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WO1999018472A1 - Systeme et procede de controle optique - Google Patents

Systeme et procede de controle optique Download PDF

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Publication number
WO1999018472A1
WO1999018472A1 PCT/IL1998/000479 IL9800479W WO9918472A1 WO 1999018472 A1 WO1999018472 A1 WO 1999018472A1 IL 9800479 W IL9800479 W IL 9800479W WO 9918472 A1 WO9918472 A1 WO 9918472A1
Authority
WO
WIPO (PCT)
Prior art keywords
pixel array
light
polarization
coming out
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IL1998/000479
Other languages
English (en)
Inventor
Reuven Silverman
Rafael Brada
Itai Naor
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orbotech Ltd
Original Assignee
Orbotech Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orbotech Ltd filed Critical Orbotech Ltd
Priority to JP2000515203A priority Critical patent/JP2001519545A/ja
Priority to KR1020007003633A priority patent/KR20010030932A/ko
Priority to AU94564/98A priority patent/AU9456498A/en
Publication of WO1999018472A1 publication Critical patent/WO1999018472A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1306—Details
    • G02F1/1309—Repairing; Testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Definitions

  • the present invention relates to optical inspection techniques, particularly useful for inspecting liquid crystal display (LCD) panels.
  • LCD liquid crystal display
  • This system comprises a means for actuating a display panel to be inspected, a sensor means for acquiring images displayed on the display panel and an image processing means.
  • a further example of a conventional system for inspecting display panels by identifying non-uniformities in the intensities of the display panel's pixels, which also comprises actuating means, sensor means and image processing means, is disclosed in EP Publication No. 95301647.
  • the actuating means are designed to generate a pattern formed of a sequence of pixel subsets, wherein each pixel subset includes a single actuated pixel within a pixel's vicinity of a preset size.
  • Blurring means are used for continuously blurring the image of the pattern so as to overcome a known aliazing effect which usually takes place and results in an undesirable Moire pattern.
  • display panels to be inspected are covered with small particles of dust or dirt which may block some pixels of the display panel.
  • a method for inspecting a pixel array producing linearly polarized light comprising the steps of:
  • the light coming out of the pixel array is directed on to a polarization means having a preset orientation of a plane of a preferred transmission (preferred polarization) relative to a plane of polarization of the linearly polarized light.
  • the polarization means may be supported for movement between a first inoperative position, being retracted out of the optical path of the light coming out of the pixel array, and a second operative position being located in the optical path of the light coming out of the pixel array.
  • the polarization means has either a fixed position or a variable position of the plane of the preferred transmission thereof.
  • the predetermined light component which forms the second image of the pixel array does not contain the linearly polarized light.
  • the second image is formed of a respective component of scattered light, produced by the passage of the linearly polarized light via the particles, and is in the form of bright spots on a dark screen.
  • the plane of the preferred transmission of the polarization means may be substantially parallel to a plane of polarization of the linearly polarized light, in which case the predetermined light component contains the linearly polarized light.
  • the second image is formed of both the linearly polarized light and a respective light component of scattered light, produced by the passage of the linearly polarized light through the particles, and is in the form of substantially dim spots on a bright screen.
  • the polarization means may be permanently located in the optical path of the light coming out of the pixel array.
  • the polarization means are rotatable between first and second extreme positions.
  • the plane of the preferred transmission is substantially perpendicular to a plane of polarization of the linearly polarized light
  • the plane of the preferred transmission is substantially parallel to a plane of polarization of the linearly polarized light.
  • the first image is also formed of a certain component of the light coming out of the pixel array, this component being of a different polarization than that of the predetermined light component forming the second image.
  • the polarization means are of an electro-optical kind.
  • the position of the plane of the preferred transmission depends on electric field applied to the polarization means.
  • the method may also comprise the steps of:
  • Each of the first and second images may be processed by means of comparing the respective image with reference data.
  • the reference data may be representative of an intended value for the pixel intensity.
  • Each of the first and second processed data may be in the form of first and second lists of defects, respectively, namely coordinates of the respective pixels. Processing the first and second data is carried out by comparing them to each other in a manner to extract the second data from the first data. If there still exist defects in the first list, these defects are indicative of the locations of the defective pixels of the pixel array.
  • the final data may be in the form of a list which contains the locations of either the defective pixels, or all the defects included in both the first and second lists added, for each defect, with data indicative of its kind, namely 'defective pixel' or 'blocked pixel'.
  • the method may also comprise the step of:
  • the defective pixels may be those pixels whose intensity value is different from a reference value.
  • the defective pixels may be those pixels which are covered by foreign particles.
  • a system for inspecting a pixel array producing linearly polarized light, so as to locate defective pixels in the array comprising:
  • an illumination means for illuminating the pixel array so as to provide light coming out of the pixel array
  • a sensing means mounted in the optical path of the light coming out of the pixel array and capable of acquiring an image thereof;
