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USD571739S1 - Semiconductor wafer delivery apparatus - Google Patents

Semiconductor wafer delivery apparatus Download PDF

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Publication number
USD571739S1
USD571739S1 US29/242,544 US24254405F USD571739S US D571739 S1 USD571739 S1 US D571739S1 US 24254405 F US24254405 F US 24254405F US D571739 S USD571739 S US D571739S
Authority
US
United States
Prior art keywords
semiconductor wafer
delivery apparatus
wafer delivery
view
elevational view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/242,544
Inventor
Hiroki Hosaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HOSAKA, HIROKI
Application granted granted Critical
Publication of USD571739S1 publication Critical patent/USD571739S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front elevational view of a semiconductor wafer delivery apparatus, showing my design;
FIG. 2 is a rear elevational view thereof;
FIG. 3 is a left side elevational view thereof;
FIG. 4 is a right side elevational view thereof;
FIG. 5 is a top plan view thereof;
FIG. 6 is a bottom plan view thereof;
FIG. 7 is a cross-sectional view taken along line 77 in FIG. 1;
FIG. 8 is a top, front and right perspective view thereof; and,
FIG. 9 is a top and left rear perspective view thereof.
The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a semiconductor wafer delivery apparatus, as shown and described.
US29/242,544 2005-08-12 2005-11-14 Semiconductor wafer delivery apparatus Expired - Lifetime USD571739S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005-023557 2005-01-31
JP2005023557 2005-08-12

Publications (1)

Publication Number Publication Date
USD571739S1 true USD571739S1 (en) 2008-06-24

Family

ID=39530403

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/242,544 Expired - Lifetime USD571739S1 (en) 2005-08-12 2005-11-14 Semiconductor wafer delivery apparatus

Country Status (2)

Country Link
US (1) USD571739S1 (en)
TW (1) TWD114134S1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD935424S1 (en) * 2019-05-06 2021-11-09 Lam Research Corporation Semiconductor wafer processing tool
USD962881S1 (en) * 2019-05-06 2022-09-06 Lam Research Corporation Semiconductor wafer processing apparatus

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5636960A (en) * 1992-07-29 1997-06-10 Tokyo Electron Limited Apparatus for detecting and aligning a substrate
US5740059A (en) * 1995-05-18 1998-04-14 Kabushiki Kaisha Toshiba Method of transporting substrates and apparatus for transporting substrates
US5772386A (en) * 1995-03-28 1998-06-30 Jenoptik Ag Loading and unloading station for semiconductor processing installations
US5826129A (en) * 1994-06-30 1998-10-20 Tokyo Electron Limited Substrate processing system
US6132160A (en) * 1997-06-27 2000-10-17 Tokyo Electron Limited Substrate transferring apparatus
US6234738B1 (en) * 1998-04-24 2001-05-22 Mecs Corporation Thin substrate transferring apparatus
US20020044860A1 (en) * 2000-04-05 2002-04-18 Yoshinobu Hayashi Processing system
US20020182040A1 (en) * 1998-09-22 2002-12-05 Yoshio Kimura Substrate processing apparatus and substrate processing method
US20020197138A1 (en) * 2001-06-22 2002-12-26 Mirae Corporation Exchanger for tray feeder
US20030133776A1 (en) * 2002-01-11 2003-07-17 Taiwan Semiconductor Manufacturing Co., Ltd. End effector with tapered fingertips
US6811370B2 (en) * 1999-03-25 2004-11-02 N&K Technology, Inc. Wafer handling robot having X-Y stage for wafer handling and positioning
US20040265100A1 (en) * 2003-06-18 2004-12-30 Satoshi Ohkawara Semiconductor wafer processing machine
US6846149B2 (en) * 1999-04-02 2005-01-25 Aviza Technology, Inc. Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system
US20050220581A1 (en) * 2003-12-31 2005-10-06 Innolux Display Corp. Adjustable substrate transfer apparatus
US20070031222A1 (en) * 2005-08-05 2007-02-08 Tokyo Electron Limited Substrate transfer apparatus and method, and storage medium

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5636960A (en) * 1992-07-29 1997-06-10 Tokyo Electron Limited Apparatus for detecting and aligning a substrate
US5826129A (en) * 1994-06-30 1998-10-20 Tokyo Electron Limited Substrate processing system
US5772386A (en) * 1995-03-28 1998-06-30 Jenoptik Ag Loading and unloading station for semiconductor processing installations
US5740059A (en) * 1995-05-18 1998-04-14 Kabushiki Kaisha Toshiba Method of transporting substrates and apparatus for transporting substrates
US6132160A (en) * 1997-06-27 2000-10-17 Tokyo Electron Limited Substrate transferring apparatus
US6234738B1 (en) * 1998-04-24 2001-05-22 Mecs Corporation Thin substrate transferring apparatus
US20020182040A1 (en) * 1998-09-22 2002-12-05 Yoshio Kimura Substrate processing apparatus and substrate processing method
US6811370B2 (en) * 1999-03-25 2004-11-02 N&K Technology, Inc. Wafer handling robot having X-Y stage for wafer handling and positioning
US6846149B2 (en) * 1999-04-02 2005-01-25 Aviza Technology, Inc. Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system
US20020044860A1 (en) * 2000-04-05 2002-04-18 Yoshinobu Hayashi Processing system
US20020197138A1 (en) * 2001-06-22 2002-12-26 Mirae Corporation Exchanger for tray feeder
US20030133776A1 (en) * 2002-01-11 2003-07-17 Taiwan Semiconductor Manufacturing Co., Ltd. End effector with tapered fingertips
US20040265100A1 (en) * 2003-06-18 2004-12-30 Satoshi Ohkawara Semiconductor wafer processing machine
US20050220581A1 (en) * 2003-12-31 2005-10-06 Innolux Display Corp. Adjustable substrate transfer apparatus
US20070031222A1 (en) * 2005-08-05 2007-02-08 Tokyo Electron Limited Substrate transfer apparatus and method, and storage medium

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD935424S1 (en) * 2019-05-06 2021-11-09 Lam Research Corporation Semiconductor wafer processing tool
USD962881S1 (en) * 2019-05-06 2022-09-06 Lam Research Corporation Semiconductor wafer processing apparatus

Also Published As

Publication number Publication date
TWD114134S1 (en) 2006-12-01

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