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WO1999046027A1 - Orifice d'admission pour ecoulement fluide - Google Patents

Orifice d'admission pour ecoulement fluide Download PDF

Info

Publication number
WO1999046027A1
WO1999046027A1 PCT/US1999/004397 US9904397W WO9946027A1 WO 1999046027 A1 WO1999046027 A1 WO 1999046027A1 US 9904397 W US9904397 W US 9904397W WO 9946027 A1 WO9946027 A1 WO 9946027A1
Authority
WO
WIPO (PCT)
Prior art keywords
inlet
fluid
inlet body
passage
inert gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1999/004397
Other languages
English (en)
Inventor
Timothy L. Herman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advanced Technology Materials Inc
Delatech Inc
Original Assignee
Advanced Technology Materials Inc
Delatech Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Technology Materials Inc, Delatech Inc filed Critical Advanced Technology Materials Inc
Priority to JP2000535436A priority Critical patent/JP2002505941A/ja
Priority to KR1020007010072A priority patent/KR20010034592A/ko
Priority to EP99908567A priority patent/EP1062017A4/fr
Publication of WO1999046027A1 publication Critical patent/WO1999046027A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
    • B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
    • B01D47/027—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath by directing the gas to be cleaned essentially tangential to the liquid surface

Definitions

  • the invention relates to a method and apparatus for preventing particulate material from adhering to the inner surface of an inlet.
  • Certain industries produce toxic gaseous effluent as a result of their particular manufacturing or fabrication process.
  • chemical vapor deposition and etch processes associated with semiconductor fabrication utilizes highly toxic and pyrophoric gases. Many of these gases go through the process tool without reacting, or react to form other gaseous species and/or particulate. These gases and particulate are then exhausted from the process tool and require treatment prior to going to the atmosphere.
  • the effluent gases may be scrubbed by reacting with liquid. Many times this reaction will cause particulate to form which is either washed away or collected and removed.
  • effluent gases are introduced through an inlet into a chamber where jet sprays spray the gases with liquid. The gaseous material reacts with the liquid and many times forms a solid particulate.
  • particulate material tends to adhere to the inner surface of the inlet and chamber due to moisture which have collected thereon and may impede the flow of gases through the inlet and chamber.
  • Various methods and apparatus have been devised to prevent adherence of particulate material to the inner surfaces of inlets and chambers.
  • the scrubbing chamber 1 has a cylindrical chamber 2. tangential water intakes 3. a tangential gaseous effluent intake 4 and opening 5. Water is injected tangentially into cylindrical chamber 2. which forms a downwardly spiraling wall of water along the inner surface of cylindrical chamber 2. Rings 6 serve as ledges in the path of the downwardly spiraling wall of water, forming curtains of water across gaseous effluent opening 5. Gaseous effluent is introduced tangentially into cylindrical chamber 2. The gaseous effluent diffuses through the curtains of water and spirals up the chamber. Particulate material in the gaseous effluent reacts vvith the water and is carried awav bv the water through a funnel section 7 and outlet 8. 2
  • the invention relates to a method for preventing particulate material from adhering to an inner surface defining a passage through an inlet body, the inlet body having a proximal inlet end and a distal exit end. comprising the steps of forming a film of inert gas within the passage at the proximal inlet end of the inlet body, forming a wall of swirling fluid within the passage at the distal exit end of the inlet body, and forming a solid cone of fluid as the wall of swirling fluid exits the inlet body.
  • the invention in another embodiment, relates to an apparatus for preventing particulate material from adhering to an inner surface defining a passage through an inlet body, the inlet body having a proximal inlet end and a distal exit end. comprising a porous wall for forming a film of inert gas within the passage at the proximal inlet end of the inlet body, an outlet, circumferential reservoir and weir for forming a wall of swirling fluid within the passage at the distal exit end of the inlet body, which, when exiting the inlet body, forms a solid cone of fluid.
  • the invention in yet another embodiment, relates to an apparatus for preventing particulate material from adhering to an inner surface of an inlet, comprising an inlet body having an inner surface defining a passage through the inlet body, a film of inert gas within the passage at a proximal inlet end of the inlet body, a wall of swirling fluid within the passage at a distal exit end of the inlet body, and a solid cone of fluid at the exit of the inlet body.
  • Advantages and features of the invention include one or more of the following.
