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WO1989000294A1 - Accelerometre - Google Patents

Accelerometre Download PDF

Info

Publication number
WO1989000294A1
WO1989000294A1 PCT/EP1988/000619 EP8800619W WO8900294A1 WO 1989000294 A1 WO1989000294 A1 WO 1989000294A1 EP 8800619 W EP8800619 W EP 8800619W WO 8900294 A1 WO8900294 A1 WO 8900294A1
Authority
WO
WIPO (PCT)
Prior art keywords
accelerometer
piezoelectric material
silicon
wafer
bonded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP1988/000619
Other languages
English (en)
Other versions
WO1989000294A2 (fr
Inventor
Borge R Jensen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of WO1989000294A1 publication Critical patent/WO1989000294A1/fr
Publication of WO1989000294A2 publication Critical patent/WO1989000294A2/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0828—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type being suspended at one of its longitudinal ends

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

Accéléromètre comprenant une poutre (1) en silicium supportée à une extrémité, à laquelle est liée une couche de matière piézo-électrique (2). On fabrique simultanément une pluralité de poutres, par découpage en cubes d'une tranche de silicium à laquelle a été liée la matière piézo-électrique. On décape la surface de la tranche opposée à la couche liée, de manière à ce que les poutres ainsi réalisées comportent une partie (3) de corps de support facilitant le montage.
PCT/EP1988/000619 1987-07-08 1988-07-08 Accelerometre Ceased WO1989000294A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB878716093A GB8716093D0 (en) 1987-07-08 1987-07-08 Accelerometer
GB8716093 1987-07-08

Publications (2)

Publication Number Publication Date
WO1989000294A1 true WO1989000294A1 (fr) 1989-01-12
WO1989000294A2 WO1989000294A2 (fr) 1989-01-12

Family

ID=

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991011722A1 (fr) * 1990-01-24 1991-08-08 Sensonor A.S Agencement dans un accelerometre a semiconducteurs
EP0567535A4 (fr) * 1991-01-17 1995-03-08 Roger A Adelman Prothese auditive amelioree.
EP0664531A1 (fr) * 1994-01-20 1995-07-26 Cerberus Ag Transducteur sonique pour détecter une effraction
EP0793103A3 (fr) * 1996-02-27 1998-10-07 Seiko Instruments R&D Center Inc. Capteur d'accélération semi-conducteur
WO1998050794A1 (fr) * 1997-05-07 1998-11-12 Pacesetter Ab Accelerometre
WO1998050795A1 (fr) * 1997-05-07 1998-11-12 Pacesetter Ab Detecteur
US6158283A (en) * 1996-02-28 2000-12-12 Seiko Instruments R&D Center Inc. Semiconductor acceleration sensor
EP1227327A3 (fr) * 2001-01-24 2004-01-21 Fujitsu Limited Capteur d'accélération
WO2012109259A3 (fr) * 2011-02-07 2013-07-04 Ion Geophysical Corporation Procédé et appareil de détection de signaux sous-marins

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1078228A (en) * 1964-02-19 1967-08-09 Kistler Instrumente Ag Acceleration measuring device
GB2053348A (en) * 1979-06-06 1981-02-04 Nissan Motor Device for detecting engine knock
EP0047660A1 (fr) * 1980-09-06 1982-03-17 Peter Kellett Accéléromètres
US4494409A (en) * 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1078228A (en) * 1964-02-19 1967-08-09 Kistler Instrumente Ag Acceleration measuring device
GB2053348A (en) * 1979-06-06 1981-02-04 Nissan Motor Device for detecting engine knock
EP0047660A1 (fr) * 1980-09-06 1982-03-17 Peter Kellett Accéléromètres
US4494409A (en) * 1981-05-29 1985-01-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Engine vibration sensor

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
IEEE Transactions on Electron Devices, vol. ED-26, no. 12, December 1979 (New York, US) L.M. Roylance et al.: "A batch-babricated silicon accelerometer", pages 1911-1917 *

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991011722A1 (fr) * 1990-01-24 1991-08-08 Sensonor A.S Agencement dans un accelerometre a semiconducteurs
EP0567535A4 (fr) * 1991-01-17 1995-03-08 Roger A Adelman Prothese auditive amelioree.
EP0664531A1 (fr) * 1994-01-20 1995-07-26 Cerberus Ag Transducteur sonique pour détecter une effraction
US5602529A (en) * 1994-01-20 1997-02-11 Cerberus Ag Structure-borne sound detector for an intruder alarm system
EP0793103A3 (fr) * 1996-02-27 1998-10-07 Seiko Instruments R&D Center Inc. Capteur d'accélération semi-conducteur
US6158283A (en) * 1996-02-28 2000-12-12 Seiko Instruments R&D Center Inc. Semiconductor acceleration sensor
US6252335B1 (en) 1997-05-07 2001-06-26 Pacesetter Ab Beam-type accelerometer
WO1998050795A1 (fr) * 1997-05-07 1998-11-12 Pacesetter Ab Detecteur
WO1998050794A1 (fr) * 1997-05-07 1998-11-12 Pacesetter Ab Accelerometre
US7021141B1 (en) 1997-05-07 2006-04-04 Pacesetter Ab Beam-type accelerometer
EP1227327A3 (fr) * 2001-01-24 2004-01-21 Fujitsu Limited Capteur d'accélération
US6823735B2 (en) 2001-01-24 2004-11-30 Fujitsu Limited Acceleration sensor
WO2012109259A3 (fr) * 2011-02-07 2013-07-04 Ion Geophysical Corporation Procédé et appareil de détection de signaux sous-marins
CN103547895A (zh) * 2011-02-07 2014-01-29 离子地球物理学公司 用于感测水下信号的方法和设备
AU2012214506B2 (en) * 2011-02-07 2015-12-17 Ion Geophysical Corporation Method and apparatus for sensing underwater signals
US9294011B2 (en) 2011-02-07 2016-03-22 Ion Geophysical Corporation Method and apparatus for sensing underwater signals
CN103547895B (zh) * 2011-02-07 2016-08-24 离子地球物理学公司 用于感测水下信号的方法和设备
US9502993B2 (en) 2011-02-07 2016-11-22 Ion Geophysical Corporation Method and apparatus for sensing signals

Also Published As

Publication number Publication date
GB8716093D0 (en) 1987-08-12

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