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WO1994003302A1 - Machine-outil a laser du type a photobalayage - Google Patents

Machine-outil a laser du type a photobalayage Download PDF

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Publication number
WO1994003302A1
WO1994003302A1 PCT/JP1993/001036 JP9301036W WO9403302A1 WO 1994003302 A1 WO1994003302 A1 WO 1994003302A1 JP 9301036 W JP9301036 W JP 9301036W WO 9403302 A1 WO9403302 A1 WO 9403302A1
Authority
WO
WIPO (PCT)
Prior art keywords
beam diameter
lens
laser beam
moving
laser
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP1993/001036
Other languages
English (en)
Japanese (ja)
Inventor
Norio Karube
Yoshinori Nakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fanuc Corp
Original Assignee
Fanuc Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fanuc Corp filed Critical Fanuc Corp
Publication of WO1994003302A1 publication Critical patent/WO1994003302A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046—Automatically focusing the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head

Definitions

  • the present invention relates to an optical scanning laser beam machine that performs processing by condensing and irradiating a laser beam onto a beam using a moving focusing system, and more particularly to a stroke (optical scanning stroke) of a moving focusing system.
  • the present invention relates to an enlarged optical scanning laser processing machine. Background technology
  • Laser processing machines are widely used for processing such as cutting and welding.
  • As the laser beam machine there is known an optical scanning type laser beam machine in which a movable condensing system is moved to perform laser irradiation.
  • FIG. 2 is a diagram schematically showing a conventional optical scanning type laser beam machine.
  • the laser oscillator 1 comprises a total reflection mirror 2 and an output coupling mirror 3, and outputs a laser beam 4.
  • the laser beam 4 expands in diameter due to a diffraction phenomenon when propagating in free space, and is incident on the moving light focusing system 8.
  • the laser beam 4 incident on the moving condensing system 8 is deflected by the reflecting mirror 5 and then condensed by the converging lens 6 to irradiate the work ⁇ .
  • the position of the moving condensing system 8 changes as indicated by an arrow 9, and the laser beam 4 is scanned on the work 7 according to the change.
  • the beam diameter D of the laser beam 4 is D 1 on the focusing lens 6. Further, on the work 7, the light is not condensed at one point of the focal point, but is condensed on the spot diameter D2.
  • the above conventional optical scanning type laser beam machine has the following disadvantages.
  • the spot diameter D 2 depends on the beam diameter D 1 on the focusing lens 6. Since the beam diameter D 1 changes as a function of the position of the moving light collecting system 8, the spot diameter D 2 also changes as a function of the position of the moving light collecting system 8. This means that the kerf (cut groove) changes at different positions on the peak 7, so that uniform cut quality cannot be guaranteed.
  • spot diameter D2 varies depending on various conditions such as the material, plate thickness, surface condition, and required cut surface roughness of the work 7, and it is difficult to always optimize the spot diameter D2.
  • the allowable stroke S of the moving light focusing system 8 is in the range from the nearest point S1 to the farthest point S2 shown in the figure, but the range is excessively small for general use. As described above, in the conventional optical scanning laser processing machine, the laser processing range was limited to a narrow range. Disclosure of the invention
  • the present invention has been made in view of such a point, and an object of the present invention is to provide an optical scanning laser beam machine capable of performing laser machining in a wide range by expanding an allowable stroke.
  • Another object of the present invention is to provide an optical scanning laser beam machine that can perform laser beam machining with an optimum kerf for each work.
  • a focusing lens and an optical component whose distance between the focusing lens and the focusing lens can be controlled are provided in the moving focusing system. For this reason, even if the moving condensing system moves and the beam diameter on the condensing lens changes due to the movement, the beam diameter can be maintained at a constant value by controlling the position of the optical component. Therefore, the allowable stroke of the moving condensing system can be expanded, and laser irradiation can be performed over a wide range.
  • the beam is controlled by controlling the position of the optical components.
  • the diameter can always be controlled to its optimal beam diameter. Therefore, the spot diameter is always optimally controlled, and laser processing can be performed with optimal force for each work.
