USH2087H1 - Pickling of refractory metals - Google Patents
Pickling of refractory metals Download PDFInfo
- Publication number
- USH2087H1 USH2087H1 US09/081,321 US8132198A USH2087H US H2087 H1 USH2087 H1 US H2087H1 US 8132198 A US8132198 A US 8132198A US H2087 H USH2087 H US H2087H
- Authority
- US
- United States
- Prior art keywords
- pickling
- solution
- tantalum
- bath
- tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/02—Cleaning or pickling metallic material with solutions or molten salts with acid solutions
- C23G1/10—Other heavy metals
- C23G1/106—Other heavy metals refractory metals
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G1/00—Cleaning or pickling metallic material with solutions or molten salts
- C23G1/36—Regeneration of waste pickling liquors
Definitions
- the present invention relates to process enhancements in pickling of refractory metals (Ta, Nb, Ti, Mo, W, V, Cr, Zr, Hf and alloys and mixtures), and more particularly Ta and Nb, incident to cleaning mill products and/or fabricated parts at the conclusion of mill processing or end product fabrication and at the end of intermediate steps, e.g. pickling drawn Ta wire or strip after each drawing or rolling pass, or each series of passes in a larger sequence, to remove lubricant and surface contaminants prior to an intermediate anneal.
- pickling is used herein in a broadest sense of cleaning the surface of a metal by a strong etching solution. Small, but valuable, portions of the metal are necessarily removed from the surface of the metal product and have to be recovered.
- a pickling bath comprising an aqueous solution of HF/H 2 O 2 with the HF and H2O 2 in a weight ratio (gpl/gpl) of from 4:1 to 15:1, while limiting the absolute amounts of HF to under 800 gpl, preferably under 400 gpl and more preferably about 10-200 gpl H 2 O 2 and to under 200 gpl and more preferably about 20-50 in relation to reasonably sized batches of tantalum (and correspondingly reduced as to other more etchable metals) to avoid excessive metal removal.
- the conditions are adjusted to achieve the effective surface etching of metal in 5-20 minutes. Temperature of the bath should be maintained between 20 and 40° C. for a median bath composition of 200 gpl HF and 10-50 gpl H 2 O 2 .
- H 2 O 2 solutions include stabilizers that may be provided in amounts of about 50-100% of peroxide amounts.
- Build up of Ta in solution to upper limits must be resolved by a bath regeneration step that includes Ta recovery.
- Addition of potassium fluoride (KF) provides a means of such regeneration/recovery as is indicated in the Apr. 23, 1982 Russian Inventor's Certificate of Balyasov et al. entitled “A Solution for the Chemical Pickling of Niobium and Its Alloys”.
- KF is added initially in small amounts to precipitate K 2 TaF 7 crystals and limit heat due to exothermic reaction, then in larger amounts and with cooling to accelerate crystallization, the KF amounts being about 1.0 to 1.5 times stoichiometric in relation to estimated Ta content in solution to limit excessive KF residuals in the bath after regeneration.
- the bath composition can accept a loading of etched metal up to and in some cases exceeding 300 gpl than allowing long usage before metal disposal and regeneration.
- Dissolved tantalum can be processed to a salt form (K 2 TaF 7 )reusable as a tantalum source by reduction in a manner well known in the art.
- FIG. 1 A A flowsheet of a projected plant layout for applying the invention is shown in FIG. 1 A and the operative equations for dissolution reactions therein are shown in FIG. 1B;
- FIGS. 2-9 are traces of tantalum weight loss (as a percentage) vs. variations of each of certain parameters of the pickling process as determined in laboratory tests described below.
- the second regeneration had 50 gpl Ta before and 7 gpl Ta, 5 gpl K afterward.
- the progress of the solution was studied to avoid an Fe concentration (from the hangers) level as high as 2 gpl which might cause H 2 O 2 decomposition. In fact the Fe maximum was seen to be less than 0.4 gpl.
- the etched wire and strip surfaces were studied and found to be just as well pickled as with conventional HF/HNO 3 baths.
- FIG. 1A shows a contemplated production scale pickling facility with continuous tantalum removal for handling these materials in a pickling bath 10 .
- Bath temperature is controlled via heat exchanger HE 1 pump (P 1 ).
- the KF is added on a batch or continuous basis to a crystallizer tank 12 and then to a settler tank 14 . Fines of etched away tantalum (in the form of tantalum salt) are captured at a filter 16 using an ethanol wash solution.
- An example of sizes of the liquid tanks are
- the bath 10 would typically be charged with 150 g/l HF, 10-20 gpl H 2 O 2 , and 10 gpl of a common H 2 O 2 stabilizer such as G. W. Richards Co. Broxide-C.
