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WO2000064634A1 - Rotary abrasive tool - Google Patents

Rotary abrasive tool Download PDF

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Publication number
WO2000064634A1
WO2000064634A1 PCT/US2000/009576 US0009576W WO0064634A1 WO 2000064634 A1 WO2000064634 A1 WO 2000064634A1 US 0009576 W US0009576 W US 0009576W WO 0064634 A1 WO0064634 A1 WO 0064634A1
Authority
WO
WIPO (PCT)
Prior art keywords
disk
tool according
abrasive
workpiece
abrasive disk
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2000/009576
Other languages
French (fr)
Inventor
Thomas G. Kinisky
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Abrasives Inc
Original Assignee
Norton Co
Saint Gobain Abrasives Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Norton Co, Saint Gobain Abrasives Inc filed Critical Norton Co
Priority to EP00922017A priority Critical patent/EP1173308B1/en
Priority to DE60000737T priority patent/DE60000737T2/en
Priority to AU42262/00A priority patent/AU750253B2/en
Priority to CA002369657A priority patent/CA2369657C/en
Priority to BRPI0009985-6A priority patent/BR0009985B1/en
Priority to JP2000613613A priority patent/JP2002542058A/en
Priority to MXPA01010823A priority patent/MXPA01010823A/en
Priority to AT00922017T priority patent/ATE227195T1/en
Publication of WO2000064634A1 publication Critical patent/WO2000064634A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/12—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with apertures for inspecting the surface to be abraded
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
    • B24B49/14—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation taking regard of the temperature during grinding

