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WO2000079290A1 - Balayage spatial et temporel de signaux electriques ultrarapides d'une sonde a cantilever dans le cadre de la microscopie par sonde a balayage ligne par ligne - Google Patents

Balayage spatial et temporel de signaux electriques ultrarapides d'une sonde a cantilever dans le cadre de la microscopie par sonde a balayage ligne par ligne Download PDF

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Publication number
WO2000079290A1
WO2000079290A1 PCT/EP2000/005616 EP0005616W WO0079290A1 WO 2000079290 A1 WO2000079290 A1 WO 2000079290A1 EP 0005616 W EP0005616 W EP 0005616W WO 0079290 A1 WO0079290 A1 WO 0079290A1
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WO
WIPO (PCT)
Prior art keywords
switch
sample
signal
cantilever
pulses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2000/005616
Other languages
German (de)
English (en)
Inventor
Rainer Kassing
Egbert Oesterschulze
Wolf M. Steffens
Sven Heisig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universitaet Kassel
Original Assignee
Universitaet Kassel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universitaet Kassel filed Critical Universitaet Kassel
Publication of WO2000079290A1 publication Critical patent/WO2000079290A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/07—Non contact-making probes
    • G01R1/071—Non contact-making probes containing electro-optic elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/30—Scanning potential microscopy

Definitions

  • Fig. 1 a shows the sampling of a periodic signal. Samples with a repetition rate T + ⁇ are taken from the signal uj to be measured with a period T (hereinafter referred to as a sample signal), where ⁇ is a variable time delay.
  • the tip of the cantilever is brought close to the component.
  • the positioning is carried out analogously to the well-known atomic force microscopy (RKM).
  • RKM atomic force microscopy
  • the cantilever can be in contact with the sample, or it can be positioned close to the surface.
  • part of the pulse energy is fed to the PL switch on the cantilever via an electrode.
  • a current flows through the PL switch until the charge carrier density distribution of the material generated by the light pulse has decayed.
  • the temporal resolution is obtained by changing the delay time between the signal generation pulse and the sampling pulse.
  • the measured signal is a time-averaged current dependent on the delay time, which is a measure of the sample voltage
  • the optical pulses are brought to the PL switch on the cantilever with the help of free beam optics.
  • a more flexible arrangement uses an optical fiber for the transmission. In order to be able to mount the fiber parallel to the surface of the cantilever, the fiber end is polished or broken at an angle of approximately 45 °, so that the light is coupled out through the fiber cladding (EP 0 559 274 A2).
  • the PL switch As
  • the PL switch can also be used in the opposite direction as a generator for electrical pulses [5,6]. All that is required is to pretension the two electrodes of the PL switch. Now the excitation with optical pulses leads to electrical pulses that spread in both directions along a waveguide connected to the PL switch. These signals can e.g. for the characterization of electronic circuits or structures, to be placed on an object to be examined.
  • This known method is to be improved in that ultrashort pulses can be generated by means of the cantilever probe.
  • the temporal resolution is achieved by changing the delay time between the signal generation pulse and the scanning pulse.
  • the measurement signal obtained is a time-averaged current which is dependent on the delay time.
  • a microwave line is integrated into the cantilever, via which the sample signal reaches the PL switch, in order to be sampled there.
  • the temporal resolution of such scanning methods is limited by the smallest achievable opening time of the PL switch, ie the sum of the rise and decay times. In order to achieve the highest possible temporal resolution, it would be desirable to minimize this in order to achieve scanning with quasi ⁇ -pulses.
  • the opening time of a PL switch is essentially defined by the sum of the rise and fall times, the fall time by the
  • a method based on a scanning probe microscope (RSM) with simultaneous sub-picosecond temporal and submicron spatial resolution which includes the following: a) the targeted positioning of a special cantilever probe in relation to the distance and position to the sample surface by measuring an interaction between sample and cantilever probe with the aim of contacting or contactlessly scanning the topography of the sample and / or setting a well-defined distance between the cantilever probe and the sample, b) using the same cantilever probe, in which a waveguide structure is integrated, for the temporal sampling of an electrical signal.
  • a sequence of ultrafast, optical pulses of sufficient photon energy between two conductors of the waveguide structure is irradiated through free-beam optics or via a light pipe.
  • Various semiconducting materials can be used (such as LT-GaAs, semi-insulating GaAs (SI-GaAs), Si, etc.).
  • Another method based on a scanning probe microscope (RSM) with simultaneous sub-picosecond temporal and submicron spatial resolution which includes the following: a) the targeted positioning of a special cantilever probe in relation to the distance and position to the sample surface by measuring an interaction between sample and Cantilever probe in contact or contactlessly to scan the topography of the sample and / or to set a well-defined distance between the cantilever probe and sample, b) the use of the same cantilever probe, in which a waveguide structure is integrated, for generating electrical pulses or step-shaped electrical signals that reflected at the open end of the cantilever line and scanned with the same or another PL switch on the cantilever. Due to the coupling between tip and sample, the reflected signal has information about the electrical and / or dielectric properties of the sample.
  • RSM scanning probe microscope
  • a new scanning technique including a cantilever probe was developed.
  • a coplanar line with an integrated PL switch was attached to a semiconducting cantilever.
  • a possible implementation of such a cantilever is shown in the scanning electron microscope image in Figure 2.
  • the thickness of the cantilever can be adjusted during the manufacturing process.
  • the cantilever used in the experiment had a length of 600 ⁇ m and a width of 190 ⁇ m.
  • the coplanar waveguide had an electrode gap of 8 ⁇ m and an electrode width of approx. 10 ⁇ m, from which a
  • the electrical behavior of the novel cantilever was examined in a conventional microscope, as described at the beginning. It can be explained by an electrical equivalent circuit with concentrated components.
  • the individual circuit elements can be found in the experimental setup in Fig. 3 a). These are named in Fig. 3 b) and lead to the equivalent circuit shown in Fig. 3 c) based on concentrated components.
  • a waveguide was used as a sample here, the transmission behavior of which is described by the characteristic impedance Z WG (approx. 100 ⁇ ).
  • a PL switch which is integrated into the waveguide of the sample, electrical pulses are generated on the top injected waveguide structure. This sample signal u i n (t) can be followed by an exponential rise corresponding to the rise time of the light pulse, followed by an exponential fall
  • the signal U (t) is integrated.
  • the original pulse shape is obtained by differentiating the resulting signal. This derivation is not shown in Fig. 7 because the signal cannot be distinguished from the original signal.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

