual waveguide. Additionally, each individual waveguide can be coupled to a different type of optoelectrical device 24. At least two waveguides of first plurality of waveguides 22 are coupled to a first coupling waveguide 26 in waveguide array 14. First coupling waveguide 26 can extend to distal end 20 of waveguide array 14. As illustrated in Figure 1(b), an arrayed waveguide grating 15 can be substituted for waveguide array 14. Examples of suitable arrayed waveguide gratings are disclosed in U.S. Patents No. 5,930,439 and 5,243,672, both incorporated herein by reference. Waveguide array 14 and waveguide grating 15 can be made of a variety of different materials including but not limited to silica, InP, GaAs, Si and the like.

In one embodiment, illustrated in Figure 2, a first portion 28 of first plurality of waveguides 22 is coupled to first coupling waveguide 26 in waveguide array 14. A second portion 30 of first plurality of waveguides 22 is coupled to a second coupling waveguide 32 in waveguide array 14. First and second coupling waveguides 28 and 30 can extend to distal end 20 of waveguide array 14.

In another embodiment, illustrated in Figure 3, a first individual waveguide 34 of the first plurality of waveguides 22 is coupled to a second plurality of waveguides 36 in waveguide array 14.

Referring to Figure 4, a second individual waveguide 38 of first plurality of waveguides 22 is coupled to a first waveguide 40 in the second plurality of waveguides 36.

As illustrated in Figure 5, a lens array 42 can be positioned between vcsel array 12 and waveguide array 14. Lens array 42 can include a lens for each individual vcsel 16 in vcsel array 12. Lens array 12 can be physically attached to the vcsel array by a variety of different methods, including but not limited to epoxy, soldering, welding and the like. Lens array 42 can be comprised of ball lenses, fresnel lenses and the like. Additionally, output facets of individual vcsel lasers 16 can be shaped or etched to form a lens. Each lens of lens array 42 can be sized to be smaller than a center to center spacing of vcsel array 12.

The output facets of vcsel array 12 can be positioned adjacent to proximal end 18 of waveguide array 14. As shown in Figure 5, each output beam of an individual vcsel 22 of vcsel array 14 can have a longitudinal axis that is optically aligned with a longitudinal axis of individual waveguides of first plurality of waveguides 22. The output facets of vcsel array 12 can be planar semiconductor-air interfaces but also dielectric-air. Output facets of individual vcsel lasers 16 need not be planar when they are formed to included lenses. When lenses are formed as an integral part of individual vcsel lasers 16 the geometry can be curved or patterned to focus the light. In another embodiment, illustrated in Figure 6, proximal face 18 of waveguide array 14 can have an angled face. Distal end 20 of waveguide array 14 can also have an angled face. Angled faces are used to achieve total internal reflection such that the direction of propagation of the beam from Vcsel array 12 after reflection is co-linear with waveguide array 14. Proximal and distal ends preferably are angled in between 0 and 90 degrees, preferably about

45 degrees. In Figure 6, each output beam of an individual vcsel 16 of vcsel array 12 has a longitudinal axis that is non-parallel to the longitudinal axis of individual waveguide of first plurality of waveguides 22. In one embodiment, the longitudinal of individual vcsels 16 is perpendicular to the longitudinal axis of individual waveguide of first plurality of waveguides 22.

As illustrated in Figures 7, 8 and 9, first plurality of waveguides 22 can extend from proximal end 18 to distal end 20 without first coupling waveguide 26.

In one embodiment of the invention, illustrated in Figure 10, each vcsel laser 46 is a cantilever apparatus that uses an electrostatic force that pulls on a cantilever arm. The mechanical deflection resulting from this electrostatic force is used to change the length of a Fabry-Perot microcavity of vcsel laser 46 and consequently to the resonance wavelength.

Vcsel laser 46 has a cantilever structure consisting of a base 48, an arm 50 and an active head 52. The bulk of cantilever structure may consist of a plurality of reflective layers 54 which form a distributed Bragg reflector (DBR). Layers 54 can be formed of different materials including but not limited to AlGaAs. Different compositional ratios are used for individual layers 54, e.g., Al_.09Ga_{. 1}As/Al ₅₈ Ga_.42As. The topmost layer of layers 54 is heavily doped to ensure good contact with an electrical tuning contact 56 deposited on top of the cantilever structure. The actual number of layers 54 may vary from 1 to 20 and more, depending on the desired reflectivity of the DBR. Furthermore, any suitable reflecting material other than AlGaAs may be used to produce layers 54. Active head 52 is made of layers. However, arm 50 and base 48 do not need to be made of layers.

