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WO1997015826A1 - Capteur servant a detecter les hydrocarbures non brules - Google Patents

Capteur servant a detecter les hydrocarbures non brules Download PDF

Info

Publication number
WO1997015826A1
WO1997015826A1 PCT/SE1996/001355 SE9601355W WO9715826A1 WO 1997015826 A1 WO1997015826 A1 WO 1997015826A1 SE 9601355 W SE9601355 W SE 9601355W WO 9715826 A1 WO9715826 A1 WO 9715826A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
light
semiconductor substrate
ofthe
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/SE1996/001355
Other languages
English (en)
Inventor
Amir Baranzai
Ingemar LUNDSTRÖM
Anita Lloyd Spetz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Forskarpatent I Linkoping AB
Original Assignee
Forskarpatent I Linkoping AB
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forskarpatent I Linkoping AB filed Critical Forskarpatent I Linkoping AB
Priority to AU73558/96A priority Critical patent/AU7355896A/en
Publication of WO1997015826A1 publication Critical patent/WO1997015826A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G01N33/0013—Sample conditioning by a chemical reaction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/14—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature
    • G01N27/16—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of an electrically-heated body in dependence upon change of temperature caused by burning or catalytic oxidation of surrounding material to be tested, e.g. of gas
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array

Definitions

  • This invention is related to sensors ofthe kind that is described in the Swedish patent application 9403218-2 and similar sensors making use of a gas sensitive semiconductor device arranged on a semiconductor substrate.
  • the invention is particularly suited for sensors ofthe kind that on their surface are coated with catalytic material.
  • a drawback with these sensors is that they are not only sensitive to the substances in the gas that are to be investigated but additionally also for instance to light (ultraviolet) as pressure strains (piezo effect).
  • the sensitivity to light and pressure may in some instances lead to fault recording and a distortion ofthe measuring result respectively.
  • the object ofthe invention is partly to eliminate the above error sources, partly to make use of it for a more complete measurement ofthe combustion reaction.
  • this is achieved by the sensor being made as a "twin” or “triplet” or more if so is necessary, at which the sensor's structure is divided into several units. Alternatively several separately made sensors are arranged close to each other. One or more of these sensors or sensor parts are shielded or influenced in some other way so that the gas sensing reaction cannot take place. In this way this sensor part can produce a signal corresponding to a background ofthe sensor that is intended for the measurement of for instance the presence of unburnt fuel. In this way the measurement accuracy ofthe gas sensor can be increased most essentially and the influence of error sources can be eliminated.
  • the values that are obtained from the so to say inactivated gas sensors or parts thereof may for instance be the intensity of light flashes (or flames) and the flow velocity ofthe gas past the sensor. It is possible to consider an altering of gas sensor parts that are to be used for background elimination by poisoning ofthe catalytic surface by for instance lead, gold or some other metal, or with a retained catalytic surface layer by the applying of a (transparent) but catalytically inactive layer.
  • the substrate with the sensor is turned from the gas source and that the sensor parts that are sensitive to light are illuminated indirectly or from its back side. At this the light is detected that lies close to the band gap energy ofthe semiconductor substrate.
  • the semiconductor substrate may also be thinned out at the parts that are sensitive to light.
  • the sensor element is shaped as a tongue in order better to enable piezo resistive measurements ofthe flow velocity and pressure pulses.
  • Light is for instance measured with a Schottky diode similar to that that may be used for the gas detection itself.
  • Mechanical influence (due to gas flow and/or pressure pulses) is for instance measured by measuring the conductivity of a part ofthe semiconductor substrate, preferably a resistance is made as a tongue and/or as a diffused resistance in a part ofthe substrate.
  • piezo-electric effect may be used to vibrate the sensor or its surface so that possible residues may be brought to come loose.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

Capteur permettant de détecter les hydrocarbures non brûlés, qui comprend une surface catalytique sur laquelle une réaction chimique peut se produire en présence d'un catalyseur. La réaction influe sur un dispositif à semi-conducteur qui peut ainsi délivrer un signal. Des sources de perturbation auxquelles le capteur est sensible et qu'il faut éliminer sont détectées au moyen d'un ou plusieurs capteurs essentiellement similaires, mais dans lesquels la véritable fonction de capteur a été bloquée, de façon que ces capteurs ou des parties de ces capteurs délivrent des signaux correspondant aux perturbations éventuelles.
PCT/SE1996/001355 1995-10-25 1996-10-23 Capteur servant a detecter les hydrocarbures non brules Ceased WO1997015826A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU73558/96A AU7355896A (en) 1995-10-25 1996-10-23 Sensor for detecting non-burnt hydrocarbons

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE9503761A SE515412C2 (sv) 1995-10-25 1995-10-25 Sensor med katalytisk yta för detektering av oförbrända kolväten
SE9503761-0 1995-10-25

Publications (1)

Publication Number Publication Date
WO1997015826A1 true WO1997015826A1 (fr) 1997-05-01

Family

ID=20399962

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/SE1996/001355 Ceased WO1997015826A1 (fr) 1995-10-25 1996-10-23 Capteur servant a detecter les hydrocarbures non brules

Country Status (3)

Country Link
AU (1) AU7355896A (fr)
SE (1) SE515412C2 (fr)
WO (1) WO1997015826A1 (fr)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699803A (en) * 1970-07-21 1972-10-24 Shiney Co Semiconductor element for detecting gases and meter for measuring component concentration of a gas mixture
WO1994027139A1 (fr) * 1993-05-19 1994-11-24 Ab Volvo Procede et dispositif de detection de materiaux oxydables dans un espace

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699803A (en) * 1970-07-21 1972-10-24 Shiney Co Semiconductor element for detecting gases and meter for measuring component concentration of a gas mixture
WO1994027139A1 (fr) * 1993-05-19 1994-11-24 Ab Volvo Procede et dispositif de detection de materiaux oxydables dans un espace

Also Published As

Publication number Publication date
AU7355896A (en) 1997-05-15
SE9503761D0 (sv) 1995-10-25
SE9503761L (sv) 1997-04-26
SE515412C2 (sv) 2001-07-30

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