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USD650818S1 - Inner lift pin - Google Patents

Inner lift pin Download PDF

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Publication number
USD650818S1
USD650818S1 US29/313,258 US31325808F USD650818S US D650818 S1 USD650818 S1 US D650818S1 US 31325808 F US31325808 F US 31325808F US D650818 S USD650818 S US D650818S
Authority
US
United States
Prior art keywords
lift pin
inner lift
view
enlarged partial
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/313,258
Inventor
Robin L. Tiner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Priority to US29/313,258 priority Critical patent/USD650818S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TINER, ROBIN L.
Application granted granted Critical
Publication of USD650818S1 publication Critical patent/USD650818S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

The patent or application file contains at least one drawing executed in color. Copies of this patent or patent application publication with color drawing(s) will be provided by the Office upon request and payment of the necessary fee.
FIG. 1 is an isometric view of a inner lift pin comprising a head and a shaft.
FIG. 2 is a top plan view of the inner lift pin of FIG. 1.
FIG. 3 is an enlarged partial top plan view of the left end of the inner lift pin of FIG. 2 illustrating the head and shaft interface.
FIG. 4 is an enlarged partial top plan view of the right end of the inner lift pin of FIG. 2. The enlarged partial bottom plan view of the right end is identical and is omitted.
FIG. 5 is a side elevation view of the inner lift pin of FIG. 1. The other side elevation view is identical and is omitted.
FIG. 6 is a bottom plan view of the inner lift pin of FIG. 1.
FIG. 7 is an enlarged partial bottom plan view of the left end of the inner lift pin of FIG. 6 illustrating the head and shaft interface.
FIG. 8 is an elevation view of the left end of the inner lift pin of FIG. 6; and,
FIG. 9 is an elevation view of the right end of the inner lift pin of FIG. 6.
The broken lines shown in the Figures are disclaimed and do not form part of the claimed design.

Claims (1)

  1. The ornamental design for a inner lift pin, as shown and described.
US29/313,258 2008-12-19 2008-12-19 Inner lift pin Expired - Lifetime USD650818S1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US29/313,258 USD650818S1 (en) 2008-12-19 2008-12-19 Inner lift pin

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/313,258 USD650818S1 (en) 2008-12-19 2008-12-19 Inner lift pin

Publications (1)

Publication Number Publication Date
USD650818S1 true USD650818S1 (en) 2011-12-20

Family

ID=45219598

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/313,258 Expired - Lifetime USD650818S1 (en) 2008-12-19 2008-12-19 Inner lift pin

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US (1) USD650818S1 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD980884S1 (en) * 2021-03-02 2023-03-14 Applied Materials, Inc. Lift pin
US11651990B2 (en) 2019-07-03 2023-05-16 Samsung Electronics Co., Ltd. Substrate processing apparatus and driving method thereof
USD990534S1 (en) * 2020-09-11 2023-06-27 Asm Ip Holding B.V. Weighted lift pin
USD1031676S1 (en) * 2020-12-04 2024-06-18 Asm Ip Holding B.V. Combined susceptor, support, and lift system
US12183618B2 (en) 2020-10-01 2024-12-31 Applied Materials, Inc. Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
USD1099184S1 (en) * 2021-11-29 2025-10-21 Asm Ip Holding B.V. Weighted lift pin

