WO1996041699A1 - Solid sphere manufacturing device - Google Patents
Solid sphere manufacturing device Download PDFInfo
- Publication number
- WO1996041699A1 WO1996041699A1 PCT/JP1996/001454 JP9601454W WO9641699A1 WO 1996041699 A1 WO1996041699 A1 WO 1996041699A1 JP 9601454 W JP9601454 W JP 9601454W WO 9641699 A1 WO9641699 A1 WO 9641699A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- substance
- solid sphere
- manufacturing apparatus
- metal paste
- molten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
- B22F1/06—Metallic powder characterised by the shape of the particles
- B22F1/065—Spherical particles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0244—Powders, particles or spheres; Preforms made therefrom
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/01—Tools for processing; Objects used during processing
- H05K2203/0104—Tools for processing; Objects used during processing for patterning or coating
- H05K2203/0134—Drum, e.g. rotary drum or dispenser with a plurality of openings
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3478—Applying solder preforms; Transferring prefabricated solder patterns
Definitions
- the present invention relates to a solid sphere manufacturing apparatus for manufacturing a solid sphere-shaped solder alloy or the like.
- the diameter of the solder balls varies, and it is necessary to classify only solder balls having a constant diameter with a high accuracy of, for example, ⁇ 0.02 mm as sphericity. There was a problem that the solder ball was expensive and expensive, because it was extremely difficult.
- an object of the present invention is to provide a solid sphere manufacturing apparatus capable of manufacturing a solid sphere such as a solder sphere having a high sphericity and high dimensional accuracy and omitting a step of classifying the solid sphere. Disclosure of the invention
- the present invention has a plurality of holes that penetrate and open on the top and bottom surfaces.
- the surface is a flat plate composed of a material that has poor wettability with a substance in a molten or semi-molten state,
- a cylinder communicating with the space
- a piston that presses the substance in the space By raising the inside of the cylinder, a piston that presses the substance in the space, passes through the plurality of holes, and ejects the substance on the upper surface of the flat plate;
- the present invention includes a heating device for heating the material or the metal paste ejected to the upper surface by heating the flat plate itself. Instead of the heating device, the material or the metal paste ejected to the upper surface is provided. In some cases, a heating device is provided to heat the atmosphere in which the metal is present to a temperature at which the surface tension of the substance or metal paste can act.
- the piston when the piston rises in the cylinder, it presses the molten or semi-molten substance or metal paste in the space, passes through the plurality of holes of the flat plate, and places it on the upper surface of the flat plate. Let it squirt.
- the flat plate is made of a material or a material having poor wettability with the metal paste, that is, the flat plate has a property of having a large contact angle between the two, so that the material or the plate is formed at the time of this ejection. If the metal paste exerts surface tension, it becomes a sphere, but if the surface tension is not sufficiently exerted due to low temperature, etc., it is difficult to form a complete sphere. If a cylindrical body is formed at the time of this ejection, the material or metal paste ejected to the upper surface is heated to exert a surface tension to form a sphere.
- the solvent is evaporated by heating.
- the weight per substance or metal paste is controlled extremely accurately, so that when the sphere is cooled, the sphericity and dimensions are reduced.
- Highly accurate solid spheres such as solder alloys can be manufactured, and the step of classifying solid spheres can be omitted.
- FIG. 1 is a configuration diagram of one embodiment of the present invention
- FIG. 2 is a configuration diagram of one embodiment of the present invention.
- FIG. 1 is a configuration diagram of one embodiment of the present invention for a solder alloy.
- the flat plate 1 has a plurality of holes 2 penetrating the upper surface 1a and the lower surface 1b.
- the flat plate 1 is made of stainless steel that has poor wettability with the solder alloy material 4 to form a solid sphere.
- aluminum nitride is used.
- (A 1 N) material is used, or the upper surface 1a is coated with aluminum nitride.
- the space 3 is filled with a material 4 such as a solder alloy in a molten or semi-molten state, is in contact with the bottom surface 1 b, and is sealed by the container 11.
- the substance 4 is injected from an inlet (not shown) provided in the container 11 and is sealed by a lid (not shown).
- the cylinder 10 communicates with the space 3.
- the space 3 is formed only in the cylinder 10 using a cylinder 10 having a larger diameter, and the container 11 is omitted.
- a metal paste in which a metal powder and a solvent are kneaded may be used.
- the driving device for vertically moving the piston 5 includes a pulse motor 8, a control circuit 9 for controlling the rotation of the pulse motor 8, and a micrometer 10 rotated by the pulse motor 8 to vertically move the piston 5.
- the heating device (not shown) is made of a nichrome wire or the like, and jets out onto the upper surface la of the flat plate 1 to heat the substance 4 in the state of forming the sphere 6b, and further controls the heating to obtain a solid sphere with high sphericity This is a device for forming a sphere 6.
- the apparatus may include a heating device for generating laser light, infrared lamp irradiation, and hot air.
- the diameter of the upper surface 1a of the hole 2 may be formed smaller than the diameter of the lower surface 1b to form a taper. Due to this taper, the material 4 or the metal paste can be easily cut from the hole 2.