Base 48 can have a variety of different geometric configurations and large enough to maintain dimensional stability of the cantilever structure. The width of arm 50 ranges typically from 2 to 8 microns while its length is 25 to 100 mu m or more. The stiffness of arm 50 increases as its length decreases. Consequently, shorter cantilevers require greater forces to achieve bending but shorter cantilevers also resonate at a higher frequency. The preferred diameter of active head 52 falls between 5 and 40 microns. Other dimensions are suitable.

Electrical tuning contact 56 resides on all or only a portion of a top of the cantilever structure. Electrical tuning contact 56 be sufficiently large to allow application of a first tuning voltage V_t|. A support 58 rests on a substrate 60 across which a voltage can be sustained. Substrate 60 can include a second DBR 50. Support 58 can be made of the same material as layers 54. A voltage difference between layers 54 and substrate 60 causes a deflection of arm 50 towards substrate 60. If layers 54 and substrate 60 are oppositely doped, then a reverse bias voltage can be established between them. Substrate 60 is sufficiently thick to provide mechanical stability to the entire cantilever apparatus. Inside substrate 60 and directly under active head 52 are one or more sets of reflective layers with each set forming a second DBR. A more complete description of the cantilever apparatus is disclosed in U.S. Patent No. 5,629,951 , incorporated herein by reference.

In another embodiment, illustrated in Figures 11-13, the present invention is a laser assembly 62 with a first mount 64 and a second mount 66. First and second mounts 64 and 66 can be Si/glass waveguide combiners. Waveguide array 14 is sandwiched between first and second mounts 62 and 64 at a first face 68 and a second face 70 of waveguide array 14. Vcsel array 12 is positioned adjacent to waveguide proximal end 18. Individual vcsel lasers 16 are each optically coupled to an individual waveguides of the first plurality of waveguides 22 at waveguide proximal end 18. Mounts 62 and 64 include pads 72 and 74 which can be ceramic and the like. Pads 72 and 74 can be coupled by wire bonding and the like. It will be appreciated that in every embodiment illustrated in

Figures 1(a), 2 through 9, and 11 through 13, arrayed waveguide grating 15 can be substituted for waveguide array 14.

The foregoing description of a preferred embodiment of the invention has been presented for purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations will be apparent to practitioners skilled in this art. It is intended that the scope of the invention be defined by the following claims and their equivalents.

What is claimed is:

Claims

1. A waveguide assembly, comprising: a vcsel array including individual vcsel lasers each having an output facet and producing an output beam; a waveguide array including a proximal end, a distal end and a first plurality of individual waveguides, each of an individual vcsel laser being optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the waveguide array; and at least one optoelectrical device coupled to the waveguide array.

2. The assembly of claim 1, wherein the optoelectrical device is a modulator.

3. The assembly of claim 1, wherein the optoelectrical device is a detector.

4. The assembly of claim 1, wherein the optoelectrical device is an attenuator.

5. The assembly of claim 1, wherein the optoelectrical device is a filter.

6. The assembly of claim 1, wherein the optoelectrical device is a circulator.

7. The assembly of claim 1, wherein the optoelectrical device is a polarization rotator.

8. The assembly of claim 1, wherein the optoelectrical device is an isolator.

9. The assembly of claim 1, wherein the optoelectrical device is a switch.

10. The assembly of claim 1, wherein the optoelectrical device is a plurality of modulators, each of a modulator being coupled to an individual waveguide of the waveguide array.

11. The assembly of claim 1 , wherein the optoelectrical device is a plurality of detectors, each of a detector being coupled to an individual waveguide of the waveguide array.

12. The assembly of claim 1, wherein the optoelectrical device is a plurality of attenuators, each of an attenuator being coupled to an individual waveguide of the waveguide array.

13. The assembly of claim 1, wherein the optoelectrical device is a plurality of filters, each of a filter being coupled to an individual waveguide of the waveguide array.

14. The assembly of claim 1, wherein the optoelectrical device is a plurality of circulators, each of a circulator being coupled to an individual waveguide of the waveguide array.

15. The assembly of claim 1 , wherein the vcsel array is formed on a single substrate.

16. The assembly of claim 1 , further comprising: a lens array positioned between the vcsel array and the waveguide array, the lens array including a lens for individual vcsel of the vcsel array.

17. The assembly of claim 16, wherein the lens array is attached to the vcsel array.

18. A waveguide assembly of claim 1 , wherein at least two waveguides of the first plurality of waveguides being coupled to a first coupling waveguide in the waveguide array.