  • FIG. 1 is a diagram schematically showing an optical scanning laser beam machine according to the present invention
  • FIG. 2 is a diagram schematically showing a conventional optical scanning laser beam machine.
  • FIG. 1 is a view schematically showing an optical scanning type laser beam machine according to the present invention.
  • the optical scanning type laser beam machine according to the present invention comprises a CNC 100, a laser oscillator 1 and a moving focusing system 8.
  • the laser oscillator 1 comprises a total reflection mirror 2 and an output coupling mirror 3, and outputs a laser beam 4.
  • the moving focusing system 8 is composed of a beam diameter correcting lens 2 °, a reflecting mirror 5 and a focusing lens 6, and its position is controlled by a command from the CNC 100 as indicated by an arrow 9. You.
  • the beam diameter correction lens 20 is provided in front of the reflecting mirror 5, and its position is controlled by a command from CNC 100 as indicated by an arrow 21. By controlling the position of the beam diameter correction lens 20, the mutual distance between the focusing lens 6 and the beam diameter correction lens 0 can be controlled. A long focal length lens or the like is used as the beam diameter correction lens 20.
  • the position control of the moving light focusing system 8 and the beam diameter correction lens 20 is performed via a servo motor and a ball screw mechanism (not shown).
  • the CNC 100 is configured around a processor (not shown) and controls the entire laser processing machine based on a processing program. That is, a laser output command is output to the laser oscillator 1, and a movement command is output to the moving focusing system 8 and the beam diameter correction lens 20 as described above. , Control.
  • the memory (not shown) that composes the CNC 100 has an optimum beam diameter on the focusing lens 6 for various conditions such as the material, thickness, surface condition, and required cut surface roughness of the work 7.
  • D 10 is set in advance. The CNC 100 outputs a position command signal of the beam diameter correction lens 20 based on the optimum beam defect D 10.
  • the beam diameter correction lens 20 and the reflecting mirror 5 After the laser beam 4 output from the laser oscillator 1 enters the moving condensing system 8, the beam diameter correction lens 20 and the reflecting mirror 5 Then, the light is irradiated onto the work ⁇ ⁇ via the condenser lens 6. Laser processing is performed by the irradiated laser beam 4.
  • the movable condenser system 8 includes the condenser lens 6 and the beam diameter correction lens 20 capable of controlling the distance between the condenser lens 6 and the condenser lens 6. Is provided. Therefore, even if the moving condensing system 8 moves and the beam diameter D 1 on the converging lens 6 changes due to the movement, the position of the beam diameter correcting lens 20 is controlled by controlling the position of the beam diameter correcting lens 20. Thus, the beam diameter D 1 can be maintained at a constant value.
  • the beam diameter D 1 can be maintained at a constant value, and The movable range of system 8 is greatly expanded. Therefore, laser processing over a wide range is possible while maintaining uniform processing quality. Further, an optimum beam diameter D 10 is set in advance for various conditions such as the material of the work 7, and the beam diameter correction lens is set so that the beam diameter D 1 is maintained at the optimum beam diameter D 10. The 20 position is controlled.
  • the optimal beam diameter D 10 is set so that the force is reduced.
  • the optimal beam diameter D10 is set so that the kerf becomes larger.
  • the position of the beam diameter correction lens 20 is controlled according to the optimum beam diameter D10. Therefore, laser processing can be performed with an optimum spot diameter D 2 corresponding to each work 7, and laser processing with an optimum force can be performed. In this way, the laser processing is performed at the optimum force for each work 7, so the advanced knowledge of the laser processing machine Functionalization can be achieved.
  • a condensing lens and an optical component capable of controlling the mutual distance between the condensing lens are provided in the moving condensing system of the optical scanning laser processing machine. . Therefore, even if the moving condensing system moves and the beam diameter on the converging lens changes due to the movement, the beam diameter can be maintained at a constant value by controlling the position of the optical component. Therefore, the allowable stroke of the moving condensing system can be expanded, and laser processing can be performed over a wide range while maintaining uniform processing quality. Further, the beam diameter on the focusing lens can be controlled to an optimum beam diameter set corresponding to each condition of the work. Therefore, the spot diameter is always optimally controlled, and laser processing with optimal power is possible.

