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USD947914S1 - Base plate for a processing chamber substrate support - Google Patents

Base plate for a processing chamber substrate support Download PDF

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Publication number
USD947914S1
USD947914S1 US29/759,527 US202029759527F USD947914S US D947914 S1 USD947914 S1 US D947914S1 US 202029759527 F US202029759527 F US 202029759527F US D947914 S USD947914 S US D947914S
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US
United States
Prior art keywords
base plate
processing chamber
substrate support
chamber substrate
view
Prior art date
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Active
Application number
US29/759,527
Inventor
Shreesha Yogish Rao
Mukund Sundararajan
Cheng-Hsiung Matthew Tsai
Manjunatha P. Koppa
Steven V. Sansoni
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Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/759,527 priority Critical patent/USD947914S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SUNDARARAJAN, MUKUND, KOPPA, MANJUNATHA P., RAO, SHREESHA YOGISH, SANSONI, STEVEN V., TSAI, Cheng-Hsiung Matthew
Priority to TW109306844F priority patent/TWD217559S/en
Priority to TW110304221F priority patent/TWD224469S/en
Priority to US29/830,409 priority patent/USD960216S1/en
Application granted granted Critical
Publication of USD947914S1 publication Critical patent/USD947914S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a top isometric view of a base plate for a processing chamber substrate support, according to the novel design.
FIG. 2 is a bottom isometric view thereof.
FIG. 3 is a top plan view thereof.
FIG. 4 is a bottom plan view thereof.
FIG. 5 is a front elevation view thereof.
FIG. 6 is a back elevation view thereof.
FIG. 7 is a left side elevation view thereof.
FIG. 8 is a right side elevation view thereof.
FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 3; and,
FIG. 10 is a cross-sectional view taken along line 10-10 in FIG. 3.
The broken lines in the drawings depict portions of the article that form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a base plate for a processing chamber substrate support, as shown and described.
US29/759,527 2020-11-23 2020-11-23 Base plate for a processing chamber substrate support Active USD947914S1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US29/759,527 USD947914S1 (en) 2020-11-23 2020-11-23 Base plate for a processing chamber substrate support
TW109306844F TWD217559S (en) 2020-11-23 2020-12-04 Base plate for a processing chamber substrate support
TW110304221F TWD224469S (en) 2020-11-23 2020-12-04 Base plate for a substrate support
US29/830,409 USD960216S1 (en) 2020-11-23 2022-03-11 Base plate for a processing chamber substrate support

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/759,527 USD947914S1 (en) 2020-11-23 2020-11-23 Base plate for a processing chamber substrate support

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US29/830,409 Division USD960216S1 (en) 2020-11-23 2022-03-11 Base plate for a processing chamber substrate support

Publications (1)

Publication Number Publication Date
USD947914S1 true USD947914S1 (en) 2022-04-05

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Family Applications (2)

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US29/759,527 Active USD947914S1 (en) 2020-11-23 2020-11-23 Base plate for a processing chamber substrate support
US29/830,409 Active USD960216S1 (en) 2020-11-23 2022-03-11 Base plate for a processing chamber substrate support

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US29/830,409 Active USD960216S1 (en) 2020-11-23 2022-03-11 Base plate for a processing chamber substrate support

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US (2) USD947914S1 (en)
TW (2) TWD224469S (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD981973S1 (en) * 2021-05-11 2023-03-28 Asm Ip Holding B.V. Reactor wall for substrate processing apparatus
USD986190S1 (en) * 2020-03-19 2023-05-16 Applied Materials, Inc. Confinement plate for a substrate processing chamber
USD989012S1 (en) * 2020-09-17 2023-06-13 Ebara Corporation Elastic membrane
USD990441S1 (en) * 2021-09-07 2023-06-27 Asm Ip Holding B.V. Gas flow control plate
USD991012S1 (en) * 2020-05-20 2023-07-04 Peak Industries, Inc. Base plate of a mobile stackable tower
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD1042892S1 (en) 2020-05-20 2024-09-17 Gerald W. Newman Mobile stackable tower
USD1071886S1 (en) * 2022-01-20 2025-04-22 Applied Materials, Inc. Substrate support for a substrate processing chamber
USD1073758S1 (en) * 2022-10-13 2025-05-06 Lam Research Corporation Baffle for substrate processing system

