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WO1993011413A1 - Consoles bimorphes piezoelectriques pour instruments d'analyse superficielle - Google Patents

Consoles bimorphes piezoelectriques pour instruments d'analyse superficielle Download PDF

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Publication number
WO1993011413A1
WO1993011413A1 PCT/AU1992/000640 AU9200640W WO9311413A1 WO 1993011413 A1 WO1993011413 A1 WO 1993011413A1 AU 9200640 W AU9200640 W AU 9200640W WO 9311413 A1 WO9311413 A1 WO 9311413A1
Authority
WO
WIPO (PCT)
Prior art keywords
bimorph
cantilever arrangement
piezoelectric
slabs
force
Prior art date
Application number
PCT/AU1992/000640
Other languages
English (en)
Inventor
John Louis Parker
Original Assignee
The Australian National University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The Australian National University filed Critical The Australian National University
Publication of WO1993011413A1 publication Critical patent/WO1993011413A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q20/00—Monitoring the movement or position of the probe
    • G01Q20/04—Self-detecting probes, i.e. wherein the probe itself generates a signal representative of its position, e.g. piezoelectric gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q60/00—Particular types of SPM [Scanning Probe Microscopy] or microscopes; Essential components thereof
    • G01Q60/24—AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
    • G01Q60/38—Probes, their manufacture, or their related instrumentation, e.g. holders
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2041—Beam type
    • H10N30/2042—Cantilevers, i.e. having one fixed end

