WO1999051333A1 - Treatment chamber - Google Patents

Abstract

A treatment chamber comprising an inlet port (2) through which helium gas is introduced into a space, an outlet port (1) through which the air replaced with the helium gas from the upper part of the space as the helium gas is introduced thereinto is exhausted, and a treatment space provided in the space and containing a helium gas atmosphere. With this constitution, a material which is easily influenced by the air can be stored and manufactured easily and safely without the influence of the air. Further, a work which produces a large quantity of dust and a work which is not suitable to be worked in the presence of dust can be performed with an improved working efficiency.

Description

 Description Processing room Technical field

 The present invention relates to a processing chamber for performing processing such as welding, soldering, forging, and filling concrete. Background art

 There are various types of work and processes that are routinely performed, for which the presence of air is undesirable.However, conventionally, when performing such work, the absence of air, that is, the creation of a vacuum work space , In which the work was performed.

 However, to create a vacuum space, equipment such as a vacuum pump is required, which costs capital investment. Further, it is difficult to completely eliminate the presence of air, and thus the cost is not as high as that of the above-mentioned equipment. Further, when a vacuum is applied, it is necessary to support the atmospheric pressure from outside the space, and the processing chamber constituting the processing space must be solid. In addition, a processing chamber having a size appropriate for the processing target had to be expected and designed in advance, and it was difficult to easily use the processing chamber when the target was large.

On the other hand, when performing work that requires dust removal, such as when a large amount of dust is generated or when the work must be performed in an atmosphere where no dust exists, the dust floats in the air and takes time to drop. Therefore, removal was difficult and some means of removal had to be provided, and there was a problem in terms of cost. Disclosure of the invention

 In order to solve such a problem, the inventor of the present invention has an inflow port for flowing helium gas into a space, and can replace the air from above in the space with the inflow of helium gas and discharge the air below. A processing chamber having a simple exhaust port and a processing space in a helium gas atmosphere in the above space was developed.

 Since there is no air in the processing space, there is no problem in the operation where it is not preferable to perform the operation in the presence of the air. In addition, since there is no vacuum, it is not necessary to harden the work room in consideration of the pressure from the atmospheric pressure, and air enters the work room when raw materials and workers enter and leave. Since there is little fear, it is easy to replenish raw materials in the processing chamber. Furthermore, helium is lighter than air and accumulates upwards in a closed space and pushes down air downwards, making replacement in the space easier.

 There is no problem even if the helium in the processing space is pressurized. That is, in the case of a processing space constituted by a covering sheet described later, it is preferable to use a pressurized helium atmosphere because a working space can be secured.

In order to fill the space with helium gas and create a helium atmosphere, it is convenient to focus on the molecular weight of helium and to replace it with air. In other words, when a helium inlet is provided in the space and helium flows through the inlet, the helium is light and thus accumulates above the space, and the air is pushed down the space. Therefore, if a discharge port for discharging air is provided below the space, the air is discharged from the discharge port, and the space is filled with helium. Also, if helium is discharged from the outlet, it is considered that the space is filled with helium. I just need.

 Since helium gas is lighter than air, it is filled from above in a closed space. Therefore, it is possible to perform the work in the work where the presence of air is not preferable in the upper work room and the work in which the loss of air is not particularly problematic in the work room below. Therefore, according to the present invention, a processing space in a helium gas atmosphere can be provided above, and a non-processing space in an air atmosphere can be provided below.

 It is necessary that at least the upper end and the side wall of the processing space filled with helium gas are sealed, and it is preferable that the processing space be a closed space. However, such a processing space can be constituted by a building structure. .

 Further, since the gas is present in the space filled with the helium gas, the gas is not compressed by the outside atmospheric pressure. Also, helium is lighter than air and is filled from the top. Therefore, if the upper end and the side wall are sealed, the space does not need to be a particularly strong structure. For example, by providing a coating sheet impermeable to gas, helium flows into the interior surrounded by the sheet, and it is easy to create a processing space in the helium atmosphere.

 In particular, in the case of the processing chamber of the present invention in which the processing space is provided with a processing space that generates airborne substances in an air atmosphere, the processing can be performed in an atmosphere of helium gas. Impurities such as dust and mist can be eliminated. Therefore, for example, as described later, it can be suitably applied to a coating / drying process and the like.

