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USD641829S1 - Plasma reactor showerhead face plate having concentric ridge pattern - Google Patents

Plasma reactor showerhead face plate having concentric ridge pattern Download PDF

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Publication number
USD641829S1
USD641829S1 US29/378,161 US37816110F USD641829S US D641829 S1 USD641829 S1 US D641829S1 US 37816110 F US37816110 F US 37816110F US D641829 S USD641829 S US D641829S
Authority
US
United States
Prior art keywords
face plate
plasma reactor
ridge pattern
concentric ridge
showerhead face
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/378,161
Inventor
Ivelin A. Angelov
James E. Caron
Ilia Kalinovshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Novellus Systems Inc
Original Assignee
Novellus Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Novellus Systems Inc filed Critical Novellus Systems Inc
Priority to US29/378,161 priority Critical patent/USD641829S1/en
Assigned to NOVELLUS SYSTEMS, INC. reassignment NOVELLUS SYSTEMS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KALINOVSKI, ILIA, ANGELOV, IVELIN A., CARON, JAMES E.
Priority to TW100301797F priority patent/TWD148169S/en
Priority to JPD2011-8763F priority patent/JP1433951S/ja
Application granted granted Critical
Publication of USD641829S1 publication Critical patent/USD641829S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a lower front perspective view of a plasma reactor showerhead face plate having concentric ridge pattern showing our new design, wherein dashed lines represent holes and are unclaimed as part of this invention;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a side elevational view thereof, all sides being identical thereto; and,
FIG. 5 is a cross-sectional view thereof, taken generally along line 5—5 in FIG. 3, showing succinctly the surface contours seen in FIGS. 1 and 3.

Claims (1)

  1. We claim the ornamental design for a plasma reactor showerhead face plate having concentric ridge pattern, as shown and described.
US29/378,161 2010-10-29 2010-10-29 Plasma reactor showerhead face plate having concentric ridge pattern Expired - Lifetime USD641829S1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
US29/378,161 USD641829S1 (en) 2010-10-29 2010-10-29 Plasma reactor showerhead face plate having concentric ridge pattern
TW100301797F TWD148169S (en) 2010-10-29 2011-04-15 Plasma reactor showerhead face plate having concentric ridge pattern
JPD2011-8763F JP1433951S (en) 2010-10-29 2011-04-15

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US29/378,161 USD641829S1 (en) 2010-10-29 2010-10-29 Plasma reactor showerhead face plate having concentric ridge pattern

Publications (1)

Publication Number Publication Date
USD641829S1 true USD641829S1 (en) 2011-07-19

Family

ID=44262361

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/378,161 Expired - Lifetime USD641829S1 (en) 2010-10-29 2010-10-29 Plasma reactor showerhead face plate having concentric ridge pattern

Country Status (3)

Country Link
US (1) USD641829S1 (en)
JP (1) JP1433951S (en)
TW (1) TWD148169S (en)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD694357S1 (en) 2012-03-09 2013-11-26 Durst Corporation, Inc. Showerhead
US9121097B2 (en) 2012-08-31 2015-09-01 Novellus Systems, Inc. Variable showerhead flow by varying internal baffle conductance
US9315899B2 (en) 2012-06-15 2016-04-19 Novellus Systems, Inc. Contoured showerhead for improved plasma shaping and control
USD790039S1 (en) * 2016-04-08 2017-06-20 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD793526S1 (en) * 2016-04-08 2017-08-01 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD794753S1 (en) * 2016-04-08 2017-08-15 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD967936S1 (en) * 2022-01-23 2022-10-25 Jiangmen Dongrui Technology Co., Ltd. Faucet
USD967935S1 (en) * 2022-01-23 2022-10-25 Kaiping Linlong Sanitary Ware Technology Co., Ltd. Faucet
US20240006157A1 (en) * 2022-07-01 2024-01-04 Taiwan Semiconductor Manufacturing Company Methods and systems for dry etching
USD1027120S1 (en) * 2020-12-17 2024-05-14 Applied Materials, Inc. Seal for an assembly in a vapor deposition chamber
USD1066569S1 (en) * 2023-07-11 2025-03-11 Troy Hartmann Wall mounted showerhead
USD1069981S1 (en) * 2023-07-12 2025-04-08 Hyku Home Inc. Shower head