Definitions

  • This invention relates to the coupling of in-situ measurement devices with rotary abrasive tools.
  • Major advantages in the use and operation of abrasive tools can be gained by real time feedback to the operator or machine tool controlling the abrasive tool.
  • the type of real-time feedback that has major significant are, for example, temperature, surface roughness, workpiece position during the abrading, grinding, or finishing, or surface roughness. Hitherto this has depended on the use of experienced operators or interrupted operations in which the abrading is interrupted more or less frequently for measurement.
  • abrading is to be understood to refer not only to processes in which substantial amounts of material are removed from a surface but also, and perhaps more importantly, to processes in which the operation is considered to be fine finishing, polishing or lapping.
  • a rotary abrasive tool has now been devised that can be controlled in a plurality of ways to respond to critical parameters automatically and to adjust the operation in response to variation in these parameters without the need for interruption of the operation.
  • the present invention provides a rotary abrading tool which comprises: a) an abrasive disk having holes pierced through the disk at intervals permitting a view of the surface during the abrading operation, the disk being mounted on b) a rotatable shaft actuated by a motor; and c) at least one non-contact sensor aligned to view and/or measure the condition of a workpiece surface through holes in the abrasive disk as it rotates.
  • the abrasive disk can be rigid, (that is self-supported), but usually more conveniently it is supported on a backup pad which comprises holes in the body of the pad corresponding in location to those in the disk supported thereon such that, upon rotation, it is possible to view a workpiece as it is undergoing abrasion through both the disk and the backup pad.
  • Abrasive disks with viewing holes or apertures are known in the art for the purpose of allowing the operator to assess the state of the surface being abraded as it happens. Such abrasive disks are described for example in WO/US96/19191.
  • the present invention goes much further however in adapting a rotary abrading tool not only to view the workpiece surface but also to measure its condition in application-specific ways.
  • the non-contact sensor is a laser device adapted to measure the surface finish of the workpiece and/or the distance between the abrasive disk and the surface of the workpiece.
  • such a sensor can, for example, advance the abrasive disk towards the workpiece in a rapid but controlled fashion so as to avoid both delays and workpiece damage resulting from excessively abrupt initial contact. Then, having initiated abrading, the laser can monitor the surface of the workpiece and, through appropriate feedback mechanisms, control the grinding pressure or withdraw the tool when the appropriate surface finish has been generated. Making this a part of the rotary abrasive tool ensures that the abrasive operation is conducted efficiently with a minimum of lost time.
  • the non-contact sensor is one specifically adapted to measure the temperature of the surface, for example using an infra-red sensor device. This is particularly important when the surface been treated is a painted surface.
  • the temperature sensing device can be separate from, or incorporated into, a laser sensing device such that both modes of surface condition sensing mechanism are available.
  • Other non-contact sensors can respond to light waves, (both UV and visible), sound waves and any other desired variety of electromagnetic radiation.
  • the abrading disk is conveniently provided with from 3 to 6 apertures located at a uniform radial distance from the axis of the disk.
  • the size of the apertures is preferably large enough to ensure that, when the tool is in use the surface condition sensors are able to receive sufficient data to give a useful reading.
  • the shape of the apertures is not critical but generally round holes are preferred since these afford maximum visibility with minimum disruption to the cohesiveness of the disk under grinding conditions. It is also preferred that sensing devices are located to view through the disk in the radial position on the disk of maximum aperture area. Since the most relevant information relates to the surface of the workpiece actually being abraded, the viewing apertures are preferably located in the radially outer half of the disk since this is the portion that is most heavily used.