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1012873S1 (en) * 2020-09-24 2024-01-30 Asm Ip Holding B.V. Electrode for semiconductor processing apparatus
USD980814S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas distributor for substrate processing apparatus
USD980813S1 (en) * 2021-05-11 2023-03-14 Asm Ip Holding B.V. Gas flow control plate for substrate processing apparatus
USD1049855S1 (en) * 2023-03-21 2024-11-05 Caniel Industries A. T. G. Ltd. Base plate for a can
TWD236714S (en) 2024-01-19 2025-03-01 美商應用材料股份有限公司 (美國) Process chamber mixer

Citations (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD375961S (en) 1995-08-03 1996-11-26 American Standard Inc. Base plate for a refrigeration compressor
US6046885A (en) 1998-04-03 2000-04-04 Intri-Plex Technologies, Inc. Base plate suspension assembly in a hard disk drive with step in flange
US6324743B1 (en) 1998-11-30 2001-12-04 Societe De Prospection Et D'inventions Techniques Spit Method for setting a piece fastening base plate
US6673651B2 (en) 1999-07-01 2004-01-06 Oki Electric Industry Co., Ltd. Method of manufacturing semiconductor device including semiconductor elements mounted on base plate
US6853533B2 (en) 2000-06-09 2005-02-08 Applied Materials, Inc. Full area temperature controlled electrostatic chuck and method of fabricating same
US20050152089A1 (en) * 2003-12-26 2005-07-14 Ngk Insulators, Ltd. Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same
US20060133907A1 (en) * 2004-12-20 2006-06-22 A.L. Hansen Manufacturing Co. Tie-down assembly
US7324307B2 (en) 2002-02-20 2008-01-29 Intri-Plex Technologies, Inc. Plated base plate for suspension assembly in hard disk drive
US7589950B2 (en) 2006-10-13 2009-09-15 Applied Materials, Inc. Detachable electrostatic chuck having sealing assembly
US7697260B2 (en) 2004-03-31 2010-04-13 Applied Materials, Inc. Detachable electrostatic chuck
USD616390S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Quartz cover for manufacturing semiconductor wafers
USD623500S1 (en) 2009-04-20 2010-09-14 Armorworks Enterprises, Llc Tie-down base plate
US20110309724A1 (en) * 2010-06-18 2011-12-22 Samhongsa Co., Ltd. Motor and method of manufacturing the same
US8476793B2 (en) 2008-05-03 2013-07-02 Anthony J. Aiello Stiffener tab for a spindle motor base plate
TWD159673S (en) 2012-11-30 2014-04-01 日立國際電氣股份有限公司 Rotator for substrate processing device
USD707257S1 (en) * 2012-04-30 2014-06-17 Samhongsa Co., Ltd. Base plate for spindle motor
TWD175855S (en) 2015-06-12 2016-05-21 Hitachi High Tech Corp Lower chamber for plasma treatment device
TWD183006S (en) 2016-02-10 2017-05-11 日立國際電氣股份有限公司 Part of the rotating tool for wafer boats of semiconductor manufacturing equipment
US9666467B2 (en) 2014-11-21 2017-05-30 Varian Semiconductor Equipment Associates, Inc. Detachable high-temperature electrostatic chuck assembly
US9668873B2 (en) 2013-03-08 2017-06-06 Biomet Manufacturing, Llc Modular glenoid base plate with augments
USD793816S1 (en) 2014-08-19 2017-08-08 Frank J Alteslaben Saucer base plate
USD802546S1 (en) * 2016-01-08 2017-11-14 Asm Ip Holding B.V. Outer wall of reactor for semiconductor manufacturing apparatus
US9853579B2 (en) 2013-12-18 2017-12-26 Applied Materials, Inc. Rotatable heated electrostatic chuck
TWD193794S (en) 2017-11-10 2018-11-01 日商日立全球先端科技股份有限公司 Semiconductor manufacturing device uses infrared lamp heater to penetrate window
US20180350653A1 (en) * 2017-05-30 2018-12-06 Asm Ip Holding B.V. Substrate supporting device and substrate processing apparatus including the same
USD836399S1 (en) * 2017-03-17 2018-12-25 Huskee Tech Pty Ltd Saucer
TWD196097S (en) 2018-02-01 2019-02-21 Asm Ip Holding Bv Gas supply plate for semiconductor manufacturing apparatus
USD847982S1 (en) 2016-02-04 2019-05-07 Atos Medical Ab Heat exchanger base plate
US10559327B2 (en) 2018-02-28 2020-02-11 Nidec Corporation Base plate with electrodeposition coating film and method for producing base plate
US10609994B2 (en) * 2018-05-25 2020-04-07 Telescope Casual Furniture, Inc. Nestable and stackable umbrella bases
USD893441S1 (en) * 2019-06-28 2020-08-18 Applied Materials, Inc. Base plate for a processing chamber substrate support
USD916037S1 (en) * 2018-05-18 2021-04-13 Kokusai Electric Corporation Cover of seal cap for reaction chamber for semiconductor