19. The assembly of claim 15, wherein, the first coupling waveguide extends to the distal end of the waveguide array.

20. The assembly of claim 1, wherein a first portion of the first plurality of waveguides is coupled to a first coupling waveguide in the waveguide array, and a second portion of the first plurality of waveguides is coupled to a second coupling waveguide in the waveguide array.

21. The assembly of claim 20, wherein the first and second coupling waveguides extend to the distal end of the waveguide array.

22. The assembly of claim 1, wherein all of the waveguides of the first plurality are coupled to a first coupling waveguide in the waveguide array.

23. The assembly of claim 22, wherein the first coupling waveguide extends to the distal end of the waveguide array.

24. The assembly of claim 1, wherein a first individual waveguide of the first plurality of waveguides is coupled to a second plurality of waveguides in the waveguide array.

25. The assembly of claim 24, wherein a second individual waveguide of the first plurality of waveguides is coupled to a first waveguide in the second plurality of waveguides.

26. The assembly of claim 27, wherein a second individual waveguide of the first plurality of waveguides is coupled to a waveguide in the second plurality of waveguides.

27. The assembly of claim 1, wherein the output facets of the vcsel array are positioned adjacent to the proximal end of the waveguide array.

28. The assembly of claim 1 , wherein each output beam of an individual vcsel of the vcsel array has a longitudinal axis that is optically aligned with a longitudinal axis of an individual waveguide of the first plurality of waveguides.

29. The assembly of claim 24, further comprising: a support member coupled to the vcsel array and the waveguide array.

30. The assembly of claim 1, wherein the waveguide array has an angled proximal face.

31. The assembly of claim 30, wherein each output beam of an individual vcsel of the vcsel array has a longitudinal axis that is non-parallel to a longitudinal axis of an individual waveguide of the first plurality of waveguides.

32. The assembly of claim 31 , wherein each output beam of an individual vcsel of the vcsel array has a longitudinal axis that is perpendicular to a longitudinal axis of an individual waveguide of the first plurality of waveguides.

33. The assembly of claim 31 , further comprising: a lens array coupled to the vcsel array.

34. The assembly of claim 33, wherein the lens array is attached to the vcsel array.

35. The assembly of claim 1, wherein the vcsel array is butt-coupled to the waveguide array.

36. A waveguide assembly, comprising: a vcsel array including individual vcsel lasers each having an output facet and producing an output beam; and a waveguide array integrated with at least one optoelectrical device, the waveguide array including a proximal end, a distal end and a first plurality of individual waveguides, each of an individual vcsel laser being optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the waveguide array.

37. The assembly of claim 36, wherein the optoelectrical device is a modulator.

38. The assembly of claim 36, wherein the optoelectrical device is a detector.

39. The assembly of claim 36, wherein the optoelectrical device is an attenuator.

40. The assembly of claim 36, wherein the optoelectrical device is a filter.

41. The assembly of claim 36, wherein the optoelectrical device is a circulator.

42. The assembly of claim 36, wherein the optoelectrical device is a polarization rotator.

43. The assembly of claim 36, wherein the optoelectrical device is an isolator.

44. The assembly of claim 36, wherein the optoelectrical device is a switch.

45. The assembly of claim 36, wherein the optoelectrical device is a plurality of modulators, each of a modulator being coupled to an individual waveguide of the waveguide array.

46. The assembly of claim 36, wherein the optoelectrical device is a plurality of detectors, each of a detector being coupled to an individual waveguide of the waveguide array.

47. The assembly of claim 36, wherein the optoelectrical device is a plurality of attenuators, each of an attenuator being coupled to an individual waveguide of the waveguide array.

48. The assembly of claim 36, wherein the optoelectrical device is a plurality of filters, each of a filter being coupled to an individual waveguide of the waveguide array.

49. The assembly of claim 36, wherein the optoelectrical device is a plurality of circulators, each of a circulator being coupled to an individual waveguide of the waveguide array.

50. The assembly of claim 36, wherein the vcsel array is formed on a single substrate.

51. The assembly of claim 36, further comprising: a lens array positioned between the vcsel array and the waveguide array, the lens array including a lens for individual vcsel of the vcsel array.

52. The assembly of claim 51 , wherein the lens array is attached to the vcsel array.

53. The assembly of claim 36, wherein at least two waveguides of the first plurality of waveguides are coupled to a first coupling waveguide in the waveguide array.

54. The assembly of claim 53, wherein, the first coupling waveguide extends to the distal end of the waveguide array.

55. The assembly of claim 36, wherein a first portion of the first plurality of waveguides is coupled to a first coupling waveguide in the waveguide array, and a second portion of the first plurality of waveguides is coupled to a second coupling waveguide in the waveguide array.