  • - light directing means capable of, when disposed in the optical path of the light coming out of the pixel array upstream of the sensing means, directing thereto a predetermined light component, having a certain polarization, of said light coming out of the pixel array;
  • an indication means coupled to the sensing means so as to be responsive to the acquired image for providing data indicative of the defective pixels of the pixel array.
  • a sensing means mounted in the optical path of the light coming out of the display panel and capable of acquiring an image thereof;
  • - light directing means capable of, when disposed in the optical path of the light coming out of the display panel upstream of the sensing means, directing thereto a predetermined light component of said light coming out of the display panel, said predetermined component having a certain polarization;
  • an indication means coupled to the sensing means so as to be responsive to the acquired image for providing data indicative of the defective pixels of the display panel.
  • an imaging apparatus for inspecting a pixel array producing linearly polarized light, in order to locate defects, the apparatus comprising: a sensor means capable of acquiring an image of the pixel array, which image is formed of light coming out of the pixel array, a polarization means coupled to the sensor means so as to be capable of, when disposed in the optical path of the light coming out of the pixel array upstream of the sensor means, directing thereto a predetermined light component of the light coming out of the pixel array. More specifically the present invention is used for inspecting an LCD panel and is, therefore, described below with respect to this application. BRIEF DESCRIPTION OF THE DRAWINGS
  • Fig. 1 is a schematic illustration of the main components of a conventional inspection system
  • Fig. 2 is a schematic pictorial view of the main components of a conventional LCD device
  • Fig. 3 is a functional block diagram illustrating the main components of an inspection system according to the invention.
  • Fig. 4 more specifically illustrates the main principles of operation of the system of Fig. 3, according to one embodiment of the invention.
  • Fig. 5 is a pictorial illustration of the system of Fig. 3 in its operational stage, according to another embodiment of the invention.
  • Fig. 1 illustrated an inspection system, generally designated 1 which is accommodated opposite to a sample 2 having a reflective surface 2a with a small dust particle 3 located thereon.
  • the system 1 typically includes a light source 4 and an observation unit 5.
  • the light source 4 is of a known kind, for example adapted for emitting a laser beam 6.
  • the observation unit 5 is capable of receiving light returned from the surface 2a and generating an image thereof.
  • the observation unit 5 is supported for horizontal sliding movement relative to the surface 2a, or vice versa, so as to perform scanning of the surface 2a by the light beam 6.
  • the lignt beam 6 impinges on the inspected surface 2a at a so-called 'grazing' angle of incidence resulting in output beams 7 and 8 returned from the surface 2a and from the particle 3, respectively.
  • the surface of the dust particle 3 is not mirror like, and, accordingly, the light beams 8 returned from the particle 3 are irregularly reflected.
  • the observation unit 5 is located at an angle ⁇ relative to a plane perpendicular to the plane of incidence, which is substantially different from the angle ⁇ , only the irregularly reflected light 8 is received by the observation unit 5, and, in this way, the location of the particle 3 is detected.
  • an LCD device is formed of an LCD panel 11 and a light source 12 for providing a back illumination of the panel 11.
  • the latter is formed of a liquid crystal cell 13 which is located between two spaced parallel glass plates 14 and 15.
  • the outer surfaces of the plates 14 and 15 are coated by a pair of polarizing films 16 and 17, respectively.
  • an outer surface of the polarizer film 17 is covered with a thin, transparent, protective layer 18. It will be readily understood that if dust particles are trapped beneath the protective layer 18, they would not be detected by the conventional technique described above.
  • FIG. 3 there is illustrated an inspection system, generally designated 20, which is constructed and operated according to the invention.
  • the system 20 is associated with a display device 22 of a known kind for inspecting its LCD panel 24.
  • the device 22 typically includes a light source 26 for illuminating the panel 24.
  • the panel 24, in turn, comprises an LC cell 28 and a pair of polarizers 30 and 32 supported on opposite sides of the cell 28.
  • the polarizer 32 is covered with a protective film 34. As shown, two dust particles Pi and P 2 are located on surfaces 32a and 34a of the polarizer 32 and the film 34, respectively.
  • the system 20 comprises a pattern generator 36 connected to a computer device 38 fitted with a screen 38a.
  • the pattern generated is operated by the computer 38 in a manner to actuate a plurality of the panel's pixels (not shown) and generate a certain pattern on the display panel 24.
  • Interconnected between the pattern generator 36 and the LCD panel 24 is prober 40 which provides an electrical communication between them.
  • a sensor 42 is accommodated opposite to the device 22 for acquiring an image of the pattern generated on the panel 24.
  • the sensor 42 may be of any known kind capable of receiving light coming out of the display panel 24 and providing output signals representative of the image of the panel 24.
  • KAPPA's CF 8/1DX CCD-camera having 752x582 picture elements may be used.
  • the sensor 42 is preferably provided with a blurring apparatus 43 for continuously blurring the images.
  • the sensor 42 is also connected to the computer device 38 which operates in a manner to grab the images acquired by the sensor 42 and display the same on the screen 38a.
  • Interconnected between the computer device 38 and the sensor 42 is an image processor 44.
  • the image processor 44 may be of any known kind adapted for receiving data representative of the acquired images, analyzing the received data and providing information indicative of non-uniformities in the intensities of light signals forming the acquired images, these light signals corresponding to respective pixels of the display panel 24. This information is displayed on the screen 38a.