  • abrasive disk In some forms of abrasive disk, it is known to remove portions of the circumference of a disk so as to afford a view of the surface right to the edge of the abrasive disk. Such removed peripheral portions are likewise considered to be “apertures” since they perform the same function as holes in the body of the disk but in a different location on the disk.
  • the sensor devices operate by transmitting and/or receiving electromagnetic radiation , (the nature of which depends on the condition being sensed as above indicated), through the apertures in the disk. In practice this means that one would synchronize the detection systems to the rotational speeds of the disc and to the frequency of the holes passing the detector system. This ensures that maximum information is received by the sensing device.
  • the disk is rigid, as would be the case for example if the disk were a "flap-disk" in which quadrilateral flaps of coated abrasive material are attached by one edge to a rigid usually cupped disk in overlapping fashion around one surface of the disk.
  • Such disks generally need no backup pad and are used for grinding down welds or joint lines.
  • the surface of the abrasive disk can be of the conventional type in which abrasive grain is bonded to a backing material by the usual maker and size coat combinations, with or without a supersize coat conferring special grinding properties or characteristics.
  • it can also have an engineered surface comprising micro-replicated structures, such as pyramids or lines of parallel ridges, each of which comprises abrasive particles dispersed in a binder and adhered to a backing material.
  • the surface can comprise a layer of a formulation comprising abrasive particles dispersed in a binder resin and deposited in a relatively uniform layer or in a contoured structure on a backing.
  • the abrasive particles used can be any of those typically made available for such purposes and range from alumina, alumina-zirconia and silicon carbide in the general purpose grinding area, to diamond, CBN, ceria, gamma alumina, and microcrystalline alpha alumina in the more specialized abrading applications.
  • the binder component of the abrasive disk can be selected from those known in the trade for such applications. These include thermosetting resins such as phenolic and ep ⁇ xy-based resins, and radiation-curable resins such as acrylates, epoxy-acrylates, urethane-acrylates resins and similar resins that are curable by visible or UV light as well as electron-beam radiation. Also included are moisture-curable resins.
  • the means by which the abrasive disk is made to rotate can be any suitable motor means and the whole tool can be a basic adaptation of an angle grinder, off-hand grinder, fixed grinder and the like.
  • condition-sensing mechanism is linked to control systems on the tool which regulate parameters such as the position of the tool with respect to a workpiece, the force with which the abrasive disk contacts a workpiece and the speed of rotation of the disk.
  • condition sensing device can be linked to a notification mechanism such as a light, a bell or a buzzer indicating that a desired end-point or limit condition has been reached.
  • the linkage is preferably of the notification type.
  • a preferred application is in the automobile industry wherein automation of finishing processes is well advanced.
  • the rotary abrasive tool of the invention is particularly well adapted to the removal of finish defects where the workpiece is a painted automobile panel.
  • An example of a tool adapted for this application is equipped with two sensors: one a laser device to read out the surface finish of the workpiece as it is polished and to terminate the work when the desired finish has been attained; and the second is a temperature sensor which is set to interrupt or moderate the polishing when the temperature of the surface approaches the point at which "balling-up" of the paint polymer becomes a problem.
  • the preferred disk for the tool has a three round hole pattern with the holes equally spaced around the disk and each is located about two thirds of the radial distance from the center of the disk to the circumference. The diameter of the holes is from about 15 to 30% of the radius of the disk.
  • the abrading surface is conventional for this application and is not critical to the tool itself.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Grinding Of Cylindrical And Plane Surfaces (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
  • Turning (AREA)

Abstract

Provision of a rotatable abrasive disk having apertures permitting a view of a workpiece surface during the abrading process makes possible the incorporation of a condition sensing mechanism viewing the workpiece surface through the holes and capable of adapting the grinding conditions accordingly.