On the other hand, in the present invention, an argon gas can be used instead of the helium gas. Even when argon gas is used, it can be applied to a space similar to the above. In addition, since argon gas is cheaper than helium gas, in that respect, it is necessary to employ argon gas in the present invention. Layer preferred. However, since argon gas is heavier than air, it is difficult to create a processing space similar to that of helium gas. Therefore, the present invention introduces helium gas into the processing chamber space, exhausts air heavier than helium gas from the processing chamber space, and then guides argon gas into the processing chamber space to perform processing. A method of filling the processing chamber with argon gas, which is characterized by replacing the helium gas in the chamber space with argon gas and filling the processing chamber space with argon gas, was adopted. Further, in order to carry out the same method, an inflow port through which helium gas flows into the space, and the air can be displaced from above in the space with the inflow of the helium gas to discharge the air below. A processing chamber having an exhaust port, an inlet for argon gas for replacing the helium gas flowing into the space, and a processing space having an atmosphere of an argon gas in the space was employed.

 Note that the treatment chamber of the present invention may be provided with an atmosphere of helium gas or argon gas. Therefore, a processing chamber equipped with an atmosphere of a gas layer composed of a plurality of inert gases such as helium gas and other inert gases, for example, argon gas, xenon gas, and carbon dioxide gas, or argon gas and other inert gases. A processing chamber having an atmosphere of a gas layer composed of a plurality of inert gases such as a gas such as xenon gas and carbon dioxide gas can be employed.

 ADVANTAGE OF THE INVENTION According to the processing chamber of this invention, storage of sensitive materials in the presence of air or any operation | work can be performed easily and safely. In addition, since the dust is unlikely to float in the gas and immediately falls to the ground, it is possible to improve the work efficiency of the work that generates a large amount of dust and the work that is not preferable to be performed in the presence of the dust.

Further, the present invention can be applied to a processing chamber in which the processing space is a welding space. The presence of air in the welding process is undesirable because it causes the metal of interest to be denatured. For example, iron is easily oxidized and denatures welds Is often caused. The present invention can be noted that helium or argon is chemically stable and can hardly make compounds. In addition, fire may be a problem in the welding process due to the use of fire, but in a helium or argon atmosphere, everything does not burn and such problems are eliminated.

 In addition, the present invention can be configured as a processing chamber in which the processing space is a welding space for titanium. In welding titanium to titanium, the presence of nitrogen in the air poses a problem. That is, in welding titanium, there is a problem that the welded portion is easily deformed by nitrogen and loses strength and the like. This problem is solved by the processing chamber of the present invention, which allows the operation to be performed in a helium or argon atmosphere.

 Further, the present invention can be configured as a processing chamber in which the processing space is a processing space for soldering. Performing the soldering in the presence of air is not preferable because the object is oxidized. In other words, soldering can be considered as a kind of welding, and therefore, the problems that may occur in the welding operation are greatly duplicated.

 Further, the present invention can also be configured as a processing chamber in which the processing space is a space for a forging process or a space for a rolling process for a forging product. Performing such a forging process and a rolling process in the presence of air has a problem that the object is denatured. As described above, since helium or argon can hardly produce a compound, it is possible to ensure an effect that a substance in a high energy state is not denatured even when it comes into contact with helium or argon. Therefore, it is possible to produce high-purity iron and the like without subjecting the object to denaturation.

Further, according to the present invention, the processing space can be configured as a processing chamber including a processing space for filling concrete into the formwork. Performing such work in the presence of air can replace helium or argon gas with air in concrete. As a result, it is possible to prevent deaeration of buildings and deterioration of concrete after construction.

 Further, the present invention can also be configured as a processing chamber having a space in which the processing space performs the painting step or the drying step. When the coating operation is generally performed in the presence of oxygen, oxidation of the object to be coated may become a problem, and there is a problem that the coating film easily peels off. In addition, a large amount of paint mist is generated when spraying paint, but the mist generated in the air floats in the air, but falls quickly to the ground surface in helium to prevent contamination other than objects to be coated. Is possible. In some cases, a baking step is performed by drying after coating. In this case, oxidation of the coating film or the surface of the object to be coated is prevented, and the adhesive strength is improved.

 Further, the present invention can also be suitably used as a processing chamber in which a processing space forms a storage. Using a processing chamber filled with helium or argon gas as a storage can prevent denaturation of foods and the like, and improve storage capacity. That is, it is publicly known that in the absence of oxygen filled with an inert gas, the oxidation of food and the like does not take place, and is effective in preserving food, but all of them are those in which a container is filled with an inert gas. Yes, it was only a transaction in a market transaction. The present inventor has found a method for easily filling the processing chamber with helium or argon gas, and has come to an invention in which the method is used as a storage. Such storage is also highly susceptible to the effects of oxygen, but is excellent for storage. For example, yellow phosphorus, which can spontaneously ignite at certain temperatures and cannot be stored in a normal storage, does not burn in a helium or argon atmosphere and can be stored safely.