  • All the above components of the inspection system 20 are well known per se and, therefore, need not be described in more detail except to note that they are, preferably, constructed and operated similar to those disclosed in the EP Publication No. 95301647.
  • the computer device 38 and the image processor 44 may be installed within a common workstation such as, for example, commercially available Sun-Ultra 2, Model 2170.
  • polarizer 46 is accommodated in the optical path of light, generally indicated 48, ensuing from the device 22.
  • the polarizer 46 is supported for either reciprocating movement into and out of the optical path of the light 48, or/and rotation in a plane perpendicular to the optical path of the light 48.
  • a processor 50 which is coupled to the image processor 44 and operated by a suitable software for processing data generated by the image processor 44, namely the information indicative of the non-uniformities in the light signals forming the acquired image.
  • the processor 50 may be a constructional utility of the image processor 44.
  • the LCD device 22 is put in operation by actuating the pattern generator 36 which, in turn, actuates the display panel pixels so as to generate a sequence of patterns formed of preset pixels subsets as described above.
  • the light 48 coming out of the LCD device 22 is directed onto the sensor 42 through the external polarizer 46 and the blurring apparatus 43. It is appreciated that the light 48 is composed of two light components 54 and 56, wherein the light component 54 is formed by light passing through the particles Pi and P 2 . It is appreciated that, owing to the provision of the internal polarizer 32, the light 56 is linearly polarized, while the light 54, due to reflection and diffraction effects, is depolarized, scattered forward light.
  • the external polarizer 46 is supported for sliding movement into and out of the optical path of the light 48.
  • the polarizer 46 is in its inoperative position being displaced away from the optical path of the light 48. Therefore, both the linearly polarized light 54 and depolarized light 56 pass through the polarizer 46.
  • the sensor 42 continuously captures the blurred images of the generated patterns, these images being formed of the both light components 54 and 56, and produces electrical signals representative of the intensities of the received light corresponding to the respective actuated pixels of the display panel 24.
  • the electrical signals are received by the image processor 44 that performs a so-called 'display pixels intensities uniformity test'.
  • This test consists of the analyzing the received signals and mapping the distribution of the intensities of the light signals within the display panel, so as to detect the non-uniformities in the intensities of pixels.
  • any known model may be employed. For example, a central tendency of the intensities values is computed so as to define a normal intensity for the display panel pixel. The intensities values of the actuated pixels are then compared to the normal value and those pixels whose intensities are other than normal are identified as defective pixels. This is immediately displayed on the screen 38a in the form of a first list of defects (not shown). Obviously, a real image of the pattern may be additionally displayed on the screen 38a.
  • the polarizer 46 is shifted into its operative position so as to be located in the optical path of the light 48.
  • the polarizer 46 has its plane of a preferred transmission which is oriented perpendicular to the plane of polarization of the light 56.
  • Light 56 does not pass through the polarizer 46 and, consequently, the image captured by the sensor 42 is formed solely of the light component of the depolarized, scattered light 54 having a plane of polarization parallel to that of the preferred transmission of the polarizer 46.
  • the image processor 44 is again operated for identifying non-uniformities in the intensities of light signals corresponding to respective pixels and providing output information in the form of a second list of defects.
  • the second list of defects is indicative of those pixels of the pattern generated on the LCD panel 24 which are blocked by the particles Pi and P 2 .
  • the processor 50 being inputted by the image processor 44, operates in a manner to compare the first and second lists of defects so as to detect and subtract those defects which appear in both lists and provide final data representative solely of those pixels which are really defective, i.e. their intensities are different from the normal value.
  • the polarizer 46 is rotatable between first and second operative positions thereof, in which its plane of the preferred transmission is parallel and perpendicular, respectively, to the plane of polarization of the light 56.
  • the second operative position of the polarizer 46 is clearly illustrated in Fig. 5.
  • the linearly polarized light 56 does not pass through the polarizer 46 and, therefore, only respective light component of the depolarized, scattered forward light 54 is sensed by the sensor 40 providing an image of the panel 24 which is presented on the screen 38a as bright spots Pi' and P 2 ' on a dark background.
  • the display panel 24 is at this stage of inspection turned on its maximum brightness.
  • an electro-optical external polarizer may be employed for the same purpose, namely to selectively allow the linearly polarized light 56 to pass therethrough.
  • the first and second images may be acquired simultaneously.
  • more than one sensor, as well as more image processors, are required for parallel capturing and processing the images.
  • a beam splitter may be accommodated in the optical path of the light coming out of the display device for splitting the light into two separate portions, each formed of completely polarized and depolarized light.
  • One light portion will pass through a polarizer whose plane of a preferred transmission is perpendicular to the plane of polarization of the polarized light, and will therefore define an image formed solely of a depolarized light.
  • the other light portion will define an image formed of both the polarized and depolarized light.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Liquid Crystal (AREA)

