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WO1997013130A3 - Static and dynamic pressure sensing electronic component - Google Patents

Static and dynamic pressure sensing electronic component Download PDF

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Publication number
WO1997013130A3
WO1997013130A3 PCT/DE1996/001718 DE9601718W WO9713130A3 WO 1997013130 A3 WO1997013130 A3 WO 1997013130A3 DE 9601718 W DE9601718 W DE 9601718W WO 9713130 A3 WO9713130 A3 WO 9713130A3
Authority
WO
WIPO (PCT)
Prior art keywords
conductive tracks
electrodes
carrier layer
pairs
individual
Prior art date
Application number
PCT/DE1996/001718
Other languages
German (de)
French (fr)
Other versions
WO1997013130A2 (en
Inventor
Margit Biehl
Original Assignee
Fraunhofer Ges Forschung
Margit Biehl
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Margit Biehl filed Critical Fraunhofer Ges Forschung
Publication of WO1997013130A2 publication Critical patent/WO1997013130A2/en
Publication of WO1997013130A3 publication Critical patent/WO1997013130A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/205—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using distributed sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/22—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers
    • G01L5/226—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping
    • G01L5/228—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring the force applied to control members, e.g. control members of vehicles, triggers to manipulators, e.g. the force due to gripping using tactile array force sensors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B34/00—Computer-aided surgery; Manipulators or robots specially adapted for use in surgery
    • A61B34/70—Manipulators specially adapted for use in surgery
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2/00—Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
    • A61F2/50—Prostheses not implantable in the body
    • A61F2002/5058—Prostheses not implantable in the body having means for restoring the perception of senses
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F2/00—Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
    • A61F2/50—Prostheses not implantable in the body
    • A61F2002/5058—Prostheses not implantable in the body having means for restoring the perception of senses
    • A61F2002/5059—Prostheses not implantable in the body having means for restoring the perception of senses the feeling of position

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Adjustable Resistors (AREA)
  • Pressure Sensors (AREA)

Abstract

An electronic component for sensing static and dynamic pressure has a non-conducting base substrate that carries at least two electrodes mutually spaced on the surface of the substrate, as well as a non-conducting, flexible carrier layer arranged above the base substrate and the electrode pairs. A number of elastic, electroconductive deformation elements which correspond to the number of electrode pairs are arranged on the bottom side of the non-conducting carrier layer, substantially in the centre of the individual electrode pairs, and may be pressed against the pairs of conductive tracks. The cross-sectional area of these elastic deformation elements is smaller in diameter near the base substrate than the distance between the electrodes, continuously increases in the direction of the carrier layer and at the level of the carrier layer approximately corresponds to the substrate surface covered by the electrodes. The invention is characterised in that the individual electrodes are mutually insulated conductive tracks which fan out into at least two individual conductive tracks arranged in such a way on the substrate surface that the individual conductive tracks of each electrode alternate in pairs with the conductive tracks of the other electrode.
PCT/DE1996/001718 1995-09-12 1996-09-12 Static and dynamic pressure sensing electronic component WO1997013130A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19533756.5 1995-09-12
DE19533756A DE19533756A1 (en) 1995-09-12 1995-09-12 Electronic component for static and dynamic pressure detection

Publications (2)

Publication Number Publication Date
WO1997013130A2 WO1997013130A2 (en) 1997-04-10
WO1997013130A3 true WO1997013130A3 (en) 1997-05-29

Family

ID=7771951

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1996/001718 WO1997013130A2 (en) 1995-09-12 1996-09-12 Static and dynamic pressure sensing electronic component

Country Status (2)

