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WO1992015813A1 - Procede pour la fabrication d'elements internes de soupape pour soupapes a vide avec tete de soupape et soufflet, ainsi que des elements internes fabriques selon ce procede - Google Patents

Procede pour la fabrication d'elements internes de soupape pour soupapes a vide avec tete de soupape et soufflet, ainsi que des elements internes fabriques selon ce procede Download PDF

Info

Publication number
WO1992015813A1
WO1992015813A1 PCT/EP1992/000054 EP9200054W WO9215813A1 WO 1992015813 A1 WO1992015813 A1 WO 1992015813A1 EP 9200054 W EP9200054 W EP 9200054W WO 9215813 A1 WO9215813 A1 WO 9215813A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
bellows
vacuum
soldering
solder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP1992/000054
Other languages
German (de)
English (en)
Inventor
Franz-Peter Contzen
Reinhard Fritsch
Heinz-Hermann Kersken
Hans Kirchner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Publication of WO1992015813A1 publication Critical patent/WO1992015813A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
    • B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
    • B23K35/38—Selection of media, e.g. special atmospheres for surrounding the working area
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00—Soldering, e.g. brazing, or unsoldering
    • B23K1/0008—Soldering, e.g. brazing, or unsoldering specially adapted for particular articles or work
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Definitions