56. The assembly of claim 55, wherein the first and second coupling waveguides extend to the distal end of the waveguide array.

57. The assembly of claim 36, wherein all of the waveguides of the first plurality are coupled to a first coupling waveguide in the waveguide array.

58. The assembly of claim 57, wherein the first coupling waveguide extends to the distal end of the waveguide array.

59. The assembly of claim 36, wherein a first individual waveguide of the first plurality of waveguides is coupled to a second plurality of waveguides in the waveguide array.

60. The assembly of claim 59, wherein a second individual waveguide of the first plurality of waveguides is coupled to a first waveguide in the second plurality of waveguides.

61. The assembly of claim 59, wherein a second individual waveguide of the first plurality of waveguides is coupled to a waveguide in the second plurality of waveguides.

62. The assembly of claim 36, wherein the output facets of the vcsel array are positioned adjacent to the proximal end of the waveguide array.

63. The assembly of claim 36, wherein each output beam of an individual vcsel of the vcsel array has a longitudinal axis that is optically aligned with a longitudinal axis of an individual waveguide of the first plurality of waveguides.

64. The assembly of claim 61 , further comprising: a support member coupled to the vcsel array and the waveguide array.

65. The assembly of claim 36, wherein the waveguide array has an angled proximal face.

66. The assembly of claim 65, wherein each output beam of an individual vcsel of the vcsel array has a longitudinal axis that is non-parallel to a longitudinal axis of an individual waveguide of the first plurality of waveguides.

67. The assembly of claim 66, wherein each output beam of an individual vcsel of the vcsel array has a longitudinal axis that is perpendicular to a longitudinal axis of an individual waveguide of the first plurality of waveguides.

68. The assembly of claim 66, further comprising: a lens array coupled to the vcsel array.

69. The assembly of claim 68, wherein the lens array is attached to the vcsel array.

70. The assembly of claim 36, wherein the vcsel array is butt- coupled to the waveguide array.

71. A laser assembly, comprising: a first mount; a second mount; a vcsel array including individual vcsel lasers each having an output facet and producing an output beam; and a waveguide array including a proximal end, a distal end, a first face, an opposing second face and a first plurality of individual waveguides, the waveguide array being sandwiched between the first and second mounts at the first and second faces, the vcsel array being positioned adjacent to the waveguide proximal end with each of an individual vcsel laser optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the waveguide array.

72. The assembly of claim 71, further comprising: at least one optoelectrical device coupled to the waveguide array.

73. The assembly of claim 72, wherein the optoelectrical device is a modulator.

74. The assembly of claim 72, wherein the optoelectrical device is a detector.

75. The assembly of claim 72, wherein the optoelectrical device is an attenuator.

76. The assembly of claim 72, wherein the optoelectrical device is a filter.

77. The assembly of claim 72, wherein the optoelectrical device is a circulator.

78. The assembly of claim 72, wherein the optoelectrical device is a polarization rotator.

79. The assembly of claim 72, wherein the optoelectrical device is an isolator.

80. The assembly of claim 72, wherein the optoelectrical device is a switch.

81. The assembly of claim 72, wherein the optoelectrical device is a plurality of modulators, each of a modulator being coupled to an individual waveguide of the waveguide array.

82. The assembly of claim 72, wherein the optoelectrical device is a plurality of detectors, each of a detector being coupled to an individual waveguide of the waveguide array.

83. The assembly of claim 72, wherein the optoelectrical device is a plurality of attenuators, each of an attenuator being coupled to an individual waveguide of the waveguide array.

84. The assembly of claim 72, wherein the optoelectrical device is a plurality of filters, each of a filter being coupled to an individual waveguide of the waveguide array.

85. The assembly of claim 72, wherein the optoelectrical device is a plurality of circulators, each of a circulator being coupled to an individual waveguide of the waveguide array.

86. The assembly of claim 72, wherein the vcsel array is formed on a single substrate.

87. The assembly of claim 71 , further comprising: first electrical connections at the first mount; and at least one electrical connection at the second mount.

88. The assembly of claim 87, wherein each of an individual vcsel laser of the vcsel array is electrically coupled to the first electrical connections at the first mount.

89. The assembly of claim 71 , wherein each of an individual vcsel laser of the vcsel array is wire bonded to a wire bond pad positioned on a surface of the first mount.

90. The assembly of claim 71, further comprising: a lens array positioned between the vcsel array and the waveguide array, the lens array including a lens for each of a vcsel laser of the vcsel array.

91. The assembly of claim 87, wherein the lens array is attached to the vcsel array.

92. The assembly of claim 71 , wherein at least two waveguides of the first plurality of waveguides are coupled to a first coupling waveguide in the waveguide array.

