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WO1992004620A3 - Procede et appareil destines a l'inspection a haute resolution de composants electroniques - Google Patents

Procede et appareil destines a l'inspection a haute resolution de composants electroniques Download PDF

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Publication number
WO1992004620A3
WO1992004620A3 PCT/US1991/006166 US9106166W WO9204620A3 WO 1992004620 A3 WO1992004620 A3 WO 1992004620A3 US 9106166 W US9106166 W US 9106166W WO 9204620 A3 WO9204620 A3 WO 9204620A3
Authority
WO
WIPO (PCT)
Prior art keywords
target
image
rays
vacuum chamber
computer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US1991/006166
Other languages
English (en)
Other versions
WO1992004620A2 (fr
Inventor
John A Adams
Bruce D Baker
Kerry L Brown
Robert L Corey
Brian L Ganz
David C Reynolds
Edward W Ross
Gerald S Russell
Christoper S Sexton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Four PI Systems Corp
Original Assignee
Four PI Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Four PI Systems Corp filed Critical Four PI Systems Corp
Publication of WO1992004620A2 publication Critical patent/WO1992004620A2/fr
Publication of WO1992004620A3 publication Critical patent/WO1992004620A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/043—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using fluoroscopic examination, with visual observation or video transmission of fluoroscopic images
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing

Landscapes

  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

Système de laminographie à haute résolution (200) destiné à l'inspection de circuits intégrés dans lequel un faisceau d'électrons hautement focalisés est tracé en une configuration circulaire sur une cible plate (272) au sein d'une enceinte à vide (275). La cible (272) convertit le faisceau d'électrons en rayons X de manière à produire une source ponctuelle de rayons X qui effectue un mouvement de rotation en synchronisation avec un ensemble détecteur rotatif. Un objet (210) est placé au sein de l'enceinte à vide (274), entre la source de rayons X et le détecteur, si bien qu'un ombrogramme aux rayons X de l'objet est converti en une image optique par un écran de substance fluorescente (285) déposé sur l'intérieur d'une fenêtre qui ferme de manière étanche l'enceinte à vide. L'ensemble détecteur rotatif redresse l'image de manière à ce qu'elle s'affiche et soit intégrée dans une caméra vidéo stationnaire (300) en tant que laminographe. Un système informatique (350) et de rétroaction (320) commande un système de positionnement automatique qui dévie le faisceau d'électrons de manière à reproduire une image de zones choisies de l'objet inspecté. Afin de garder une qualité et une résolution d'image élevées, le système informatique (350) et de réaction (320) commande également la synchronisation de la déflexion du faisceau d'électrons et du système détecteur rotatif, corrigeant les inexactitudes de la mécanique du système. Le système informatique (350) peut également fonctionner sous commande de programme pour analyser automatiquement les données, mesurer les caractéristiques de l'objet inspecté et prendre des décisions concernant l'acceptabilité de la qualité de l'objet. Ladite invention emploie également des techniques de balayage au microscope électronique pour produire directement une image de la cible, si bien qu'il est possible de surveiller l'état de la cible et de compenser la dérive d'électrons au sein du système. Ladite invention convient particulièrement à l'analyse des défauts de puces de circuit intégré et autres.
PCT/US1991/006166 1990-08-30 1991-08-28 Procede et appareil destines a l'inspection a haute resolution de composants electroniques Ceased WO1992004620A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US07/575,550 US5199054A (en) 1990-08-30 1990-08-30 Method and apparatus for high resolution inspection of electronic items
US575,550 1990-08-30

Publications (2)

Publication Number Publication Date
WO1992004620A2 WO1992004620A2 (fr) 1992-03-19
WO1992004620A3 true WO1992004620A3 (fr) 1992-05-29

Family

ID=24300754

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1991/006166 Ceased WO1992004620A2 (fr) 1990-08-30 1991-08-28 Procede et appareil destines a l'inspection a haute resolution de composants electroniques

Country Status (2)

Country Link
US (1) US5199054A (fr)
WO (1) WO1992004620A2 (fr)

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Also Published As

Publication number Publication date
US5199054A (en) 1993-03-30
WO1992004620A2 (fr) 1992-03-19

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