Patent Citations (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD375961S (en) 1995-08-03 1996-11-26 American Standard Inc. Base plate for a refrigeration compressor
US6046885A (en) 1998-04-03 2000-04-04 Intri-Plex Technologies, Inc. Base plate suspension assembly in a hard disk drive with step in flange
US6324743B1 (en) 1998-11-30 2001-12-04 Societe De Prospection Et D'inventions Techniques Spit Method for setting a piece fastening base plate
US6673651B2 (en) 1999-07-01 2004-01-06 Oki Electric Industry Co., Ltd. Method of manufacturing semiconductor device including semiconductor elements mounted on base plate
US6853533B2 (en) 2000-06-09 2005-02-08 Applied Materials, Inc. Full area temperature controlled electrostatic chuck and method of fabricating same
US7324307B2 (en) 2002-02-20 2008-01-29 Intri-Plex Technologies, Inc. Plated base plate for suspension assembly in hard disk drive
US20050152089A1 (en) * 2003-12-26 2005-07-14 Ngk Insulators, Ltd. Electrostatic chuck and manufacturing method for the same, and alumina sintered member and manufacturing method for the same
US7697260B2 (en) 2004-03-31 2010-04-13 Applied Materials, Inc. Detachable electrostatic chuck
US20060133907A1 (en) * 2004-12-20 2006-06-22 A.L. Hansen Manufacturing Co. Tie-down assembly
US7589950B2 (en) 2006-10-13 2009-09-15 Applied Materials, Inc. Detachable electrostatic chuck having sealing assembly
US8476793B2 (en) 2008-05-03 2013-07-02 Anthony J. Aiello Stiffener tab for a spindle motor base plate
USD616390S1 (en) * 2009-03-06 2010-05-25 Tokyo Electron Limited Quartz cover for manufacturing semiconductor wafers
USD623500S1 (en) 2009-04-20 2010-09-14 Armorworks Enterprises, Llc Tie-down base plate
US20110309724A1 (en) * 2010-06-18 2011-12-22 Samhongsa Co., Ltd. Motor and method of manufacturing the same
USD707257S1 (en) * 2012-04-30 2014-06-17 Samhongsa Co., Ltd. Base plate for spindle motor
TWD159673S (en) 2012-11-30 2014-04-01 日立國際電氣股份有限公司 Rotator for substrate processing device
US9668873B2 (en) 2013-03-08 2017-06-06 Biomet Manufacturing, Llc Modular glenoid base plate with augments
US9853579B2 (en) 2013-12-18 2017-12-26 Applied Materials, Inc. Rotatable heated electrostatic chuck
USD793816S1 (en) 2014-08-19 2017-08-08 Frank J Alteslaben Saucer base plate
US9666467B2 (en) 2014-11-21 2017-05-30 Varian Semiconductor Equipment Associates, Inc. Detachable high-temperature electrostatic chuck assembly
TWD175855S (en) 2015-06-12 2016-05-21 Hitachi High Tech Corp Lower chamber for plasma treatment device
USD802546S1 (en) * 2016-01-08 2017-11-14 Asm Ip Holding B.V. Outer wall of reactor for semiconductor manufacturing apparatus
USD847982S1 (en) 2016-02-04 2019-05-07 Atos Medical Ab Heat exchanger base plate
TWD183006S (en) 2016-02-10 2017-05-11 日立國際電氣股份有限公司 Part of the rotating tool for wafer boats of semiconductor manufacturing equipment
USD836399S1 (en) * 2017-03-17 2018-12-25 Huskee Tech Pty Ltd Saucer
US20180350653A1 (en) * 2017-05-30 2018-12-06 Asm Ip Holding B.V. Substrate supporting device and substrate processing apparatus including the same
TWD193794S (en) 2017-11-10 2018-11-01 日商日立全球先端科技股份有限公司 Semiconductor manufacturing device uses infrared lamp heater to penetrate window
TWD196097S (en) 2018-02-01 2019-02-21 Asm Ip Holding Bv Gas supply plate for semiconductor manufacturing apparatus
US10559327B2 (en) 2018-02-28 2020-02-11 Nidec Corporation Base plate with electrodeposition coating film and method for producing base plate
USD916037S1 (en) * 2018-05-18 2021-04-13 Kokusai Electric Corporation Cover of seal cap for reaction chamber for semiconductor
US10609994B2 (en) * 2018-05-25 2020-04-07 Telescope Casual Furniture, Inc. Nestable and stackable umbrella bases
USD893441S1 (en) * 2019-06-28 2020-08-18 Applied Materials, Inc. Base plate for a processing chamber substrate support