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD459435S1 (en) * 2001-06-05 2002-06-25 Etablissements Fauquet, S.A. Watering hose nozzle
USD459434S1 (en) * 2001-06-05 2002-06-25 Etablissements Fauquet, S.A. Watering hose nozzle
USD466183S1 (en) * 2002-01-08 2002-11-26 Brand New Technology Ltd. Showerhead assembly
USD495776S1 (en) * 2003-01-20 2004-09-07 Kohler Co. Face plate for plumbing fixture
US6983898B2 (en) * 2003-05-21 2006-01-10 Frank Clark Showerhead with optical lens feature
USD593640S1 (en) * 2008-01-31 2009-06-02 Hansgrohe Ag Showerhead
USD599881S1 (en) * 2009-02-13 2009-09-08 Xiamen Lota International Co., Ltd. Dispensing plate for shower head
USD619202S1 (en) * 2009-06-23 2010-07-06 Jinwei Zhang Shower head
USD623721S1 (en) * 2009-12-23 2010-09-14 I-JET, Inc. Apertured cover
USD624155S1 (en) * 2009-04-23 2010-09-21 Toto Ltd. Shower panel

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD459435S1 (en) * 2001-06-05 2002-06-25 Etablissements Fauquet, S.A. Watering hose nozzle
USD459434S1 (en) * 2001-06-05 2002-06-25 Etablissements Fauquet, S.A. Watering hose nozzle
USD466183S1 (en) * 2002-01-08 2002-11-26 Brand New Technology Ltd. Showerhead assembly
USD495776S1 (en) * 2003-01-20 2004-09-07 Kohler Co. Face plate for plumbing fixture
US6983898B2 (en) * 2003-05-21 2006-01-10 Frank Clark Showerhead with optical lens feature
USD593640S1 (en) * 2008-01-31 2009-06-02 Hansgrohe Ag Showerhead
USD599881S1 (en) * 2009-02-13 2009-09-08 Xiamen Lota International Co., Ltd. Dispensing plate for shower head
USD624155S1 (en) * 2009-04-23 2010-09-21 Toto Ltd. Shower panel
USD619202S1 (en) * 2009-06-23 2010-07-06 Jinwei Zhang Shower head
USD623721S1 (en) * 2009-12-23 2010-09-14 I-JET, Inc. Apertured cover

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD694357S1 (en) 2012-03-09 2013-11-26 Durst Corporation, Inc. Showerhead
USD738991S1 (en) 2012-03-09 2015-09-15 Durst Corporation, Inc. Showerhead
US9315899B2 (en) 2012-06-15 2016-04-19 Novellus Systems, Inc. Contoured showerhead for improved plasma shaping and control
US9598770B2 (en) 2012-06-15 2017-03-21 Novellus Systems, Inc. Contoured showerhead for improved plasma shaping and control
US9121097B2 (en) 2012-08-31 2015-09-01 Novellus Systems, Inc. Variable showerhead flow by varying internal baffle conductance
US9728380B2 (en) 2012-08-31 2017-08-08 Novellus Systems, Inc. Dual-plenum showerhead with interleaved plenum sub-volumes
USD793526S1 (en) * 2016-04-08 2017-08-01 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD790039S1 (en) * 2016-04-08 2017-06-20 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD794753S1 (en) * 2016-04-08 2017-08-15 Applied Materials, Inc. Showerhead for a semiconductor processing chamber
USD1027120S1 (en) * 2020-12-17 2024-05-14 Applied Materials, Inc. Seal for an assembly in a vapor deposition chamber
USD967936S1 (en) * 2022-01-23 2022-10-25 Jiangmen Dongrui Technology Co., Ltd. Faucet
USD967935S1 (en) * 2022-01-23 2022-10-25 Kaiping Linlong Sanitary Ware Technology Co., Ltd. Faucet
US20240006157A1 (en) * 2022-07-01 2024-01-04 Taiwan Semiconductor Manufacturing Company Methods and systems for dry etching
USD1066569S1 (en) * 2023-07-11 2025-03-11 Troy Hartmann Wall mounted showerhead
USD1069981S1 (en) * 2023-07-12 2025-04-08 Hyku Home Inc. Shower head

Also Published As

Publication number Publication date
JP1433951S (en) 2015-02-09
TWD148169S (en) 2012-07-11

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