- the stabilizers comprise antioxidants in propylene glycol solution.
- the equipment should be prepared from materials compatible with HF and H 2 O 2 , e.g. PVC, polypropylene, Viton, Kynar, Teflon and in regions not directly exposed to HF or H 2 O 2 solution, stainless steel.
- the tanks could be stainless steel lined with PVC or polypropylene.
- FIGS. 2, 3 , 4 , 5 , 6 , 7 , 8 , 9 show, respectively, effects—as determined in laboratory tests—on tantalum weight loss of temperature (2), agitation (3), HF concentration (4), H 2 O 2 concentration, KF concentration (6), Ni+Cr concentration (7), H 2 O 2 stabilizer concentration (8) and Fe concentration (9).
- the pilot plant testing shows a modification of such relationships in the course of processing in much larger volumes of the pilot plant compared to the laboratory tests.
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
Description
| TABLE 1 |
| Comparison of Tantalum Product Thickness Change, Weight |
| Loss, and Pickling | ||
| Reduction in | Rate Corresponding | |
| Thickness | Weight Loss, % | Equivalent Pickling |
| or Diameter | 0.103- | 0.0284- | Rate, mg/(cm2-min, at |
| 0.44 | inch | inch | Indicated Pickling | |
| Inch | diam. | diam. | Time, min. |
| Mil | Micron | Square | wire | wire | 5 | 10 | 20 |
| 0.2 | 5.1 | 0.091 | 0.39 | 1.4 | 0.84 | 0.42 | 0.21 |
| 0.3 | 7.6 | 0.136 | 0.58 | 2.1 | 1.26 | 0.63 | 0.32 |
| 0.4 | 10.2 | 0.182 | 0.78 | 2.8 | 1.68 | 0.84 | 0.42 |
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/081,321 USH2087H1 (en) | 1998-05-19 | 1998-05-19 | Pickling of refractory metals |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/081,321 USH2087H1 (en) | 1998-05-19 | 1998-05-19 | Pickling of refractory metals |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USH2087H1 true USH2087H1 (en) | 2003-11-04 |
Family
ID=29268620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US09/081,321 Abandoned USH2087H1 (en) | 1998-05-19 | 1998-05-19 | Pickling of refractory metals |
Country Status (1)
| Country | Link |
|---|---|
| US (1) | USH2087H1 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050089699A1 (en) * | 2003-10-22 | 2005-04-28 | Applied Materials, Inc. | Cleaning and refurbishing chamber components having metal coatings |
| US6902627B2 (en) | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Cleaning chamber surfaces to recover metal-containing compounds |
| WO2005068681A3 (en) * | 2003-12-19 | 2005-09-15 | Applied Materials Inc | Cleaning tantalum-containing deposits from process chamber components |
| US20060105182A1 (en) * | 2004-11-16 | 2006-05-18 | Applied Materials, Inc. | Erosion resistant textured chamber surface |
| US7579067B2 (en) | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US7762114B2 (en) | 2005-09-09 | 2010-07-27 | Applied Materials, Inc. | Flow-formed chamber component having a textured surface |
| US7942969B2 (en) | 2007-05-30 | 2011-05-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
| US7964085B1 (en) | 2002-11-25 | 2011-06-21 | Applied Materials, Inc. | Electrochemical removal of tantalum-containing materials |
| US7981262B2 (en) | 2007-01-29 | 2011-07-19 | Applied Materials, Inc. | Process kit for substrate processing chamber |
| US8617672B2 (en) | 2005-07-13 | 2013-12-31 | Applied Materials, Inc. | Localized surface annealing of components for substrate processing chambers |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5164016A (en) * | 1990-02-08 | 1992-11-17 | Ugine, Aciers De Chatillon Et Gueugnon | Method for pickling or cleaning materials of steel, in particular stainless steel |
| US5215624A (en) * | 1991-02-08 | 1993-06-01 | Aluminum Company Of America | Milling solution and method |
| US5248386A (en) * | 1991-02-08 | 1993-09-28 | Aluminum Company Of America | Milling solution and method |
| US5338367A (en) * | 1989-07-26 | 1994-08-16 | Ugine, Aciers De Chatillon Et Gueugnon | Pickling process in an acid bath of metallic products containing titanium or at least one chemical element of the titanium family |
| US5354383A (en) * | 1991-03-29 | 1994-10-11 | Itb, S.R.L. | Process for pickling and passivating stainless steel without using nitric acid |
| US5690748A (en) * | 1991-02-25 | 1997-11-25 | Ugine Aciers De Chatillon Et Gueugnon | Process for the acid pickling of stainless steel products |
| US5843240A (en) * | 1995-10-18 | 1998-12-01 | Novamax Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
