USD568837S1 - Semiconductor wafer delivery apparatus - Google Patents
Semiconductor wafer delivery apparatus Download PDFInfo
- Publication number
- USD568837S1 USD568837S1 US29/242,547 US24254705F USD568837S US D568837 S1 USD568837 S1 US D568837S1 US 24254705 F US24254705 F US 24254705F US D568837 S USD568837 S US D568837S
- Authority
- US
- United States
- Prior art keywords
- semiconductor wafer
- delivery apparatus
- wafer delivery
- view
- elevational view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 3
Images
Description
The broken lines represent unclaimed subject matter.
Claims (1)
- The ornamental design for a semiconductor wafer delivery apparatus, as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005023556 | 2005-08-12 | ||
| JP2005-023556 | 2005-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD568837S1 true USD568837S1 (en) | 2008-05-13 |
Family
ID=39362046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/242,547 Expired - Lifetime USD568837S1 (en) | 2005-08-12 | 2005-11-14 | Semiconductor wafer delivery apparatus |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD568837S1 (en) |
| TW (1) | TWD114184S1 (en) |
Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5636960A (en) * | 1992-07-29 | 1997-06-10 | Tokyo Electron Limited | Apparatus for detecting and aligning a substrate |
| US5740059A (en) * | 1995-05-18 | 1998-04-14 | Kabushiki Kaisha Toshiba | Method of transporting substrates and apparatus for transporting substrates |
| US5772386A (en) * | 1995-03-28 | 1998-06-30 | Jenoptik Ag | Loading and unloading station for semiconductor processing installations |
| US5826129A (en) * | 1994-06-30 | 1998-10-20 | Tokyo Electron Limited | Substrate processing system |
| US6132160A (en) * | 1997-06-27 | 2000-10-17 | Tokyo Electron Limited | Substrate transferring apparatus |
| US6234738B1 (en) * | 1998-04-24 | 2001-05-22 | Mecs Corporation | Thin substrate transferring apparatus |
| US20020044860A1 (en) * | 2000-04-05 | 2002-04-18 | Yoshinobu Hayashi | Processing system |
| US20020182040A1 (en) * | 1998-09-22 | 2002-12-05 | Yoshio Kimura | Substrate processing apparatus and substrate processing method |
| US20020197138A1 (en) * | 2001-06-22 | 2002-12-26 | Mirae Corporation | Exchanger for tray feeder |
| US20030133776A1 (en) * | 2002-01-11 | 2003-07-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | End effector with tapered fingertips |
| US6811370B2 (en) * | 1999-03-25 | 2004-11-02 | N&K Technology, Inc. | Wafer handling robot having X-Y stage for wafer handling and positioning |
| US20040265100A1 (en) * | 2003-06-18 | 2004-12-30 | Satoshi Ohkawara | Semiconductor wafer processing machine |
| US6846149B2 (en) * | 1999-04-02 | 2005-01-25 | Aviza Technology, Inc. | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system |
| US20050220581A1 (en) * | 2003-12-31 | 2005-10-06 | Innolux Display Corp. | Adjustable substrate transfer apparatus |
| US20070031222A1 (en) * | 2005-08-05 | 2007-02-08 | Tokyo Electron Limited | Substrate transfer apparatus and method, and storage medium |
-
2005
- 2005-11-03 TW TW094306662F patent/TWD114184S1/en unknown
- 2005-11-14 US US29/242,547 patent/USD568837S1/en not_active Expired - Lifetime
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5636960A (en) * | 1992-07-29 | 1997-06-10 | Tokyo Electron Limited | Apparatus for detecting and aligning a substrate |
| US5826129A (en) * | 1994-06-30 | 1998-10-20 | Tokyo Electron Limited | Substrate processing system |
| US5772386A (en) * | 1995-03-28 | 1998-06-30 | Jenoptik Ag | Loading and unloading station for semiconductor processing installations |
| US5740059A (en) * | 1995-05-18 | 1998-04-14 | Kabushiki Kaisha Toshiba | Method of transporting substrates and apparatus for transporting substrates |
| US6132160A (en) * | 1997-06-27 | 2000-10-17 | Tokyo Electron Limited | Substrate transferring apparatus |
| US6234738B1 (en) * | 1998-04-24 | 2001-05-22 | Mecs Corporation | Thin substrate transferring apparatus |
| US20020182040A1 (en) * | 1998-09-22 | 2002-12-05 | Yoshio Kimura | Substrate processing apparatus and substrate processing method |
| US6811370B2 (en) * | 1999-03-25 | 2004-11-02 | N&K Technology, Inc. | Wafer handling robot having X-Y stage for wafer handling and positioning |
| US6846149B2 (en) * | 1999-04-02 | 2005-01-25 | Aviza Technology, Inc. | Semiconductor wafer processing system with vertically-stacked process chambers and single-axis dual-wafer transfer system |
| US20020044860A1 (en) * | 2000-04-05 | 2002-04-18 | Yoshinobu Hayashi | Processing system |
| US20020197138A1 (en) * | 2001-06-22 | 2002-12-26 | Mirae Corporation | Exchanger for tray feeder |
| US20030133776A1 (en) * | 2002-01-11 | 2003-07-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | End effector with tapered fingertips |
| US20040265100A1 (en) * | 2003-06-18 | 2004-12-30 | Satoshi Ohkawara | Semiconductor wafer processing machine |
| US20050220581A1 (en) * | 2003-12-31 | 2005-10-06 | Innolux Display Corp. | Adjustable substrate transfer apparatus |
| US20070031222A1 (en) * | 2005-08-05 | 2007-02-08 | Tokyo Electron Limited | Substrate transfer apparatus and method, and storage medium |
Also Published As
| Publication number | Publication date |
|---|---|
| TWD114184S1 (en) | 2006-12-01 |
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