  • the invention relates to a method for producing an inner valve part for a vacuum valve with a valve disk and bellows, and an inner part produced by this method.
  • Vacuum valves of the type concerned here are available on the market with a wide variety of nominal sizes and with several actuators. Such valves are therefore manufactured - as far as possible - according to the modular principle.
  • Known valves essentially consist of three subassemblies, namely a valve housing with a valve seat, a valve drive and a valve inner part with one
  • Valve plate a bellows and a sealing collar.
  • the valve drives can be actuated mechanically. The use of knobs is common. Depending on whether the opening and closing movement should be carried out quickly or slowly, these mechanical drives are designed differently. Pneumatically, electro-pneumatically and electro-magnetically actuable valves are also known. Vacuum valves of here affected type are disclosed for example in the brochure "valves", which is part of the catalog HV 200, part 6, edition 08/86 of the applicant.
  • the bellows located in vacuum valves has the task of separating the interior of the valve housing, which is in contact with media, from the atmosphere.
  • the bellows therefore extends from the valve plate to a sealing collar, which is mounted in a vacuum-tight manner between the actuator and the valve housing.
  • Stainless steel has proven to be a suitable material for the bellows, the valve plate and the flange.
  • a stainless steel bellows must be very thin (0.1 mm) so that it does not obstruct rapid movements of the valve plate too much.
  • Thin-walled stainless steel also meets the requirements for high-vacuum-tight separation without deformation. After all, stainless steel is relatively corrosion-resistant.
  • Critical areas of the known vacuum valve inner parts are the connections of the two end faces of the bellows with the valve disk and the sealing collar. These connections must be highly vacuum-tight and should have a long service life.
  • the bellows is connected to the valve plate and the sealing collar by welding.
  • the technical effort for this joint connection is very high, since this work can only be carried out by highly qualified welders.
  • a special welding machine must be used.
  • the requirements for the accuracy of the parts to be joined are very high.
  • the material stresses known in welding processes due to the local heating occur in the weld seam and in the transition zone. Not all of the joint connections produced in this way therefore meet the high requirements for high vacuum tightness.
  • the service life of the weld seams is limited.
  • the object of the present invention is to simplify the technical outlay associated with the production of the connections between the bellows and the valve plate and the sealing collar while at the same time reducing the rejects and increasing the service life.
  • connection between the bellows and the valve plate is made by soldering in a vacuum.
  • connection between the bellows and its sealing collar is also simultaneously made in this way.
  • the application of this invention has the advantage that the required technical effort and thus the manufacturing costs are significantly lower compared to the prior art. Highly qualified employees are no longer required to establish the connection between the bellows and its adjacent components. The requirements for the accuracy of the components to be connected to each other are significantly lower. It is also advantageous that the valve inner part is heated by soldering in a vacuum oven after the connections have been made and is thus immediately available for further processing or assembly. A cleaning process, as is necessary after welding processes because of the tarnishing colors and the greases present, is omitted. The direct contact surfaces between the bellows and its adjacent components are much larger after the soldering process according to the invention than with the welding process according to the prior art. The tightness of the connections is thus guaranteed. Committees for leaky connections no longer occur.
  • valve interior parts produced by the process according to the invention have a service life which is considerably longer than the prior art - by more than a factor of 4. Obviously, this advantage is based on the fact that the soldering process gives the material a uniform structure, in particular in the soldering zone, without the temperature zones behind the seam that occur during welding. Breaks in resonance or fatigue occur much less frequently.
  • FIG. 1 is a partial section through an inventive valve
  • FIG. 2 shows a valve inner part according to the invention
  • the valve 1 shown in FIG. 1 comprises the partially illustrated electromagnetic drive 2, of which essentially only the armature 3 is visible.
  • the valve housing 5 is fastened to a flange-like edge 4 of the drive 2.
  • the sealing ring 6 is embedded in the end face of the valve housing 5 facing the edge 4, so that the connection to the process space is vacuum-tight.
  • the valve housing 5 has two connecting pieces 7 and 8, which can be connected to one another via the opening 9.
  • the upper edge of the opening 9 forms a valve seat 11.
  • the valve seat 12 and thus the opening 9 is associated with the valve plate 12 with the sealing ring 13.
  • the valve disk 12 is held at the lower end of the valve plunger 14.
  • the upper end of the valve plunger 14 is screwed into the armature 3 of the valve drive 2 via a threaded connector 15.
  • a bellows 16 is provided which extends between the valve plate 12 and an annular disk 17. Both the valve plate 12 and the washer 17 have recesses 18 and 19, respectively, into which the bellows 16 is soldered and is therefore connected to these components in a vacuum-tight manner.
  • the outer edge of the annular disc 17 is located between the flange 4 of the drive 2 and the end face of the valve housing 5 and extends into the area of the sealing ring 6, so that tightness is ensured in this area as well. 21 also designates a hose section which abuts the bellows 16 from the inside and dampens bellows vibrations.
  • Figure 2 shows an enlarged valve inner part, consisting of plate 12, bellows 16 and flange or washer 17.
  • the plate 12 is equipped with a recess 18 with an outer edge, which the lower, extending perpendicular to the bellows axis portion of the bellows section or is present.
  • the sealing collar 17 has an inner recess 19 with an outer edge, into which the upper part of the bellows, which extends perpendicularly to the bellows axis, extends.
  • the components 12, 16, 17 are connected to one another by soldering in a vacuum.
  • the solder is e.g. when assembling the parts in the soldering position shown. in the form of thin washers or as a solder paste between the areas to be connected.
  • the parts - preferably a plurality of inner parts to be soldered - are then inserted into a vacuum oven. The soldering process takes place in the oven under vacuum and at elevated temperature.
  • the furnace temperature is between 600 ° C and 1130 ° C.
  • a temperature between 600 ° C and 1000 ° C is sufficient.
  • the use of nickel-based solder and a furnace temperature of about 1050 ° C in an oven during soldering is a vacuum with a value between 10 and _a received 10- * mbar aufrecht ⁇ ; it is preferably less than 10- 3 mbar.
  • the duration of the soldering process is approximately 2 to 3 hours.
  • the soldered parts must be cooled as quickly as possible to avoid material structure changes, ie within a few minutes.
  • the cooling is carried out in a protective gas atmosphere in the furnace.
  • the furnace is first flooded with inert gas, for example nitrogen or argon.
  • inert gas for example nitrogen or argon.
  • cool inert gas is constantly introduced into the furnace, for example in a circuit, and the heated inert gas is removed.
  • the interior parts with a purity that meets the high requirements of high vacuum technology are immediately available for further assembly.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Diaphragms And Bellows (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

La présente invention se rapporte à un procédé pour la fabrication d'un élément interne pour une soupape à vide avec tête de soupape (12), soufflet (16) et collet d'étanchéité (17). Afin de réduire la difficulté technique relativement élevée lors de l'assemblage du soufflet avec les pièces adjacentes, il est proposé que l'assemblage des faces avant du soufflet (16) avec la tête de soupape (12) et le collet d'étanchéité (17) soit réalisé par brasage sous vide.
PCT/EP1992/000054 1991-03-04 1992-01-14 Procede pour la fabrication d'elements internes de soupape pour soupapes a vide avec tete de soupape et soufflet, ainsi que des elements internes fabriques selon ce procede Ceased WO1992015813A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19914106761 DE4106761A1 (de) 1991-03-04 1991-03-04 Verfahren zur herstellung von ventilinnenteilen fuer vakuumventile mit ventilteller und faltenbalg sowie nach diesem verfahren hergestellte innenteile
DEP4106761.4 1991-03-04

Publications (1)

Publication Number Publication Date
WO1992015813A1 true WO1992015813A1 (fr) 1992-09-17

Family

ID=6426374

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1992/000054 Ceased WO1992015813A1 (fr) 1991-03-04 1992-01-14 Procede pour la fabrication d'elements internes de soupape pour soupapes a vide avec tete de soupape et soufflet, ainsi que des elements internes fabriques selon ce procede