- the flat plate 1 is formed in a disk shape, and a plurality of holes 2 are provided at symmetrical positions from the center of the flat plate 1. Thereby, the pushing force of the substance 4 or the metal paste from the hole 2 by the piston 5 is made uniform.
- a flat plate 1 made of stainless steel having a thickness of 3 mm is provided with a hole 2 having a diameter of 0.6 mm ⁇ , and a space 3 is made up of 60% by weight of Sn and 40% by weight of Pb.
- the molten solder alloy substance 4 was filled.
- the pulse motor 8 was rotated twice by the control circuit 9, and the piston 5 was pushed up by the micrometer 10 to push the substance 4.
- the substance 4 passes through the plurality of holes 2 and is ejected onto the upper surface 1a of the flat plate 1 as a cylindrical body 6a as shown in FIG. 1, and the ejected material exerts a surface tension.
- the ejected material exerts a surface tension.
- it becomes a sphere 6b, as shown in FIG.
- the spherical body 6b is formed by heating with a heating device.
- the sphericity was heated to 190 ° C (eutectic molten state) for 1 minute, as shown in FIG. An almost perfect solid sphere 6 of 0.01% was obtained.
- the reason why a solid sphere 6 with high sphericity can be obtained is that, for example, the weight per substance of substance 4 is extremely accurately controlled by a pulse motor. Because you can. As a result, the manufactured solid sphere 6 of the solder alloy was sufficiently usable for BGA.
- a paste using solder powder for example, propyl alcohol or a 5% polyvinyl alcohol solution was used as a solvent, and heated to 200 ° C. after ejection.
- a sweeper (not shown) for collecting the solid sphere 6 at a predetermined position may be provided.
- the step of ejecting the substance 4 to the upper surface 1a of the flat plate 1 is preferably performed in a non-oxidizing atmosphere such as nitrogen.
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Nanotechnology (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Powder Metallurgy (AREA)
- Glanulating (AREA)
Description
Claims
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/776,307 US5778964A (en) | 1995-06-13 | 1996-05-30 | Solid spherical body manufacturing apparatus |
| AU58445/96A AU5844596A (en) | 1995-06-13 | 1996-05-30 | Solid sphere manufacturing device |
| EP96919999A EP0776726A4 (en) | 1995-06-13 | 1996-05-30 | DEVICE FOR PRODUCING SOLID BALLS |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17012895A JP3765321B2 (ja) | 1995-06-13 | 1995-06-13 | 中実球体製造装置 |
| JP7/170128 | 1995-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1996041699A1 true WO1996041699A1 (en) | 1996-12-27 |
Family
ID=15899176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP1996/001454 Ceased WO1996041699A1 (en) | 1995-06-13 | 1996-05-30 | Solid sphere manufacturing device |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5778964A (ja) |
| EP (1) | EP0776726A4 (ja) |
| JP (1) | JP3765321B2 (ja) |
| AU (1) | AU5844596A (ja) |
| TW (1) | TW313542B (ja) |
| WO (1) | WO1996041699A1 (ja) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6501663B1 (en) | 2000-02-28 | 2002-12-31 | Hewlett Packard Company | Three-dimensional interconnect system |
| US6565342B1 (en) * | 2000-11-17 | 2003-05-20 | Accurus Scientific Co. Ltd. | Apparatus for making precision metal spheres |
| US9216469B2 (en) * | 2013-10-18 | 2015-12-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Indirect printing bumping method for solder ball deposition |
| CN106735264A (zh) * | 2016-10-12 | 2017-05-31 | 侯明玉 | 冶金颗粒浇铸熔液分流器 |
| CN107486652B (zh) * | 2017-08-18 | 2019-08-27 | 安徽鼎恒再制造产业技术研究院有限公司 | 一种半自动焊芯初步包裹装置 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50102546A (ja) * | 1974-01-16 | 1975-08-13 | ||
| JPH0466603A (ja) * | 1990-07-06 | 1992-03-03 | Nippon Steel Corp | 微細金属球の製造方法 |
| JPH0523887A (ja) * | 1991-07-19 | 1993-02-02 | Matsushita Electric Ind Co Ltd | 金属ボールの形成方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AT119306B (de) * | 1925-04-07 | 1930-10-10 | Chemische Produkte Vormals H S | Verfahren zur Herstellung von Leim und Gelatine in Körner-, Grieß- oder Pulverform. |
| NL213021A (ja) * | 1955-12-16 | |||
| DE2635147C3 (de) * | 1976-08-05 | 1979-02-08 | Sandvik Conveyor Gmbh, 7012 Fellbach | Vorrichtung zur Herstellung von festen Teilchen |
| JPS605804A (ja) * | 1983-06-23 | 1985-01-12 | Tanaka Kikinzoku Kogyo Kk | 微小金属球の製造方法 |
| DE3604169A1 (de) * | 1986-02-10 | 1987-08-13 | Klebchemie M G Becker Gmbh | Abschmelzbare patrone, insbesondere schmelzkleberpatrone |