93. The assembly of claim 98, wherein, the first coupling waveguide extends to the distal end of the waveguide array.

94. The assembly of claim 71 , wherein a first portion of the first plurality of waveguides is coupled to a first coupling waveguide in the waveguide array, and a second portion of the first plurality of waveguides is coupled to a second coupling waveguide in the waveguide array.

95. The assembly of claim 94, wherein the first and second coupling waveguides extend to the distal end of the waveguide array.

96. The assembly of claim 71 , wherein all of the waveguides of the first plurality are coupled to a first coupling waveguide in the waveguide array.

97. The assembly of claim 96, wherein the first coupling waveguide extends to the distal end of the waveguide array.

98. The assembly of claim 71 , wherein a first individual waveguide of the first plurality of waveguides is coupled to a second plurality of waveguides in the waveguide array.

99. The assembly of claim 98, wherein a second individual waveguide of the first plurality of waveguides is coupled to a first waveguide in the second plurality of waveguides.

100. The assembly of claim 98, wherein a second individual waveguide of the first plurality of waveguides is coupled to a waveguide of the second plurality of waveguides.

101. The assembly of claim 71 , wherein the output facets of the vcsel array are positioned adjacent to the proximal end of the waveguide array.

102. The assembly of claim 71 , wherein each output beam of an individual vcsel of the vcsel array has a longitudinal axis that is optically aligned with a longitudinal axis of an individual waveguide of the first plurality of waveguides.

103. A laser assembly, comprising: a first mount; a second mount; a vcsel array including individual vcsel lasers each having an output facet and producing an output beam; and a waveguide array integrated with at least one optoelectrical device, the waveguide array including a proximal end, a distal end, a first face, an opposing second face and a first plurality of individual waveguides, the waveguide array being sandwiched between the first and second mounts at the first and second faces, the vcsel array being positioned adjacent to the waveguide proximal end with each of an individual vcsel laser optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the waveguide array.

104. The assembly of claim 103 wherein the optoelectrical device is a modulator.

105. The assembly of claim 103, wherein the optoelectrical device is a detector.

106. The assembly of claim 103, wherein the optoelectrical device is an attenuator.

107. The assembly of claim 103, wherein the optoelectrical device is a filter.

108. The assembly of claim 103, wherein the optoelectrical device is a circulator.

109. The assembly of claim 103, wherein the optoelectrical device is a polarization rotator.

110. The assembly of claim 103 , wherein the optoelectrical device is an isolator.

111. The assembly of claim 103, wherein the optoelectrical device is a filter.

112. The assembly of claim 103, wherein the optoelectrical device is a plurality of modulators, each of a modulator being coupled to an individual waveguide of the waveguide array.

113. The assembly of claim 103, wherein the optoelectrical device is a plurality of detectors, each of a detector being coupled to an individual waveguide of the waveguide array.

114. The assembly of claim 103, wherein the optoelectrical device is a plurality of attenuators, each of an attenuator being coupled to an individual waveguide of the waveguide array.

115. The assembly of claim 103, wherein the optoelectrical device is a plurality of filters, each of a filter being coupled to an individual waveguide of the waveguide array.

116. The assembly of claim 103, wherein the optoelectrical device is a plurality of circulators, each of a circulator being coupled to an individual waveguide of the waveguide array.

117. A waveguide assembly, comprising: a vcsel array including individual vcsel lasers each having an output facet and producing an output beam; an arrayed waveguide grating including a proximal end, a distal end and a first plurality of individual waveguides, each of an individual vcsel laser being optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the arrayed waveguide grating; and at least one optoelectrical device coupled to the arrayed waveguide grating.

118. A waveguide assembly, comprising: a vcsel array including individual vcsel lasers each having an output facet and producing an output beam; and an arrayed waveguide grating integrated with at least one optoelectrical device, the arrayed waveguide grating including a proximal end, a distal end and a first plurality of individual waveguides, each of an individual vcsel laser being optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the arrayed waveguide grating.

119. A laser assembly, comprising: a first mount; a second mount; a vcsel array including individual vcsel lasers each having an output facet and producing an output beam; and an arrayed waveguide grating including a proximal end, a distal end, a first face, an opposing second face and a first plurality of individual waveguides, the arrayed waveguide grating being sandwiched between the first and second mounts at the first and second faces, the vcsel array being positioned adjacent to the waveguide proximal end with each of an individual vcsel laser optically coupled to an individual waveguide of the first plurality of waveguides at the proximal end of the arrayed waveguide grating.