Abstract

L'invention porte sur un système et un procédé de contrôle d'une lumière polarisée de manière linaire et produisant une matrice (24) de pixels, ce système et ce procédé permettant de localiser dans la matrice les pixels défectueux. Le procédé consiste à éclairer la matrice (24) de pixels de façon à générer une sortie de lumière, à obtenir des première et seconde images de la matrice de pixels pour détecter s'il y a ou non des non uniformités dans les intensités de lumière correspondant aux pixels respectifs de la matrice (24); à former une seconde image d'une composante prédéfinie de lumière émanant de la matrice de pixels, la composante lumineuse ayant une certaine polarisation, et à analyser les première et seconde images pour déterminer les emplacements des pixels défectueux dans la matrice.
PCT/IL1998/000479 1997-10-06 1998-10-01 Systeme et procede de controle optique Ceased WO1999018472A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000515203A JP2001519545A (ja) 1997-10-06 1998-10-01 光学的検査法及びシステム
KR1020007003633A KR20010030932A (ko) 1997-10-06 1998-10-01 광학 검사 방법 및 시스템
AU94564/98A AU9456498A (en) 1997-10-06 1998-10-01 Optical inspection method and system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IL12188997A IL121889A0 (en) 1997-10-06 1997-10-06 Optical inspection method and system
IL121889 1997-10-06

Publications (1)

Publication Number Publication Date
WO1999018472A1 true WO1999018472A1 (fr) 1999-04-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL1998/000479 Ceased WO1999018472A1 (fr) 1997-10-06 1998-10-01 Systeme et procede de controle optique

Country Status (6)

Country Link
JP (1) JP2001519545A (fr)
KR (1) KR20010030932A (fr)
AU (1) AU9456498A (fr)
IL (1) IL121889A0 (fr)
TW (1) TW366475B (fr)
WO (1) WO1999018472A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61178648A (ja) * 1985-02-04 1986-08-11 Seiko Epson Corp 液晶表示素子検査装置
JPH01138476A (ja) * 1987-11-25 1989-05-31 Rohm Co Ltd 半導体素子の不良解析装置
JPH03217817A (ja) * 1990-01-24 1991-09-25 Nippon Maikuronikusu:Kk 液晶表示パネルの検査方法と検査装置
JPH08292406A (ja) * 1995-04-24 1996-11-05 Advantest Corp Ｌｃｄパネル検査装置
JPH09257641A (ja) * 1996-03-26 1997-10-03 Seiko Epson Corp 液晶パネルの表示面検査方法及び装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61178648A (ja) * 1985-02-04 1986-08-11 Seiko Epson Corp 液晶表示素子検査装置
JPH01138476A (ja) * 1987-11-25 1989-05-31 Rohm Co Ltd 半導体素子の不良解析装置
JPH03217817A (ja) * 1990-01-24 1991-09-25 Nippon Maikuronikusu:Kk 液晶表示パネルの検査方法と検査装置
JPH08292406A (ja) * 1995-04-24 1996-11-05 Advantest Corp Ｌｃｄパネル検査装置
US5734158A (en) * 1995-04-24 1998-03-31 Advantest Corp. LCD panel test apparatus
JPH09257641A (ja) * 1996-03-26 1997-10-03 Seiko Epson Corp 液晶パネルの表示面検査方法及び装置

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 010, no. 389 (P - 531) 26 December 1986 (1986-12-26) *
PATENT ABSTRACTS OF JAPAN vol. 013, no. 389 (P - 925) 29 August 1989 (1989-08-29) *
PATENT ABSTRACTS OF JAPAN vol. 015, no. 503 (P - 1290) 19 December 1991 (1991-12-19) *
PATENT ABSTRACTS OF JAPAN vol. 098, no. 002 30 January 1998 (1998-01-30) *

Also Published As

Publication number Publication date
JP2001519545A (ja) 2001-10-23
KR20010030932A (ko) 2001-04-16
IL121889A0 (en) 1998-03-10
AU9456498A (en) 1999-04-27
TW366475B (en) 1999-08-11

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