L'invention concerne un procédé permettant un balayage spatial et temporel de signaux ultrarapides provenant d'un échantillon et la production de signaux électriques ultrarapides, selon lequel il est prévu d'utiliser une sonde à cantilever en matériau semi-conducteur. Cette sonde à cantilever comporte une structure de tracé conducteur avec un commutateur photoconducteur intégré qui peut être actionné sous l'action de la lumière. Le commutateur photoconducteur à conducteur d'équipotentialité comporte une fonction de transmission sensiblement progressive en ce sens où en vue du balayage de signaux ultrarapides, le signal de convolution du commutateur à conducteur d'équipotentialité est soumis à une différenciation. Ce procédé se caractérise en ce qu'on applique un potentiel entre au moins deux tracés conducteurs et en ce que le signal produit par le commutateur photoconducteur à conducteur d'équipotentialité est soumis à une différenciation et est injecté dans l'échantillon. L'invention concerne en outre une sonde à cantilever permettant de mettre ledit procédé en oeuvre.
PCT/EP2000/005616 1999-06-21 2000-06-19 Balayage spatial et temporel de signaux electriques ultrarapides d'une sonde a cantilever dans le cadre de la microscopie par sonde a balayage ligne par ligne Ceased WO2000079290A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19928338.9 1999-06-21
DE19928338A DE19928338C1 (de) 1999-06-21 1999-06-21 Verfahren zur räumlichen und zeitlichen Abtastung ultraschneller elektrischer Signale einer Probe mittels einer Cantileversonde aus Halbleitermaterial für die Rastersondenmikroskopie

Publications (1)

Publication Number Publication Date
WO2000079290A1 true WO2000079290A1 (fr) 2000-12-28

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2000/005616 Ceased WO2000079290A1 (fr) 1999-06-21 2000-06-19 Balayage spatial et temporel de signaux electriques ultrarapides d'une sonde a cantilever dans le cadre de la microscopie par sonde a balayage ligne par ligne

Country Status (2)

Country Link
DE (1) DE19928338C1 (fr)
WO (1) WO2000079290A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7810166B2 (en) * 2004-10-07 2010-10-05 Nambition Gmbh Device and method for scanning probe microscopy

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10300988B4 (de) * 2003-01-14 2005-03-24 Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Arbeit, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt Vorrichtung zur Bestimmung topologischer und elektrischer Eigenschaften eines Probenkörpers

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5416327A (en) * 1993-10-29 1995-05-16 Regents Of The University Of California Ultrafast scanning probe microscopy
US5844288A (en) * 1994-07-06 1998-12-01 The Regents Of The University Of Michigan Photoconductive element and method for measuring high frequency signals

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4851767A (en) * 1988-01-15 1989-07-25 International Business Machines Corporation Detachable high-speed opto-electronic sampling probe
EP0559274A3 (en) * 1992-03-03 1994-06-29 Philips Nv Probe apparatus and method for measuring high-frequency signals
US5442300A (en) * 1994-04-29 1995-08-15 Regents Of The University Of Michigan Ultrafast electrical scanning force microscope probe

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5416327A (en) * 1993-10-29 1995-05-16 Regents Of The University Of California Ultrafast scanning probe microscopy
US5844288A (en) * 1994-07-06 1998-12-01 The Regents Of The University Of Michigan Photoconductive element and method for measuring high frequency signals

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
KEIL U D ET AL: "TRANSIENT MEASUREMENTS WITH AN ULTRAFAST SCANNING TUNNELING MICROSCOPE ON SEMICONDUCTOR SURFACES", APPLIED PHYSICS LETTERS,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 72, no. 13, 30 March 1998 (1998-03-30), pages 1644 - 1646, XP000742912, ISSN: 0003-6951 *
OESTERSCHULZE E ET AL: "SENSORS FOR SCANNING PROBE MICROSCOPY (SPM)", IWPSD-99: THE 10TH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES; PROC. OF SPIE - INT. SOC. F. OPT. ENG. (2000), vol. 3975 (I), 14 December 1999 (1999-12-14) - 18 December 1999 (1999-12-18), NEW DELHI, pages 683 - 690, XP000956059 *
WEIDE VAN DER D W: "LOCALIZED PICOSECOND RESOLUTION WITH A NEAR-FIELD MICROWAVE/SCANNING-FORCE MICROSCOPE", APPLIED PHYSICS LETTERS,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 70, no. 6, 10 February 1997 (1997-02-10), pages 677 - 679, XP000685150, ISSN: 0003-6951 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7810166B2 (en) * 2004-10-07 2010-10-05 Nambition Gmbh Device and method for scanning probe microscopy

Also Published As

Publication number Publication date
DE19928338C1 (de) 2001-01-18

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