| GB9200936D0 (en) * | 1992-01-16 | 1992-03-11 | Sprayforming Dev Ltd | Improvements in the processing of metals and alloys |
-
1995
- 1995-06-13 JP JP17012895A patent/JP3765321B2/ja not_active Expired - Lifetime
-
1996
- 1996-05-29 TW TW085106393A patent/TW313542B/zh not_active IP Right Cessation
- 1996-05-30 WO PCT/JP1996/001454 patent/WO1996041699A1/ja not_active Ceased
- 1996-05-30 US US08/776,307 patent/US5778964A/en not_active Expired - Lifetime
- 1996-05-30 AU AU58445/96A patent/AU5844596A/en not_active Abandoned
- 1996-05-30 EP EP96919999A patent/EP0776726A4/en not_active Withdrawn
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50102546A (ja) * | 1974-01-16 | 1975-08-13 | ||
| JPH0466603A (ja) * | 1990-07-06 | 1992-03-03 | Nippon Steel Corp | 微細金属球の製造方法 |
| JPH0523887A (ja) * | 1991-07-19 | 1993-02-02 | Matsushita Electric Ind Co Ltd | 金属ボールの形成方法 |
Non-Patent Citations (1)
| Title |
|---|
| See also references of EP0776726A4 * |
Also Published As
| Publication number | Publication date |
|---|---|
| US5778964A (en) | 1998-07-14 |
| EP0776726A4 (en) | 1999-01-27 |
| AU5844596A (en) | 1997-01-09 |
| JPH091392A (ja) | 1997-01-07 |
| JP3765321B2 (ja) | 2006-04-12 |
| EP0776726A1 (en) | 1997-06-04 |
| TW313542B (ja) | 1997-08-21 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6077380A (en) | Method of forming an adhesive connection | |
| US5415679A (en) | Methods and apparatus for forming microdroplets of liquids at elevated temperatures | |
| US8056222B2 (en) | Laser-based technique for the transfer and embedding of electronic components and devices | |
| US5861323A (en) | Process for manufacturing metal ball electrodes for a semiconductor device | |
| US20080164298A1 (en) | Apparatus and method for depositing and reflowing solder paste on a microelectronic workpiece | |
| CN101681849A (zh) | 焊接装置以及焊接方法 | |
| US20090168381A1 (en) | Printed wiring board unit and method of making the same | |
| US6635101B2 (en) | Rapid surface cooling of solder droplets by flash evaporation | |
| WO1996041699A1 (en) | Solid sphere manufacturing device | |
| US20030003011A1 (en) | Lead-free solder balls and method for the production thereof | |
| JP2002248596A (ja) | 耐酸化性に優れる鉛レス半田ボール | |
| CN104399620A (zh) | 气动膜片式焊球微滴喷射装置 | |
| US20040145064A1 (en) | Solder ball assembly for bump formation and method for its manufacture | |
| CN105655260B (zh) | 一种微互连凸点制备方法及装置 | |
| US4869418A (en) | Solder leveling method and apparatus | |
| JP3782116B2 (ja) | 金属小滴を製造し移送する方法 | |
| WO2006043377A1 (ja) | はんだバンプ形成用シートとその製造方法 | |
| US4799616A (en) | Solder leveling method and apparatus | |
| CN105826207A (zh) | 一种核壳结构凸点制备方法及装置 | |
| JP4735177B2 (ja) | 溶融金属吐出装置及び溶融金属吐出方法並びにバンプ形成方法 | |
| JP2018090866A (ja) | 溶融金属吐出装置 | |
| KR20090112506A (ko) | 잉크젯 방식에 의하여 기판의 전극 패드에 박막 범프를형성하는 방법 | |
| JPH0426704A (ja) | 微細金球の製造方法 | |
| JP2006120695A (ja) | はんだボールの製造方法 | |
| JP3434674B2 (ja) | バンプ形成装置およびその方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AK | Designated states |
Kind code of ref document: A1 Designated state(s): AL AM AT AU AZ BB BG BR BY CA CH CN CZ DE DK EE ES FI GB GE HU IS KE KG KR KZ LK LR LS LT LU LV MD MG MK MN MW MX NO NZ PL PT RO RU SD SE SG SI SK TJ TM TR TT UA UG US UZ VN AM AZ BY KG KZ MD RU TJ TM |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): KE LS MW SD SZ UG AT BE CH DE DK ES FI FR GB GR IE IT LU MC NL PT SE BF BJ CF CG CI CM GA GN ML MR |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 08776307 Country of ref document: US |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 1996919999 Country of ref document: EP |
|
| WWE | Wipo information: entry into national phase |
Ref document number: 1019970700787 Country of ref document: KR |
|
| 121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
| WWP | Wipo information: published in national office |
Ref document number: 1996919999 Country of ref document: EP |
|
| REG | Reference to national code |
Ref country code: DE Ref legal event code: 8642 |
|
| WWP | Wipo information: published in national office |
Ref document number: 1019970700787 Country of ref document: KR |
|
| NENP | Non-entry into the national phase |
Ref country code: CA |
|
| WWW | Wipo information: withdrawn in national office |
Ref document number: 1996919999 Country of ref document: EP |
|
| WWR | Wipo information: refused in national office |
Ref document number: 1019970700787 Country of ref document: KR |