Description

ROTARY ABRASIVE TOOL
Background of the Invention This invention relates to the coupling of in-situ measurement devices with rotary abrasive tools. Major advantages in the use and operation of abrasive tools can be gained by real time feedback to the operator or machine tool controlling the abrasive tool. The type of real-time feedback that has major significant are, for example, temperature, surface roughness, workpiece position during the abrading, grinding, or finishing, or surface roughness. Hitherto this has depended on the use of experienced operators or interrupted operations in which the abrading is interrupted more or less frequently for measurement. In this document the term "abrading" is to be understood to refer not only to processes in which substantial amounts of material are removed from a surface but also, and perhaps more importantly, to processes in which the operation is considered to be fine finishing, polishing or lapping.
A rotary abrasive tool has now been devised that can be controlled in a plurality of ways to respond to critical parameters automatically and to adjust the operation in response to variation in these parameters without the need for interruption of the operation. Description of the Invention The present invention provides a rotary abrading tool which comprises: a) an abrasive disk having holes pierced through the disk at intervals permitting a view of the surface during the abrading operation, the disk being mounted on b) a rotatable shaft actuated by a motor; and c) at least one non-contact sensor aligned to view and/or measure the condition of a workpiece surface through holes in the abrasive disk as it rotates. The abrasive disk can be rigid, (that is self-supported), but usually more conveniently it is supported on a backup pad which comprises holes in the body of the pad corresponding in location to those in the disk supported thereon such that, upon rotation, it is possible to view a workpiece as it is undergoing abrasion through both the disk and the backup pad.
Abrasive disks with viewing holes or apertures are known in the art for the purpose of allowing the operator to assess the state of the surface being abraded as it happens. Such abrasive disks are described for example in WO/US96/19191. The present invention goes much further however in adapting a rotary abrading tool not only to view the workpiece surface but also to measure its condition in application-specific ways. In one embodiment if the invention the non-contact sensor is a laser device adapted to measure the surface finish of the workpiece and/or the distance between the abrasive disk and the surface of the workpiece. Thus in an automated operation such a sensor can, for example, advance the abrasive disk towards the workpiece in a rapid but controlled fashion so as to avoid both delays and workpiece damage resulting from excessively abrupt initial contact. Then, having initiated abrading, the laser can monitor the surface of the workpiece and, through appropriate feedback mechanisms, control the grinding pressure or withdraw the tool when the appropriate surface finish has been generated. Making this a part of the rotary abrasive tool ensures that the abrasive operation is conducted efficiently with a minimum of lost time. In another embodiment the non-contact sensor is one specifically adapted to measure the temperature of the surface, for example using an infra-red sensor device. This is particularly important when the surface been treated is a painted surface. Modern automobile paints, for example, above a certain temperature determined by the chemistry of the polymer matrix, tend to "ball up", (that is to partially melt or soften and form small balls or globules of polymer), during abrasion This of course destroys the abrasive function of the disk and it is therefore critical to monitor the surface temperature during abrasion. The temperature sensing device can be separate from, or incorporated into, a laser sensing device such that both modes of surface condition sensing mechanism are available. Other non-contact sensors can respond to light waves, (both UV and visible), sound waves and any other desired variety of electromagnetic radiation. The abrading disk is conveniently provided with from 3 to 6 apertures located at a uniform radial distance from the axis of the disk. The size of the apertures is preferably large enough to ensure that, when the tool is in use the surface condition sensors are able to receive sufficient data to give a useful reading. The shape of the apertures is not critical but generally round holes are preferred since these afford maximum visibility with minimum disruption to the cohesiveness of the disk under grinding conditions. It is also preferred that sensing devices are located to view through the disk in the radial position on the disk of maximum aperture area. Since the most relevant information relates to the surface of the workpiece actually being abraded, the viewing apertures are preferably located in the radially outer half of the disk since this is the portion that is most heavily used. In some forms of abrasive disk, it is known to remove portions of the circumference of a disk so as to afford a view of the surface right to the edge of the abrasive disk.. Such removed peripheral portions are likewise considered to be "apertures" since they perform the same function as holes in the body of the disk but in a different location on the disk. The sensor devices operate by transmitting and/or receiving electromagnetic radiation , (the nature of which depends on the condition being sensed as above indicated), through the apertures in the disk. In practice this means that one would synchronize the detection systems to the rotational speeds of the disc and to the frequency of the holes passing the detector system. This ensures that maximum information is received by the sensing device. Where the disk is rigid, as would be the case for example if the disk were a "flap-disk" in which quadrilateral flaps of coated abrasive material are attached by one edge to a rigid usually cupped disk in overlapping fashion around one surface of the disk. Such disks generally need no backup pad and are used for grinding down welds or joint lines.
The surface of the abrasive disk can be of the conventional type in which abrasive grain is bonded to a backing material by the usual maker and size coat combinations, with or without a supersize coat conferring special grinding properties or characteristics. However it can also have an engineered surface comprising micro-replicated structures, such as pyramids or lines of parallel ridges, each of which comprises abrasive particles dispersed in a binder and adhered to a backing material. Finally the surface can comprise a layer of a formulation comprising abrasive particles dispersed in a binder resin and deposited in a relatively uniform layer or in a contoured structure on a backing.
The abrasive particles used can be any of those typically made available for such purposes and range from alumina, alumina-zirconia and silicon carbide in the general purpose grinding area, to diamond, CBN, ceria, gamma alumina, and microcrystalline alpha alumina in the more specialized abrading applications.
The binder component of the abrasive disk can be selected from those known in the trade for such applications. These include thermosetting resins such as phenolic and epύxy-based resins, and radiation-curable resins such as acrylates, epoxy-acrylates, urethane-acrylates resins and similar resins that are curable by visible or UV light as well as electron-beam radiation. Also included are moisture-curable resins.
The means by which the abrasive disk is made to rotate can be any suitable motor means and the whole tool can be a basic adaptation of an angle grinder, off-hand grinder, fixed grinder and the like.
Advantageously the condition-sensing mechanism is linked to control systems on the tool which regulate parameters such as the position of the tool with respect to a workpiece, the force with which the abrasive disk contacts a workpiece and the speed of rotation of the disk. Alternatively or additionally the condition sensing device can be linked to a notification mechanism such as a light, a bell or a buzzer indicating that a desired end-point or limit condition has been reached. Clearly if the tool is used in an off-hand grinding mode, the linkage is preferably of the notification type. A preferred application is in the automobile industry wherein automation of finishing processes is well advanced. The rotary abrasive tool of the invention is particularly well adapted to the removal of finish defects where the workpiece is a painted automobile panel. An example of a tool adapted for this application is equipped with two sensors: one a laser device to read out the surface finish of the workpiece as it is polished and to terminate the work when the desired finish has been attained; and the second is a temperature sensor which is set to interrupt or moderate the polishing when the temperature of the surface approaches the point at which "balling-up" of the paint polymer becomes a problem. The preferred disk for the tool has a three round hole pattern with the holes equally spaced around the disk and each is located about two thirds of the radial distance from the center of the disk to the circumference. The diameter of the holes is from about 15 to 30% of the radius of the disk. The abrading surface is conventional for this application and is not critical to the tool itself.