In addition, when the packaging operation is performed normally in a helium or argon atmosphere, the container is naturally filled with helium or argon gas, which has the same effect as the conventional inert gas filling and packaging processing. In other words, what kind of equipment Inert gas filling can be performed without the need, and capital investment can be reduced. According to the present invention, the processing space may be a processing chamber configured as a space for packaging processing.

 Further, the present invention can also be used as a processing chamber in which the processing space is configured as a space for polishing the blade. In the polishing process of the blade, there was a problem that the blade edge was baked by the action of oxygen in the air and became brittle. By performing such an operation in an atmosphere of helium or argon, burning can be prevented, and the production of a blade having excellent sharpness becomes easy.

 Further, the present invention can also be adopted as a processing chamber in which the processing space is configured as a space for the processing of charging explosives. When manufacturing explosives, it is necessary to fill the tube with explosives, but mishandling in such a process often causes an explosion and is dangerous. Since the explosion is considered to be the rapid combustion of explosives and oxygen in the air, the risk of explosion in an atmosphere without oxygen can be significantly reduced.

 Further, the present invention can also be adopted as a processing chamber in which the processing space is a space for vapor deposition processing. This is effective because high-quality vapor deposition can be performed without vapor deposition in a vacuum.

Further, the present invention can also be adopted as a processing room in which the processing space is constituted by a space for food processing. As mentioned above, food deteriorates in the presence of oxygen, and it is difficult to store it for a long time, but there are problems in the manufacturing process. In other words, in the process of producing food, by performing the treatment in a treatment space in an atmosphere of helium or argon, oxidation of the food is prevented, and long-term storage is enabled. Food includes not only food but also drinks. For example, it is also applied to processing such as roasting of coffee beans. Performing plastic production, molding, metal refining, molding, and glass production and melt molding in the presence of air in the air is not preferable because the respective objects are susceptible to denaturation. Also, some operations use fire, which may cause fire problems. Performing such an operation in a processing chamber provided with a processing space in a helium or argon atmosphere can prevent denaturation and prevent a fire problem.

 Further, the present invention can also be applied to a processing chamber in which the processing space forms a clean room. Because helium is lighter than air, airborne substances such as dust fall quickly to the ground surface in a helium atmosphere. Therefore, it is preferable to use the processing space as a clean room that does not like the presence of dust and the like. In addition, there are many bacterial species that can survive only in the presence of oxygen, and in a helium or argon atmosphere, the growth of such bacterial species can be prevented.

 Further, the present invention can also be applied as a processing chamber in which the processing space is a kneading space for cement. During the kneading of cement, there was a problem that the cement powder floated in the air, which was not only unfavorable for hygiene, but also caused contamination by adhesion to other nearby substances. Performing such a kneading operation in a working space in a helium atmosphere can solve such a problem because the suspended cement powder quickly falls to the ground surface.

It is preferable from the viewpoint of removing dust that the manufacturing and assembling operations of semiconductors and the like are performed in the processing space in the helium atmosphere. In other words, since it is necessary to completely remove impurities from semiconductors and the like, it is preferable to work in a clean room, and equipment for this is required. Performing such work in a helicopter atmosphere allows airborne substances such as dust to quickly fall to the surface of the ground, and achieves good results in semiconductor manufacturing and assembly work. It is possible to INDUSTRIAL APPLICABILITY The present invention can be applied to a processing chamber in which a processing space forms a space for a semiconductor assembling process or a manufacturing process.

 Further, the present invention can be applied to a processing room in which the processing space forms a space for fire extinguishing work. If a fire occurs in a space with an air atmosphere, the helium gas flows into the processing chamber, causing helium to accumulate in a layer above, so that the fire does not spread above the helium layer and is easily extinguished. A fire is set.

As described above, according to the present invention, helium gas is introduced from the inlet of the processing chamber, and is replaced with air from above in the space of the processing chamber as the helium gas flows in, and the air is discharged from the exhaust port below. After discharge, a treatment method in a treatment space in a helium gas atmosphere, or introduction of lithium gas from the inlet of the treatment chamber, and replacement of air from above in the treatment chamber space with the inflow of helium gas Then, after the air is discharged from the exhaust port below, a processing chamber capable of implementing a processing method in which argon gas is introduced from the inflow port and processed in a processing space in an argon gas atmosphere can be employed. Helium gas is introduced from the inlet of the processing chamber, and is replaced with air from above in the space of the processing chamber along with the inflow of the helium gas, and the air is discharged from the exhaust port below, and then helium is discharged. Helium gas is introduced from the processing chamber obtained in the processing space in a gas atmosphere or from the inlet of the processing chamber, and is replaced with air from above in the processing chamber space as the helium gas flows in. After the air is exhausted from the exhaust port at the lower part, it is processed in a processing space in a helium gas atmosphere, whereby a processed product obtained can be produced. Therefore, it is possible to solve the above-mentioned technical problems that have been treated in an air atmosphere. BRIEF DESCRIPTION OF THE FIGURES 1 P98 / 01617

FIG. 1 is a conceptual diagram showing the entire processing chamber according to the present invention.