Definitions

  • TITLE "PIEZOELECTRIC BIMORPH CANTILEVERS FOR SURFACE ANALYSIS INSTRUMENTS"
  • This invention concerns apparatus for investigating surfaces. More particularly, it concerns sensors for use in instruments such as atomic force microscopes and surface force apparatus.
  • the sensors incorporate piezoelectric bimorphs.
  • Atomic force microscopes operate using similar principles, but instead of having two curved macroscopic surfaces, one of the surfaces is usually a planar macroscopic surface and the other is replaced by an atomically sharp tip which is mounted (with the tip pointing to and closely spaced from the macroscopic surface) at the end of a weak spring.
  • the spring typically has a spring constant, k, of 1 N " 1 , but with modern etched silicon nitride cantilevers, spring constants as low as 0.1 Nm" 1 can be obtained.
  • the spring deflection (due to changes in atomic forces) is measured using a laser beam reflected from the back of the tip mounting, and is held constant by controlling the distance between the tip and the macroscopic surface (usually by step pulses from a feedback loop, applied to a DC motor or to a piezoelectric device) while the surface is subjected to a planar raster scan before the tip. A three- dimensional image of the surface is then mapped out.
  • the force resolution of the atomic force microscope depends upon the type of spring on which the atomically sharp tip is mounted. Using the etched silicon nitride springs mentioned above, detection of the deflection of the spring to 0.1 nm gives a force resolution of 10" 1:l N.
  • a subsidiary object of the present invention is to provide a spring arrangement which ensures that a spring-mounted surface or tip retains its orientation relative to a second surface when the spring is deflected.
  • One of these locations is at the end of the bimorph sandwich, which is designed to be clamped within the instrument.
  • the other fastening together is at the location on the bimorph at which the surface or tip is to be mounted, which may be at the other end of the bimorph but which may be a variable location, in which case the clamping arrangement will be a slidable clamp.
  • a piezoelectric bimorph is electrically equivalent to a capacitor, the charge on which varies with the dimensions of the device, and any deflection of the bimorph will cause a charge to be developed on the sandwich, then observation of the charge on the bimorph will enable the force applied to it, to cause its deflection, to be calculated.
  • a cantilever arrangement for use in instruments such as surface force apparatus and atomic force microscopes, said cantilever arrangement comprising a piezoelectric bimorph consisting of two elongate slabs of a piezoelectric material, said piezoelectric material having a polarisation direction, said slabs being mounted with their polarisation directions facing each other; said slabs being clamped at one end of said bimorph; a further clamp being applied to said bimorph at a location remote from said one end; said further clamp being adapted to support a surface or atomically sharp tip or the like; said bimorph having connection points thereon for monitoring equipment adapted to monitor any electrical charge developed on the bimorph.
  • the present invention also encompasses instruments which include such a cantilever arrangement.
  • Figure 1 shows, schematically, a cantilevered piezoelectric bimorph with a charge monitoring arrangement connected to the bimorph.
  • Figure 2 illustrates the cantilever arrangement of the present invention, installed in an assembly for mounting in a surface force apparatus.
  • Figure 3 is a partly schematic, partly block diagram illustration of a surface force apparatus incorporating the present invention.
  • a piezoelectric bimorph constructed to replace conventional springs in surface analysis instruments and used as a sensor, is the essential feature of the present invention.
  • a piezoelectric bimorph consists of two slabs of piezo material fastened together with their polarisation directions facing each other. If one end of this piezoelectric bimorph sandwich (shown diagrammatically in Figure 1) is deflected by applying a force to it, then a compressive strain is produced in one slab and an expansion is produced in the other.
  • the charge Q developed for a given applied force F can be calculated from the relation:
  • piezoelectric devices when used as actuators, can show a large amount of hysteresis and creep in their motion. The same may be expected for a piezo bimorph when used as a displacement sensor.
  • the potential across the device is controlled and in the other a charge is measured.
  • V(t) Y.
  • V(t) is directly proportional to the deflection of the spring.
  • the force can be measured by continuous solution of the equation for V(t), with a limit in accuracy determined soley by the accuracy with which the integral can be performed and the accuracy of ⁇ . Since the surface investigation equipment referred to above is frequently used with the surfaces immersed in a liquid, the bimorph will usually be protected by a sheath.
  • the sheath is preferably of "TEFLON" (trade mark) material.
  • FIG. 2 shows a peizoelectric bimorph mounted in an assembly for inclusion in the Mark IV surface force apparatus produced by Anutech Pty Limited.
  • the bimorph 10 consists of two slabs of "VERNITRON' (trade mark) piezoelectric material, each 25.1 mm long, 3 mm wide, and 0.15 mm thick.
  • the bimorph 10 is mounted within a TEFLON sheath 11. One end of the bimorph is clamped by a clamp 12. The other end of the bimorph is clamped with a moveable slider 14 which allows the sensitivity and the spring constant of the bimorph to be varied at will.
  • One of the surfaces 20 being investigated is supported on a surface holder adaptor 15, which is connected rigidly to the moveable slider 14.
  • the electrical connection of the displacement transducer (see Figure 3) to the bimorph is via a connector from which wires enter the shaft 13 through an upper opening 13A. Those wires pass down through the shaft 13, through the inner passage 13B in the centre of the shaft, and are connected to the bimorph. Thus both the bimorph and the wiring are completely isolated from the solution which bathes the surfaces being investigated.
  • Figure 3 illustrates the essential components of the Mark IV surface force equipment marketed by Anutech Pty Limited. Since persons of skill in this art will be familiar with that equipment or its predecessor models (the original model being designed by Dr Israelachvili of The Australian National University), no further explanation of the operation of that equipment - or of the atomic surface microscope which functions in a similar manner - is necessary. However, those persons who require further information are referred to the paper by Dr Parker entitled "A Novel Method for Measuring the Force between Two Surfaces in a Surface Force Apparatus", which was published in Langmuir, volume 8, page 551, 1992, and which is essentially the same disclosure as the specification of Australian provisional patent application No PK 9797, filed on 26 November 1991. The contents of that paper by J L Parker and the specification of Australian patent application No PK 9797 are incorporated into the present specification by this reference thereto.
  • Mining and mineral processing for example, in coal/mineral slurry separation
  • Surface coating techniques for example, paints, thin films, polymers, resins
  • Agricultural chemicals pesticide, herbicide and fertilizers applications
  • Reproduction chemicals i.e. (used in photographic films, photocopies/laser printer toners); .
  • Adhesives in glues, tapes);
  • Lubricants/Bearings particularly oils, oil additives and substitutes
  • Semiconductor properties in deposition layers

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)