Claims

We Claim: l. A rotary abrading tool which comprises: a) an abrasive disk having holes pierced through the disk at intervals permitting a view of the surface during the abrading operation; the disk being mounted on b) a rotatable shaft actuated by a motor; and c) at least one non-contact sensor aligned to view and/or measure the condition of a workpiece surface through holes in the abrasive disk as it rotates.
2. A tool according to Claim 1 in which the sensor is coupled to means for adjusting the abrading operation in response to the condition sensed.
3. A tool according to Claim 1 in which the abrasive disk is supported on a backup pad having holes in the body of the pad corresponding in location to those in the disk supported thereon such that, upon rotation, it is possible to view a workpiece as it is undergoing abrasion through both the disk and the backup pad.
4. A tool according to Claim 1 in which the sensor is a laser device adapted to measure the surface finish of the workpiece and/or the distance between the abrasive disk and the surface of the workpiece.
5. A tool according to Claim 1 in which the sensor is adapted to measure the temperature of the surface using an infra-red sensor device.
6. A tool according to Claim 1 in which the viewing apertures in the abrasive disk are located in the radially outer half of the disk.
7. A tool according to Claim 1 in which the viewing apertures in the abrasive disk are in the form of portions removed from the circumference of the disk.
8. A tool according to Claim 1 in which the surface of the abrasive disk is engineered to provide a plurality of micro-replicated structures.
PCT/US2000/009576 1999-04-23 2000-04-10 Rotary abrasive tool Ceased WO2000064634A1 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
EP00922017A EP1173308B1 (en) 1999-04-23 2000-04-10 Rotary abrasive tool
DE60000737T DE60000737T2 (en) 1999-04-23 2000-04-10 ROTATING GRINDING TOOL
AU42262/00A AU750253B2 (en) 1999-04-23 2000-04-10 Rotary abrasive tool
CA002369657A CA2369657C (en) 1999-04-23 2000-04-10 Rotary abrasive tool
BRPI0009985-6A BR0009985B1 (en) 1999-04-23 2000-04-10 rotary abrasive tool.
JP2000613613A JP2002542058A (en) 1999-04-23 2000-04-10 Rotary polishing tool
MXPA01010823A MXPA01010823A (en) 1999-04-23 2000-04-10 Rotary abrasive tool.
AT00922017T ATE227195T1 (en) 1999-04-23 2000-04-10 ROTATING GRINDING TOOL

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US13100399P 1999-04-23 1999-04-23
US52288100A 2000-03-10 2000-03-10
US09/522,881 2000-03-10
US60/131,003 2000-03-10

Publications (1)

Publication Number Publication Date
WO2000064634A1 true WO2000064634A1 (en) 2000-11-02

Family

ID=26829041

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/009576 Ceased WO2000064634A1 (en) 1999-04-23 2000-04-10 Rotary abrasive tool

Country Status (14)

Country Link
EP (1) EP1173308B1 (en)
JP (1) JP2002542058A (en)
KR (1) KR100416329B1 (en)
CN (1) CN1129507C (en)
AT (1) ATE227195T1 (en)
AU (1) AU750253B2 (en)
BR (1) BR0009985B1 (en)
CA (1) CA2369657C (en)
DE (1) DE60000737T2 (en)
ES (1) ES2186644T3 (en)
ID (1) ID30452A (en)
MX (1) MXPA01010823A (en)
TW (1) TW567116B (en)
WO (1) WO2000064634A1 (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6722955B2 (en) 2001-01-10 2004-04-20 3M Innovative Properties Company Buckup plate assembly for grinding system
US7244170B2 (en) 2005-09-16 2007-07-17 3M Innovative Properties Co. Abrasive article and methods of making same
US7252694B2 (en) 2005-08-05 2007-08-07 3M Innovative Properties Company Abrasive article and methods of making same
US7258705B2 (en) 2005-08-05 2007-08-21 3M Innovative Properties Company Abrasive article and methods of making same
US7329175B2 (en) 2004-12-30 2008-02-12 3M Innovative Properties Company Abrasive article and methods of making same
US7390244B2 (en) 2005-09-16 2008-06-24 3M Innovative Properties Company Abrasive article mounting assembly and methods of making same
US7393269B2 (en) 2005-09-16 2008-07-01 3M Innovative Properties Company Abrasive filter assembly and methods of making same
US7452265B2 (en) 2006-12-21 2008-11-18 3M Innovative Properties Company Abrasive article and methods of making same