Citations (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3015709A (en) * 1959-04-09 1962-01-02 Ite Circuit Breaker Ltd Cover lift pin
US3074186A (en) * 1961-05-31 1963-01-22 Missouri Wood Heel Company Locking means for top lift and pin combination
US3832764A (en) * 1973-06-18 1974-09-03 Nasa Tool for use in lifting pin-supported objects
US5594985A (en) * 1995-05-08 1997-01-21 Texas Instruments Incorporated End pin extractor for semiconductor storage tube
US5796066A (en) 1996-03-29 1998-08-18 Lam Research Corporation Cable actuated drive assembly for vacuum chamber
US5848670A (en) 1996-12-04 1998-12-15 Applied Materials, Inc. Lift pin guidance apparatus
US5879128A (en) 1996-07-24 1999-03-09 Applied Materials, Inc. Lift pin and support pin apparatus for a processing chamber
US6120609A (en) 1996-10-25 2000-09-19 Applied Materials, Inc. Self-aligning lift mechanism
US6202368B1 (en) * 1999-07-02 2001-03-20 Wallace, Iii Millard F. Earth anchoring system
US6364955B2 (en) * 1992-10-06 2002-04-02 Unaxis Balzers Aktiengesellschaft Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method
US20020121312A1 (en) 2001-03-01 2002-09-05 Dmitry Lubomirsky Lift pin alignment and operation methods and apparatus
US6481723B1 (en) * 2001-03-30 2002-11-19 Lam Research Corporation Lift pin impact management
US20030075387A1 (en) 2001-10-22 2003-04-24 Chung-Chiang Wang Wafer loading device
US6719516B2 (en) * 1998-09-28 2004-04-13 Applied Materials, Inc. Single wafer load lock with internal wafer transport
US6767176B2 (en) * 2001-06-29 2004-07-27 Applied Materials, Inc. Lift pin actuating mechanism for semiconductor processing chamber
US6884319B2 (en) * 2001-11-12 2005-04-26 Jusung Engineering Co., Ltd. Susceptor of apparatus for manufacturing semiconductor device
US20050180737A1 (en) * 2004-02-12 2005-08-18 Applied Materials, Inc. Substrate support bushing
US6958098B2 (en) 2000-02-28 2005-10-25 Applied Materials, Inc. Semiconductor wafer support lift-pin assembly
US6962084B2 (en) * 2003-08-06 2005-11-08 Honeywell International Inc. Sensor with molded sensor diaphragm cover
US20060156987A1 (en) * 2005-01-18 2006-07-20 Chien-Hsing Lai Lift pin mechanism and substrate carrying device of a process chamber
US7204888B2 (en) 2003-05-01 2007-04-17 Applied Materials, Inc. Lift pin assembly for substrate processing
USD568914S1 (en) 2002-09-10 2008-05-13 Applied Materials, Inc. Substrate support lift pin
US20080110397A1 (en) * 2006-11-10 2008-05-15 Hyoung Kyu Son Lift pin driving device and a flat panel display manufacturing apparatus having same
US20080149032A1 (en) * 2006-12-22 2008-06-26 Soon-Bin Jung Lift pin, apparatus for processing a substrate and method of processing a substrate
US20080196665A1 (en) * 2007-02-21 2008-08-21 Jogesh Chandran Batter applicator with adjustable tilt control for submerger or coating mechanism
US20090095621A1 (en) * 2004-02-26 2009-04-16 Chien-Teh Kao Support assembly
US20090127808A1 (en) * 2002-11-08 2009-05-21 Smarte Carte, Inc. Brake assembly and control mechanism for a cart, and method
US20090155025A1 (en) * 2007-12-12 2009-06-18 Applied Materials, Inc. Lift pin for substrate processing
US20090190908A1 (en) * 2007-09-03 2009-07-30 Canon Anelva Corporation Apparatus for heat-treating substrate and method for heat-treating substrate