 FIG. 2 is a conceptual diagram of a processing room including a processing space having a helium gas atmosphere on the upper floor and a processing space having an air atmosphere on the lower floor.

 FIG. 3 is a schematic diagram of a simplified processing chamber according to the present invention. BEST MODE FOR CARRYING OUT THE INVENTION

 FIG. 1 is a view showing the concept of a processing chamber according to the present invention. The processing chamber according to the present invention has four closed side walls and a closed ceiling, and requires at least an exhaust port 1 for exhausting air and an inlet 2 for inflow of helium gas. There is an entry port for sending supplies into the processing chamber and an entrance port for humans. The exhaust port 1 needs to be provided below the processing chamber, but the location of the inlet 2 is not particularly limited. However, in order to effectively make the air layer exist below the helium layer, it is preferable to provide the inflow port 2 above the processing chamber.

 Since there is no oxygen in the processing chamber according to the present invention, it is necessary to take some kind of treatment when humans enter the work, and widely known treatments can be used for this treatment. For example, a gas mask or a whole body hermetically sealed and provided with a supply and exhaust device such as oxygen can be exemplified.

 In such a treatment chamber, the treatments considered to be effective are not limited to those described above, but require the storage and production of materials that do not favor contact with air, work to generate large amounts of dust, and removal of dust. It can be widely and safely used for these tasks.

It is also possible to have two layers of treatment room, one above the helium atmosphere and one below the air atmosphere. Fig. 2 shows a conceptual diagram of a processing room consisting of a processing space with a helium gas atmosphere upstairs and a processing space with an air atmosphere downstairs. 3 in the figure indicates the threshold for separating both layers. You. In addition, in order to reliably maintain the air space downstairs, it is preferable that the outlet 1 be provided to some extent above. In other words, it is unlikely that helium accumulates below the position of the outlet 1, so that air can be reliably maintained below the outlet 1.

 When the processing space in the helium atmosphere is constituted by the covering sheet, the sheet may be covered on the work object, and the helium gas may flow from the bottom. Helium is replaced with air in sheet 、, and eventually helium is filled in the sheet. This treatment space is effective outdoors, for example, when filling and painting concrete in the building construction process.By changing the size of the sheet, it can be used in a helium atmosphere regardless of the size of the target object. This is preferable in that a processing space can be created. Hereinafter, the mechanism for filling the processing chamber with helium gas will be described in more detail. In FIGS. 1 and 2 in which the processing space is a processing chamber having a structure, the helium gas flowing in from the inflow port 2 accumulates upward in the processing chamber and pushes air downward. HE in the figure indicates a helium layer, and A indicates an air layer. As the helium gas continues to flow, the thickness of the helium layer HE increases, and the air constituting the air layer A is exhausted from the outlet 1 to the outside of the processing chamber. Therefore, the air layer that has existed in the processing chamber is eventually replaced by the helium layer, and the processing chamber is filled with helium gas. If helium gas is contained at a certain concentration in the gas discharged from the exhaust port, it can be considered that the gas in the processing chamber is filled with helium gas. The specific concentration of the exhaust gas may be freely set according to the anaerobic degree of the treatment, and is not particularly limited.

In Fig. 2, a helium layer must be used on the upper floor and an air layer must be used on the lower floor. In addition, it is not preferable to provide it at the bottom in order to secure an air space. In addition, there are 3 floors above and below It is necessary to provide a gap to allow sufficient ventilation between the lower part, and the size of the gap may be determined by the inflow speed of the helium gas.

 When argon gas is used, for example, in FIG. 1, the inlet 2 for helium gas inflow provided in the upper part of the processing chamber is used as an outlet for helium gas exhaust, and It is preferable that the air exhaust port 1 provided at the lower part be used as an argon gas inlet. In this way, helium gas is introduced into the processing chamber space, air that is heavier than helium gas is exhausted from the processing chamber space, and helium gas lighter than argon gas is discharged from the lower part of the processing chamber. By the inflow of the gas, the gas can be exhausted from the helium gas inlet 2 provided in the upper part of the processing chamber. Note that it is also possible not to completely exhaust the Helium gas. In this case, the processing chamber can have an atmosphere of helium gas at the top of the processing chamber and an atmosphere of argon gas at the bottom.