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Mechanical Optical Scanning Systems (AREA)

Abstract

L'invention a trait à une machine-outil à laser du type à photobalayage qui peut effectuer un usinage au laser sur une distance accrue en augmentant son déplacement possible. Un système de condenseur mobile (8) comprend une lentille correctrice de diamètre de faisceau (20), un miroir (5) et un condenseur (6) et sa position est commandée par un circuit de commande numérique (100) comme indiqué par une flèche (9). La lentille correctrice de diamètre de faisceau (20) est disposée devant le miroir (5) et sa position est commandée par des instructions provenant du circuit de commande numérique (100) comme indiqué par une flèche (21). Ainsi, même si le système de condenseur mobile (8) se déplace et si, de ce fait, le diamètre de faisceau (D1) du condenseur (6) tend à changer, ce diamètre (D1) est maintenu constant par la commande de position régissant la lentille correctrice de diamètre de faisceau (20). En d'autres termes, même quand le déplacement du système de condenseur mobile (8) fait passer ce dernier du point le plus proche (53) au plus éloigné (54), l'usinage au laser peut se dérouler sur une distance importante sans subir de variation de qualité.
PCT/JP1993/001036 1992-08-03 1993-07-23 Machine-outil a laser du type a photobalayage Ceased WO1994003302A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP4205833A JPH0647575A (ja) 1992-08-03 1992-08-03 光走査型レーザ加工機
JP4/205833 1992-08-03

Publications (1)

Publication Number Publication Date
WO1994003302A1 true WO1994003302A1 (fr) 1994-02-17

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1993/001036 Ceased WO1994003302A1 (fr) 1992-08-03 1993-07-23 Machine-outil a laser du type a photobalayage

Country Status (2)

Country Link
JP (1) JPH0647575A (fr)
WO (1) WO1994003302A1 (fr)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974930B2 (en) * 2001-09-07 2005-12-13 Jense Systemen B.V. Laser scanner
WO2008025811A1 (fr) * 2006-08-30 2008-03-06 Thyssenkrupp Steel Ag Procédé et dispositif d'usinage de pièces à usiner au moyen d'un rayon laser
US7560661B2 (en) * 2003-10-08 2009-07-14 Toyota Jidosha Kabushiki Kaisha Laser beam machine
WO2018098398A1 (fr) * 2016-11-25 2018-05-31 Glowforge Inc. Composants optiques prédéfinis dans une machine commandée numériquement par ordinateur
US10379517B2 (en) 2015-02-12 2019-08-13 Glowforge Inc. Cloud controlled laser fabrication
US10509390B2 (en) 2015-02-12 2019-12-17 Glowforge Inc. Safety and reliability guarantees for laser fabrication
US10551824B2 (en) 2016-11-25 2020-02-04 Glowforge Inc. Controlled deceleration of moveable components in a computer numerically controlled machine
US10737355B2 (en) 2016-11-25 2020-08-11 Glowforge Inc. Engraving in a computer numerically controlled machine
US10802465B2 (en) 2016-11-25 2020-10-13 Glowforge Inc. Multi-user computer-numerically-controlled machine
US11137738B2 (en) 2016-11-25 2021-10-05 Glowforge Inc. Calibration of a computer-numerically-controlled machine
US11249456B2 (en) 2016-11-25 2022-02-15 Glowforge Inc. Fabrication with image tracing
US11433477B2 (en) 2016-11-25 2022-09-06 Glowforge Inc. Housing for computer-numerically-controlled machine
US11698622B2 (en) 2021-03-09 2023-07-11 Glowforge Inc. Previews for computer numerically controlled fabrication
US11740608B2 (en) 2020-12-24 2023-08-29 Glowforge, Inc Computer numerically controlled fabrication using projected information
US12420355B2 (en) 2016-11-25 2025-09-23 Glowforge Inc. Laser fabrication with beam detection

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE9407288U1 (de) * 1994-05-02 1994-08-04 Trumpf Gmbh & Co, 71254 Ditzingen Laserschneidmaschine mit Fokuslageneinstellung
AU4547896A (en) * 1995-02-03 1996-08-21 Banyu Pharmaceutical Co., Ltd. 4-oxo-2-butenoic acid derivatives
JP5311682B2 (ja) * 2010-06-17 2013-10-09 株式会社レザック 抜型製造用レーザー加工装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01159988U (fr) * 1988-04-21 1989-11-07
JPH0231276Y2 (fr) * 1985-02-25 1990-08-23

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0231276Y2 (fr) * 1985-02-25 1990-08-23
JPH01159988U (fr) * 1988-04-21 1989-11-07