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DE10315218B4 (en) * 2003-04-01 2010-12-30 Nagel Maschinen- Und Werkzeugfabrik Gmbh Method and device for fine machining a surface of a workpiece
DE102012004212A1 (en) * 2012-03-06 2013-09-12 Illinois Tool Works Inc. Disc for cutting and / or grinding
DE102013218233A1 (en) * 2013-05-02 2014-11-06 Bayerische Motoren Werke Aktiengesellschaft Rotating grinding tool
CN112912209A (en) * 2018-10-25 2021-06-04 3M创新有限公司 Robotic paint repair system and method
WO2020084411A1 (en) * 2018-10-25 2020-04-30 3M Innovative Properties Company Indirect force control systems and methods used in robotic paint repair
US20200306927A1 (en) 2019-03-29 2020-10-01 Saint Gobain Abrasives, Inc. Performance Grinding Solutions
US12226876B2 (en) 2019-04-03 2025-02-18 Saint-Gobain Abrasives, Inc. Abrasive article, abrasive system and method for using and forming same
CN111941259B (en) * 2020-07-16 2022-02-22 金中控股有限公司 Waxing and polishing device for automatically detecting polishing interface and interface detection method thereof
CN111975463B (en) * 2020-07-16 2021-11-12 金中控股有限公司 A kind of preparation method of light-weight multi-layer composite cookware
CN112247806A (en) * 2020-10-19 2021-01-22 邵阳县辰宜居家具有限公司 Intelligent furniture top layer burnishing machine

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WO1997021520A1 (en) * 1995-12-08 1997-06-19 Norton Company Backing plates for abrasive disks
EP0824995A1 (en) * 1996-08-16 1998-02-25 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
US5888119A (en) * 1997-03-07 1999-03-30 Minnesota Mining And Manufacturing Company Method for providing a clear surface finish on glass

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US6007415A (en) * 1995-12-08 1999-12-28 Norton Company Sanding disks
US5999264A (en) * 1997-06-26 1999-12-07 Mitutoyo Corporation On-the-fly optical interference measurement device, machining device provided with the measurement device, and machine tool suited to on-the-fly optical measurement

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997021520A1 (en) * 1995-12-08 1997-06-19 Norton Company Backing plates for abrasive disks
EP0824995A1 (en) * 1996-08-16 1998-02-25 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
US5888119A (en) * 1997-03-07 1999-03-30 Minnesota Mining And Manufacturing Company Method for providing a clear surface finish on glass

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6722955B2 (en) 2001-01-10 2004-04-20 3M Innovative Properties Company Buckup plate assembly for grinding system
US7329175B2 (en) 2004-12-30 2008-02-12 3M Innovative Properties Company Abrasive article and methods of making same
US7252694B2 (en) 2005-08-05 2007-08-07 3M Innovative Properties Company Abrasive article and methods of making same
US7258705B2 (en) 2005-08-05 2007-08-21 3M Innovative Properties Company Abrasive article and methods of making same
US7244170B2 (en) 2005-09-16 2007-07-17 3M Innovative Properties Co. Abrasive article and methods of making same
US7390244B2 (en) 2005-09-16 2008-06-24 3M Innovative Properties Company Abrasive article mounting assembly and methods of making same
US7393269B2 (en) 2005-09-16 2008-07-01 3M Innovative Properties Company Abrasive filter assembly and methods of making same
US7452265B2 (en) 2006-12-21 2008-11-18 3M Innovative Properties Company Abrasive article and methods of making same

Also Published As

Publication number Publication date
ATE227195T1 (en) 2002-11-15
KR100416329B1 (en) 2004-01-31
KR20010113827A (en) 2001-12-28
BR0009985A (en) 2002-01-08
CA2369657C (en) 2006-07-18
TW567116B (en) 2003-12-21
AU4226200A (en) 2000-11-10
DE60000737D1 (en) 2002-12-12
BR0009985B1 (en) 2008-11-18
CN1351532A (en) 2002-05-29
EP1173308B1 (en) 2002-11-06
CA2369657A1 (en) 2000-11-02
AU750253B2 (en) 2002-07-11
DE60000737T2 (en) 2003-07-17
ID30452A (en) 2001-12-06
MXPA01010823A (en) 2003-09-04
EP1173308A1 (en) 2002-01-23
CN1129507C (en) 2003-12-03
ES2186644T3 (en) 2003-05-16
JP2002542058A (en) 2002-12-10

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