The processing in the processing chamber of the present invention can be performed by introducing a robot or the like into the processing chamber, but the processing can also be configured to be performed by the operator himself. For example, as shown in FIG. 3, an outer wall 5 constituting a closed space 4 filled with an inert gas, and a continuous space provided on the outer wall 5, connected to an outer space 6 inside the closed space 4, It is possible to employ a processing room provided with a work partition 7 into which workers enter. The outer wall 5 may be an inelastic structure, but may be made of an elastic material or an elastic body such as rubber or elastomer together with the working partition 7. In FIG. 3, the working partition 7 has a human shape, which facilitates the work. 8 indicates an operator. Further, it is preferable that the pressure in the closed space 4 inside the outer wall 5 is almost equal to the pressure in the outer space 6 outside the outer wall 5 or that the pressure in the outer space is larger. As a result, the working bulkhead 7 A space in which a worker can work can be secured inside. Fig. 3 is a schematic diagram of a simplified processing chamber, so this type of processing chamber has an inlet for helium gas and an outlet for air, and a loading port for the processing object into the space. Provided.

 Although the present invention discloses a method of filling an inert gas such as helium gas or argon gas, a space filled with high-purity oxygen can be created by using the above-described filling method. . For example, helium gas is introduced into the processing chamber space, air that is heavier than helium gas is exhausted from the processing chamber space, and then oxygen gas is introduced into the processing chamber space, and helium gas in the processing chamber space is removed. An oxygen gas filling method in which the processing chamber space is filled with oxygen gas instead of oxygen gas can also be employed. Industrial applicability

 As described above, the processing chamber of the present invention is used for welding processing, soldering, fabrication, rolling of structures, bleeding of concrete, painting and drying, storage of foods and the like, packaging, cutting of blades, polishing of explosives, etc. Processing room for filling, vapor deposition, manufacturing plastics, forming work, metal refining, forming work, glass manufacturing, melt forming, clean room, kneading cement, manufacturing and assembling semiconductors, fire fighting work, etc. Useful.

Claims

The scope of the claims The inside of the space has a Tit nozzle, 9 V inlet, and an exhaust port that can be replaced with air from above in the space with the inflow of helium gas and discharge the air below. A processing room with a processing space in a helium gas atmosphere. 2. The processing chamber according to claim 1, wherein a processing space in a helium atmosphere is provided above, and a non-processing space in an air atmosphere is provided below. 3. The processing chamber according to claim 1, wherein the processing space is a processing space accompanied by generation of airborne substances under an air atmosphere. 4. An inlet for injecting helium gas into the space, an exhaust port for displacing air from above in the space with the inflow of helium gas and discharging the air below, and an air outlet in the space. A processing chamber having an inlet for an argon gas that replaces the helium that has flowed into the chamber, and a processing space having an atmosphere of an argon gas in the space. 5. The processing chamber according to claim 1, further comprising a processing space for a plurality of gas layers formed of another inert gas in the space. 6. An outer wall constituting an enclosed space filled with an inert gas, and a working partition provided continuously with the outer wall, connected to the outer space inside the enclosed space, and into which an operator enters. The processing room described in 1. 7. Introduce helium gas into the processing chamber space, exhaust air that is heavier than helium gas from the processing chamber space, and then introduce argon gas into the processing chamber space to introduce helium gas in the processing chamber space. Filling the processing chamber with argon gas by substituting the argon gas with argon gas. 8. Introduce helium gas from the inlet of the processing chamber, replace the air from above in the space of the processing chamber with the inflow of the helium gas, and discharge the air from the exhaust port below and then the helium gas atmosphere. Processing method that performs processing in the processing space. 9. Helium gas is introduced from the inlet of the processing chamber, and is replaced with air from above in the space of the processing chamber with the inflow of helium gas, and the air is discharged from the exhaust port below, and then the helium gas atmosphere is released. Processed product obtained by processing in the processing space. 10. Helium gas is introduced from the inlet of the processing chamber, and is replaced with air from above in the space of the processing chamber as the helium gas flows in, and the air is discharged from the exhaust port below, and then the argon gas is discharged. Is introduced from the inlet and treated in a processing space in an argon gas atmosphere. 1 1. Helium gas is introduced from the inlet of the processing chamber, and is replaced with air from above in the space of the processing chamber with the inflow of the helium gas, and the air is discharged from the exhaust port below, and then argon. Gas is introduced from the inlet,  'Processed material obtained by processing in an atmosphere processing space.