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Search Report for Taiwan Design Application No. 108308059001, dated Jun. 1, 2021.
Search Report for Taiwan Design Application No. 109306844, dated May 30, 2021.

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD986190S1 (en) * 2020-03-19 2023-05-16 Applied Materials, Inc. Confinement plate for a substrate processing chamber
USD991012S1 (en) * 2020-05-20 2023-07-04 Peak Industries, Inc. Base plate of a mobile stackable tower
USD1036967S1 (en) 2020-05-20 2024-07-30 Gerald W. Newman Base plate of a mobile stackable tower
USD1042892S1 (en) 2020-05-20 2024-09-17 Gerald W. Newman Mobile stackable tower
USD989012S1 (en) * 2020-09-17 2023-06-13 Ebara Corporation Elastic membrane
USD1021832S1 (en) 2020-09-17 2024-04-09 Ebara Corporation Elastic membrane
USD1006768S1 (en) * 2021-01-07 2023-12-05 Solaero Technologies Corp. Semiconductor wafer for mosaic solar cell fabrication
USD981973S1 (en) * 2021-05-11 2023-03-28 Asm Ip Holding B.V. Reactor wall for substrate processing apparatus
USD990441S1 (en) * 2021-09-07 2023-06-27 Asm Ip Holding B.V. Gas flow control plate
USD1071886S1 (en) * 2022-01-20 2025-04-22 Applied Materials, Inc. Substrate support for a substrate processing chamber
USD1073758S1 (en) * 2022-10-13 2025-05-06 Lam Research Corporation Baffle for substrate processing system

Also Published As

Publication number Publication date
USD960216S1 (en) 2022-08-09
TWD224469S (en) 2023-04-01
TWD217559S (en) 2022-03-11

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