  • a film of inert gas along the inner surface of the proximal inlet end of the inlet and a wall of swirling fluid along the inner surface of the distal exit end of the inlet prevent solid accumulation.
  • a solid cone of fluid formed as the wall of swirling fluid exits the inlet prevents backflow of moisture through the exit.
  • Fig. 1 illustrates a prior art method for scrubbing effluent gases.
  • Fig. 2 illustrates an inlet according to one embodiment of the present invention.
  • Fig. 3 illustrates a closeup view of the method and apparatus for providing a film of inert gas according to the embodiment of Fig. 2.
  • Fig. 4 illustrates a closeup view of the method and apparatus for providing a wall of swirling fluid and solid cone of fluid according to the embodiment of Fig. 2.
  • an inlet is shown generally at 10.
  • the inlet 10 has an inlet body 15.
  • An inner surface 16 defines a passage through the inlet body 15.
  • the inlet body 15 is threaded at an upper opening 17 so as to enable the inlet to securely engage an outlet 18 from, for example, a combustion chamber (not shown).
  • a porous wall section 20, which may be a fritted pipe, is housed within the passage at a proximal inlet end of the inlet body 15.
  • An outer surface 21 of porous wall section 20 forms an external chamber 25 with the inner surface 16 of the inlet body 15.
  • a gas intake 26 is connected to external chamber 25 by a conduit 27.
  • the external chamber 25 receives a supply of inert gas. for example He. Ne. Ar. Kr.
  • Reservoir 40 receives a continuous injection of fluid through fluid intake 42 in a tangential direction so as to cause the fluid to swirl around within reservoir 40. As more fluid is injected, the fluid 4 level within reservoir 40 rises up and over weir 41 and down outlet pipe 35. coating an inner surface 37 of outlet pipe 35 with a wall of swirling fluid 45.
  • porous wall section 20 contains pores 23. It will be appreciated that pores 23 are spaced within porous wall section 20 so as to allow the inert gas to pass through porous wall section 20 in an evenly distributed manner.
  • the wall of swirling fluid 45 forms a solid cone of fluid 50.
  • the swirling motion of the fluid causes solid cone of fluid 50 to be formed.
  • inlet 10 receives a flow of effluent gases through outlet 18. which may be from, for example, a CVD process chamber.
  • effluent gases are heavily laden with toxic gaseous material and must be cleaned, or "scrubbed.” before being released into the atmosphere.
  • Some toxic gaseous material will react with moisture to form particulate material, which may adhere to inlet 10 upon contact with the inner surface of inlet 10. Over time, a layer of particulate material may form on the inner surface of inlet 10 and may clog inlet 10 and impede the flow of effluent gases.
  • the reactant particulate material is prevented from adhering to the inner surface of inlet 10 by a film of inert gas 30 and wall of swirling fluid 45. Effluent gases entering inlet 10 will encounter a film of inert gas 30 in the proximal inlet end of inlet body 15.
  • the film of inert gas 30 serves to cool the reactant particulate material and prevent them from adhering to the proximal inlet end of inlet body 15.
  • a wall of swirling fluid 45 at the distal exit end of inlet body 15 is encountered.
  • the wall of swirling fluid 45 serves to further cool the particulate material and prevent them from adhering to the distal exit end of inlet body 15. Particulate material that come in contact with wall of swirling fluid 45 are washed away by the fluid.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Air Transport Of Granular Materials (AREA)
  • Incineration Of Waste (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Treating Waste Gases (AREA)
  • Separation Of Particles Using Liquids (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Cette invention a trait à un procédé et à l'appareil correspondant permettant d'empêcher qu'un matériau particulaire n'adhère à la surface interne d'un orifice d'admission (10). Un segment de paroi poreuse (20) et une enceinte externe (25) sont conçues pour recevoir une alimentation (26, 27) en gaz inerte et ce, afin de constituer une pellicule de gaz inerte sur la surface interne (22) de l'extrémité proximale (15) de l'orifice d'admission (10). Cette pellicule (30) de gaz inerte empêche l'adhésion de matériau particulaire sur cette zone d'extrémité proximale (15) de l'orifice d'admission. Un réservoir circulaire (40) et un déversoir (41) sont conçus pour recevoir un fluide injecté tangentiellement (42) de manière à former une paroi (45) de fluide turbulent sur la surface interne de l'extrémité distale de sortie (35) de l'orifice d'admission (10). Le fluide se trouvant dans un cône plein (50) réagit avec le matériau particulaire diffusant dans ce cône et empêche l'humidité dispersée de reculer vers l'orifice d'admission (10) et de s'y diffuser.
PCT/US1999/004397 1998-03-10 1999-03-01 Orifice d'admission pour ecoulement fluide Ceased WO1999046027A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2000535436A JP2002505941A (ja) 1998-03-10 1999-03-01 流体流動注入体
KR1020007010072A KR20010034592A (ko) 1998-03-10 1999-03-01 유체 유동 유입구
EP99908567A EP1062017A4 (fr) 1998-03-10 1999-03-01 Orifice d'admission pour ecoulement fluide