Country Link
DE (1) DE19533756A1 (en)
WO (1) WO1997013130A2 (en)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2853057B1 (en) * 2003-03-26 2005-09-23 Cera DETECTION DETECTION DEVICE WITH DETECTION AMPLIFIER
GB0313794D0 (en) * 2003-06-14 2003-07-23 Univ Dundee Tactile sensor assembly
DE102006007664A1 (en) * 2006-02-18 2007-08-23 Bayerische Motoren Werke Ag Accelerator system
FR2942658B1 (en) * 2009-02-27 2011-12-09 Commissariat Energie Atomique PROTECTIVE SKIN FOR ROBOTS
DE102010034712A1 (en) * 2010-08-18 2012-02-23 Deutsches Zentrum für Luft- und Raumfahrt e.V. Minimally invasive instrument used for minimally invasive surgery, has tactile sensor having planar sensor element that exhibits elastic properties in tactile sensitive surface through access channel
AT511330B1 (en) * 2011-06-03 2012-11-15 Piezocryst Advanced Sensorics SENSOR FOR MEASUREMENT OF PRESSURE AND / OR FORCE
CN103091005B (en) * 2011-11-07 2015-02-18 中国医药大学 Pressure sensing component
WO2014117724A1 (en) * 2013-01-29 2014-08-07 中国科学院苏州纳米技术与纳米仿生研究所 Electronic skin, preparation method and use thereof
CN104706335B (en) * 2013-12-17 2018-03-20 中国科学院苏州纳米技术与纳米仿生研究所 Application of the electronic skin in pulse detection, pulse detection system and method
CN108735889B (en) * 2017-04-14 2021-08-17 中国科学院苏州纳米技术与纳米仿生研究所 Pressure sensor and preparation method thereof
DE102017218229A1 (en) * 2017-10-12 2019-04-18 Dr. Doll Engineering Gmbh Protective device for an industrial robot and protective element for such a protective device
WO2020195460A1 (en) * 2019-03-25 2020-10-01 アルプスアルパイン株式会社 Pressure-sensitive member and pressure detection device
EP3726191A1 (en) * 2019-04-17 2020-10-21 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Pressure sensor
DE102019114185B4 (en) * 2019-05-27 2022-08-11 Tacterion Gmbh Tactile sensor element
CN115803596A (en) * 2020-06-18 2023-03-14 巴斯夫欧洲公司 Piezoresistive pressure sensor based on foam structure
CN113023662B (en) * 2021-02-09 2025-04-01 南京高华科技股份有限公司 A MEMS capacitive tactile pressure sensor and its preparation method
CN120403930A (en) * 2025-07-01 2025-08-01 浙江大学 A microstructured flexible pressure sensor and design method based on crease evolution

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4479392A (en) * 1983-01-03 1984-10-30 Illinois Tool Works Inc. Force transducer
US4793193A (en) * 1984-01-31 1988-12-27 Borgudd Slim T Device for sensing loads
JPH02275603A (en) * 1988-12-29 1990-11-09 Yokohama Rubber Co Ltd:The Variable resistor and sensor using it
US5237879A (en) * 1991-10-11 1993-08-24 At&T Bell Laboratories Apparatus for dynamically varying the resolution of a tactile sensor array
US5287089A (en) * 1992-05-13 1994-02-15 Micro-Integration Corporation Hand manipulatable computer input device

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4694231A (en) * 1986-04-18 1987-09-15 Mecanotron Corporation Robotic skin
DE3903094A1 (en) * 1988-07-14 1990-01-18 Blomberg Gmbh Robotertechnik Tactile sensor

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4479392A (en) * 1983-01-03 1984-10-30 Illinois Tool Works Inc. Force transducer
US4793193A (en) * 1984-01-31 1988-12-27 Borgudd Slim T Device for sensing loads
JPH02275603A (en) * 1988-12-29 1990-11-09 Yokohama Rubber Co Ltd:The Variable resistor and sensor using it
US5237879A (en) * 1991-10-11 1993-08-24 At&T Bell Laboratories Apparatus for dynamically varying the resolution of a tactile sensor array
US5287089A (en) * 1992-05-13 1994-02-15 Micro-Integration Corporation Hand manipulatable computer input device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 015, no. 036 (E - 1027) 29 January 1991 (1991-01-29) *

Also Published As

Publication number Publication date
DE19533756A1 (en) 1997-03-13
WO1997013130A2 (en) 1997-04-10

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