Country Status (3)

Country Link
EP (1) EP0574407A1 (fr)
DE (1) DE4106761A1 (fr)
WO (1) WO1992015813A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0750148A1 (fr) * 1995-05-10 1996-12-27 Fujikin Incorporated Soupape régulatrice de pression

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001033126A1 (fr) * 1999-11-03 2001-05-10 Tuchenhagen Gmbh Dispositif pour l'actionnement exempt de couples d'un obturateur d'une soupape a levee
DE10104998A1 (de) * 2001-02-03 2002-08-22 Hydac Electronic Gmbh Schaltvorrichtung

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2308183A (en) * 1941-12-27 1943-01-12 Du Pont Packless valve
US2800711A (en) * 1954-08-18 1957-07-30 Wall Colmonoy Corp Brazing method
GB845239A (en) * 1957-11-27 1960-08-17 Midland Ind Computing Improvements in valves for controlling the flow of fluids
US3030983A (en) * 1961-03-16 1962-04-24 Mechtronics Corp Bellows
US3080648A (en) * 1959-11-16 1963-03-12 Young Spring & Wire Corp Silver soldering apparatus and method
GB1135916A (en) * 1966-03-25 1968-12-11 Leybold Holding Ag An adjustable needle valve for vacuum installations
FR2296489A1 (fr) * 1975-01-03 1976-07-30 Specim Procede d'assemblage par brasage en atmosphere controlee de pieces metalliques
DE2026969C1 (de) * 1969-06-03 1984-05-24 British Nuclear Fuels Ltd., Risley, Warrington, Cheshire Hubventil für Verfahrensgas
EP0264466A1 (fr) * 1986-10-17 1988-04-27 Leybold Aktiengesellschaft Vanne à soufflet
US4795134A (en) * 1987-05-27 1989-01-03 Huntington Mechanical Laboratories, Inc. Valve with improved sealing properties

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD152396A1 (de) * 1980-07-15 1981-11-25 Helmut Bollinger Schieberventil,insbesondere fuer hochvakuumanlagen
DE3140497A1 (de) * 1981-10-13 1983-04-28 GeWerTec Gesellschaft für Werkstofftechnik mbH, 4600 Dortmund "verfahren zum hochtemperaturloeten von werkstuecken aus hochwarmfesten werkstoffen"
DE3504008A1 (de) * 1985-02-06 1986-08-07 Kraftwerk Union AG, 4330 Mülheim Steuerventil
DE3726072A1 (de) * 1987-08-06 1989-02-16 Thyssen Edelstahlwerke Ag Loet-verfahren
DE3926619C2 (de) * 1989-07-15 1993-11-04 Calor Emag Elektrizitaets Ag Verfahren zur herstellung einer vakuumschaltkammer
DE4008102A1 (de) * 1990-03-11 1991-09-12 Lvt Loet Und Verschleisstechni Zerspanendes werkzeug

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2308183A (en) * 1941-12-27 1943-01-12 Du Pont Packless valve
US2800711A (en) * 1954-08-18 1957-07-30 Wall Colmonoy Corp Brazing method
GB845239A (en) * 1957-11-27 1960-08-17 Midland Ind Computing Improvements in valves for controlling the flow of fluids
US3080648A (en) * 1959-11-16 1963-03-12 Young Spring & Wire Corp Silver soldering apparatus and method
US3030983A (en) * 1961-03-16 1962-04-24 Mechtronics Corp Bellows
GB1135916A (en) * 1966-03-25 1968-12-11 Leybold Holding Ag An adjustable needle valve for vacuum installations
DE2026969C1 (de) * 1969-06-03 1984-05-24 British Nuclear Fuels Ltd., Risley, Warrington, Cheshire Hubventil für Verfahrensgas
FR2296489A1 (fr) * 1975-01-03 1976-07-30 Specim Procede d'assemblage par brasage en atmosphere controlee de pieces metalliques
EP0264466A1 (fr) * 1986-10-17 1988-04-27 Leybold Aktiengesellschaft Vanne à soufflet
US4795134A (en) * 1987-05-27 1989-01-03 Huntington Mechanical Laboratories, Inc. Valve with improved sealing properties

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0750148A1 (fr) * 1995-05-10 1996-12-27 Fujikin Incorporated Soupape régulatrice de pression
US5634627A (en) * 1995-05-10 1997-06-03 Fujikin Incorporated Controller

Also Published As

Publication number Publication date
EP0574407A1 (fr) 1993-12-22
DE4106761A1 (de) 1992-09-10

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