Abstract

Appareils à force superficielle et microscopes à force atomique, dans lesquels une surface libre et un élément pointu de manière atomique sont montés respectivement sur un ressort faible en porte-à-faux situé à l'intérieur de l'instrument. On a prévu de remplacer le ressort faible par un bimorphe piézoélectrique (10) comportant deux plaques allongées en matériau piézoélectrique maintenues en contact intime au niveau de l'une de leurs extrémités par un dispositif de serrage (12). Le bimorphe est également serré dans un second endroit par un second dispositif de serrage (14), de préférence monté coulissant sur le bimorphe. Le second dispositif de serrage est adapté pour porter un adaptateur de support (15) pour une surface libre (20) ou pour un élément pointu de manière atomique. La mesure de la charge qui se produit sur le bimorphe lorsqu'il fléchit sous l'action d'une force appliquée permet le calcul de la valeur de ladite force appliquée.
PCT/AU1992/000640 1991-11-26 1992-11-26 Consoles bimorphes piezoelectriques pour instruments d'analyse superficielle WO1993011413A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AUPK976991 1991-11-26
AUPK9769 1991-11-26

Publications (1)

Publication Number Publication Date
WO1993011413A1 true WO1993011413A1 (fr) 1993-06-10

Family

ID=3775853

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/AU1992/000640 WO1993011413A1 (fr) 1991-11-26 1992-11-26 Consoles bimorphes piezoelectriques pour instruments d'analyse superficielle

Country Status (1)

Country Link
WO (1) WO1993011413A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100306885A1 (en) * 2006-08-15 2010-12-02 Georgia Tech Research Corporation Cantilevers with Integrated Actuators for Probe Microscopy

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0290648A1 (fr) * 1987-05-12 1988-11-17 International Business Machines Corporation Dispositif senseur de forces atomiques pour déterminer la topographie d'une surface
US4800274A (en) * 1987-02-02 1989-01-24 The Regents Of The University Of California High resolution atomic force microscope
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
WO1990007700A2 (fr) * 1988-12-23 1990-07-12 Thomson-Csf Dispositif capteur de flexion
WO1990015986A1 (fr) * 1989-06-20 1990-12-27 The Board Of Trustees Of The Leland Stanford Junior University Unite a microscope microfabriquee
US4992728A (en) * 1989-12-21 1991-02-12 International Business Machines Corporation Electrical probe incorporating scanning proximity microscope
DE4122697A1 (de) * 1990-07-11 1992-01-16 Olympus Optical Co Atomsondenmikroskop
US5085070A (en) * 1990-02-07 1992-02-04 At&T Bell Laboratories Capacitive force-balance system for measuring small forces and pressures
WO1992012398A1 (fr) * 1991-01-04 1992-07-23 The Board Of Trustees Of The Leland Stanford Junior University Console piezoresistive pour la microscopie par force atomique

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4800274A (en) * 1987-02-02 1989-01-24 The Regents Of The University Of California High resolution atomic force microscope
EP0290648A1 (fr) * 1987-05-12 1988-11-17 International Business Machines Corporation Dispositif senseur de forces atomiques pour déterminer la topographie d'une surface
US4906840A (en) * 1988-01-27 1990-03-06 The Board Of Trustees Of Leland Stanford Jr., University Integrated scanning tunneling microscope
WO1990007700A2 (fr) * 1988-12-23 1990-07-12 Thomson-Csf Dispositif capteur de flexion
WO1990015986A1 (fr) * 1989-06-20 1990-12-27 The Board Of Trustees Of The Leland Stanford Junior University Unite a microscope microfabriquee
US4992728A (en) * 1989-12-21 1991-02-12 International Business Machines Corporation Electrical probe incorporating scanning proximity microscope
US5085070A (en) * 1990-02-07 1992-02-04 At&T Bell Laboratories Capacitive force-balance system for measuring small forces and pressures
DE4122697A1 (de) * 1990-07-11 1992-01-16 Olympus Optical Co Atomsondenmikroskop
WO1992012398A1 (fr) * 1991-01-04 1992-07-23 The Board Of Trustees Of The Leland Stanford Junior University Console piezoresistive pour la microscopie par force atomique

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
LANGMUIR: THE ACS JOURNAL OF SURFACES AND COLLOIDS, Volume 8, Number 1, January 1992, (Washington DC; AMERICAN CHEMICAL SOCIETY), J.L. PARKER, "A Novel Method for Measuring the Force Between Two Surfaces in a Surface Force Apparatus", pages 551-556. *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100306885A1 (en) * 2006-08-15 2010-12-02 Georgia Tech Research Corporation Cantilevers with Integrated Actuators for Probe Microscopy
US8321959B2 (en) * 2006-08-15 2012-11-27 Georgia Tech Research Corporation Cantilevers with integrated piezoelectric actuators for probe microscopy

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