Patent Citations (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3015709A (en) * 1959-04-09 1962-01-02 Ite Circuit Breaker Ltd Cover lift pin
US3074186A (en) * 1961-05-31 1963-01-22 Missouri Wood Heel Company Locking means for top lift and pin combination
US3832764A (en) * 1973-06-18 1974-09-03 Nasa Tool for use in lifting pin-supported objects
US6364955B2 (en) * 1992-10-06 2002-04-02 Unaxis Balzers Aktiengesellschaft Chamber, at least for the transport of workpieces, a chamber combination, a vacuum treatment facility as well as a transport method
US5594985A (en) * 1995-05-08 1997-01-21 Texas Instruments Incorporated End pin extractor for semiconductor storage tube
US5796066A (en) 1996-03-29 1998-08-18 Lam Research Corporation Cable actuated drive assembly for vacuum chamber
US5879128A (en) 1996-07-24 1999-03-09 Applied Materials, Inc. Lift pin and support pin apparatus for a processing chamber
US6120609A (en) 1996-10-25 2000-09-19 Applied Materials, Inc. Self-aligning lift mechanism
US5848670A (en) 1996-12-04 1998-12-15 Applied Materials, Inc. Lift pin guidance apparatus
US6719516B2 (en) * 1998-09-28 2004-04-13 Applied Materials, Inc. Single wafer load lock with internal wafer transport
US6202368B1 (en) * 1999-07-02 2001-03-20 Wallace, Iii Millard F. Earth anchoring system
US6958098B2 (en) 2000-02-28 2005-10-25 Applied Materials, Inc. Semiconductor wafer support lift-pin assembly
US20020121312A1 (en) 2001-03-01 2002-09-05 Dmitry Lubomirsky Lift pin alignment and operation methods and apparatus
US6481723B1 (en) * 2001-03-30 2002-11-19 Lam Research Corporation Lift pin impact management
US6767176B2 (en) * 2001-06-29 2004-07-27 Applied Materials, Inc. Lift pin actuating mechanism for semiconductor processing chamber
US20030075387A1 (en) 2001-10-22 2003-04-24 Chung-Chiang Wang Wafer loading device
US6884319B2 (en) * 2001-11-12 2005-04-26 Jusung Engineering Co., Ltd. Susceptor of apparatus for manufacturing semiconductor device
USD568914S1 (en) 2002-09-10 2008-05-13 Applied Materials, Inc. Substrate support lift pin
US20090127808A1 (en) * 2002-11-08 2009-05-21 Smarte Carte, Inc. Brake assembly and control mechanism for a cart, and method
US7204888B2 (en) 2003-05-01 2007-04-17 Applied Materials, Inc. Lift pin assembly for substrate processing
US6962084B2 (en) * 2003-08-06 2005-11-08 Honeywell International Inc. Sensor with molded sensor diaphragm cover
US20050180737A1 (en) * 2004-02-12 2005-08-18 Applied Materials, Inc. Substrate support bushing
US20090095621A1 (en) * 2004-02-26 2009-04-16 Chien-Teh Kao Support assembly
US20060156987A1 (en) * 2005-01-18 2006-07-20 Chien-Hsing Lai Lift pin mechanism and substrate carrying device of a process chamber
US20080110397A1 (en) * 2006-11-10 2008-05-15 Hyoung Kyu Son Lift pin driving device and a flat panel display manufacturing apparatus having same
US20080149032A1 (en) * 2006-12-22 2008-06-26 Soon-Bin Jung Lift pin, apparatus for processing a substrate and method of processing a substrate
US20080196665A1 (en) * 2007-02-21 2008-08-21 Jogesh Chandran Batter applicator with adjustable tilt control for submerger or coating mechanism
US20090190908A1 (en) * 2007-09-03 2009-07-30 Canon Anelva Corporation Apparatus for heat-treating substrate and method for heat-treating substrate
US20090155025A1 (en) * 2007-12-12 2009-06-18 Applied Materials, Inc. Lift pin for substrate processing

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11651990B2 (en) 2019-07-03 2023-05-16 Samsung Electronics Co., Ltd. Substrate processing apparatus and driving method thereof
US11984345B2 (en) 2019-07-03 2024-05-14 Samsung Electronics Co., Ltd. Substrate processing apparatus and driving method thereof
USD990534S1 (en) * 2020-09-11 2023-06-27 Asm Ip Holding B.V. Weighted lift pin
US12183618B2 (en) 2020-10-01 2024-12-31 Applied Materials, Inc. Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
USD1031676S1 (en) * 2020-12-04 2024-06-18 Asm Ip Holding B.V. Combined susceptor, support, and lift system
USD980884S1 (en) * 2021-03-02 2023-03-14 Applied Materials, Inc. Lift pin
USD1099184S1 (en) * 2021-11-29 2025-10-21 Asm Ip Holding B.V. Weighted lift pin

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