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US3777098A 1998-03-10 1998-03-10
US09/037,770 1998-03-10

Publications (1)

Publication Number Publication Date
WO1999046027A1 true WO1999046027A1 (fr) 1999-09-16

Family

ID=21896239

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1999/004397 Ceased WO1999046027A1 (fr) 1998-03-10 1999-03-01 Orifice d'admission pour ecoulement fluide

Country Status (6)

Country Link
EP (1) EP1062017A4 (fr)
JP (1) JP2002505941A (fr)
KR (1) KR20010034592A (fr)
CN (1) CN1147345C (fr)
TW (1) TW476658B (fr)
WO (1) WO1999046027A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001059177A1 (fr) 2000-02-14 2001-08-16 Ebara Corporation Tuyau d'echappement equipe de moyens permettant de prevenir l'agglutination de sous-produit reactif et procede permettant de prevenir l'agglutination

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4015958A (en) * 1974-04-05 1977-04-05 Kurt Leschonski Wet centrifugal separator for gas
US4172708A (en) * 1977-04-22 1979-10-30 Shell Internationale Research Maatschappij B.V. Process and apparatus for use with a reactor for the partial combustion of finely divided solid fuel
US4279627A (en) * 1978-08-07 1981-07-21 Dresser Industries, Inc. Fine particle separation apparatus
US4388089A (en) * 1981-06-04 1983-06-14 Santek, Inc. Self-cleaning electro-inertial precipitator unit
US4986838A (en) * 1989-06-14 1991-01-22 Airgard, Inc. Inlet system for gas scrubber
US5846275A (en) * 1996-12-31 1998-12-08 Atmi Ecosys Corporation Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4015958A (en) * 1974-04-05 1977-04-05 Kurt Leschonski Wet centrifugal separator for gas
US4172708A (en) * 1977-04-22 1979-10-30 Shell Internationale Research Maatschappij B.V. Process and apparatus for use with a reactor for the partial combustion of finely divided solid fuel
US4279627A (en) * 1978-08-07 1981-07-21 Dresser Industries, Inc. Fine particle separation apparatus
US4388089A (en) * 1981-06-04 1983-06-14 Santek, Inc. Self-cleaning electro-inertial precipitator unit
US4986838A (en) * 1989-06-14 1991-01-22 Airgard, Inc. Inlet system for gas scrubber
US5846275A (en) * 1996-12-31 1998-12-08 Atmi Ecosys Corporation Clog-resistant entry structure for introducing a particulate solids-containing and/or solids-forming gas stream to a gas processing system

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1062017A4 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001059177A1 (fr) 2000-02-14 2001-08-16 Ebara Corporation Tuyau d'echappement equipe de moyens permettant de prevenir l'agglutination de sous-produit reactif et procede permettant de prevenir l'agglutination
EP1270763A4 (fr) * 2000-02-14 2004-09-15 Ebara Corp Tuyau d'echappement equipe de moyens permettant de prevenir l'agglutination de sous-produit reactif et procede permettant de prevenir l'agglutination
US7635501B2 (en) 2000-02-14 2009-12-22 Ebara Corporation Exhaust pipe having means for preventing deposition of a reaction by-product and method for preventing deposition of a reaction by-product

Also Published As

Publication number Publication date
CN1147345C (zh) 2004-04-28
TW476658B (en) 2002-02-21
EP1062017A1 (fr) 2000-12-27
EP1062017A4 (fr) 2002-02-06
KR20010034592A (ko) 2001-04-25
CN1299297A (zh) 2001-06-13
JP2002505941A (ja) 2002-02-26

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