| US5908511A (en) * | 1992-08-06 | 1999-06-01 | Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
-
1998
- 1998-05-19 US US09/081,321 patent/USH2087H1/en not_active Abandoned
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5338367A (en) * | 1989-07-26 | 1994-08-16 | Ugine, Aciers De Chatillon Et Gueugnon | Pickling process in an acid bath of metallic products containing titanium or at least one chemical element of the titanium family |
| US5164016A (en) * | 1990-02-08 | 1992-11-17 | Ugine, Aciers De Chatillon Et Gueugnon | Method for pickling or cleaning materials of steel, in particular stainless steel |
| US5215624A (en) * | 1991-02-08 | 1993-06-01 | Aluminum Company Of America | Milling solution and method |
| US5248386A (en) * | 1991-02-08 | 1993-09-28 | Aluminum Company Of America | Milling solution and method |
| US5690748A (en) * | 1991-02-25 | 1997-11-25 | Ugine Aciers De Chatillon Et Gueugnon | Process for the acid pickling of stainless steel products |
| US5354383A (en) * | 1991-03-29 | 1994-10-11 | Itb, S.R.L. | Process for pickling and passivating stainless steel without using nitric acid |
| US5908511A (en) * | 1992-08-06 | 1999-06-01 | Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
| US5843240A (en) * | 1995-10-18 | 1998-12-01 | Novamax Itb S.R.L. | Process for stainless steel pickling and passivation without using nitric acid |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6902627B2 (en) | 2002-11-25 | 2005-06-07 | Applied Materials, Inc. | Cleaning chamber surfaces to recover metal-containing compounds |
| US9068273B2 (en) | 2002-11-25 | 2015-06-30 | Quantum Global Technologies LLC | Electrochemical removal of tantalum-containing materials |
| US7964085B1 (en) | 2002-11-25 | 2011-06-21 | Applied Materials, Inc. | Electrochemical removal of tantalum-containing materials |
| US7910218B2 (en) | 2003-10-22 | 2011-03-22 | Applied Materials, Inc. | Cleaning and refurbishing chamber components having metal coatings |
| US20050089699A1 (en) * | 2003-10-22 | 2005-04-28 | Applied Materials, Inc. | Cleaning and refurbishing chamber components having metal coatings |
| WO2005068681A3 (en) * | 2003-12-19 | 2005-09-15 | Applied Materials Inc | Cleaning tantalum-containing deposits from process chamber components |
| US20060105182A1 (en) * | 2004-11-16 | 2006-05-18 | Applied Materials, Inc. | Erosion resistant textured chamber surface |
| US8021743B2 (en) | 2004-11-24 | 2011-09-20 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US7579067B2 (en) | 2004-11-24 | 2009-08-25 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US20100086805A1 (en) * | 2004-11-24 | 2010-04-08 | Applied Materials, Inc. | Process chamber component with layered coating and method |
| US8617672B2 (en) | 2005-07-13 | 2013-12-31 | Applied Materials, Inc. | Localized surface annealing of components for substrate processing chambers |
| US9481608B2 (en) | 2005-07-13 | 2016-11-01 | Applied Materials, Inc. | Surface annealing of components for substrate processing chambers |
| US7762114B2 (en) | 2005-09-09 | 2010-07-27 | Applied Materials, Inc. | Flow-formed chamber component having a textured surface |
| US7981262B2 (en) | 2007-01-29 | 2011-07-19 | Applied Materials, Inc. | Process kit for substrate processing chamber |
| US7942969B2 (en) | 2007-05-30 | 2011-05-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
| US8980045B2 (en) | 2007-05-30 | 2015-03-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
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| AS | Assignment |
Owner name: H.C. STARCK, INC., MASSACHUSETTS Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:BALLIETT, ROBERT W.;BRONSTEIN, ARTHUR H.;RYAN, THOMAS J.;AND OTHERS;REEL/FRAME:009195/0559 Effective date: 19980506 |
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Owner name: COMMERZBANK AG, FILIALE LUXEMBURG, AS SECURITY AGE Free format text: SECURITY AGREEMENT;ASSIGNOR:H.C. STARCK INC.;REEL/FRAME:028503/0188 Effective date: 20120620 Owner name: COMMERZBANK AG, FILIALE LUXEMBURG, AS SECURITY AGE Free format text: SECURITY AGREEMENT;ASSIGNOR:H.C. STARCK INC.;REEL/FRAME:028503/0196 Effective date: 20120620 Owner name: COMMERZBANKAG, FILIALE LUXEMBURG, AS SECURITY AGEN Free format text: SECURITY AGREEMENT;ASSIGNOR:H.C. STARCK INC.;REEL/FRAME:028503/0167 Effective date: 20120620 |
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