Cited By (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6974930B2 (en) * 2001-09-07 2005-12-13 Jense Systemen B.V. Laser scanner
US7560661B2 (en) * 2003-10-08 2009-07-14 Toyota Jidosha Kabushiki Kaisha Laser beam machine
WO2008025811A1 (fr) * 2006-08-30 2008-03-06 Thyssenkrupp Steel Ag Procédé et dispositif d'usinage de pièces à usiner au moyen d'un rayon laser
US11995159B2 (en) 2015-02-12 2024-05-28 Glowforge, Inc. Multi-function computer numerically controlled machine
US10379517B2 (en) 2015-02-12 2019-08-13 Glowforge Inc. Cloud controlled laser fabrication
US10496070B2 (en) 2015-02-12 2019-12-03 Glowforge Inc. Moving material during laser fabrication
US10509390B2 (en) 2015-02-12 2019-12-17 Glowforge Inc. Safety and reliability guarantees for laser fabrication
US10520915B2 (en) 2015-02-12 2019-12-31 Glowforge Inc. Visual preview for laser fabrication
US11327461B2 (en) 2015-02-12 2022-05-10 Glowforge Inc. Safety assurances for laser fabrication using temperature sensors
US11880182B2 (en) 2015-02-12 2024-01-23 Glowforge Inc. Safety and reliability for laser fabrication
US11797652B2 (en) 2015-02-12 2023-10-24 Glowforge, Inc. Cloud controlled laser fabrication
US11537096B2 (en) 2015-02-12 2022-12-27 Glowforge Laser cutter engraver material height measurement
US11231693B2 (en) 2015-02-12 2022-01-25 Glowforge Inc. Cloud controlled laser fabrication
US11537095B2 (en) 2015-02-12 2022-12-27 Glowforge Inc. Multi-function computer numerically controlled machine
US11537097B2 (en) 2015-02-12 2022-12-27 Glowforge Inc. Visual preview for laser fabrication by assembling multiple camera images
US12330231B2 (en) 2015-02-12 2025-06-17 Glowforge, Inc. Cloud controlled laser fabrication
US11433477B2 (en) 2016-11-25 2022-09-06 Glowforge Inc. Housing for computer-numerically-controlled machine
US10802465B2 (en) 2016-11-25 2020-10-13 Glowforge Inc. Multi-user computer-numerically-controlled machine
US11305379B2 (en) 2016-11-25 2022-04-19 Glowforge Inc. Preset optical components in a computer numerically controlled machine
US11460828B2 (en) 2016-11-25 2022-10-04 Glowforge Inc. Multi-user computer-numerically-controlled machine
US11281189B2 (en) 2016-11-25 2022-03-22 Glowforge Inc. Controlled deceleration of moveable components in a computer numerically controlled machine
US11249456B2 (en) 2016-11-25 2022-02-15 Glowforge Inc. Fabrication with image tracing
US11137738B2 (en) 2016-11-25 2021-10-05 Glowforge Inc. Calibration of a computer-numerically-controlled machine
US12420355B2 (en) 2016-11-25 2025-09-23 Glowforge Inc. Laser fabrication with beam detection
WO2018098398A1 (fr) * 2016-11-25 2018-05-31 Glowforge Inc. Composants optiques prédéfinis dans une machine commandée numériquement par ordinateur
US11338387B2 (en) 2016-11-25 2022-05-24 Glowforge Inc. Engraving in a computer numerically controlled machine
US11835936B2 (en) 2016-11-25 2023-12-05 Glowforge, Inc. Multi-user computer-numerically-controlled machine
US11860601B2 (en) 2016-11-25 2024-01-02 Glowforge Inc. Calibration of a computer-numerically-controlled machine
US11860606B2 (en) 2016-11-25 2024-01-02 Glowforge, Inc. Fabrication with image tracing
US10737355B2 (en) 2016-11-25 2020-08-11 Glowforge Inc. Engraving in a computer numerically controlled machine
US10551824B2 (en) 2016-11-25 2020-02-04 Glowforge Inc. Controlled deceleration of moveable components in a computer numerically controlled machine
US12287617B2 (en) 2016-11-25 2025-04-29 Glowforge, Inc. Multi-user computer-numerically-controlled machine
US12181855B2 (en) 2016-11-25 2024-12-31 Glowforge, Inc. Calibration of a computer-numerically-controlled machine
US11740608B2 (en) 2020-12-24 2023-08-29 Glowforge, Inc Computer numerically controlled fabrication using projected information
US12153397B2 (en) 2021-03-09 2024-11-26 Glowforge, Inc. Stamp design tool for computer numerically controlled fabrication
US11698622B2 (en) 2021-03-09 2023-07-11 Glowforge Inc. Previews for computer numerically controlled fabrication

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